JP2012046814A - 蒸着装置 - Google Patents

蒸着装置 Download PDF

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Publication number
JP2012046814A
JP2012046814A JP2010192886A JP2010192886A JP2012046814A JP 2012046814 A JP2012046814 A JP 2012046814A JP 2010192886 A JP2010192886 A JP 2010192886A JP 2010192886 A JP2010192886 A JP 2010192886A JP 2012046814 A JP2012046814 A JP 2012046814A
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JP
Japan
Prior art keywords
thin film
film material
vacuum chamber
heat generating
vapor deposition
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Pending
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JP2010192886A
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English (en)
Japanese (ja)
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JP2012046814A5 (https=
Inventor
Ichiro Uno
一郎 宇野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaneka Corp
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Kaneka Corp
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Priority to JP2010192886A priority Critical patent/JP2012046814A/ja
Publication of JP2012046814A publication Critical patent/JP2012046814A/ja
Publication of JP2012046814A5 publication Critical patent/JP2012046814A5/ja
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
JP2010192886A 2010-08-30 2010-08-30 蒸着装置 Pending JP2012046814A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010192886A JP2012046814A (ja) 2010-08-30 2010-08-30 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010192886A JP2012046814A (ja) 2010-08-30 2010-08-30 蒸着装置

Publications (2)

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JP2012046814A true JP2012046814A (ja) 2012-03-08
JP2012046814A5 JP2012046814A5 (https=) 2013-08-15

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JP2010192886A Pending JP2012046814A (ja) 2010-08-30 2010-08-30 蒸着装置

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JP (1) JP2012046814A (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014038761A (ja) * 2012-08-16 2014-02-27 Nitto Denko Corp 有機ｅｌ素子の製造方法及び蒸着装置
KR20150012808A (ko) * 2013-07-26 2015-02-04 주식회사 선익시스템 증발유닛 및 이를 구비한 증착장치
KR101543953B1 (ko) 2014-03-18 2015-08-11 주식회사 포스코 고상금속 공급장치와 이를 포함한 진공 증착장치 및 고상금속 공급방법
CN106947941A (zh) * 2017-04-13 2017-07-14 合肥鑫晟光电科技有限公司 蒸镀系统
CN113564534A (zh) * 2020-04-28 2021-10-29 宝山钢铁股份有限公司 一种真空镀机组镀液连续供给装置及其供给方法
CN115404442A (zh) * 2022-09-23 2022-11-29 研博智创任丘科技有限公司 一种管道内表面镀膜装置及其使用方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63243264A (ja) * 1987-03-31 1988-10-11 Matsushita Electric Ind Co Ltd 薄膜製造装置
JPH10204624A (ja) * 1997-01-14 1998-08-04 Sumitomo Heavy Ind Ltd 真空成膜装置の材料供給装置
JP2003183815A (ja) * 2001-12-17 2003-07-03 Fuji Photo Film Co Ltd 蛍光体シート製造装置
JP2009516072A (ja) * 2005-11-10 2009-04-16 イーストマン コダック カンパニー シールされた補充容器を用いた堆積システム
JP2009161798A (ja) * 2007-12-28 2009-07-23 Ulvac Japan Ltd 成膜源、成膜装置
JP2013515862A (ja) * 2009-12-31 2013-05-09 エスエヌユー プレシジョン カンパニー リミテッド 気化装置及びこの制御方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63243264A (ja) * 1987-03-31 1988-10-11 Matsushita Electric Ind Co Ltd 薄膜製造装置
JPH10204624A (ja) * 1997-01-14 1998-08-04 Sumitomo Heavy Ind Ltd 真空成膜装置の材料供給装置
JP2003183815A (ja) * 2001-12-17 2003-07-03 Fuji Photo Film Co Ltd 蛍光体シート製造装置
JP2009516072A (ja) * 2005-11-10 2009-04-16 イーストマン コダック カンパニー シールされた補充容器を用いた堆積システム
JP2009161798A (ja) * 2007-12-28 2009-07-23 Ulvac Japan Ltd 成膜源、成膜装置
JP2013515862A (ja) * 2009-12-31 2013-05-09 エスエヌユー プレシジョン カンパニー リミテッド 気化装置及びこの制御方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014038761A (ja) * 2012-08-16 2014-02-27 Nitto Denko Corp 有機ｅｌ素子の製造方法及び蒸着装置
KR20150012808A (ko) * 2013-07-26 2015-02-04 주식회사 선익시스템 증발유닛 및 이를 구비한 증착장치
KR102152147B1 (ko) * 2013-07-26 2020-09-04 주식회사 선익시스템 증발유닛 및 이를 구비한 증착장치
KR101543953B1 (ko) 2014-03-18 2015-08-11 주식회사 포스코 고상금속 공급장치와 이를 포함한 진공 증착장치 및 고상금속 공급방법
CN106947941A (zh) * 2017-04-13 2017-07-14 合肥鑫晟光电科技有限公司 蒸镀系统
CN113564534A (zh) * 2020-04-28 2021-10-29 宝山钢铁股份有限公司 一种真空镀机组镀液连续供给装置及其供给方法
CN115404442A (zh) * 2022-09-23 2022-11-29 研博智创任丘科技有限公司 一种管道内表面镀膜装置及其使用方法
CN115404442B (zh) * 2022-09-23 2023-09-12 研博智创任丘科技有限公司 一种管道内表面镀膜装置及其使用方法

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