JP2012037635A5 - - Google Patents

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Publication number
JP2012037635A5
JP2012037635A5 JP2010176004A JP2010176004A JP2012037635A5 JP 2012037635 A5 JP2012037635 A5 JP 2012037635A5 JP 2010176004 A JP2010176004 A JP 2010176004A JP 2010176004 A JP2010176004 A JP 2010176004A JP 2012037635 A5 JP2012037635 A5 JP 2012037635A5
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JP
Japan
Prior art keywords
light reflecting
movable
optical scanner
support member
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010176004A
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English (en)
Japanese (ja)
Other versions
JP5447272B2 (ja
JP2012037635A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010176004A priority Critical patent/JP5447272B2/ja
Priority claimed from JP2010176004A external-priority patent/JP5447272B2/ja
Priority to US13/192,767 priority patent/US8553303B2/en
Publication of JP2012037635A publication Critical patent/JP2012037635A/ja
Publication of JP2012037635A5 publication Critical patent/JP2012037635A5/ja
Application granted granted Critical
Publication of JP5447272B2 publication Critical patent/JP5447272B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010176004A 2010-08-05 2010-08-05 光スキャナーおよび画像形成装置 Expired - Fee Related JP5447272B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010176004A JP5447272B2 (ja) 2010-08-05 2010-08-05 光スキャナーおよび画像形成装置
US13/192,767 US8553303B2 (en) 2010-08-05 2011-07-28 Optical scanner and image forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010176004A JP5447272B2 (ja) 2010-08-05 2010-08-05 光スキャナーおよび画像形成装置

Publications (3)

Publication Number Publication Date
JP2012037635A JP2012037635A (ja) 2012-02-23
JP2012037635A5 true JP2012037635A5 (enExample) 2013-09-12
JP5447272B2 JP5447272B2 (ja) 2014-03-19

Family

ID=45555967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010176004A Expired - Fee Related JP5447272B2 (ja) 2010-08-05 2010-08-05 光スキャナーおよび画像形成装置

Country Status (2)

Country Link
US (1) US8553303B2 (enExample)
JP (1) JP5447272B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6094105B2 (ja) * 2012-09-13 2017-03-15 セイコーエプソン株式会社 アクチュエーター、光スキャナー、画像表示装置、ヘッドマウントディスプレイ
JP6442989B2 (ja) * 2014-10-31 2018-12-26 セイコーエプソン株式会社 光学デバイス、光学デバイスの製造方法および画像表示装置
US10168569B2 (en) * 2014-12-12 2019-01-01 Sharp Kabushiki Kaisha Display device, adhesive-layer-including light-diffusion member, and method of manufacturing the light-diffusion member
JP6398754B2 (ja) * 2015-01-30 2018-10-03 セイコーエプソン株式会社 光学デバイスおよび画像表示装置
JP6565459B2 (ja) * 2015-08-06 2019-08-28 セイコーエプソン株式会社 光スキャナー、画像表示装置およびヘッドマウントディスプレイ
KR102046473B1 (ko) * 2017-03-08 2019-11-19 삼성전기주식회사 손떨림 보정 반사모듈 및 이를 포함하는 카메라 모듈
IT201900004199A1 (it) 2019-03-22 2020-09-22 St Microelectronics Srl Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche
CN113219647B (zh) * 2020-02-05 2023-06-13 中强光电股份有限公司 光学模块及投影装置
EP4187318A4 (en) * 2020-07-23 2024-08-28 LG Innotek Co., Ltd. CAMERA ACTUATOR AND CAMERA MODULE COMPRISING SAME

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5583688A (en) * 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
US6480320B2 (en) * 2001-02-07 2002-11-12 Transparent Optical, Inc. Microelectromechanical mirror and mirror array
FR2820834B1 (fr) * 2001-02-15 2004-06-25 Teem Photonics Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede
US6891655B2 (en) * 2003-01-02 2005-05-10 Micronic Laser Systems Ab High energy, low energy density, radiation-resistant optics used with micro-electromechanical devices
US7428353B1 (en) * 2003-12-02 2008-09-23 Adriatic Research Institute MEMS device control with filtered voltage signal shaping
JP2005181395A (ja) 2003-12-16 2005-07-07 Canon Inc 光偏向器
US7391553B2 (en) * 2004-12-03 2008-06-24 Texas Instruments Incorporated Low cost torsional hinge mirror package with non-rotating magnetic drive
US7404909B2 (en) * 2006-12-06 2008-07-29 Texas Instruments Incorporated Mirror including dielectric portions and a method of manufacturing the same
US8472100B2 (en) * 2008-03-12 2013-06-25 Texas Instruments Incorporated Multilayered deformable element with reduced memory properties in a MEMS device
JP5573232B2 (ja) * 2010-03-02 2014-08-20 セイコーエプソン株式会社 画像形成装置および背面投影型表示装置

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