JP2012022878A - 有機エレクトロルミネッセンス照明装置及びその製造方法 - Google Patents
有機エレクトロルミネッセンス照明装置及びその製造方法 Download PDFInfo
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Abstract
【解決手段】透光性基板1上に設けられる透光性電極層2を含む1対の電極層と、該1対の電極層に挟持され、有機エレクトロスミネッセンス物質を含有する有機層3とを有し、透光性電極層上にその一部に接触して設けられる遮光性の補助電極5と、該補助電極5を被覆する絶縁被膜5eとを有する有機エレクトロルミネッセンス照明装置の製造方法であって、該絶縁被膜5eを補助電極5形成のフォトリソグラフィー工程で用いるレジストで形成する。
【選択図】図4
Description
2 透光性電極層
3 有機層
31a 正孔注入層
32a 正孔輸送層
3b 発光層
3Rb 赤色発光層
3Gb 緑色発光層
3Bb 青色発光層
3c 電子輸送層
3d 電子注入層
4 電極層
5 補助電極
5a 補助電極材料膜
5b レジスト膜
5c マスク
5d レジストパターン
5e 絶縁被膜
5f 逆テーパー形状残留レジスト
5h 残留レジスト
Claims (3)
- 透光性基板上に設けられる透光性電極層を含む1対の電極層と、該1対の電極層に挟持され、有機エレクトロスミネッセンス物質を含有する有機層とを有し、透光性電極層上にその一部に接触して設けられる遮光性の補助電極と、該補助電極を被覆する絶縁被膜とを有する有機エレクトロルミネッセンス照明装置の製造方法であって、該絶縁被膜を補助電極形成のフォトリソグラフィー工程で用いるレジストで形成することを特徴とする有機エレクトロルミネッセンス照明装置の製造方法。
- 透光性電極層上に補助電極材料膜を形成し、補助電極材料膜上にレジストを塗布し、露光、現像、エッチング後、補助電極上に残留するレジストを該レジストのガラス転移温度以上に加熱して流動させ補助電極を被覆させて絶縁被膜を形成することを特徴とする請求項1記載の有機エレクトロルミネッセンス照明装置の製造方法。
- 透光性基板上に設けられる透光性電極層を含む1対の電極層と、該1対の電極層に挟持され、有機エレクトロスミネッセンス物質を含有する有機層とを有し、透光性電極層上にその一部に接触して設けられる遮光性の補助電極と、該補助電極を被覆する絶縁被膜とを有する有機エレクトロルミネッセンス照明装置において、該絶縁被膜が補助電極形成のフォトリソグラフィー工程で用いたレジストで形成されたことを特徴とする有機エレクトロルミネッセンス照明装置。
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