JP2012019205A5 - - Google Patents
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- Publication number
- JP2012019205A5 JP2012019205A5 JP2011124805A JP2011124805A JP2012019205A5 JP 2012019205 A5 JP2012019205 A5 JP 2012019205A5 JP 2011124805 A JP2011124805 A JP 2011124805A JP 2011124805 A JP2011124805 A JP 2011124805A JP 2012019205 A5 JP2012019205 A5 JP 2012019205A5
- Authority
- JP
- Japan
- Prior art keywords
- thermoelectric conversion
- conversion material
- material structure
- thermal resistance
- thermoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 88
- 239000000463 material Substances 0.000 claims description 68
- 239000000758 substrate Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 230000003014 reinforcing effect Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 7
- 239000000443 aerosol Substances 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
- 239000012779 reinforcing material Substances 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 4
- 230000002787 reinforcement Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000013081 microcrystal Substances 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011124805A JP2012019205A (ja) | 2010-06-10 | 2011-06-03 | 熱電変換素子及びその製造方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010132982 | 2010-06-10 | ||
JP2010132982 | 2010-06-10 | ||
JP2011124805A JP2012019205A (ja) | 2010-06-10 | 2011-06-03 | 熱電変換素子及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012019205A JP2012019205A (ja) | 2012-01-26 |
JP2012019205A5 true JP2012019205A5 (enrdf_load_stackoverflow) | 2012-05-24 |
Family
ID=45604170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011124805A Pending JP2012019205A (ja) | 2010-06-10 | 2011-06-03 | 熱電変換素子及びその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2012019205A (enrdf_load_stackoverflow) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5672079B2 (ja) * | 2011-03-08 | 2015-02-18 | 富士通株式会社 | セラミックス構造体の製造方法及び熱電変換素子の製造方法 |
JP6003998B2 (ja) * | 2012-10-22 | 2016-10-05 | 富士通株式会社 | 半導体装置、半導体装置の製造方法及び熱電発電電子機器 |
JP6405604B2 (ja) * | 2013-07-08 | 2018-10-17 | 富士通株式会社 | 熱電素子及びその製造方法 |
JP6240514B2 (ja) * | 2014-01-22 | 2017-11-29 | 株式会社アツミテック | 熱電変換モジュール |
KR101517784B1 (ko) * | 2014-03-27 | 2015-05-06 | 서울시립대학교 산학협력단 | 열전 성능이 우수한 산화물 반도체 열전 소자 및 그 제조 방법 |
JP6785459B2 (ja) * | 2016-03-28 | 2020-11-18 | パナソニックIpマネジメント株式会社 | 熱電変換素子および熱電変換モジュール |
WO2020227280A1 (en) | 2019-05-06 | 2020-11-12 | 3M Innovative Properties Company | Patterned article including electrically conductive elements |
CN112038478B (zh) * | 2020-09-15 | 2023-09-26 | 上海商皓电子科技有限公司 | 一种半导体制冷元件的制造工艺及元件 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2777508B2 (ja) * | 1991-10-07 | 1998-07-16 | 松下電器産業株式会社 | 電子冷却素子 |
JPH1098216A (ja) * | 1996-09-20 | 1998-04-14 | Seiko Epson Corp | 熱電発電素子の製造方法 |
JPH10209509A (ja) * | 1997-01-24 | 1998-08-07 | Ngk Insulators Ltd | 熱電変換装置およびその製造方法 |
JP3724133B2 (ja) * | 1997-08-26 | 2005-12-07 | 松下電工株式会社 | 熱電変換モジュールの製造方法 |
JP2001210879A (ja) * | 1999-11-17 | 2001-08-03 | Sumitomo Metal Ind Ltd | 高出力多孔質熱電変換素子 |
JP2003229607A (ja) * | 2002-02-01 | 2003-08-15 | Hiroshima Pref Gov | サーモモジュールの製造方法及びサーモモジュール |
JP4301827B2 (ja) * | 2003-02-03 | 2009-07-22 | パナソニック株式会社 | 熱電モジュールの製造方法 |
JP2011129832A (ja) * | 2009-12-21 | 2011-06-30 | Denso Corp | 熱電変換素子及びその製造方法 |
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2011
- 2011-06-03 JP JP2011124805A patent/JP2012019205A/ja active Pending