JP2012002661A - 外観検査装置 - Google Patents

外観検査装置 Download PDF

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Publication number
JP2012002661A
JP2012002661A JP2010137714A JP2010137714A JP2012002661A JP 2012002661 A JP2012002661 A JP 2012002661A JP 2010137714 A JP2010137714 A JP 2010137714A JP 2010137714 A JP2010137714 A JP 2010137714A JP 2012002661 A JP2012002661 A JP 2012002661A
Authority
JP
Japan
Prior art keywords
appearance inspection
inspection apparatus
appearance
inspection
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010137714A
Other languages
English (en)
Japanese (ja)
Inventor
Tomohiko Matsuzaki
智彦 松崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IO GIKEN CO Ltd
Original Assignee
IO GIKEN CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IO GIKEN CO Ltd filed Critical IO GIKEN CO Ltd
Priority to JP2010137714A priority Critical patent/JP2012002661A/ja
Priority to PCT/JP2011/063579 priority patent/WO2011158826A1/fr
Publication of JP2012002661A publication Critical patent/JP2012002661A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
JP2010137714A 2010-06-16 2010-06-16 外観検査装置 Pending JP2012002661A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010137714A JP2012002661A (ja) 2010-06-16 2010-06-16 外観検査装置
PCT/JP2011/063579 WO2011158826A1 (fr) 2010-06-16 2011-06-14 Dispositif de contrôle de l'aspect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010137714A JP2012002661A (ja) 2010-06-16 2010-06-16 外観検査装置

Publications (1)

Publication Number Publication Date
JP2012002661A true JP2012002661A (ja) 2012-01-05

Family

ID=45348225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010137714A Pending JP2012002661A (ja) 2010-06-16 2010-06-16 外観検査装置

Country Status (2)

Country Link
JP (1) JP2012002661A (fr)
WO (1) WO2011158826A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019239501A1 (fr) * 2018-06-12 2019-12-19 株式会社エフケー光学研究所 Dispositif d''examen de corps étranger et procédé d'examen de corps étranger

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08304044A (ja) * 1995-02-07 1996-11-22 Shigeki Kobayashi 撮像対象領域位置決め撮像装置、検査装置、形状計測装置、及び製品製造方法
JPH08327554A (ja) * 1995-03-31 1996-12-13 Lintec Corp 照明装置
JPH1082622A (ja) * 1996-09-05 1998-03-31 Dainippon Printing Co Ltd 基板の検査装置
JP2000030041A (ja) * 1998-07-14 2000-01-28 Olympus Optical Co Ltd 画像入力装置
JP2002310934A (ja) * 2001-04-18 2002-10-23 Saki Corp:Kk 外観検査装置
JP2004226319A (ja) * 2003-01-24 2004-08-12 Saki Corp:Kk 外観検査装置および画像取得方法
JP2005188968A (ja) * 2003-12-24 2005-07-14 Dainippon Printing Co Ltd 目視検査台
JP2006184019A (ja) * 2004-12-24 2006-07-13 Saki Corp:Kk 外観検査装置
JP2007232445A (ja) * 2006-02-28 2007-09-13 Web Tec Kk ラインセンサ検査装置
JP3145180U (ja) * 2008-05-16 2008-10-02 晶彩科技股▲ふん▼有限公司 光学検査モジュール
JP2010175305A (ja) * 2009-01-27 2010-08-12 Saki Corp:Kk 被検査体の検査装置

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08304044A (ja) * 1995-02-07 1996-11-22 Shigeki Kobayashi 撮像対象領域位置決め撮像装置、検査装置、形状計測装置、及び製品製造方法
JPH08327554A (ja) * 1995-03-31 1996-12-13 Lintec Corp 照明装置
JPH1082622A (ja) * 1996-09-05 1998-03-31 Dainippon Printing Co Ltd 基板の検査装置
JP2000030041A (ja) * 1998-07-14 2000-01-28 Olympus Optical Co Ltd 画像入力装置
JP2002310934A (ja) * 2001-04-18 2002-10-23 Saki Corp:Kk 外観検査装置
JP2004226319A (ja) * 2003-01-24 2004-08-12 Saki Corp:Kk 外観検査装置および画像取得方法
JP2005188968A (ja) * 2003-12-24 2005-07-14 Dainippon Printing Co Ltd 目視検査台
JP2006184019A (ja) * 2004-12-24 2006-07-13 Saki Corp:Kk 外観検査装置
JP2007232445A (ja) * 2006-02-28 2007-09-13 Web Tec Kk ラインセンサ検査装置
JP3145180U (ja) * 2008-05-16 2008-10-02 晶彩科技股▲ふん▼有限公司 光学検査モジュール
JP2010175305A (ja) * 2009-01-27 2010-08-12 Saki Corp:Kk 被検査体の検査装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019239501A1 (fr) * 2018-06-12 2019-12-19 株式会社エフケー光学研究所 Dispositif d''examen de corps étranger et procédé d'examen de corps étranger
CN112236671A (zh) * 2018-06-12 2021-01-15 Fk光学研究所股份有限公司 异物检查装置及异物检查方法
TWI721447B (zh) * 2018-06-12 2021-03-11 日商Ｆｋ光學研究所股份有限公司 異物檢查裝置及異物檢查方法
JPWO2019239501A1 (ja) * 2018-06-12 2021-03-18 株式会社 エフケー光学研究所 異物検査装置及び異物検査方法

Also Published As

Publication number Publication date
WO2011158826A1 (fr) 2011-12-22

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