JP2011527436A5 - - Google Patents
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- Publication number
- JP2011527436A5 JP2011527436A5 JP2011517284A JP2011517284A JP2011527436A5 JP 2011527436 A5 JP2011527436 A5 JP 2011527436A5 JP 2011517284 A JP2011517284 A JP 2011517284A JP 2011517284 A JP2011517284 A JP 2011517284A JP 2011527436 A5 JP2011527436 A5 JP 2011527436A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- extreme ultraviolet
- ultraviolet radiation
- element according
- reflecting element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 238000005286 illumination Methods 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 229910052741 iridium Inorganic materials 0.000 claims 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims 1
- 238000001459 lithography Methods 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- 239000010955 niobium Substances 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- 229910052762 osmium Inorganic materials 0.000 claims 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910052702 rhenium Inorganic materials 0.000 claims 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims 1
- 229910052703 rhodium Inorganic materials 0.000 claims 1
- 239000010948 rhodium Substances 0.000 claims 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229910052713 technetium Inorganic materials 0.000 claims 1
- GKLVYJBZJHMRIY-UHFFFAOYSA-N technetium atom Chemical compound [Tc] GKLVYJBZJHMRIY-UHFFFAOYSA-N 0.000 claims 1
- 229910052716 thallium Inorganic materials 0.000 claims 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052720 vanadium Inorganic materials 0.000 claims 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims 1
- 229910052727 yttrium Inorganic materials 0.000 claims 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP08104648 | 2008-07-07 | ||
| EP08104648.4 | 2008-07-07 | ||
| PCT/IB2009/052855 WO2010004482A1 (en) | 2008-07-07 | 2009-07-01 | Extreme uv radiation reflecting element comprising a sputter-resistant material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011527436A JP2011527436A (ja) | 2011-10-27 |
| JP2011527436A5 true JP2011527436A5 (https=) | 2016-03-10 |
Family
ID=41151943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011517284A Pending JP2011527436A (ja) | 2008-07-07 | 2009-07-01 | スパッタ耐性材料を含む極紫外線放射反射要素 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8693090B2 (https=) |
| EP (1) | EP2297746A1 (https=) |
| JP (1) | JP2011527436A (https=) |
| CN (1) | CN102138185B (https=) |
| WO (1) | WO2010004482A1 (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103080840B (zh) | 2010-06-25 | 2016-01-27 | Asml荷兰有限公司 | 光刻设备和方法 |
| JP5926264B2 (ja) * | 2010-09-27 | 2016-05-25 | カール・ツァイス・エスエムティー・ゲーエムベーハー | ミラー、当該ミラーを備える投影対物レンズ、及び当該投影対物レンズを備えるマイクロリソグラフィ用投影露光装置 |
| CN102621815B (zh) * | 2011-01-26 | 2016-12-21 | Asml荷兰有限公司 | 用于光刻设备的反射光学部件及器件制造方法 |
| DE102012207125A1 (de) | 2012-04-27 | 2013-03-28 | Carl Zeiss Smt Gmbh | Optisches Element und optisches System für die EUV-Lithographie sowie Verfahren zum Optimieren eines Schutzlagensystems für ein optisches Element |
| US9696467B2 (en) * | 2014-01-31 | 2017-07-04 | Corning Incorporated | UV and DUV expanded cold mirrors |
| WO2016148724A1 (en) * | 2015-03-19 | 2016-09-22 | Halliburton Energy Services, Inc. | Mesh reinforcement for metal-matrix composite tools |
| US10128016B2 (en) * | 2016-01-12 | 2018-11-13 | Asml Netherlands B.V. | EUV element having barrier to hydrogen transport |
| CN109370271B (zh) * | 2018-10-29 | 2021-05-25 | 山东建筑大学 | 一种新型的耐辐照空间固体润滑剂涂层及制备方法 |
| EP3779525B1 (en) * | 2019-08-13 | 2024-01-03 | Istituto Nazionale di Astrofisica | Method for applying a carbon-based reflective overcoating on a grazing incidence optical unit |
| CN116165734B (zh) * | 2023-03-01 | 2025-12-02 | 苏州江泓电子科技有限公司 | 一种反射镜及其制备方法和应用 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5433988A (en) | 1986-10-01 | 1995-07-18 | Canon Kabushiki Kaisha | Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray |
| JPH02238400A (ja) * | 1989-03-13 | 1990-09-20 | Nippon Telegr & Teleph Corp <Ntt> | 多層膜 |
| TWI267704B (en) | 1999-07-02 | 2006-12-01 | Asml Netherlands Bv | Capping layer for EUV optical elements |
| US6664554B2 (en) | 2001-01-03 | 2003-12-16 | Euv Llc | Self-cleaning optic for extreme ultraviolet lithography |
| US20030008148A1 (en) | 2001-07-03 | 2003-01-09 | Sasa Bajt | Optimized capping layers for EUV multilayers |
| JP4460284B2 (ja) | 2001-07-03 | 2010-05-12 | イーユーヴィー リミテッド ライアビリティー コーポレイション | 光学要素及びその形成方法 |
| US7234064B2 (en) | 2002-08-16 | 2007-06-19 | Hx Technologies, Inc. | Methods and systems for managing patient authorizations relating to digital medical data |
| US7420653B2 (en) | 2003-10-02 | 2008-09-02 | Asml Netherlands B.V. | Lithographic projection apparatus, mirror, method of supplying a protective cap layer, device manufacturing method and device manufactured accordingly |
| JP4466566B2 (ja) * | 2003-10-15 | 2010-05-26 | 株式会社ニコン | 多層膜反射鏡、多層膜反射鏡の製造方法、及び露光装置 |
| US7193228B2 (en) | 2004-03-10 | 2007-03-20 | Cymer, Inc. | EUV light source optical elements |
| JP2006153528A (ja) | 2004-11-26 | 2006-06-15 | Canon Inc | 軟ｘ線多層膜反射鏡、軟ｘ線多層膜反射鏡による投影光学系を備えた露光装置 |
| GB0426036D0 (en) | 2004-11-26 | 2004-12-29 | Boc Group Plc | Protection of surfaces exposed to charged particles |
| DE102004062289B4 (de) * | 2004-12-23 | 2007-07-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Thermisch stabiler Multilayer-Spiegel für den EUV-Spektralbereich |
| JP2006332153A (ja) * | 2005-05-24 | 2006-12-07 | Hoya Corp | 反射型マスクブランク及び反射型マスク並びに半導体装置の製造方法 |
| US7599112B2 (en) | 2005-10-11 | 2009-10-06 | Nikon Corporation | Multilayer-film mirrors, lithography systems comprising same, and methods for manufacturing same |
| JP4703354B2 (ja) * | 2005-10-14 | 2011-06-15 | Ｈｏｙａ株式会社 | 多層反射膜付き基板、その製造方法、反射型マスクブランクおよび反射型マスク |
| JP2008109060A (ja) * | 2005-11-10 | 2008-05-08 | Asahi Glass Co Ltd | Ｅｕｖリソグラフィ用反射型マスクブランクの多層反射膜を成膜する方法、ならびにｅｕｖリソグラフィ用反射型マスクブランクの製造方法 |
| US20080153010A1 (en) * | 2006-11-09 | 2008-06-26 | Asahi Glass Company., Ltd. | Method for depositing reflective multilayer film of reflective mask blank for euv lithography and method for producing reflective mask blank for euv lithography |
| US7875863B2 (en) * | 2006-12-22 | 2011-01-25 | Asml Netherlands B.V. | Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method |
-
2009
- 2009-07-01 EP EP09786493A patent/EP2297746A1/en not_active Withdrawn
- 2009-07-01 CN CN200980126444.7A patent/CN102138185B/zh active Active
- 2009-07-01 US US13/000,674 patent/US8693090B2/en active Active
- 2009-07-01 WO PCT/IB2009/052855 patent/WO2010004482A1/en not_active Ceased
- 2009-07-01 JP JP2011517284A patent/JP2011527436A/ja active Pending
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