JP2011512647A5 - - Google Patents

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Publication number
JP2011512647A5
JP2011512647A5 JP2010543446A JP2010543446A JP2011512647A5 JP 2011512647 A5 JP2011512647 A5 JP 2011512647A5 JP 2010543446 A JP2010543446 A JP 2010543446A JP 2010543446 A JP2010543446 A JP 2010543446A JP 2011512647 A5 JP2011512647 A5 JP 2011512647A5
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JP
Japan
Prior art keywords
optical system
light source
condensing optical
axis
grazing incidence
Prior art date
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Application number
JP2010543446A
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English (en)
Japanese (ja)
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JP5368478B2 (ja
JP2011512647A (ja
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Publication date
Priority claimed from EP08001536.5A external-priority patent/EP2083328B1/en
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Publication of JP2011512647A publication Critical patent/JP2011512647A/ja
Publication of JP2011512647A5 publication Critical patent/JP2011512647A5/ja
Application granted granted Critical
Publication of JP5368478B2 publication Critical patent/JP5368478B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010543446A 2008-01-28 2009-01-28 レーザ生成プラズマ源の斜入射集光光学系 Expired - Fee Related JP5368478B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP08001536.5 2008-01-28
EP08001536.5A EP2083328B1 (en) 2008-01-28 2008-01-28 Grazing incidence collector for laser produced plasma sources
PCT/EP2009/000539 WO2009095220A2 (en) 2008-01-28 2009-01-28 Grazing incidence collector for laser produced plasma sources

Publications (3)

Publication Number Publication Date
JP2011512647A JP2011512647A (ja) 2011-04-21
JP2011512647A5 true JP2011512647A5 (enExample) 2012-03-15
JP5368478B2 JP5368478B2 (ja) 2013-12-18

Family

ID=39766873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010543446A Expired - Fee Related JP5368478B2 (ja) 2008-01-28 2009-01-28 レーザ生成プラズマ源の斜入射集光光学系

Country Status (5)

Country Link
US (1) US8411815B2 (enExample)
EP (1) EP2083328B1 (enExample)
JP (1) JP5368478B2 (enExample)
DE (1) DE112009000120T5 (enExample)
WO (1) WO2009095220A2 (enExample)

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