JP2011508211A5 - - Google Patents
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- JP2011508211A5 JP2011508211A5 JP2010539468A JP2010539468A JP2011508211A5 JP 2011508211 A5 JP2011508211 A5 JP 2011508211A5 JP 2010539468 A JP2010539468 A JP 2010539468A JP 2010539468 A JP2010539468 A JP 2010539468A JP 2011508211 A5 JP2011508211 A5 JP 2011508211A5
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- spectrometer
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- ray
- vacuum gauge
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- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
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Description
電離真空計100およびクラスター装置1100と共に使用可能な(またはクラスター装置1100なしでも使用可能な)表面分析装置1105bには、走査型電子顕微鏡、エネルギー分散型X線分析装置(EOS/XPS)、走査型オージェ電子顕微鏡装置(Auger/SAM)、グロー放電質量分析装置(GDMS)、電子分光装置(ESCA)、原子間力顕微鏡/走査型プローブ顕微鏡装置(AFM/SPM)、フーリエ変換赤外分光装置(FTIR)、波長分散型X線分光装置(WDS)、誘導結合プラズマ質量分析装置(ICPMS)、蛍光X線分析装置(XRF)、中性子放射化分析装置(NAA)、計測装置などが含まれる。上記のリストは全てを網羅しておらず、真空計100は、上記のリストに挙げられていない他の装置と共に使用することも可能である。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US818507P | 2007-12-19 | 2007-12-19 | |
US61/008,185 | 2007-12-19 | ||
PCT/US2008/013790 WO2009085165A2 (en) | 2007-12-19 | 2008-12-17 | Ionization gauge having electron multiplier cold emmission source |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011508211A JP2011508211A (ja) | 2011-03-10 |
JP2011508211A5 true JP2011508211A5 (ja) | 2012-01-19 |
JP5762749B2 JP5762749B2 (ja) | 2015-08-12 |
Family
ID=40824942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010539468A Active JP5762749B2 (ja) | 2007-12-19 | 2008-12-17 | 冷電子増倍放出源を備える電離真空計 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8686733B2 (ja) |
EP (1) | EP2232224A4 (ja) |
JP (1) | JP5762749B2 (ja) |
KR (1) | KR101541273B1 (ja) |
CN (1) | CN101952703A (ja) |
WO (1) | WO2009085165A2 (ja) |
Families Citing this family (21)
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WO2013042829A1 (ko) * | 2011-09-20 | 2013-03-28 | 한국기초과학지원연구원 | 자외선 다이오드와 mcp를 이용한 질량분석기의 이온화원 획득장치 |
WO2013042830A1 (ko) * | 2011-09-20 | 2013-03-28 | 한국기초과학지원연구원 | 자외선 다이오드와 cem을 이용한 질량분석기의 이온화원 획득장치 |
CN103094049B (zh) * | 2011-10-28 | 2015-11-25 | 清华大学 | 电离规 |
KR101303242B1 (ko) * | 2011-11-25 | 2013-09-04 | 한국기초과학지원연구원 | 냉전자를 이용한 음이온 발생 및 전자포획 분해장치 |
WO2013081195A1 (ko) * | 2011-11-28 | 2013-06-06 | 한국기초과학지원연구원 | 냉전자를 이용한 음이온 발생 및 전자포획 분해장치 |
KR102082168B1 (ko) * | 2012-02-08 | 2020-02-27 | 엠케이에스 인스트루먼츠, 인코포레이티드 | 압력을 측정하는 이온화 게이지 및 이를 이용한 압력 측정 방법 |
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WO2016108451A2 (ko) * | 2014-12-30 | 2016-07-07 | 한국기초과학지원연구원 | 비행시간 질량분석기 |
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US9927317B2 (en) | 2015-07-09 | 2018-03-27 | Mks Instruments, Inc. | Ionization pressure gauge with bias voltage and emission current control and measurement |
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US10062554B2 (en) * | 2016-11-28 | 2018-08-28 | The United States Of America, As Represented By The Secretary Of The Navy | Metamaterial photocathode for detection and imaging of infrared radiation |
JP7036675B2 (ja) * | 2018-06-11 | 2022-03-15 | 株式会社アルバック | Ba型電離真空計及びその感度異常検知方法、並びにba型電離真空計を用いた圧力測定方法 |
CN109001969B (zh) * | 2018-07-02 | 2020-04-21 | 北京无线电计量测试研究所 | 一种微通道板电子倍增器 |
US11101120B2 (en) * | 2018-11-21 | 2021-08-24 | Sri International | Fast pressure sensing system |
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CN103094049B (zh) * | 2011-10-28 | 2015-11-25 | 清华大学 | 电离规 |
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2008
- 2008-12-17 JP JP2010539468A patent/JP5762749B2/ja active Active
- 2008-12-17 CN CN2008801267012A patent/CN101952703A/zh active Pending
- 2008-12-17 WO PCT/US2008/013790 patent/WO2009085165A2/en active Application Filing
- 2008-12-17 KR KR1020107016098A patent/KR101541273B1/ko active IP Right Grant
- 2008-12-17 EP EP08868368.5A patent/EP2232224A4/en not_active Withdrawn
- 2008-12-17 US US12/808,983 patent/US8686733B2/en active Active
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