JP2011503668A - 集積化カラーマスク - Google Patents

集積化カラーマスク Download PDF

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Publication number
JP2011503668A
JP2011503668A JP2010534935A JP2010534935A JP2011503668A JP 2011503668 A JP2011503668 A JP 2011503668A JP 2010534935 A JP2010534935 A JP 2010534935A JP 2010534935 A JP2010534935 A JP 2010534935A JP 2011503668 A JP2011503668 A JP 2011503668A
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JP
Japan
Prior art keywords
color
material layer
photopatternable
mask
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010534935A
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English (en)
Japanese (ja)
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JP2011503668A5 (enExample
Inventor
マリー アービング，リン
ハワード レビー，デイビッド
エドワード アービング，マーク
アール． エリンガー，キャロリン
Original Assignee
イーストマン コダック カンパニー
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Application filed by イーストマン コダック カンパニー filed Critical イーストマン コダック カンパニー
Publication of JP2011503668A publication Critical patent/JP2011503668A/ja
Publication of JP2011503668A5 publication Critical patent/JP2011503668A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment
    • H10D86/021—Manufacture or treatment of multiple TFTs
    • H10D86/0231—Manufacture or treatment of multiple TFTs using masks, e.g. half-tone masks
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G03F7/2016—Contact mask being integral part of the photosensitive element and subject to destructive removal during post-exposure processing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G03F7/2016—Contact mask being integral part of the photosensitive element and subject to destructive removal during post-exposure processing
    • G03F7/2018—Masking pattern obtained by selective application of an ink or a toner, e.g. ink jet printing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0312—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes
    • H10D30/0316—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] characterised by the gate electrodes of lateral bottom-gate TFTs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/031—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT]
    • H10D30/0321—Manufacture or treatment of FETs having insulated gates [IGFET] of thin-film transistors [TFT] comprising silicon, e.g. amorphous silicon or polysilicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/421—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
    • H10D86/423—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24851—Intermediate layer is discontinuous or differential

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Thin Film Transistor (AREA)
JP2010534935A 2007-11-20 2008-11-07 集積化カラーマスク Pending JP2011503668A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/986,068 US8221964B2 (en) 2007-11-20 2007-11-20 Integrated color mask
PCT/US2008/012559 WO2009067147A1 (en) 2007-11-20 2008-11-07 Integrated color mask

Publications (2)

Publication Number Publication Date
JP2011503668A true JP2011503668A (ja) 2011-01-27
JP2011503668A5 JP2011503668A5 (enExample) 2013-01-17

Family

ID=40338212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010534935A Pending JP2011503668A (ja) 2007-11-20 2008-11-07 集積化カラーマスク

Country Status (4)

Country Link
US (2) US8221964B2 (enExample)
EP (1) EP2212743A1 (enExample)
JP (1) JP2011503668A (enExample)
WO (1) WO2009067147A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011505589A (ja) * 2007-11-20 2011-02-24 イーストマン コダック カンパニー 選択的領域堆積と組み合わせて着色マスクを使用する方法
JP2011507008A (ja) * 2007-11-20 2011-03-03 イーストマン コダック カンパニー マルチカラーマスク
JP2014529728A (ja) * 2011-08-02 2014-11-13 アルマ・マテール・ストゥディオルム・ウニベルシータ・ディ・ボローニャＡｌｍａ Ｍａｔｅｒ Ｓｔｕｄｉｏｒｕｍ Ｕｎｉｖｅｒｓｉｔａ Ｄｉ Ｂｏｌｏｇｎａ 電離放射線のイントリンジックな直接検出器およびその検出器の製造方法
JP2016191937A (ja) * 2012-01-12 2016-11-10 株式会社ニコン 基板処理装置、基板処理方法、及び円筒状マスク

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7972898B2 (en) * 2007-09-26 2011-07-05 Eastman Kodak Company Process for making doped zinc oxide
US20090155994A1 (en) * 2007-12-12 2009-06-18 Hawkins Gilbert A Forming thin film transistors using ablative films with pre-patterned conductors
CN102543723A (zh) * 2012-01-05 2012-07-04 复旦大学 一种栅控二极管半导体器件的制造方法
CN104658974A (zh) * 2015-03-12 2015-05-27 京东方科技集团股份有限公司 一种薄膜层图案、薄膜晶体管及阵列基板的制备方法
CN108335985B (zh) * 2017-01-20 2020-07-28 中国科学院物理研究所 一种全透明薄膜晶体管的制备方法
CN109614008B (zh) * 2018-12-28 2022-04-12 业成科技（成都）有限公司 双面图案化的方法及触控面板的制造方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62132367A (ja) * 1985-12-04 1987-06-15 Nec Corp 薄膜電界効果型トランジスタ
JPH01246551A (ja) * 1988-03-29 1989-10-02 Dainippon Printing Co Ltd 多色螢光面形成法
JPH0437804A (ja) * 1990-06-04 1992-02-07 Seiko Epson Corp カラーフィルターの形成法
JPH06110086A (ja) * 1992-02-20 1994-04-22 Philips Gloeilampenfab:Nv 薄膜構造製造方法
JPH06509884A (ja) * 1991-08-19 1994-11-02 イーストマン コダック カンパニー ハードコピー画像形成システム
JP2000330128A (ja) * 1999-05-14 2000-11-30 Internatl Business Mach Corp <Ibm> カラー液晶表示装置製造方法
WO2007136656A2 (en) * 2006-05-19 2007-11-29 Eastman Kodak Company Colored masking for forming transparent structures
WO2009067162A1 (en) * 2007-11-20 2009-05-28 Eastman Kodak Company Process using colored mask combined with selective area deposition
WO2009067153A1 (en) * 2007-11-20 2009-05-28 Eastman Kodak Company Multicolor mask

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US2371746A (en) * 1942-12-12 1945-03-20 Eastman Kodak Co Photographic color correction process
JPS629301A (ja) 1985-07-05 1987-01-17 Kyodo Printing Co Ltd カラ−フイルタの製造方法
FR2595155B1 (fr) * 1986-02-28 1988-04-29 Commissariat Energie Atomique Procede de realisation de filtres colores en bandes et d'electrodes en bandes auto-alignes pour une cellule d'affichage polychrome a film liquide et cellule correspondante
JP2593670B2 (ja) * 1987-11-26 1997-03-26 セイコー電子工業株式会社 カラー表示装置の製造方法
JPH01241522A (ja) * 1988-03-23 1989-09-26 Seiko Instr & Electron Ltd 多色液晶表示装置の製造方法
US5212575A (en) * 1988-08-30 1993-05-18 Canon Kabushiki Kaisha Functional substrate for controlling pixels
JPH03287103A (ja) 1990-04-02 1991-12-17 Seiko Epson Corp カラーフィルターの形成法
US5391507A (en) * 1993-09-03 1995-02-21 General Electric Company Lift-off fabrication method for self-aligned thin film transistors
JPH08313726A (ja) * 1995-05-16 1996-11-29 Seiko Epson Corp アクティブマトリックス型液晶表示装置及びその製造方法
US6068953A (en) * 1997-11-17 2000-05-30 Ricoh Company, Ltd. Color filter for liquid crystal display device
US6338988B1 (en) * 1999-09-30 2002-01-15 International Business Machines Corporation Method for fabricating self-aligned thin-film transistors to define a drain and source in a single photolithographic step
GB9927287D0 (en) * 1999-11-19 2000-01-12 Koninkl Philips Electronics Nv Top gate thin film transistor and method of producing the same
US6294445B1 (en) * 2000-02-22 2001-09-25 International Rectifier Corp. Single mask process for manufacture of fast recovery diode
US7804552B2 (en) * 2000-05-12 2010-09-28 Semiconductor Energy Laboratory Co., Ltd. Electro-optical device with light shielding portion comprising laminated colored layers, electrical equipment having the same, portable telephone having the same
US7056834B2 (en) * 2004-02-10 2006-06-06 Hewlett-Packard Development Company, L.P. Forming a plurality of thin-film devices using imprint lithography
US7100510B2 (en) * 2005-02-09 2006-09-05 Eastman Kodak Company Method for registering patterns on a web
US8153352B2 (en) * 2007-11-20 2012-04-10 Eastman Kodak Company Multicolored mask process for making display circuitry

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62132367A (ja) * 1985-12-04 1987-06-15 Nec Corp 薄膜電界効果型トランジスタ
JPH01246551A (ja) * 1988-03-29 1989-10-02 Dainippon Printing Co Ltd 多色螢光面形成法
JPH0437804A (ja) * 1990-06-04 1992-02-07 Seiko Epson Corp カラーフィルターの形成法
JPH06509884A (ja) * 1991-08-19 1994-11-02 イーストマン コダック カンパニー ハードコピー画像形成システム
JPH06110086A (ja) * 1992-02-20 1994-04-22 Philips Gloeilampenfab:Nv 薄膜構造製造方法
JP2000330128A (ja) * 1999-05-14 2000-11-30 Internatl Business Mach Corp <Ibm> カラー液晶表示装置製造方法
WO2007136656A2 (en) * 2006-05-19 2007-11-29 Eastman Kodak Company Colored masking for forming transparent structures
WO2009067162A1 (en) * 2007-11-20 2009-05-28 Eastman Kodak Company Process using colored mask combined with selective area deposition
WO2009067153A1 (en) * 2007-11-20 2009-05-28 Eastman Kodak Company Multicolor mask

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011505589A (ja) * 2007-11-20 2011-02-24 イーストマン コダック カンパニー 選択的領域堆積と組み合わせて着色マスクを使用する方法
JP2011507008A (ja) * 2007-11-20 2011-03-03 イーストマン コダック カンパニー マルチカラーマスク
JP2014529728A (ja) * 2011-08-02 2014-11-13 アルマ・マテール・ストゥディオルム・ウニベルシータ・ディ・ボローニャＡｌｍａ Ｍａｔｅｒ Ｓｔｕｄｉｏｒｕｍ Ｕｎｉｖｅｒｓｉｔａ Ｄｉ Ｂｏｌｏｇｎａ 電離放射線のイントリンジックな直接検出器およびその検出器の製造方法
JP2016191937A (ja) * 2012-01-12 2016-11-10 株式会社ニコン 基板処理装置、基板処理方法、及び円筒状マスク

Also Published As

Publication number Publication date
EP2212743A1 (en) 2010-08-04
US8715894B2 (en) 2014-05-06
US20120231239A1 (en) 2012-09-13
WO2009067147A1 (en) 2009-05-28
US20090130610A1 (en) 2009-05-21
US8221964B2 (en) 2012-07-17

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