JP2011501209A - 色共焦点センサ - Google Patents

色共焦点センサ Download PDF

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Publication number
JP2011501209A
JP2011501209A JP2010528958A JP2010528958A JP2011501209A JP 2011501209 A JP2011501209 A JP 2011501209A JP 2010528958 A JP2010528958 A JP 2010528958A JP 2010528958 A JP2010528958 A JP 2010528958A JP 2011501209 A JP2011501209 A JP 2011501209A
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Japan
Prior art keywords
light
reflected
light beam
substrate
position signal
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JP2010528958A
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Japanese (ja)
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JP2011501209A5 (enExample
Inventor
ジェイ． ゲイツ，ブライアン
アール． シコラ，クレイグ
ファクリス，ディーン
ジェイ． マーナン，アンドリュー
オー． フアルミガ，ネスター
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of JP2011501209A publication Critical patent/JP2011501209A/ja
Publication of JP2011501209A5 publication Critical patent/JP2011501209A5/ja
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0075—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. increasing, the depth of field or depth of focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP2010528958A 2007-10-11 2008-10-03 色共焦点センサ Withdrawn JP2011501209A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US97924007P 2007-10-11 2007-10-11
PCT/US2008/078724 WO2009048808A1 (en) 2007-10-11 2008-10-03 Chromatic confocal sensor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014014491A Division JP5890443B2 (ja) 2007-10-11 2014-01-29 色共焦点センサ

Publications (2)

Publication Number Publication Date
JP2011501209A true JP2011501209A (ja) 2011-01-06
JP2011501209A5 JP2011501209A5 (enExample) 2011-11-10

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JP2010528958A Withdrawn JP2011501209A (ja) 2007-10-11 2008-10-03 色共焦点センサ
JP2014014491A Active JP5890443B2 (ja) 2007-10-11 2014-01-29 色共焦点センサ

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JP2014014491A Active JP5890443B2 (ja) 2007-10-11 2014-01-29 色共焦点センサ

Country Status (5)

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US (1) US8451457B2 (enExample)
EP (1) EP2208100B8 (enExample)
JP (2) JP2011501209A (enExample)
CN (1) CN101821659B (enExample)
WO (1) WO2009048808A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
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JP2015502566A (ja) * 2011-10-25 2015-01-22 サンフォード−バーナム メディカル リサーチ インスティテュート 自動化された顕微鏡使用のための多関数型自動焦点システムおよび方法
WO2019116802A1 (ja) * 2017-12-15 2019-06-20 株式会社堀場製作所 粒子分析装置

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JP5951928B2 (ja) 2007-09-06 2016-07-13 スリーエム イノベイティブ プロパティズ カンパニー 光出力の領域制御を提供する光抽出構造体を有する光ガイド
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KR101819006B1 (ko) * 2010-10-27 2018-01-17 삼성전자주식회사 광학 측정 장치
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CN109752354A (zh) * 2017-11-06 2019-05-14 锐准医光股份有限公司 整合米洛光学干涉显微术与荧光显微术的光学切层装置
US11421983B2 (en) * 2018-01-24 2022-08-23 Cyberoptics Corporation Structured light projection for specular surfaces
US10866092B2 (en) * 2018-07-24 2020-12-15 Kla-Tencor Corporation Chromatic confocal area sensor
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CN111596464B (zh) * 2020-05-28 2021-10-15 华中科技大学 一种调控聚焦光斑三维方向强度的装置和方法
CN113358030B (zh) * 2021-07-15 2022-09-30 中国科学院长春光学精密机械与物理研究所 色散共焦测量系统及其误差修正方法
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JP2006198634A (ja) * 2005-01-18 2006-08-03 National Institute Of Information & Communication Technology レーザー加工装置、この装置を用いて製造した光デバイス

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Cited By (3)

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Publication number Priority date Publication date Assignee Title
JP2015502566A (ja) * 2011-10-25 2015-01-22 サンフォード−バーナム メディカル リサーチ インスティテュート 自動化された顕微鏡使用のための多関数型自動焦点システムおよび方法
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JPWO2019116802A1 (ja) * 2017-12-15 2020-12-24 株式会社堀場製作所 粒子分析装置

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Publication number Publication date
EP2208100A1 (en) 2010-07-21
JP5890443B2 (ja) 2016-03-22
CN101821659A (zh) 2010-09-01
US8451457B2 (en) 2013-05-28
EP2208100B1 (en) 2017-06-28
CN101821659B (zh) 2014-09-24
JP2014088041A (ja) 2014-05-15
EP2208100B8 (en) 2017-08-16
WO2009048808A1 (en) 2009-04-16
US20100296106A1 (en) 2010-11-25
EP2208100A4 (en) 2011-03-09

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