JP2011500462A - 互い違いの壁構造を有するウェハ容器 - Google Patents
互い違いの壁構造を有するウェハ容器 Download PDFInfo
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- JP2011500462A JP2011500462A JP2010528847A JP2010528847A JP2011500462A JP 2011500462 A JP2011500462 A JP 2011500462A JP 2010528847 A JP2010528847 A JP 2010528847A JP 2010528847 A JP2010528847 A JP 2010528847A JP 2011500462 A JP2011500462 A JP 2011500462A
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- Prior art keywords
- base
- wall
- cover
- wafer container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
【選択図】図2
Description
Claims (22)
- 円形領域が複数の角度セクタを含む円周を有するベースと、
第1角度セクタを定める第1外側円弧に沿った第1壁と、第2角度セクタを定める第1内側円弧に沿った第2壁とを含み、前記第1壁と前記第2壁が角度セクタの0−50%を共有する、前記ベースに取り付けられた壁構造と、
第3角度セクタを定める第2外側円弧に沿った第3壁と、第4角度セクタを定める第2内側円弧に沿っており、角度セクタの0−50%を前記第3壁と共有する第4壁と、
前記ベースと嵌合して閉じた容器を形成するカバーと、を備えたことを特徴とするウェハ容器。 - 壁の総数をk個とする一連の付加的な壁をさらに備え、kは4より大きい整数であり、k番目の壁は角度セクタの0−50%を前記第1壁と共有する円弧を有し、各内側円弧は前記円周に沿って外側円弧と交互に配置されることを特徴とする請求項1に記載のウェハ容器。
- 前記壁構造の壁は、角度セクタの0.1%から25%を共有することを特徴とする請求項1に記載のウェハ容器。
- 前記壁構造の壁は、角度セクタの0.1%から10%を共有することを特徴とする請求項1に記載のウェハ容器。
- 前記カバーは各ノッチに隣接したランプを含み、該ランプは、前記ベース上のラッチをガイドしてそれぞれのノッチと係合させるための勾配を有することを特徴とする請求項1に記載のウェハ容器。
- 前記ベースは4つの角を有し、当該角の少なくとも2つにはラッチが取り付けられていることを特徴とする請求項1に記載のウェハ容器。
- 円形領域が複数の角度セクタを含む円周を有するベースと、
セグメント化された内壁とセグメント化された外壁とを備え、前記ベースに対して垂直であり、各内壁は前記ベースにおけるそれぞれの第1円弧上に位置するとともに各外壁は前記ベースにおけるそれぞれの第2円弧上に位置し、前記第1円弧の円弧長の50−99.5%は前記第2円弧の円弧長と同じ角度セクタに位置しない、壁構造と、
前記ベースと嵌合して閉じた容器を形成するカバーと、を備えたことを特徴とするウェハ容器。 - 前記第1円弧の円弧長の少なくとも90%は、前記第2円弧の円弧長と同じ角度セクタに位置しないことを特徴とする7に記載のウェハ容器。
- セグメント化された内壁はそれぞれ前記円周の90度未満を占めることを特徴とする請求項7に記載のウェハ容器。
- 前記セグメント化された内壁は、前記セグメント化された外壁と交互に配置されることを特徴とする請求項7に記載のウェハ容器。
- 前記カバーは、前記ベースを受けるためのランプを有するノッチを含むことを特徴とする請求項7に記載のウェハ容器。
- 前記ベースに連結された一対のラッチをさらに備え、各ラッチが前記カバーの各ランプ上にロックされると、前記ラッチは前記ベースを前記カバーに固定することを特徴とする請求項11に記載の容器。
- 主面を有するトップカバー、及び該主面から延びる第1壁構造と、
前記壁構造に取り付けられた複数の支持ブラケットと、
前記カバーの各角に設けられたノッチと、
前記トップカバーの各ノッチと係合する複数のラッチを有するベースとを備え、
各ノッチは第1の縁と該第1の縁より長い第2の縁とを有し、前記第2の縁は前記ベースから対応するラッチを受けるためのランプを有することを特徴とするウェハ容器。 - 前記壁構造における隙間をさらに備え、前記支持ブラケットの一つは前記隙間の一方の側を囲むことを特徴とする請求項13に記載のウェハ容器。
- 前記ベースに垂直な第2壁構造をさらに備え、前記ベースは複数の角度セクタを含む円周を有する円形領域を有し、前記壁構造は外壁部分と交互に配置される内壁セグメントを含み、各内壁セグメントは角度セクタの0−10%を次に代わる外壁セグメントと共有することを特徴とする請求項13に記載のウェハ容器。
- 内部に収容された複数の半導体ウェハをさらに備えたことを特徴とする請求項13に記載のウェハ容器。
- 円周が配置される上面を有するベースと、
前記ベースから延びる壁構造と、
前記上面の各側に位置する一対の基準タブと、
固定されたウェハ容器を形成するために前記基準タブと位置合わせされるカバーと、を備えたことを特徴とするウェハ容器。 - 前記カバーはその第1表面に取り付けられた支持ブラケットを含み、各支持ブラケットは対応する一対の基準タブと連結する一対の凹部を有することを特徴とする請求項17に記載のウェハ容器。
- 前記ベースの少なくとも2つの角にラッチをさらに備えたことを特徴とする請求項17に記載のウェハ容器。
- 前記カバーは前記ベースからラッチを受けるノッチを有し、各ノッチは第1の縁と該第1の縁より長い第2の縁とを有し、前記第2の縁は前記ベースから対応するラッチを受けるためのランプを有することを特徴とする請求項19に記載のウェハ容器。
- 内部に収容された複数の半導体ウェハをさらに備えたことを特徴とする請求項17に記載のウェハ容器。
- 前記ベースと前記カバーとの位置合わせを容易にするために、前記ベースの上面及び前記カバーに目視マークをさらに備えたことを特徴とする請求項17に記載のウェハ容器。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US99867807P | 2007-10-12 | 2007-10-12 | |
US60/998,678 | 2007-10-12 | ||
PCT/US2007/025434 WO2009048456A1 (en) | 2007-10-12 | 2007-12-11 | Wafer container with staggered wall structure |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011500462A true JP2011500462A (ja) | 2011-01-06 |
JP5091321B2 JP5091321B2 (ja) | 2012-12-05 |
Family
ID=40533139
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010528847A Active JP5091321B2 (ja) | 2007-10-12 | 2007-12-11 | 互い違いの壁構造を有するウェハ容器 |
Country Status (7)
Country | Link |
---|---|
US (3) | US7918341B2 (ja) |
EP (1) | EP2209726A4 (ja) |
JP (1) | JP5091321B2 (ja) |
KR (1) | KR20100080503A (ja) |
CN (1) | CN101888957B (ja) |
TW (1) | TW200921828A (ja) |
WO (1) | WO2009048456A1 (ja) |
Cited By (1)
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WO2018180733A1 (ja) * | 2017-03-31 | 2018-10-04 | アキレス株式会社 | ウェーハ収容容器 |
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-
2007
- 2007-12-11 CN CN200780101838.8A patent/CN101888957B/zh active Active
- 2007-12-11 KR KR1020107001778A patent/KR20100080503A/ko not_active Application Discontinuation
- 2007-12-11 JP JP2010528847A patent/JP5091321B2/ja active Active
- 2007-12-11 EP EP07862831A patent/EP2209726A4/en not_active Withdrawn
- 2007-12-11 WO PCT/US2007/025434 patent/WO2009048456A1/en active Application Filing
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2008
- 2008-02-01 US US12/012,371 patent/US7918341B2/en active Active - Reinstated
- 2008-05-30 TW TW097120345A patent/TW200921828A/zh unknown
-
2010
- 2010-10-14 US US12/904,405 patent/US8104619B2/en not_active Expired - Fee Related
-
2011
- 2011-12-23 US US13/336,582 patent/US20120168346A1/en not_active Abandoned
Patent Citations (5)
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JP2003505875A (ja) * | 1999-07-23 | 2003-02-12 | ブルックス、レイ ジー. | 保存および出荷用に設計された容器内に保持された集積回路(ic)ウェーハの保護システム |
JP2002334923A (ja) * | 2001-05-09 | 2002-11-22 | Achilles Corp | 電子部材用収納容器 |
JP2006527919A (ja) * | 2003-06-17 | 2006-12-07 | イリノイ トゥール ワークス インコーポレイティド | 動きを限定するウェファボックス |
JP2005347734A (ja) * | 2004-06-03 | 2005-12-15 | Convey Inc | 集積回路ウェハの梱包システム及び方法 |
JP2006056573A (ja) * | 2004-08-20 | 2006-03-02 | Vantec Co Ltd | ウェハー搬送容器 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2018180733A1 (ja) * | 2017-03-31 | 2018-10-04 | アキレス株式会社 | ウェーハ収容容器 |
US11335615B2 (en) | 2017-03-31 | 2022-05-17 | Achilles Corporation | Wafer accommodation container |
Also Published As
Publication number | Publication date |
---|---|
US8104619B2 (en) | 2012-01-31 |
CN101888957B (zh) | 2013-01-02 |
JP5091321B2 (ja) | 2012-12-05 |
US20110036748A1 (en) | 2011-02-17 |
CN101888957A (zh) | 2010-11-17 |
US7918341B2 (en) | 2011-04-05 |
KR20100080503A (ko) | 2010-07-08 |
EP2209726A1 (en) | 2010-07-28 |
EP2209726A4 (en) | 2012-08-15 |
WO2009048456A1 (en) | 2009-04-16 |
US20090095650A1 (en) | 2009-04-16 |
TW200921828A (en) | 2009-05-16 |
US20120168346A1 (en) | 2012-07-05 |
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