JP2011252147A - 光酸発生剤、この製造方法、及びこれを含むレジスト組成物 - Google Patents
光酸発生剤、この製造方法、及びこれを含むレジスト組成物 Download PDFInfo
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- JP2011252147A JP2011252147A JP2011097064A JP2011097064A JP2011252147A JP 2011252147 A JP2011252147 A JP 2011252147A JP 2011097064 A JP2011097064 A JP 2011097064A JP 2011097064 A JP2011097064 A JP 2011097064A JP 2011252147 A JP2011252147 A JP 2011252147A
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- 239000001257 hydrogen Substances 0.000 claims abstract description 15
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- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 10
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- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical group C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 claims description 9
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 8
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- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 claims description 6
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- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 4
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- 101150065749 Churc1 gene Proteins 0.000 claims description 2
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- 125000005428 anthryl group Chemical group [H]C1=C([H])C([H])=C2C([H])=C3C(*)=C([H])C([H])=C([H])C3=C([H])C2=C1[H] 0.000 claims description 2
- 125000002529 biphenylenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C12)* 0.000 claims description 2
- 125000005982 diphenylmethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])(*)C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 claims description 2
- GVEPBJHOBDJJJI-UHFFFAOYSA-N fluoranthrene Chemical group C1=CC(C2=CC=CC=C22)=C3C2=CC=CC3=C1 GVEPBJHOBDJJJI-UHFFFAOYSA-N 0.000 claims description 2
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- 125000002950 monocyclic group Chemical group 0.000 claims description 2
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- 125000001712 tetrahydronaphthyl group Chemical group C1(CCCC2=CC=CC=C12)* 0.000 claims description 2
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- 125000004432 carbon atom Chemical group C* 0.000 description 14
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- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid group Chemical group C(C1=CC=CC=C1)(=O)O WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 12
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- 239000011734 sodium Substances 0.000 description 8
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 7
- 0 Cc1ccc(*)cc1 Chemical compound Cc1ccc(*)cc1 0.000 description 7
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- 239000012153 distilled water Substances 0.000 description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 5
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- 229920005989 resin Polymers 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 4
- 238000005160 1H NMR spectroscopy Methods 0.000 description 4
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 4
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 4
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 125000000753 cycloalkyl group Chemical group 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
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- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
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- JBPFVEMAQAZIBT-UHFFFAOYSA-M sodium 1,1-difluoro-3-hydroxypropane-1-sulfonate Chemical compound FC(CCO)(S(=O)(=O)[O-])F.[Na+] JBPFVEMAQAZIBT-UHFFFAOYSA-M 0.000 description 4
- ITMCEJHCFYSIIV-UHFFFAOYSA-M triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-M 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 3
- 238000005481 NMR spectroscopy Methods 0.000 description 3
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- PASDCCFISLVPSO-UHFFFAOYSA-N benzoyl chloride Chemical compound ClC(=O)C1=CC=CC=C1 PASDCCFISLVPSO-UHFFFAOYSA-N 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
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- SFVWXKDDDVPZHT-UHFFFAOYSA-M sodium 1,1-difluoro-3-methoxy-3-oxopropane-1-sulfonate Chemical compound FC(CC(=O)OC)(S(=O)(=O)[O-])F.[Na+] SFVWXKDDDVPZHT-UHFFFAOYSA-M 0.000 description 3
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 description 3
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- WRMNZCZEMHIOCP-UHFFFAOYSA-N 2-phenylethanol Chemical compound OCCC1=CC=CC=C1 WRMNZCZEMHIOCP-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-WFGJKAKNSA-N Dimethyl sulfoxide Chemical compound [2H]C([2H])([2H])S(=O)C([2H])([2H])[2H] IAZDPXIOMUYVGZ-WFGJKAKNSA-N 0.000 description 2
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- 125000003707 hexyloxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 2
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- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
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- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
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- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
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- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 229950005499 carbon tetrachloride Drugs 0.000 description 1
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Abstract
【解決手段】光酸発生剤は下記化学式で表される化合物である。X、Y、Q1、Q2、n、及びA+の定義は詳細な説明に記載した通りである。光酸発生剤は、露光時に発生する酸の拡散速度が遅く、拡散距離が短く、適切な酸度を有するため、LWR特性を改善でき、工程に使用する純水などの溶媒への溶出を制御することができる。
【化1】
Description
[光酸発生剤の合成例1]
安息香酸−2,2−ジフルオロ−2−スルホ−プロピルエステルジフェニルメチルフェニルスルホニウム塩(Benzoic acid−2,2−difluoro−2−sulfo−propyl ester diphenyl methyl phenyl sulfonium salt)の合成
(第1段階)下記反応式1のように、氷浴下で1,1−ジフルオロ−3−メトキシ−3−オキソプロパン−1−スルホネートナトリウム塩(sodium 1,1−difluoro−3−methoxy−3−oxopropane−1−sulfonate)83g(0.376mol)を溶媒のメタノール(methanol、MeOH)160mlとTHF(tetrahydrofuran)1.2Lに溶かし、水素化ホウ素ナトリウム(NaBH4)44g(1.16mol)をゆっくり滴加して反応混合液を製造した。前記滴加を完了した反応混合液は、氷浴を除去した後、昇温して60℃を維持し、約4時間撹拌した。
安息香酸−2,2−ジフルオロ−2−スルホ−プロピルエステルジフェニルメチルフェニルスルホニウム塩(Benzoic acid−2,2−difluoro−2−sulfo−propyl ester diphenyl methyl phenyl sulfonium salt)の合成
(第1段階)前記合成例1の第1段階と同一に実施して1,1−ジフルオロ−3−ヒドロキシプロパン−1−スルホネートナトリウム塩を得た。
[樹脂の合成例1]
3−ビシクロ[2.2.1]ヘプト−5−エン−2−イル−3−ヒドロキシプロピオン酸t−ブチルエステル(3−Bicyclo[2.2.1]hept−5−en−2−yl−3−hydroxy−propionic acid t−butyl ester)、1−メチルアダマンタンアクリレート(1−methyl adamantane acrylate)、γ−ブチロラクトンアクリレート(gamma−butyrolactone acrylate)を1:1:1(33部:33部:33部)のモル比で充填し、重合溶媒としては1,4−ジオキサンを反応単量体の総質量の3倍を使用した。開始剤としては、アゾビスイソブチロニトリルを単量体の総モル量を基準として4mol%の比率で使用し、65℃で16時間反応させた。
[比較例1]
樹脂の合成例1で得られた前記化学式10で表される樹脂100重量部に対して、光酸発生剤(PAG)としてアダマンタン−1−カルボン酸−2,2−ジフルオロ−2−スルホ−プロピルエステルジフェニルメチルフェニルスルホニウム塩5重量部と、塩基性添加剤(BASE)としてテトラメチルアンモニウムヒドロキシド0.5重量部をプロピレングリコールメチルエーテルアセテート1,000重量部に溶解させた後、0.2umの膜フィルタで濾過してレジスト液を調製した。
光酸発生剤として、合成例1で得られた前記反応式4で「B」と表示した安息香酸−2,2−ジフルオロ−2−スルホ−プロピルエステルジフェニルメチルフェニルスルホニウム塩(Benzoic acid−2,2−difluoro−2−sulfo−propyl ester diphenyl methyl phenyl sulfonium salt)3重量部を用いたことを除いては、比較例1と同一にレジスト液を製造して物性を評価した。
光酸発生剤として、合成例1で得られた前記反応式4で「B」と表示した安息香酸−2,2−ジフルオロ−2−スルホ−プロピルエステルジフェニルメチルフェニルスルホニウム塩(Benzoic acid−2,2−difluoro−2−sulfo−propyl ester diphenyl methyl phenyl sulfonium salt)5重量部を用いたことを除いては、比較例1と同一にレジスト液を製造して物性を評価した。
光酸発生剤として、合成例1で得られた前記反応式4で「B」と表示した安息香酸−2,2−ジフルオロ−2−スルホ−プロピルエステルジフェニルメチルフェニルスルホニウム塩(Benzoic acid−2,2−difluoro−2−sulfo−propyl ester diphenyl methyl phenyl sulfonium salt)7重量部を用いたことを除いては、比較例1と同一にレジスト液を製造して物性を評価した。
実施例1〜3:前記合成例1で得られた前記反応式4でBと表示した安息香酸−2,2−ジフルオロ−2−スルホ−プロピルエステルジフェニルメチルフェニルスルホニウム塩
比較例1:アダマンタン−1−カルボン酸−2,2−ジフルオロ−2−スルホ−プロピルエステルジフェニルメチルフェニルスルホニウム塩
(2)塩基性添加剤(BASE):テトラメチルアンモニウムヒドロキシド
前記実施例1〜3で使用した光酸発生剤(PAG)は、光酸発生剤のアニオンに芳香族環(aromatic)を導入して製造したもので、既存のトリフラートやノナフレートの光酸発生剤に比べ、トリフラートとほぼ同様の酸度を維持し、かつ酸の拡散速度が遅く、拡散距離が短くて、益々微細化するL/Sのパターン実現に適合した特性を有する。
Claims (9)
- 前記Yは、フェニル基、ナフチル基、ビフェニル基、アントリル基、フェナントレン基、フルオレニル基、ピレン基、フェナレン基、インデン基、ビフェニレン基、ジフェニルメチル基、テトラヒドロナフチル基、ジヒドロアントリル基、テトラフェニルメチル基、及びトリフェニルメチル基からなる群から選択された何れか1つであることを特徴とする請求項1に記載の光酸発生剤。
- 前記Yは、下記化学式1−a〜1−lからなる群から選択された何れか1つであることを特徴とする請求項1に記載の光酸発生剤。
前記R21及びR22は、各々独立にCR24R25、O、CO、S、及びNR23からなる群から選択された何れか1つであり、前記R23〜R25は、各々独立に水素、アルキル基、及びアリール基からなる群から選択された何れか1つであり、
前記a、h及びiは、各々独立に0〜5の整数であり、前記bは、0〜3の整数であり、前記c及びdは、各々独立に0〜4の整数であり、前記e、f、及びgは、各々独立に0〜2の整数であり、0≦c+d+e≦9である。 - 前記化学式1において、前記Xは−O−、−OCH2−、−OCH(Cl)−、−CO−、−COCH2−、−COCH2CH2−、−CH2−、−CH2CH2−、−CH2−O−、−CH2−O−CH2−、−CH2CH2−O−、−CH2−O−CH2CH2−、−CH2CH2−O−CH2−、−CH2CH2CH2−O−、−CH2−O−CH2CH2CH2−、−CH2CH2−O−CH2CH2−、−CH2CH2CH2−O−CH2−、−CH(CH3)−、−C(CH3)2CH2−、−CH(CH3)CH2−、−CH(CH2CH3)−、−CH(OCH3)−、−C(CF3)(OCH3)−、−CH2−S−、−CH2−S−CH2−、−CH2CH2−S−、−CH2−S−CH2CH2−、−CH2CH2−S−CH2−、−CH2CH2CH2−S−、−CH2−S−CH2CH2CH2−、−CH2CH2−S−CH2CH2−、−CH2CH2CH2−S−CH2−、−CH(CH2)CH−、−C(CH2CH2)−、−CH2CO−、−CH2CH2CO−、−CH(CH3)CH2CO−、−CH(OH)−、−C(OH)(CH3)−、−CH(F)−、−CH(Br)−、−CH(Br)CH(Br)−、−CH=CH−、−CH2CH=CH−、−CH=CHCH2−、−CH=CH−O−、−CH=CH−S−、及び−CH=CHCO−からなる群から選択された何れか1つであることを特徴とする請求項1に記載の光酸発生剤。
- 下記化学式8で表される化合物を溶媒に溶解し、還元剤に反応させて下記化学式6で表される化合物を得る第1段階と、
下記化学式7で表される化合物と下記化学式6で表される化合物を塩基性触媒下で反応させて下記化学式4で表される化合物を得る第2段階と、
下記化学式4で表される化合物と下記化学式5で表される化合物を置換反応させて下記化学式1で表される化合物を得る第3段階と、
を含む下記化学式1で表される光酸発生剤の製造方法。
前記R6はアルキル基であり、
前記Q1、Q2、及びQ5は各々独立にハロゲン原子であり、
前記Yはアリール基で置換されたアルキル基及び芳香族炭化水素基からなる群から選択された何れか1つであり、
前記Xはアルカンジイル、アルケンジイル、NR’、S、O、CO、及びこれらの組み合わせからなる群から選択された何れか1つであり、前記R’は水素及びアルキル基からなる群から選択された何れか1つであり、
前記nは0〜5の整数であり、
前記A+は有機対イオンであり、
前記M+はLi+、Na+、及びK+からなる群から選択された何れか1つであり、
前記Z−は(OSO2CF3)−、(OSO2C4F9)−、(OSO2C8F17)−、(N(CF3)2)−、(N(C2F5)2)−、(N(C4F9)2)、(C(CF3)3)−、(C(C2F5)3)−、(C(C4F9)3)−、F−、Cl−、Br−、I−、BF4−、AsF6−、及びPF6−からなる群から選択された何れか1つである。 - 請求項1から請求項5の何れか1項に記載の光酸発生剤を含む化学増幅型レジスト組成物。
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CN102289149A (zh) | 2011-12-21 |
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SG176366A1 (en) | 2011-12-29 |
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