JP2011228362A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2011228362A JP2011228362A JP2010094386A JP2010094386A JP2011228362A JP 2011228362 A JP2011228362 A JP 2011228362A JP 2010094386 A JP2010094386 A JP 2010094386A JP 2010094386 A JP2010094386 A JP 2010094386A JP 2011228362 A JP2011228362 A JP 2011228362A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 90
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 119
- 238000000034 method Methods 0.000 claims description 50
- 239000007767 bonding agent Substances 0.000 claims description 15
- 238000003475 lamination Methods 0.000 claims description 12
- 238000005304 joining Methods 0.000 abstract description 4
- 239000003795 chemical substances by application Substances 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 202
- 238000005520 cutting process Methods 0.000 description 22
- 238000003384 imaging method Methods 0.000 description 8
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- 238000003754 machining Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000005286 illumination Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000011218 segmentation Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
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- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B24—GRINDING; POLISHING
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Abstract
【解決手段】複数の半導体デバイス22が形成されたマザーウエーハ2の表面に、積層デバイス32の裏面を接合して構成する半導体装置の製造方法。マザーボードに形成された複数の半導体デバイス22に対応する積層ウエーハ3の表面にサブストレート4の表面をボンド剤で接合し、サブストレート4が接合された積層ウエーハ3の裏面を研削して積層ウエーハ3を所定の厚みとし、積層ウエーハ3の裏面をマザーウエーハ2の表面に対面させて積層し、積層デバイス32の裏面に露出する電極221をマザーウエーハ2の表面に形成された半導体デバイス22に設けられた電極221に接合し、積層ウエーハ3の表面に接合されているサブストレート4を研削し、積層ウエーハ3の表面から除去する。
【選択図】図5
Description
マザーボードに形成された複数の半導体デバイスと対応して設けられた積層ウエーハの表面にサブストレートの表面をボンド剤を介して接合するサブストレート装着工程と、
サブストレートが接合された積層ウエーハのサブストレート側を研削装置のチャックテーブル上に保持し、積層ウエーハの裏面を研削して積層ウエーハを所定の厚みに研削する積層ウエーハ研削工程と、
積層ウエーハ研削工程が実施された積層ウエーハの裏面をマザーウエーハの表面に対面させて積層し、積層デバイスの裏面に露出する電極をマザーウエーハの表面に形成された半導体デバイスに設けられた電極に接合する積層ウエーハ接合工程と、
積層ウエーハが積層されたマザーウエーハ側を研削装置のチャックテーブル上に保持し、積層ウエーハの表面に接合されているサブストレートを研削し、積層ウエーハの表面からサブストレートを除去するサブストレート除去工程と、を含む、
ことを特徴とする半導体装置の製造方法が提供される。
積層デバイスが複数設けられた積層ウエーハの表面にサブストレートの表面をボンド剤を介して接合するサブストレート装着工程と、
サブストレートが接合された積層ウエーハのサブストレート側を研削装置のチャックテーブル上に保持し、積層ウエーハの裏面を研削して積層ウエーハを所定の厚みに研削する積層ウエーハ研削工程と、
積層ウエーハ研削工程が実施された積層ウエーハをサブストレートとともに個々の積層デバイスに分割する積層ウエーハ分割工程と、
個々に分割された積層デバイスの裏面をマザーウエーハの表面に形成された半導体デバイスの表面に対面させて積層し、積層デバイスの裏面に露出する電極をマザーウエーハの表面に形成された半導体デバイスに設けられた電極に接合する積層デバイス接合工程と、
積層デバイスが積層されたマザーウエーハ側を研削装置のチャックテーブル上に保持し、積層デバイスの表面に接合されているサブストレートを研削し、積層デバイスの表面からサブストレートを除去するサブストレート除去工程と、を含む、
ことを特徴とする半導体装置の製造方法が提供される。
そして、積層ウエーハの表面からサブストレートを除去するサブストレート除去工程においては、積層ウエーハの表面に接合されているサブストレートを研削して除去するので、積層ウエーハに負荷がかかることがない。従って、積層ウエーハの表面からサブストレートを離脱するためにサブストレートを250℃以上の温度に加熱し、積層ウエーハに負荷がかからないようにサブストレートを積層ウエーハの表面に沿ってスライドさせながら離脱するとともに、常温まで冷却する作業が不要となり生産性が向上する。
また、本発明による半導体装置の製造方法においては、サブストレートが接合された積層ウエーハの裏面を研削して積層ウエーハを所定の厚みに研削した後に積層ウエーハをサブストレートとともに個々の積層デバイスに分割し、個々に分割された積層デバイスの裏面をマザーウエーハの表面に形成された半導体デバイスの表面に対面させて積層し、積層デバイスの裏面に露出する電極をマザーウエーハの表面に形成された半導体デバイスに設けられた電極とを接合するので、薄くなった積層デバイスでも取り扱いが良好で、マザーウエーハの表面に形成された半導体デバイスに確実に接合することができる。
そして、積層デバイスの表面からサブストレートを除去するサブストレート除去工程においては、積層デバイスの表面に接合されているサブストレートを研削して除去するので、積層ウエーハに負荷がかかることがない。
先ず、複数の積層デバイス32が設けられた積層ウエーハ3の表面にサブストレートの表面をボンド剤を介して接合するサブストレート装着工程を実施する。即ち、図3に示すように積層ウエーハ3の表面3aに厚みが例えば500μmの円板状のシリコン基板からなるサブストレート4の表面4aを高温に耐えられる例えばエポキシ系のボンド剤40を介して接合する。なお、サブストレートとしては加工性がよいシリコン基板を用いることが望ましい。また、ボンド剤40の厚みは例えば20μmに設定されている。
本発明による半導体装置の製造方法の第2の実施形態においても、先ず上記第1の実施形態と同様に上記サブストレート装着工程を実施し、そして上記積層ウエーハ研削工程を実施する。
22:半導体デバイス
221:電極
3:積層ウエーハ
32:積層デバイス
321:電極
4:サブストレート
5:研削装置
51:研削装置のチャックテーブル
52:研削手段
524:研削ホイール
6:切削装置
61:切削装置のチャックテーブル
62:切削手段
623:切削ブレード
F:環状のフレーム
T:ダイシングテープ
Claims (2)
- 複数の半導体デバイスが形成されたマザーウエーハにおける複数の半導体デバイスの表面に、積層デバイスの裏面を接合して構成する半導体装置の製造方法であって、
マザーボードに形成された複数の半導体デバイスと対応して設けられた積層ウエーハの表面にサブストレートの表面をボンド剤を介して接合するサブストレート装着工程と、
サブストレートが接合された積層ウエーハのサブストレート側を研削装置のチャックテーブル上に保持し、積層ウエーハの裏面を研削して積層ウエーハを所定の厚みに研削する積層ウエーハ研削工程と、
積層ウエーハ研削工程が実施された積層ウエーハの裏面をマザーウエーハの表面に対面させて積層し、積層デバイスの裏面に露出する電極をマザーウエーハの表面に形成された半導体デバイスに設けられた電極に接合する積層ウエーハ接合工程と、
積層ウエーハが積層されたマザーウエーハ側を研削装置のチャックテーブル上に保持し、積層ウエーハの表面に接合されているサブストレートを研削し、積層ウエーハの表面からサブストレートを除去するサブストレート除去工程と、を含む、
ことを特徴とする半導体装置の製造方法。 - 複数の半導体デバイスが形成されたマザーウエーハの表面に、積層デバイスの裏面を接合して構成する半導体装置の製造方法であって、
積層デバイスが複数設けられた積層ウエーハの表面にサブストレートの表面をボンド剤を介して接合するサブストレート装着工程と、
サブストレートが接合された積層ウエーハのサブストレート側を研削装置のチャックテーブル上に保持し、積層ウエーハの裏面を研削して積層ウエーハを所定の厚みに研削する積層ウエーハ研削工程と、
積層ウエーハ研削工程が実施された積層ウエーハをサブストレートとともに個々の積層デバイスに分割する積層ウエーハ分割工程と、
個々に分割された積層デバイスの裏面をマザーウエーハの表面に形成された半導体デバイスの表面に対面させて積層し、積層デバイスの裏面に露出する電極をマザーウエーハの表面に形成された半導体デバイスに設けられた電極に接合する積層デバイス接合工程と、
積層デバイスが積層されたマザーウエーハ側を研削装置のチャックテーブル上に保持し、積層デバイスの表面に接合されているサブストレートを研削し、積層デバイスの表面からサブストレートを除去するサブストレート除去工程と、を含む、
ことを特徴とする半導体装置の製造方法。
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KR20140041338A (ko) * | 2012-09-27 | 2014-04-04 | 가부시기가이샤 디스코 | 표면 보호 부재 및 가공 방법 |
JP2015050363A (ja) * | 2013-09-03 | 2015-03-16 | 株式会社ディスコ | ウェーハの加工方法 |
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JP2003257930A (ja) * | 2002-03-01 | 2003-09-12 | Nec Electronics Corp | 半導体装置およびその製造方法 |
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TWI497658B (zh) * | 2009-10-07 | 2015-08-21 | Xintec Inc | 晶片封裝體及其製造方法 |
US8114707B2 (en) * | 2010-03-25 | 2012-02-14 | International Business Machines Corporation | Method of forming a multi-chip stacked structure including a thin interposer chip having a face-to-back bonding with another chip |
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JP2003257930A (ja) * | 2002-03-01 | 2003-09-12 | Nec Electronics Corp | 半導体装置およびその製造方法 |
JP2004186522A (ja) * | 2002-12-05 | 2004-07-02 | Renesas Technology Corp | 半導体装置の製造方法 |
US6762074B1 (en) * | 2003-01-21 | 2004-07-13 | Micron Technology, Inc. | Method and apparatus for forming thin microelectronic dies |
JP2007150048A (ja) * | 2005-11-29 | 2007-06-14 | Disco Abrasive Syst Ltd | ウェーハの分割方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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KR20140041338A (ko) * | 2012-09-27 | 2014-04-04 | 가부시기가이샤 디스코 | 표면 보호 부재 및 가공 방법 |
KR102024390B1 (ko) * | 2012-09-27 | 2019-09-23 | 가부시기가이샤 디스코 | 표면 보호 부재 및 가공 방법 |
JP2015050363A (ja) * | 2013-09-03 | 2015-03-16 | 株式会社ディスコ | ウェーハの加工方法 |
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