JP2011226894A - 電磁誘導式エンコーダ - Google Patents
電磁誘導式エンコーダ Download PDFInfo
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- JP2011226894A JP2011226894A JP2010096361A JP2010096361A JP2011226894A JP 2011226894 A JP2011226894 A JP 2011226894A JP 2010096361 A JP2010096361 A JP 2010096361A JP 2010096361 A JP2010096361 A JP 2010096361A JP 2011226894 A JP2011226894 A JP 2011226894A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2086—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of two or more coils with respect to two or more other coils
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- Physics & Mathematics (AREA)
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- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
【解決手段】測定方向に沿ってスケール10上に多数配列されたスケールコイル14と、前記スケールに対して測定方向に相対移動自在にグリッド12上に配設された送信コイル24及び受信コイルとを備え、送信コイルを励磁した時に、スケールコイルを経由して受信コイルで検出される磁束の変化から、スケールとグリッドの相対移動量を検出する電磁誘導式エンコーダにおいて、前記受信コイルが、測定方向に沿って複数セット(20A、20B)(20−1A、20−1B)(20−2A、20−2B)配置されており、該受信コイルの一方のセットは、他方のセットに対し、スケールピッチλ、λ1、λ2の1/2位相がずれた関係になっている。
【選択図】図4
Description
12…グリッド
14、14−1、14−2…スケールコイル
20A、20B、20−1A、20−1B、20−2A、20−2B…受信コイル
24、24−1、24−2…送信コイル
28…送信制御部
Claims (3)
- 測定方向に沿ってスケール上に多数配列されたスケールコイルと、
前記スケールに対して測定方向に相対移動自在にグリッド上に配設された送信コイル及び受信コイルとを備え、
送信コイルを励磁した時に、スケールコイルを経由して受信コイルで検出される磁束の変化から、スケールとグリッドの相対移動量を検出する電磁誘導式エンコーダにおいて、
前記受信コイルが、測定方向に沿って複数セット配置されており、
該受信コイルの一方のセットは、他方のセットに対し、スケールピッチの1/2位相がずれた関係になっていることを特徴とする電磁誘導式エンコーダ。 - 前記複数セットの受信コイルの出力の差を取るように受信コイル同士が接続されていることを特徴とする請求項1に記載の電磁誘導式エンコーダ。
- 前記スケールコイル、送信コイル及び受信コイルを有する、スケールピッチの異なる複数のトラックを備えたことを特徴とする請求項1又は2に記載の電磁誘導式エンコーダ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010096361A JP5885382B2 (ja) | 2010-04-19 | 2010-04-19 | 電磁誘導式直線型エンコーダ |
US13/073,066 US20110254541A1 (en) | 2010-04-19 | 2011-03-28 | Electromagnetic encoder |
EP11162345.0A EP2378252B1 (en) | 2010-04-19 | 2011-04-14 | Electromagnetic encoder |
CN201110096933.1A CN102252702B (zh) | 2010-04-19 | 2011-04-18 | 电磁编码器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010096361A JP5885382B2 (ja) | 2010-04-19 | 2010-04-19 | 電磁誘導式直線型エンコーダ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011226894A true JP2011226894A (ja) | 2011-11-10 |
JP5885382B2 JP5885382B2 (ja) | 2016-03-15 |
Family
ID=44357904
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010096361A Active JP5885382B2 (ja) | 2010-04-19 | 2010-04-19 | 電磁誘導式直線型エンコーダ |
Country Status (4)
Country | Link |
---|---|
US (1) | US20110254541A1 (ja) |
EP (1) | EP2378252B1 (ja) |
JP (1) | JP5885382B2 (ja) |
CN (1) | CN102252702B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019196969A (ja) * | 2018-05-09 | 2019-11-14 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
CN111006698A (zh) * | 2018-10-04 | 2020-04-14 | 株式会社三丰 | 电磁感应型编码器 |
KR20210098442A (ko) * | 2019-09-29 | 2021-08-10 | 구이린 광루 메저링 인스트루먼트 컴퍼니 리미티드 | 하이브리드 위치결정 전자기 유도식 변위 센서 |
JP7257714B1 (ja) | 2022-01-25 | 2023-04-14 | 三男 眞鍋 | 位置測定装置 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6327874B2 (ja) * | 2014-02-04 | 2018-05-23 | 株式会社ミツトヨ | 誘導型位置測定装置 |
JP6234497B2 (ja) | 2016-03-15 | 2017-11-22 | Thk株式会社 | エンコーダ装置及びエンコーダ装置付き運動案内装置 |
US10520335B2 (en) * | 2016-08-24 | 2019-12-31 | Mitutoyo Corporation | Winding configuration for inductive position encoder |
US10612943B2 (en) * | 2016-08-24 | 2020-04-07 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
US10775199B2 (en) * | 2016-08-24 | 2020-09-15 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
EP3299771B1 (en) | 2016-09-22 | 2020-04-29 | Sagentia Limited | Inductive sensor arrangement |
JP2019113542A (ja) * | 2017-12-21 | 2019-07-11 | 株式会社ミツトヨ | 電磁誘導式エンコーダの巻線及びスケール構成 |
JP7154990B2 (ja) * | 2017-12-21 | 2022-10-18 | 株式会社ミツトヨ | 電磁誘導式エンコーダの巻線及びスケール構成 |
US11067414B1 (en) | 2020-03-23 | 2021-07-20 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11169008B2 (en) | 2020-03-23 | 2021-11-09 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US11181395B2 (en) | 2020-03-23 | 2021-11-23 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
US20230366702A1 (en) | 2020-10-02 | 2023-11-16 | TESA Sàrl | Absolute position encoder for measuring instrument |
US11713983B2 (en) | 2021-06-30 | 2023-08-01 | Mitutoyo Corporation | Sensing winding configuration for inductive position encoder |
Citations (3)
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JP2000180209A (ja) * | 1998-12-17 | 2000-06-30 | Mitsutoyo Corp | オフセットを減少させた高精度誘導電流型絶対位置トランスデュ―サ及び絶対位置決定方法 |
JP2005531779A (ja) * | 2002-07-02 | 2005-10-20 | アクチボラゲット エス ケイ エフ | 計測機能付きころがり軸受及びこれを備えた電動機 |
JP2009186200A (ja) * | 2008-02-04 | 2009-08-20 | Mitsutoyo Corp | 電磁誘導式エンコーダ |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0318781A (ja) | 1989-06-16 | 1991-01-28 | Fujitsu Ltd | バッテリチェック方式 |
US5434504A (en) * | 1993-10-01 | 1995-07-18 | International Business Machines Corporation | Position sensors for linear motors including plural symmetrical fluxes generated by a planar drive coil and received by planar sense coils being colinear along an axis of motion |
US6005387A (en) * | 1997-04-16 | 1999-12-21 | Mitutoyo Corporation | Reduced offset high accuracy induced current position transducer |
JP3842099B2 (ja) * | 2001-10-12 | 2006-11-08 | 株式会社ミツトヨ | 磁気式エンコーダ |
JP4392228B2 (ja) * | 2003-11-28 | 2009-12-24 | オークマ株式会社 | 位置検出装置 |
-
2010
- 2010-04-19 JP JP2010096361A patent/JP5885382B2/ja active Active
-
2011
- 2011-03-28 US US13/073,066 patent/US20110254541A1/en not_active Abandoned
- 2011-04-14 EP EP11162345.0A patent/EP2378252B1/en active Active
- 2011-04-18 CN CN201110096933.1A patent/CN102252702B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000180209A (ja) * | 1998-12-17 | 2000-06-30 | Mitsutoyo Corp | オフセットを減少させた高精度誘導電流型絶対位置トランスデュ―サ及び絶対位置決定方法 |
JP2005531779A (ja) * | 2002-07-02 | 2005-10-20 | アクチボラゲット エス ケイ エフ | 計測機能付きころがり軸受及びこれを備えた電動機 |
JP2009186200A (ja) * | 2008-02-04 | 2009-08-20 | Mitsutoyo Corp | 電磁誘導式エンコーダ |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019196969A (ja) * | 2018-05-09 | 2019-11-14 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
JP7086469B2 (ja) | 2018-05-09 | 2022-06-20 | 株式会社ミツトヨ | 電磁誘導式エンコーダ |
CN111006698A (zh) * | 2018-10-04 | 2020-04-14 | 株式会社三丰 | 电磁感应型编码器 |
CN111006698B (zh) * | 2018-10-04 | 2022-11-15 | 株式会社三丰 | 电磁感应型编码器 |
KR20210098442A (ko) * | 2019-09-29 | 2021-08-10 | 구이린 광루 메저링 인스트루먼트 컴퍼니 리미티드 | 하이브리드 위치결정 전자기 유도식 변위 센서 |
JP2022508323A (ja) * | 2019-09-29 | 2022-01-19 | グイリン グアンルー メジャリング インストルメント カンパニー リミテッド | ハイブリッド測位による電磁誘導型変位センサー |
JP7076645B2 (ja) | 2019-09-29 | 2022-05-27 | グイリン グアンルー メジャリング インストルメント カンパニー リミテッド | ハイブリッド測位による電磁誘導型変位センサー |
KR102650230B1 (ko) * | 2019-09-29 | 2024-03-21 | 구이린 광루 메저링 인스트루먼트 컴퍼니 리미티드 | 하이브리드 위치결정 전자기 유도식 변위 센서 |
JP7257714B1 (ja) | 2022-01-25 | 2023-04-14 | 三男 眞鍋 | 位置測定装置 |
JP2023108226A (ja) * | 2022-01-25 | 2023-08-04 | 三男 眞鍋 | 位置測定装置 |
Also Published As
Publication number | Publication date |
---|---|
US20110254541A1 (en) | 2011-10-20 |
JP5885382B2 (ja) | 2016-03-15 |
CN102252702B (zh) | 2014-06-11 |
EP2378252B1 (en) | 2015-08-19 |
CN102252702A (zh) | 2011-11-23 |
EP2378252A2 (en) | 2011-10-19 |
EP2378252A3 (en) | 2014-03-26 |
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