JP2011223043A - 半導体発光素子、および半導体発光素子を作製する方法 - Google Patents

半導体発光素子、および半導体発光素子を作製する方法 Download PDF

Info

Publication number
JP2011223043A
JP2011223043A JP2011173949A JP2011173949A JP2011223043A JP 2011223043 A JP2011223043 A JP 2011223043A JP 2011173949 A JP2011173949 A JP 2011173949A JP 2011173949 A JP2011173949 A JP 2011173949A JP 2011223043 A JP2011223043 A JP 2011223043A
Authority
JP
Japan
Prior art keywords
layer
gallium nitride
less
region
well layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011173949A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011223043A5 (https=
Inventor
Katsushi Akita
勝史 秋田
Yusuke Yoshizumi
祐介 善積
Takashi Kyono
孝史 京野
Hiroyuki Kitabayashi
弘之 北林
Koji Katayama
浩二 片山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP2011173949A priority Critical patent/JP2011223043A/ja
Publication of JP2011223043A publication Critical patent/JP2011223043A/ja
Publication of JP2011223043A5 publication Critical patent/JP2011223043A5/ja
Pending legal-status Critical Current

Links

Images

Landscapes

  • Led Devices (AREA)
JP2011173949A 2011-08-09 2011-08-09 半導体発光素子、および半導体発光素子を作製する方法 Pending JP2011223043A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011173949A JP2011223043A (ja) 2011-08-09 2011-08-09 半導体発光素子、および半導体発光素子を作製する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011173949A JP2011223043A (ja) 2011-08-09 2011-08-09 半導体発光素子、および半導体発光素子を作製する方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005326270A Division JP5048236B2 (ja) 2005-11-10 2005-11-10 半導体発光素子、および半導体発光素子を作製する方法

Publications (2)

Publication Number Publication Date
JP2011223043A true JP2011223043A (ja) 2011-11-04
JP2011223043A5 JP2011223043A5 (https=) 2012-08-23

Family

ID=45039516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011173949A Pending JP2011223043A (ja) 2011-08-09 2011-08-09 半導体発光素子、および半導体発光素子を作製する方法

Country Status (1)

Country Link
JP (1) JP2011223043A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113451455A (zh) * 2020-11-26 2021-09-28 重庆康佳光电技术研究院有限公司 Led外延的制备方法及led外延结构与led芯片

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001168471A (ja) * 1998-12-15 2001-06-22 Nichia Chem Ind Ltd 窒化物半導体発光素子
JP2002124702A (ja) * 2000-10-18 2002-04-26 Sharp Corp 窒化ガリウム系半導体発光素子
JP2003133649A (ja) * 2001-10-29 2003-05-09 Sharp Corp 窒化物半導体レーザ素子及び窒化物半導体レーザ素子の製造方法及びこれを備えた半導体光学装置
JP2005129923A (ja) * 2003-10-02 2005-05-19 Showa Denko Kk 窒化物半導体、それを用いた発光素子、発光ダイオード、レーザー素子およびランプ並びにそれらの製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001168471A (ja) * 1998-12-15 2001-06-22 Nichia Chem Ind Ltd 窒化物半導体発光素子
JP2002124702A (ja) * 2000-10-18 2002-04-26 Sharp Corp 窒化ガリウム系半導体発光素子
JP2003133649A (ja) * 2001-10-29 2003-05-09 Sharp Corp 窒化物半導体レーザ素子及び窒化物半導体レーザ素子の製造方法及びこれを備えた半導体光学装置
JP2005129923A (ja) * 2003-10-02 2005-05-19 Showa Denko Kk 窒化物半導体、それを用いた発光素子、発光ダイオード、レーザー素子およびランプ並びにそれらの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113451455A (zh) * 2020-11-26 2021-09-28 重庆康佳光电技术研究院有限公司 Led外延的制备方法及led外延结构与led芯片
CN113451455B (zh) * 2020-11-26 2022-05-03 重庆康佳光电技术研究院有限公司 Led外延的制备方法及led外延结构与led芯片

Similar Documents

Publication Publication Date Title
US7547910B2 (en) Semiconductor light-emitting device and method of manufacturing semiconductor light-emitting device
CN101689586B (zh) 氮化物半导体发光元件和氮化物半导体的制造方法
JP5634368B2 (ja) 半導体装置
JP4539752B2 (ja) 量子井戸構造の形成方法および半導体発光素子の製造方法
CN101626058B (zh) Ⅲ族氮化物类半导体发光元件及外延晶圆
JP5279006B2 (ja) 窒化物半導体発光素子
WO2015146069A1 (ja) 発光ダイオード素子
JP2006332258A (ja) 窒化物半導体装置及びその製造方法
JP2008118049A (ja) GaN系半導体発光素子
JP3626423B2 (ja) フォトニックデバイスの製造方法
JP4940670B2 (ja) 窒化物半導体発光素子を作製する方法
JP2009231609A (ja) 半導体発光素子の製造方法
JP2008028121A (ja) 半導体発光素子の製造方法
JP2011223043A (ja) 半導体発光素子、および半導体発光素子を作製する方法
JP2010021360A (ja) Iii族窒化物発光素子を製造する方法、及びiii族窒化物発光素子
JP2008227103A (ja) GaN系半導体発光素子
JP6071044B2 (ja) 半導体発光素子及びその製造方法
JP7319559B2 (ja) 窒化物半導体発光素子
JP2011187993A (ja) 半導体発光素子および半導体発光素子の製造方法
JP4057473B2 (ja) 化合物半導体発光素子及びその製造方法
KR20090002190A (ko) 질화물 반도체 발광소자 및 그 제조 방법
JP3767534B2 (ja) 発光デバイス
JP2009026956A (ja) 発光素子、発光素子のための基板生産物、および発光素子を作製する方法
JP5340351B2 (ja) 窒化物半導体装置
JP4369970B2 (ja) 化合物半導体発光素子の製造方法および化合物半導体発光素子

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110907

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120709

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130621

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130702

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20131105