JP2011223043A5 - - Google Patents
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- Publication number
- JP2011223043A5 JP2011223043A5 JP2011173949A JP2011173949A JP2011223043A5 JP 2011223043 A5 JP2011223043 A5 JP 2011223043A5 JP 2011173949 A JP2011173949 A JP 2011173949A JP 2011173949 A JP2011173949 A JP 2011173949A JP 2011223043 A5 JP2011223043 A5 JP 2011223043A5
- Authority
- JP
- Japan
- Prior art keywords
- gallium nitride
- region
- less
- layer
- dislocation density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910002601 GaN Inorganic materials 0.000 claims 16
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 16
- 238000005253 cladding Methods 0.000 claims 14
- 239000000758 substrate Substances 0.000 claims 11
- 239000004065 semiconductor Substances 0.000 claims 10
- 230000004888 barrier function Effects 0.000 claims 8
- 150000004767 nitrides Chemical class 0.000 claims 8
- 230000008021 deposition Effects 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- 239000002019 doping agent Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011173949A JP2011223043A (ja) | 2011-08-09 | 2011-08-09 | 半導体発光素子、および半導体発光素子を作製する方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011173949A JP2011223043A (ja) | 2011-08-09 | 2011-08-09 | 半導体発光素子、および半導体発光素子を作製する方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005326270A Division JP5048236B2 (ja) | 2005-11-10 | 2005-11-10 | 半導体発光素子、および半導体発光素子を作製する方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011223043A JP2011223043A (ja) | 2011-11-04 |
| JP2011223043A5 true JP2011223043A5 (https=) | 2012-08-23 |
Family
ID=45039516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011173949A Pending JP2011223043A (ja) | 2011-08-09 | 2011-08-09 | 半導体発光素子、および半導体発光素子を作製する方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011223043A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113451455B (zh) * | 2020-11-26 | 2022-05-03 | 重庆康佳光电技术研究院有限公司 | Led外延的制备方法及led外延结构与led芯片 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3705047B2 (ja) * | 1998-12-15 | 2005-10-12 | 日亜化学工業株式会社 | 窒化物半導体発光素子 |
| JP2002124702A (ja) * | 2000-10-18 | 2002-04-26 | Sharp Corp | 窒化ガリウム系半導体発光素子 |
| JP3910041B2 (ja) * | 2001-10-29 | 2007-04-25 | シャープ株式会社 | 窒化物半導体レーザ素子及びこれを備えた半導体光学装置 |
| JP2005129923A (ja) * | 2003-10-02 | 2005-05-19 | Showa Denko Kk | 窒化物半導体、それを用いた発光素子、発光ダイオード、レーザー素子およびランプ並びにそれらの製造方法 |
-
2011
- 2011-08-09 JP JP2011173949A patent/JP2011223043A/ja active Pending
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