JP2011187867A - 接合方法および水晶素子 - Google Patents

接合方法および水晶素子 Download PDF

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Publication number
JP2011187867A
JP2011187867A JP2010054208A JP2010054208A JP2011187867A JP 2011187867 A JP2011187867 A JP 2011187867A JP 2010054208 A JP2010054208 A JP 2010054208A JP 2010054208 A JP2010054208 A JP 2010054208A JP 2011187867 A JP2011187867 A JP 2011187867A
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Japan
Prior art keywords
substrate
bonding
material layer
quartz
bonding surface
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Pending
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JP2010054208A
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English (en)
Japanese (ja)
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JP2011187867A5 (enExample
Inventor
Takehito Shimazu
武仁 島津
Sachi Uomoto
幸 魚本
Hirokazu Kobayashi
宏和 小林
Kenji Oba
健司 大場
Yukiko Furukata
由紀子 古堅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tohoku University NUC
Kyocera Crystal Device Corp
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Tohoku University NUC
Kyocera Crystal Device Corp
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Application filed by Tohoku University NUC, Kyocera Crystal Device Corp filed Critical Tohoku University NUC
Priority to JP2010054208A priority Critical patent/JP2011187867A/ja
Publication of JP2011187867A publication Critical patent/JP2011187867A/ja
Publication of JP2011187867A5 publication Critical patent/JP2011187867A5/ja
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2010054208A 2010-03-11 2010-03-11 接合方法および水晶素子 Pending JP2011187867A (ja)

Priority Applications (1)

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JP2010054208A JP2011187867A (ja) 2010-03-11 2010-03-11 接合方法および水晶素子

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JP2010054208A JP2011187867A (ja) 2010-03-11 2010-03-11 接合方法および水晶素子

Publications (2)

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JP2011187867A true JP2011187867A (ja) 2011-09-22
JP2011187867A5 JP2011187867A5 (enExample) 2013-03-14

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014186887A (ja) * 2013-03-25 2014-10-02 Kyocera Crystal Device Corp 光学機器用窓部材
JP2016050863A (ja) * 2014-09-01 2016-04-11 京セラクリスタルデバイス株式会社 光学セル及びその製造方法
US11539346B2 (en) 2019-01-31 2022-12-27 Seiko Epson Corporation Resonator device, resonator module, electronic apparatus, and vehicle
US11575361B2 (en) 2019-01-31 2023-02-07 Seiko Epson Corporation Resonator device, resonator module, electronic apparatus, and vehicle
CN120178389A (zh) * 2025-05-21 2025-06-20 中国科学院高能物理研究所 一种超高能量分辨率分析晶体及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008207221A (ja) * 2007-02-27 2008-09-11 Takehito Shimazu 常温接合方法
JP2009206759A (ja) * 2008-02-27 2009-09-10 Seiko Instruments Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
JP2010046696A (ja) * 2008-08-22 2010-03-04 Musashino Eng:Kk 原子拡散接合方法及び前記方法により接合された構造体

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008207221A (ja) * 2007-02-27 2008-09-11 Takehito Shimazu 常温接合方法
JP2009206759A (ja) * 2008-02-27 2009-09-10 Seiko Instruments Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
JP2010046696A (ja) * 2008-08-22 2010-03-04 Musashino Eng:Kk 原子拡散接合方法及び前記方法により接合された構造体

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014186887A (ja) * 2013-03-25 2014-10-02 Kyocera Crystal Device Corp 光学機器用窓部材
JP2016050863A (ja) * 2014-09-01 2016-04-11 京セラクリスタルデバイス株式会社 光学セル及びその製造方法
US11539346B2 (en) 2019-01-31 2022-12-27 Seiko Epson Corporation Resonator device, resonator module, electronic apparatus, and vehicle
US11575361B2 (en) 2019-01-31 2023-02-07 Seiko Epson Corporation Resonator device, resonator module, electronic apparatus, and vehicle
CN120178389A (zh) * 2025-05-21 2025-06-20 中国科学院高能物理研究所 一种超高能量分辨率分析晶体及其制备方法

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