JP2011164402A - Method for manufacturing pellicle - Google Patents

Method for manufacturing pellicle Download PDF

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JP2011164402A
JP2011164402A JP2010027801A JP2010027801A JP2011164402A JP 2011164402 A JP2011164402 A JP 2011164402A JP 2010027801 A JP2010027801 A JP 2010027801A JP 2010027801 A JP2010027801 A JP 2010027801A JP 2011164402 A JP2011164402 A JP 2011164402A
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adhesive
pellicle
pellicle frame
position information
application
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Atsushi Horikoshi
堀越　　淳
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Shin Etsu Chemical Co Ltd
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Shin Etsu Chemical Co Ltd
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Priority to JP2010027801A priority Critical patent/JP2011164402A/en
Priority to KR1020100119462A priority patent/KR20110093588A/en
Priority to TW100104437A priority patent/TW201128323A/en
Priority to CN201110035692XA priority patent/CN102189066A/en
Publication of JP2011164402A publication Critical patent/JP2011164402A/en
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a pellicle, the method including a means of checking an application position prior to application in a process of applying an adhesive or a pressure-sensitive adhesive to a pellicle frame by using an automatic application device. <P>SOLUTION: The method for manufacturing a pellicle includes a process of applying an adhesive or a pressure-sensitive adhesive on an end face of a pellicle frame by using an automatic application device, wherein the process of applying the adhesive or the pressure-sensitive adhesive includes acquiring the position information of an end face of the pellicle frame to be coated, fetching an application start position and an application direction into an application program based on the acquired position information, and applying the adhesive or the pressure-sensitive adhesive to the end face of the pellicle frame. It is preferable that: the position information to be acquired is three-dimensional position information; the position information is acquired from an image; position information in a plane direction in the three-dimensional position information is acquired from an image while position information in a vertical direction is acquired by means of electromagnetic waves or sonic waves; and the image is obtained through a camera. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、半導体デバイス、プリント基板、液晶ディスプレイ等を製造する際のゴミ除けとして使用されるリソグラフィー用ペリクルの製造方法に関し、特には、ペリクルフレームへの接着剤、粘着剤の塗布工程に関するものである。   The present invention relates to a method for manufacturing a pellicle for lithography used as a dust remover when manufacturing a semiconductor device, a printed circuit board, a liquid crystal display, etc., and particularly relates to a process for applying an adhesive and a pressure-sensitive adhesive to a pellicle frame. is there.

ＬＳＩ、超ＬＳＩなどの半導体製造或いは液晶ディスプレイ等の製造においては、半導体ウェハー或いは液晶用原板に光を照射してパターンを作製するが、この時に用いるフォトマスク或いはレチクル（以下、単にフォトマスクと記述する）にゴミが付着していると、エッジががさついたものとなるほか、下地が黒く汚れたりするなど、寸法、品質、外観などが損なわれるという問題があった。   In the manufacture of semiconductors such as LSI and VLSI, or the manufacture of liquid crystal displays or the like, a pattern is produced by irradiating a semiconductor wafer or liquid crystal master plate with light. A photomask or reticle (hereinafter simply referred to as a photomask) used at this time is used. If the dust adheres to the surface, the edges become gritty and the base is black and dirty, resulting in a problem that the size, quality, and appearance are impaired.

このため、これらの作業は通常クリーンルームで行われているが、それでもフォトマスクを常に清浄に保つことが難しい。そこで、フォトマスク表面にゴミ除けとしてペリクルを貼り付けした後に露光を行っている。この場合、異物はフォトマスクの表面には直接付着せず、ペリクル上に付着するため、リソグラフィー時に焦点をフォトマスクのパターン上に合わせておけば、ペリクル上の異物は転写に無関係となる。   For this reason, these operations are usually performed in a clean room, but it is still difficult to keep the photomask clean. Therefore, exposure is performed after a pellicle is affixed to the photomask surface as a dust remover. In this case, the foreign matter does not adhere directly to the surface of the photomask but adheres to the pellicle. Therefore, if the focus is set on the pattern of the photomask during lithography, the foreign matter on the pellicle becomes irrelevant to the transfer.

一般に、ペリクルは、光を良く透過させるニトロセルロース、酢酸セルロース或いはフッ素樹脂などからなる透明なペリクル膜をアルミニウム、ステンレス、ポリエチレンなどからなるペリクルフレームの上端面にペリクル膜の良溶媒を塗布した後、風乾して接着する（特許文献１参照）か、アクリル樹脂やエポキシ樹脂などの接着剤で接着する（特許文献２、特許文献３参照）。さらに、ペリクルフレームの下端にはフォトマスクに接着するためのポリブテン樹脂、ポリ酢酸ビニル樹脂、アクリル樹脂、シリコーン樹脂等からなる粘着剤が設けられる。尚、粘着剤の表面には、通常粘着剤の保護を目的とした離型シート（セパレータ）が設けられる。   In general, the pellicle has a transparent pellicle film made of nitrocellulose, cellulose acetate or fluororesin that transmits light well, and a pellicle film good solvent is applied to the upper end surface of a pellicle frame made of aluminum, stainless steel, polyethylene, etc. Air-dry and adhere (see Patent Document 1) or adhere with an adhesive such as acrylic resin or epoxy resin (see Patent Document 2 and Patent Document 3). Further, an adhesive made of polybutene resin, polyvinyl acetate resin, acrylic resin, silicone resin or the like for adhering to the photomask is provided at the lower end of the pellicle frame. Note that a release sheet (separator) is usually provided on the surface of the adhesive to protect the adhesive.

ペリクルフレームへの接着剤、粘着剤の塗布は刷毛塗り、スプレー塗布、ディップ、チューブやカートリッジからの押出し塗布、自動塗布装置による塗布等によって行われるが、精密に定量的に塗布できるということから自動塗布装置による塗布が最も適している。自動塗布装置としては、特許文献４に示される液体塗布装置等が利用され得る。   Adhesives and adhesives are applied to the pellicle frame by brushing, spraying, dipping, extrusion coating from tubes and cartridges, coating by automatic coating equipment, etc. Application by an application device is most suitable. As the automatic coating apparatus, a liquid coating apparatus shown in Patent Document 4 can be used.

特開昭５８−２１９０２３号公報JP 58-219033 米国特許第４８６１４０２号明細書US Pat. No. 4,861,402 特公昭６３−２７７０７号公報Japanese Patent Publication No. 63-27707 特開平７−２４３９０号公報Japanese Patent Laid-Open No. 7-24390

通常、自動塗布装置の塗布プログラムにおける運行パターンは、ペリクルフレームが毎回同じ場所にセットされることを前提にして予めプログラムされている。しかしながら、ペリクルフレームを毎回正確に同じ場所へセットすることは非常に困難である。そのため、ペリクルフレームのセット位置が自動塗布装置が予定する位置とズレている場合には、自動塗布装置はその位置ズレには対応できず、接着剤、粘着剤がペリクルフレームからこぼれたり、逆に未塗布部分が残ったりすることがある。   Usually, the operation pattern in the coating program of the automatic coating apparatus is programmed in advance on the assumption that the pellicle frame is set at the same place every time. However, it is very difficult to set the pellicle frame exactly at the same place every time. Therefore, if the setting position of the pellicle frame is misaligned with the position that the automatic coating device is scheduled, the automatic coating device cannot cope with the positional shift, and adhesive or adhesive spills from the pellicle frame or conversely. An uncoated part may remain.

そして、接着剤がペリクルフレームからこぼれたり、未塗布部分が残ったりするとペリクル膜との接着不良や外観不良を起こし、更には異物がペリクル内に混入する原因となる。また、粘着剤の場合も同様で、粘着剤がペリクルフレームからこぼれたり、未塗布部分が残ったりした場合には、フォトマスクとの粘着不良や外観不良を起こし、更には異物がペリクル内に混入する原因となる。これらはともにペリクル製造の歩留り低下の要因となってしまう。
本発明はこのような不利、問題点を解決することを課題とする。 If the adhesive spills from the pellicle frame or an unapplied portion remains, it causes poor adhesion to the pellicle film and poor appearance, and further causes foreign matter to enter the pellicle. Further, the same applies to the pressure-sensitive adhesive, or spilled adhesive from the pellicle frame, when or left uncoated portion, cause adhesive bad and poor appearance of a photomask, even in foreign objects inside the pellicle It becomes a cause of mixing. Both of these factors cause a decrease in the yield of pellicle manufacturing.
An object of the present invention is to solve such disadvantages and problems.

本発明のペリクルの製造方法は、ペリクルフレームの端面に接着剤又は粘着剤を自動塗布装置を用いて塗布する工程を含むペリクルの製造方法であって、
前記接着剤又は粘着剤を塗布する工程において、
塗布操作を受けるペリクルフレームの端面の位置情報を取得し、
取得した位置情報によって塗布開始位置と塗布方向とを塗布プログラムに取り込み、
ペリクルフレームの端面に接着剤又は粘着剤を塗布することを特徴とする。
取得する位置情報が３次元の位置情報であること、前記画像情報は、カメラによって取得すること、３次元の位置情報のうち平面（ＸＹ）方向の位置情報を画像から取得し、上下（Ｚ）方向の位置情報を電磁波又は音波によって取得すること、位置情報を画像から取得すること、が好ましい。 The method for producing a pellicle of the present invention is a method for producing a pellicle including a step of applying an adhesive or a pressure-sensitive adhesive to an end surface of a pellicle frame using an automatic coating apparatus,
In the step of applying the adhesive or pressure-sensitive adhesive,
Obtain the position information of the end face of the pellicle frame that receives the coating operation,
Based on the acquired position information, the application start position and application direction are taken into the application program,
An adhesive or a pressure-sensitive adhesive is applied to the end surface of the pellicle frame.
The position information to be acquired is three-dimensional position information, the image information is acquired by a camera, the position information in the plane (XY) direction is acquired from the image, and the top and bottom (Z) It is preferable to acquire position information of a direction by electromagnetic waves or sound waves, and to acquire position information from an image.

本発明によれば、ペリクルフレームに接着剤、粘着剤を塗布する際、ペリクルフレームから接着剤、粘着剤がこぼれたり、未塗布になったりせずに正確に塗布できるので、ペリクル製造の歩留りを向上させることができる。   According to the present invention, when applying an adhesive or pressure-sensitive adhesive to the pellicle frame, it can be applied accurately without causing the adhesive or pressure-sensitive adhesive to spill or unapply from the pellicle frame. Can be improved.

ペリクルの縦断面説明図である。It is vertical section explanatory drawing of a pellicle. 接着剤、粘着剤塗布装置の一例を示す概略説明図である。It is a schematic explanatory drawing which shows an example of an adhesive agent and an adhesive coating device. ペリクルフレーム端面の位置を検出する装置の一例を示す概略説明図である。It is a schematic explanatory drawing which shows an example of the apparatus which detects the position of a pellicle frame end surface.

以下、図面により本発明を詳細に説明するが、本発明はこれに限定されるものではない。
ペリクル１は、図１に示すように、ペリクル１を貼り付ける基板（フォトマスク）の形状に対応した通常四角枠状（長方形枠状又は正方形枠状）のペリクルフレーム１３の上端面に接着剤１２を介してペリクル膜１１が張設され、ペリクルフレーム１３の下端面には、ペリクルを基板に貼り付けるための粘着剤１４が形成されたものである。また粘着剤１４の下端面には、粘着剤１４を保護するための離型シート（セパレータ）１５が剥離可能に貼り付けられている。 Hereinafter, the present invention will be described in detail with reference to the drawings, but the present invention is not limited thereto.
As shown in FIG. 1, the pellicle 1 has an adhesive 12 on the upper end surface of a pellicle frame 13 having a normal square frame shape (rectangular frame shape or square frame shape) corresponding to the shape of a substrate (photomask) to which the pellicle 1 is attached. A pellicle film 11 is stretched through the pellicle frame 13, and an adhesive 14 for attaching the pellicle to the substrate is formed on the lower end surface of the pellicle frame 13. Moreover, the release sheet (separator) 15 for protecting the adhesive 14 is affixed on the lower end surface of the adhesive 14 so that peeling is possible.

ここで、ペリクル膜の材質に特に制限はなく、光をよく透過させるニトロセルロース、酢酸セルロース、或いはフッ素樹脂等の公知のものを使用することができる。ペリクルフレームの材質にも特に制限はなく、アルミニウム、ステンレススチール等の金属、ポリエチレンなどの合成樹脂等の公知のものを使用することができる。   Here, the material of the pellicle film is not particularly limited, and known materials such as nitrocellulose, cellulose acetate, or fluororesin that can transmit light well can be used. The material of the pellicle frame is not particularly limited, and known materials such as metals such as aluminum and stainless steel, and synthetic resins such as polyethylene can be used.

接着剤は、ペリクルフレームの上端面に所定の幅（通常、ペリクルフレームのフレーム幅と同じ又はそれ以下）で設けられ、ペリクルフレームの上端面の周方向に亘って、ペリクル膜をペリクルフレームに貼り付けることができるように、形成される。
接着剤の材質については特に制限はなく、ポリブテン系接着剤、ポリ酢酸ビニル系接着剤、シリコーン系接着剤、アクリル系接着剤等の公知の接着剤を使用することができる。 The adhesive is provided on the upper end surface of the pellicle frame with a predetermined width (usually equal to or less than the frame width of the pellicle frame), and the pellicle film is attached to the pellicle frame along the circumferential direction of the upper end surface of the pellicle frame. Formed so that it can be attached.
There is no restriction | limiting in particular about the material of an adhesive agent, Well-known adhesive agents, such as a polybutene adhesive, a polyvinyl acetate adhesive, a silicone adhesive, and an acrylic adhesive, can be used.

粘着剤は、ペリクルフレームの下端面に所定の幅（通常、ペリクルフレームのフレーム幅と同じ又はそれ以下）で設けられ、ペリクルフレームの下端面の周方向に亘って、ペリクルを基板に貼り付けることができるように、形成されている。
粘着剤の材質についても特に制限はなく、ポリブテン系粘着剤、ポリ酢酸ビニル系粘着剤、シリコーン系粘着剤、アクリル系粘着剤等の公知の粘着剤を使用することができる。 The adhesive is provided on the lower end surface of the pellicle frame with a predetermined width (usually equal to or less than the frame width of the pellicle frame), and the pellicle is attached to the substrate along the circumferential direction of the lower end surface of the pellicle frame. It is formed so that it can.
There is no restriction | limiting in particular also about the material of an adhesive, Well-known adhesives, such as a polybutene adhesive, a polyvinyl acetate adhesive, a silicone adhesive, and an acrylic adhesive, can be used.

離型シート（セパレータ）はペリクルを基板に貼り付けるまで、粘着剤を保護するためのものであり、ペリクルの使用時には取り除かれる。そのため、離型シート（セパレータ）は、粘着剤をペリクルの使用時まで保護することが、必要な場合に適宜設けられる。製品ペリクルでは、一般に、離型シート（セパレータ）を貼り付けたもので流通する。
離型シート（セパレータ）の材質にも特に制限はなく、公知のものを使用することができ、また、離型シート（セパレータ）は公知の方法で粘着剤に貼り付ければよい。 The release sheet (separator) is for protecting the adhesive until the pellicle is affixed to the substrate, and is removed when the pellicle is used. Therefore, the release sheet (separator) is appropriately provided when it is necessary to protect the adhesive until the pellicle is used. In general, a product pellicle is distributed with a release sheet (separator) attached thereto.
There is no restriction | limiting in particular also in the material of a release sheet (separator), A well-known thing can be used, and a release sheet (separator) should just be affixed on an adhesive by a well-known method.

ペリクルフレームへの接着剤又は粘着剤の塗布は、常法通り、自動塗布装置にて行われるを基本とする。以下、接着剤を塗布する場合について説明するが、粘着剤を塗布する場合も同様である。   Application of the adhesive or pressure-sensitive adhesive to the pellicle frame is basically performed by an automatic coating apparatus as usual. Hereinafter, although the case where an adhesive is applied will be described, the same applies to the case where an adhesive is applied.

図２に自動塗布装置の一例を示す。
図２において、２１は架台、２２は門型ＸＹＺ直交３軸ロボット、２３はシリンジ、２４はペリクルフレーム、２５はニードルである。架台２１上に（門型ＸＹＺ直交）３軸ロボット２２が取り付けられており、そのＺ軸先端にはシリンジ２３が取り付けられている。シリンジ２３はディスペンサ（図示しない）に接続され、３軸ロボット２２の制御部（図示しない）によりロボット動作と塗布液吐出の両方が制御される。 FIG. 2 shows an example of an automatic coating apparatus.
In FIG. 2, 21 is a gantry, 22 is a portal XYZ orthogonal three-axis robot, 23 is a syringe, 24 is a pellicle frame, and 25 is a needle. A triaxial robot 22 (gate-shaped XYZ orthogonal) is attached on the gantry 21, and a syringe 23 is attached to the tip of the Z axis. The syringe 23 is connected to a dispenser (not shown), and both the robot operation and the coating liquid discharge are controlled by a control unit (not shown) of the three-axis robot 22.

従来のこの種の自動塗布装置では、架台２１の定位置にペリクルフレーム２４を位置付け、自動塗布装置に組み込まれた制御プログラムにしたがって、ペリクルフレームの端面（上面）に接着剤（反対の面の場合には粘着剤）が塗布される。
しかし、ペリクルフレームを定位置に位置付けるのは、一般に、それほど易しいことではなく、ペリクルフレームの位置付けがずれていると、接着剤が所望の位置に所望量塗布されないことが起こり得る。 In this type of conventional automatic coating apparatus, the pellicle frame 24 is positioned at a fixed position of the gantry 21, and an adhesive (on the opposite surface) is applied to the end surface (upper surface) of the pellicle frame according to a control program incorporated in the automatic coating apparatus. Is coated with an adhesive).
However, it is generally not easy to position the pellicle frame in a fixed position. If the position of the pellicle frame is shifted, the adhesive may not be applied in a desired amount at a desired position.

本発明では、ペリクルフレームを定位置に特に拘らずに位置付け、その載置した位置を検出して、その位置信号を自動塗布装置に組み込まれているプロフラムに送り、塗布操作の始点・終点を自動認識するようにすることを特徴とする。
その際に、位置信号が三次元的に読み取られるならば、ペリクルフレームの端面（接着剤・粘着剤の塗布面）が水平から逸脱していても、対応が可能となる。 In the present invention, the pellicle frame is positioned regardless of the fixed position, the position of the pellicle frame is detected, the position signal is sent to the program incorporated in the automatic coating apparatus, and the start point and end point of the coating operation are automatically detected. It is characterized by making it recognize.
At this time, if the position signal is read three-dimensionally, it is possible to cope with even if the end surface of the pellicle frame (application surface of the adhesive / adhesive) deviates from the horizontal.

図３にペリクルフレーム端面の位置を検出する装置の一例を示す。
端面の位置の確認は、カメラとレーザー変位計等の深度計によって行うことが好ましい。ペリクルフレームの設置に水平が担保されるならば、カメラのみでも差し支えない。
図３において、図２に示されるシリンジ２３を中心として、カメラ３１とレーザー変位計３２を配する。カメラによって水平面内の二次元位置情報を、深度計によって垂直高さ（Ｚ軸方向位置）の位置情報を得る。 FIG. 3 shows an example of an apparatus for detecting the position of the end surface of the pellicle frame.
The position of the end face is preferably confirmed by a camera and a depth meter such as a laser displacement meter. If the pellicle frame is installed horizontally, a camera alone is acceptable.
3, a camera 31 and a laser displacement meter 32 are arranged around the syringe 23 shown in FIG. Two-dimensional position information in the horizontal plane is obtained by the camera, and position information of the vertical height (Z-axis direction position) is obtained by the depth meter.

カメラとしては、ＣＣＤカメラ、ＭＯＳカメラ、ＣＭＯＳカメラ等使用することができ、暗所でも高画質であるということからＣＣＤカメラが好ましく、更にはペリクルフレームと干渉しないように長焦点タイプのＣＣＤカメラがより好ましい。
Ｚ軸方向位置の確認に用いる深度計としては、電磁波としてレーザー、ミリ波のレーダーや、音波として超音波センサ等を（以下、代表して、レーザー変位計ともいう）使用することができ、短距離を正確に測定できることからレーザー変位計によるＺ軸方向の、確認が好ましい。 As the camera, a CCD camera, a MOS camera, a CMOS camera, etc. can be used, and a CCD camera is preferable because it has high image quality even in the dark. More preferred.
As a depth meter used for checking the position in the Z-axis direction, a laser, millimeter wave radar as an electromagnetic wave, an ultrasonic sensor or the like as a sound wave (hereinafter also referred to as a laser displacement meter) can be used. Since the distance can be measured accurately, confirmation in the Z-axis direction with a laser displacement meter is preferable.

位置確認手段の取り付け位置はディスペンサと同軸であることが好ましいが、ディスペンサとのオフセット値がわかっていれば同軸にこだわる必要はない。
本発明によって接着剤ないし粘着剤をペリクルフレームの端面に塗布する態様を説明する。
まず、塗布位置の確認手段によって既にプログラムされている塗布プログラムパターンと実際にペリクルフレームがセットされている塗布位置とのズレを確認する。 The attachment position of the position confirmation means is preferably coaxial with the dispenser, but if the offset value with respect to the dispenser is known, it is not necessary to stick to the coaxial.
An embodiment in which an adhesive or pressure-sensitive adhesive is applied to the end face of the pellicle frame according to the present invention will be described.
First, a deviation between the application program pattern already programmed and the application position where the pellicle frame is actually set is confirmed by the application position confirmation means.

ペリクルフレームの位置確認手段の移動動作とその動作制御はディスペンサの移動動作、動作制御と同系列でも異系列でも良いが、機構を簡略化できることから同系列であることが好ましい。
そして塗布プログラムのペリクルフレームのパターン位置と、実際のにペリクルフレームがセットされている位置とのＸＹＺ軸方向、また回転方向のズレを比較し、必要があれば塗布プログラム中の塗布開始位置情報、ペリクルフレームへの塗布方向、所望によってはそれぞれの位置における塗布量（塗布物質の供給量）を補正して接着剤の塗布を行う。 The moving operation of the position confirmation means of the pellicle frame and its operation control may be the same or different from the moving operation and operation control of the dispenser, but are preferably the same because the mechanism can be simplified.
Then, the difference between the pattern position of the pellicle frame of the application program and the actual position where the pellicle frame is set is compared in the XYZ axis direction and rotation direction, and if necessary, application start position information in the application program, The adhesive is applied by correcting the application direction to the pellicle frame and, if desired, the application amount (applying substance supply amount) at each position.

ペリクルフレームの位置確認は、ＸＹ面情報は画像情報として処理されることが好ましい。そして、Ｚ軸方向の位置情報を加味して、三次元的な位置情報を得る。
ペリクルフレームの位置確認は、第一次的にはペリクルフレームの全体形状を対比して行われるが、塗布開始位置を含む、ペリクルフレームの特定点をチェックすることが好ましい。補正をかけるための確認を行う特定点はいくつでも良いが、正確に補正するためには少なくとも２点以上、好ましくは４点以上が好ましい。
ペリクルフレームの位置確認に基づいて、接着剤塗布を実施する。 In confirming the position of the pellicle frame, the XY plane information is preferably processed as image information. Then, three-dimensional position information is obtained by adding position information in the Z-axis direction.
The position confirmation of the pellicle frame is primarily performed by comparing the overall shape of the pellicle frame, but it is preferable to check a specific point of the pellicle frame including the application start position. The number of specific points to be confirmed for correction may be any number, but at least 2 points, preferably 4 points or more are preferable for accurate correction.
Based on the confirmation of the position of the pellicle frame, the adhesive is applied.

接着剤の塗布は、接着剤が満たされたシリンジ２３をディスペンサ（図示しない）に接続し、３軸ロボット２２の制御部によりロボット動作と塗布液吐出の両方を制御する。そして上記の位置確認によって構成された自動塗布装置によって、ペリクルフレーム端面上に接着剤を流下しながら移動させることにより、ペリクルフレーム端面上に接着剤を塗布する。   For the application of the adhesive, the syringe 23 filled with the adhesive is connected to a dispenser (not shown), and the controller of the three-axis robot 22 controls both the robot operation and the application liquid discharge. Then, the adhesive is applied onto the end surface of the pellicle frame by moving the adhesive while flowing down on the end surface of the pellicle frame by the automatic application device configured by the above-described position confirmation.

接着剤の給送手段（図示しない）は、エア加圧、窒素加圧などの気体加圧によるものに限らず、ギヤポンプ、シリンジポンプ、プランジャーポンプ、チューブポンプによるものなど、供給量及び吐出・停止が制御できる各種の給送手段が利用できる。   Adhesive feeding means (not shown) is not limited to those using gas pressurization such as air pressurization and nitrogen pressurization, but also using gear pumps, syringe pumps, plunger pumps, tube pumps, etc. Various feeding means that can control the stop can be used.

以下、実施例を示して本発明を具体的に説明するが、本発明は下記実施例に制限されるものではない。尚、接着剤を塗布する場合についての実施例を説明するが、粘着剤を塗布する場合においても同様である。
［実施例］
はじめに、外寸７８２ｍｍ×４７４ｍｍ、内寸７６８ｍｍ×４５６ｍｍ、高さ５．０ｍｍ、コーナー部の内寸Ｒ２．０ｍｍ、外寸Ｒ６．０ｍｍの長方形のアルミニウム合金製ペリクルフレームを機械加工により製作し、ＳＵＳビーズでブラスト処理を行い、Ｒａ０．５〜１．０程度の表面粗さとした後、表面に黒色アルマイト処理を施した。このペリクルフレームをクリーンルームに搬入し、中性洗剤と純水により良く洗浄・乾燥させた。 EXAMPLES Hereinafter, although an Example is shown and this invention is demonstrated concretely, this invention is not restrict | limited to the following Example. In addition, although the Example about the case of apply | coating an adhesive agent is described, it is the same also when applying an adhesive.
[Example]
First, a rectangular aluminum alloy pellicle frame having an outer dimension of 782 mm x 474 mm, an inner dimension of 768 mm x 456 mm, a height of 5.0 mm, an inner dimension of a corner portion of R 2.0 mm, and an outer dimension of R 6.0 mm is manufactured by machining. Blasting was performed with beads to obtain a surface roughness of about Ra 0.5 to 1.0, and then black alumite treatment was applied to the surface. This pellicle frame was carried into a clean room and thoroughly washed and dried with a neutral detergent and pure water.

図２に示した接着剤塗布装置を使用して塗布を行った。
ＰＰ製シリンジ２３は、エア加圧式ディスペンサ（岩下エンジニアリング製、図示しない）に接続され、３軸ロボット２２の制御部によりロボット動作と塗布液吐出の両方が制御される。そして、この装置上に上記した仕様のペリクルフレーム２４を接着剤塗布端面が上向きに固定した。
なお、ペリクルフレーム２４の自重による撓みを防ぎ、粘着面を平面に保つために、ペリクルフレーム下には各辺ともおよそ２００ｍｍ間隔でＰＯＭ樹脂製のサポートを設けた。 Application was performed using the adhesive application apparatus shown in FIG.
The PP syringe 23 is connected to an air pressure dispenser (manufactured by Iwashita Engineering, not shown), and both the robot operation and the coating liquid discharge are controlled by the control unit of the three-axis robot 22. The pellicle frame 24 having the above specifications was fixed on the apparatus with the adhesive-coated end face facing upward.
In order to prevent bending of the pellicle frame 24 due to its own weight and to keep the adhesive surface flat, support of POM resin was provided under each pellicle frame at intervals of about 200 mm.

そして、接着剤としてトルエンで１０％に希釈したシリコーン粘着剤Ｘ−４０−３１２２［信越化学工業（株）製：製品名］をシリンジ２３に充填した。シリンジ２３の先端に取り付けられたニードル２５の先端から接着剤を吐出しペリクルフレーム２４に塗布した。
ペリクルフレーム位置の確認は、ＣＣＤカメラ３１（ＸＣ−５６；商品名、株式会社キーエンス製）とレーザー変位計３２（ＬＫ−Ｇ８０；商品名、株式会社キーエンス製）によって行われる。シリンジ２３とＣＣＤカメラ３１、レーザー変位計３２はプレート３３に固定され、同じ制御部によって制御される。尚、シリンジ２３とＣＣＤカメラ３１の間のオフセット値、シリンジ２３とレーザー変位計３２の間のオフセット値は予め計測されており、塗布プログラムパターンへ反映されている。 The syringe 23 was filled with silicone adhesive X-40-3122 [manufactured by Shin-Etsu Chemical Co., Ltd .: product name] diluted to 10% with toluene as an adhesive. The adhesive was discharged from the tip of the needle 25 attached to the tip of the syringe 23 and applied to the pellicle frame 24.
The position of the pellicle frame is confirmed by a CCD camera 31 (XC-56; trade name, manufactured by Keyence Corporation) and a laser displacement meter 32 (LK-G80; trade name, manufactured by Keyence Corporation). The syringe 23, the CCD camera 31, and the laser displacement meter 32 are fixed to the plate 33 and controlled by the same control unit. The offset value between the syringe 23 and the CCD camera 31 and the offset value between the syringe 23 and the laser displacement meter 32 are measured in advance and reflected in the application program pattern.

ＣＣＤカメラ３１を基本プログラムに沿って動作させ、予め内蔵されているペリクルフレームの基準端面の画像と実際のペリクルフレームの塗布端面の画像を比較して、実際のペリクルフレームの塗布端面がどれくらいＸＹ軸の各方向に変位しているか、また、どれくらい回転しているかを算出し、その変位量に基づいて基本プログラムを補正する。   The CCD camera 31 is operated according to the basic program, and the reference end face image of the built-in pellicle frame is compared with the image of the actual end face of the pellicle frame. It is calculated how much it is displaced in each direction and how much it is rotated, and the basic program is corrected based on the amount of displacement.

次に、レーザー変位計３２を塗布プログラムパターンに沿って動作させることによって、定点における予めプログラムされたペリクルフレームの高さと実際のペリクルフレームが置かれている高さとを比較して、塗布プログラムパターンに対して実際のペリクルフレームがどれくらいＺ軸方向にズレているかを算出し、塗布プログラムに補正をかける。   Next, by operating the laser displacement meter 32 along the application program pattern, the height of the pre-programmed pellicle frame at a fixed point is compared with the height where the actual pellicle frame is placed, and the application program pattern is obtained. On the other hand, how much the actual pellicle frame is displaced in the Z-axis direction is calculated, and the coating program is corrected.

上記のように塗布プログラムパターンにＸＹ軸方向の補正、回転の補正、Ｚ軸方向の補正をかけた後、接着剤を塗布した。
上記の方法により塗布位置を確認手段で確認した後、塗布プログラムパターンを補正してから接着剤を塗布した結果、ペリクルフレームのセット位置が塗布プログラムパターンと若干ズレていたにも関わらず、接着剤がこぼれたり、未塗布部分が残ったりせず塗布することができた。 As described above, the adhesive was applied after the application program pattern was corrected in the XY-axis direction, the rotation, and the Z-axis direction.
After confirming the application position by the confirmation means by the above method and correcting the application program pattern and then applying the adhesive, the adhesive was set even though the set position of the pellicle frame was slightly shifted from the application program pattern. It could be applied without spilling or leaving no uncoated part.

なお、上記実施例では、まず平面方向の変位量を求めて基本プログラムを補正し、次に上下方向の変位量を求めて基本プログラムをさらに補正したが、これらの順序は逆転しても良い。つまり、まず上下方向の変位量を求めて基本プログラムを補正し、次に平面方向の変位量を求めて基本プログラムをさらに補正してもよい。また、平面方向と上下方向の変位量をそれぞれ取得した後に、基本プログラムを一度に補正してもよい。   In the above embodiment, the basic program is corrected by first obtaining the amount of displacement in the plane direction, and then the basic program is further corrected by obtaining the amount of displacement in the vertical direction. However, the order may be reversed. That is, the basic program may be corrected by first obtaining the amount of displacement in the vertical direction, and then further correcting the basic program by obtaining the amount of displacement in the plane direction. Further, the basic program may be corrected at a time after obtaining the displacement amounts in the plane direction and the vertical direction, respectively.

本発明はペリクルの製造方法に関するものであり、これは、ペリクルフレームに接着剤、粘着剤を塗布する工程において、塗布操作開始前に塗布位置を確認した後、塗布位置を画像情報を利用して補正して塗布する手段を備えたことを特徴とするものであるが、これによりペリクルフレームに接着剤、粘着剤を塗布する際、ペリクルフレームの接着剤、粘着剤塗布位置から接着剤、粘着剤がこぼれたり、未塗布になったりせずに正確に塗布できるので、位置を塗布操作前に補正をしない従来の装置（塗布方法）と比べて、ペリクル製造の歩留りを格段に向上させることができるという有利性が与えられる。   The present invention relates to a method for manufacturing a pellicle, which is a process of applying an adhesive or a pressure-sensitive adhesive to a pellicle frame, after confirming the application position before starting the application operation, and then using the image information to determine the application position. It is characterized in that it is provided with a means for applying with correction, so that when applying the adhesive or pressure-sensitive adhesive to the pellicle frame, the adhesive or pressure-sensitive adhesive is applied from the adhesive / pressure-sensitive adhesive application position of the pellicle frame. Since it can be applied accurately without spilling or unapplied, the yield of pellicle manufacturing can be significantly improved compared to conventional devices that do not correct the position before the coating operation (coating method). The advantage is given.

１ ペリクル
１１ ペリクル膜
１２ 接着剤
１３ ペリクルフレーム
１４ 粘着剤
１５ セパレータ

２１ 架台
２２ （門型ＸＹＺ直交）３軸ロボット
２３ シリンジ
２４ ペリクルフレーム
２５ ニードル

３１ カメラ
３２ 深度計（レーザー変位計）
３３ プレート 1 Pellicle 11 Pellicle membrane 12 Adhesive 13 Pellicle frame 14 Adhesive 15 Separator

21 Stand 22 (Gate-type XYZ orthogonal) 3-axis robot 23 Syringe 24 Pellicle frame 25 Needle

31 Camera 32 Depth meter (Laser displacement meter)
33 plates

Claims (5)

ペリクルフレームの端面に接着剤又は粘着剤を自動塗布装置を用いて塗布する工程を含むペリクルの製造方法であって、
前記接着剤又は粘着剤を塗布する工程において、
塗布操作を受けるペリクルフレームの端面の位置情報を取得し、
取得した位置情報によって塗布開始位置と塗布方向とを塗布プログラムに取り込み、
ペリクルフレームの端面に接着剤又は粘着剤を塗布することを特徴とするペリクルの製造方法。 A method for producing a pellicle comprising a step of applying an adhesive or a pressure-sensitive adhesive to an end surface of a pellicle frame using an automatic coating apparatus,
In the step of applying the adhesive or pressure-sensitive adhesive,
Obtain the position information of the end face of the pellicle frame that receives the coating operation,
Based on the acquired position information, the application start position and application direction are taken into the application program,
A method for producing a pellicle, comprising applying an adhesive or a pressure-sensitive adhesive to an end surface of the pellicle frame. 取得する位置情報が３次元の位置情報である請求項１に記載のペリクルの製造方法。   The method for manufacturing a pellicle according to claim 1, wherein the position information to be acquired is three-dimensional position information. ３次元の位置情報のうち平面（ＸＹ）方向の位置情報を画像から取得し、上下（Ｚ）方向の位置情報を電磁波又は音波によって取得する請求項２に記載のペリクルの製造方法。   The method for manufacturing a pellicle according to claim 2, wherein position information in the plane (XY) direction is acquired from an image among three-dimensional position information, and position information in the vertical (Z) direction is acquired by electromagnetic waves or sound waves. 前記画像情報は、カメラによって取得する請求項３に記載のペリクルの製造方法。   The pellicle manufacturing method according to claim 3, wherein the image information is acquired by a camera. 前記上下（Ｚ）方向の位置情報は、電磁波又は音波によって取得する請求項３に記載のペリクルの製造方法。   The method for manufacturing a pellicle according to claim 3, wherein the position information in the vertical (Z) direction is acquired by electromagnetic waves or sound waves.
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TW201128323A (en) 2011-08-16
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