201128323 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種在製造半導體裝置、印 ^關於—種在防塵賴組件框架上塗佈接合劑、蹄躺塗佈步 【先前技術】 或是型積體電路)等半導體裝置 會使基底之外，還201128323 VI. Description of the Invention: [Technical Field] The present invention relates to a method for manufacturing a semiconductor device, for applying a bonding agent on a frame of a dustproof component, a hoof coating step, or a prior art. Semiconductor device, etc., etc., will cause the substrate to be external to the substrate.
因此，這些作業通常是在無塵室内進狹 要經常保持光罩清潔仍是相當困難。於T ’ J :光罩表面上，而是附著於防塵 光罩的圖案，防塵薄膜組件上的異物 質所構=塵的 聚乙稀等物 媒’之後將由诱㈣#二Γ &面塗佈防塵賴的良好溶 巧T透明防等 聚丁^脂、架的下端面設置與光罩接合用的由 所構成的_〜:另夂外，i^在_樹脂等樹脂 著劑為目的的脫模片（隔離苦;)曰。在枯者劑的表面上設置以保護枯 吐塗=2:件==、糊可用刷毛塗佈、喷 或塗料®盒推擠邀出塗佈、利用自 201128323Therefore, these operations are usually carried out in a clean room and it is still quite difficult to keep the reticle clean. On T ' J : on the surface of the mask, but attached to the pattern of the dust mask, the foreign matter on the dust-proof membrane module = the polyethylene of the dust, etc., will be coated by the (4) #二Γ & The cloth is dust-proof, and it is made of a resin coating agent such as _resin, which is made up of _~: another one, which is formed by the lower end surface of the frame and the reticle. Release sheet (isolated bitter;) 曰. Set on the surface of the dry agent to protect the dry coating = 2: piece ==, the paste can be coated with a brush, spray or paint ® box to push out the coating, use from 201128323
動塗佈農置塗佈等方式進行，然若考量 ，這個問題，則還是以自動塗佈:以J 佈裝置可採用例如專利文獻4所揭示 胃自動主 [習知技術文獻] 土柙凌置。 [專利文獻] [專利文獻1]日本特開昭58—219023號公 [專利文獻2]美國專利第48614〇2號說明書 [專利文獻3]日本特公昭63 —277〇7號公^ [專利文獻4]曰本特開平7一2439〇號公報 【發明内容】 [發明所欲解決的問題] *靈ssse 而 設定程式的 ^定ϊίί，差時’自動塗佈展置並無法修正該i 巧的：因此，當防麟膜組件框架的設置位置與自缝佈装置 、4上装游U*-TAt A .....正5亥位置偏差’接合 有塗會從防塵薄膜組件框架溢出，甚至會殘留下沒 然後，當接合劑從防塵薄膜組件框架 這些均為_福祕ί造件内。 本發明便是為了解決這些技術問題。 [解決問題之技術手段] 防鹿之防塵薄膜組件的製造方法，包含用自動塗佈裝置對 為.纽、=件框㈣端®塗佈接合劑紐著綱步驟，其特伐 為.在塗佈該接合誠枯著_步射，取得接受塗佈操作= 201128323 塵薄膜組件框㈣端面的位置㈣，根據所取得的 始塗佈位置與塗佈方向輸人塗佈程式， 端面塗佈接合劑雜著劑。 ㈣驗件框架的 所取得的位置資訊宜為三維的位置資 中的平面（XY轴）糾的位置f訊宜從維的位置資訊之 方向的位置資訊宜利用電磁波或音波取得由） 得’該影像資訊宜利用相機取得。 置貪訊且切像取 [對照先前技術之功效] 時，劑合劑，劑 塗佈部分，而能夠正確地i佈防出，或殘留未 品率。 故可賴崎的製造成 【實施方式】 以:，根據圖式詳細説明本發明，惟本 合之===，在對應防塵二 _的卩彡嫌或正方形 薄膜11，在防塵薄膜組件框架13勺?"2張設防塵 件貼合於基板上的而著^又^來將防塵薄膜組 的著r的脫模片=巧面以可剝離 性的蛾化纖維素限制，可使用具備良好透光 膜組件框架的:質 乙烯等合成樹脂這些f知的材f。了使胸s不銹_金屬、聚 (通成-寬度 上端面的整個周圍， 接口」的材貝並热特別限制，可使用聚丁烯系接合劑、聚醋 201128323 =稀^系接合劑、補系接合劑、丙稀酸系接合劑等習知的接 (通ΐί ^舰件_的下端“形成既定寬度 基$上，。件下端面的整個周圍’以將防塵薄膜組件貼合在 酸乙並無特別限制，可使用聚丁 __劑、聚醋 著 1湘日系枯者劑、_系招著劑、丙稀酸系枯著劑等習知的枯 此，脫楛η r K3 、 潯胺組件使用時會被取下除去。因 應設置在需要;二防塵薄膜組件使用之前保護招著劑 貼合著脫模塵薄膜組件製成品-般都是 另外脫的材質並無特聰制，可使用習知的材質， 的情況，惟塗佈點ί劑ϊΐ況説明的是塗佈接合劑 圖2顯示自動塗佈裝置的-個實施例。 23為1C 242:=t㈤22 J門型ΧΥΖ正交3轴機械裝置， 安裝著（門型ΧΥΖ正f 轴且:架置g °在架台21上 注射器23。注射器23與分注器^裝置2=其Z軸前端絲著 J !2 C ® 架台裝置’聽防蘭驗件购Μ設置於 201128323 並不2那麼H防ΐ薄驗絲架設置在固定位置上，—般而言， 能會錢差，接合劑可 在固定寺無須特別拘泥於將防塵薄膜組件框架設置 安=|j出該載置位置，將該位置信號傳送給自 點。 述的的程式，以自動朗出塗佈操作的始點、終 件框的方式讀取位置信號，則即使防塵薄膜組 例。圖3表示防塵薄膜組件框架端面的位置檢測裝置的一個實施 要妒認宜_相機與雷射位移計等深度計進行。只 問題 件框架設置的水平，只用相機也不會有什麼 •射t圖2所示的注射器23為中心，配置相機31與 田射位和,十32。利用相機獲得水平面上的 計獲直高度（Z财向位置）驗置置貝Λ ’利用 ^機可使用CCD相機、MOS相機、CMOS相機等，若希望 ^^能ΪΪ高晝f的話還是使用CCD相機為佳，另外為Ϊ避 免干涉到防塵溥膜組件框架更宜使用長焦距型的CCD相機。 Z軸方向位置確認用的深度計就電磁波而言可使用雷射、毫 米波的雷達，就音波而言可使用超音波感測料（以下以雷射位 代表），為了正確地測量脑的距離，宜使用雷射位移計作 z軸方向上的確認。 y 位置確認裝置的安裝位置宜與分注器同軸，但若 的OFF設置値便無須拘泥於同軸。 / ° 茲說明利用本發明在防塵薄膜組件框架的端面上 或粘著劑的態樣。 首先，利用塗佈位置確認裝置確認已經設定好的塗佈程式的 201128323 =圖案與防塵薄廳件框架實際上設置的塗佈位置二者之間的 做Ϊ??膜組件㈣的位置確認裝㈣移_作以及其動靜 的移動動作、動作控制同系統或不同系統均可，惟^ 考慮到機構的簡略化則宜為同系統。 准右 &鹿ΐίίϊ塗佈紅的防㈣敝件轉_案位置|實際上 【塵框架設置的錄在χγζ轴方向以及旋轉方向I: 右’、、要便修正塗佈程式中的開始塗佈位置資 鹿 == 的塗佈方向、預期在各位置上的塗以。⑶的專 供給置），然後進行接合劑的塗佈。 物質的 >就防塵_組件框架的位置確認而言，χγ面資訊 補方式處理。紐’加人ζ軸方向 _ = _ 位置資訊。 且貝汛取侍二次兀的 #加薄膜組件框架的位置確認’第—次係輯防塵薄膜祕 的正體形狀’惟宜檢測包含開始塗佈位置在内的防靡^ 件框架上的特定點。為了修 = ^據所確奴防麟敵雜架驗置，實施接合涂 中夫2於?ΐ:的塗佈’係使填滿接合劑的注射器23與分；(圖 叙涂欲^ — 者然後利用構成上述位置確認方式的白 動佈i—4塗佈接合劑-邊移 式泵2控=給量以及吐出、停止___^泵 例為把本發明的實關，惟本發㈣非以下述實 =情雖是塗佈接合劑的實施例，惟在^ 〔實施例〕 201128323 7似首用機械加工製作出外尺寸782_474匪、内尺寸 Γ 、高5.0mm、角落部的内尺寸似麵、外尺ί R6.0mm的長方形的鋁合金製防塵薄膜組 ^Ra ^ °·5-·0 ^ ^ -皮銘處將該防塵薄膜組件框架搬入無塵室，用中 性β洗劑與純水徹底洗淨，並使其乾燥。 使用圖2所示的接合劑塗佈裝置進行塗佈。 ΡΡ製注射器23與空氣加壓式分注器土(岩下工程公 Γ後’將上述規格的防塵薄膜組件框架％ 以接5 Α彳塗佈鈿面朝上的方式固定在該裝置上。 並使riίϊ塵薄膜組件框架24因為本身的重量而彎曲 ^使枯者面保持水平，可在防塵㈣組件框架下各 200mm的間隔設置Ρ0Μ樹脂製的支持部。 、·' μΪ後鲁?用、甲苯稀釋成_的石夕_著劑X—40-3122〔信 -驻J工ί (股製：製品名〕填充於注射器23當作接合劑。從 = 25的前_接合劑，將其塗佈 ^塵，膜組件框架位置的確認，利用CCD相機31 (沈_56 ; ^Heyen讀份有限公司製）與雷射位移計32(lk—⑽； ㈣續份有限公司製）進行。注射器23、CCD相機 立移=32被固定在平板33上，受同一控制部所控制 器23 與CCD相機31之間的〇FF設置値、在注射 32之間的〇FF設置値被預先測量出來，並將 其反映到塗佈程式的塗佈圖案。 膜电根據基本程式運作，比較預先内建的防塵薄 mi面的影像與實際上防塵薄膜組件框架的塗佈 轴的夂=^ π只際上的防塵薄膜組件框架的塗佈端面在XY 正基;^程^。立移了多少’或者旋轉了多少，並根據該位移量修 201128323 接著，讓雷射位移計32沿著塗佈程式圖案 程式贱設定好的防㈣驗件_的高度與•丄在巧比較 巧框架所設置的高度’計算出相對於 薄膜組 缚膜組件框架在ζ軸方向尚有多少偏差，並將mm的防塵 如上所述在將XY軸方向的修正、旋轉的修正、式。 正加入塗佈程式的塗佈圖案之後，開始塗佈接合劑。輛方向的修 在根據上述方法用確認裝置確認過塗佈位置之德攸 式圖案’然後再塗佈接合劑，結果發現即使 ，主佈程 設置位置與塗佈程式圖案有若 框^ 出，也不核留未_部分，而㈣丨職=佈接合劑不會溢 L惟知順序亦可顛倒過來。換句話:二 修正基本程式'接著求出平面方二 都取得之後，在將基本程式作—次性的修正y τ方向的位移罝 [產業利用性] 件且防，膜組件的製造方法，該防塵薄膜組 塗佈位置並進行塗佈’藉此，在對防塵薄膜組 合劑、枯著劑時，接合劑、枯著劑便不會從防塵薄 而ΐίΐί接合劑、歸劑塗佈位置溢出，或形成未塗佈部分， 也進行塗佈’故比起在塗佈操作前沒有修正位置的習 4 if方法）而言’更能大幅提高防塵薄膜組件的製造成 m率，故對本技術領域有所貢獻。 【圖式簡單說明】 圖1係防塵薄膜組件的縱剖面説明圖。 圖2係表示接合齊Η占著劑塗佈裝置的一個實施_概略説 11 201128323 明圖。 圖3係表示防塵薄膜組件框架端面的位置檢測裝置的一個實 '施例的概略説明圖。 【主要元件符號說明】 1防塵薄膜組件 11防塵薄膜 12接合劑 13防塵薄膜組件框架 14粘著劑 15隔離部 21架台 · 22 (門型XYZ正交）3軸機械裝置 23注射器 24防塵薄膜組件框架 25針頭 31相機 .32深度計（雷射位移計） 33平板In the case of the application of the coating, the application is carried out in the form of automatic coating: if the problem is concerned, the coating is still applied automatically: for example, the gastric automatic main body disclosed in Patent Document 4 can be used. . [Patent Document 1] Japanese Laid-Open Patent Publication No. SHO-58-219023 [Patent Document 2] U.S. Patent No. 48,614, 2 [Patent Document 3] Japanese Patent Publication No. 63-277〇7 4] 曰本特开平 7一2439〇号 [Summary of the invention] [The problem to be solved by the invention] * The ssse is set and the program is set to ϊ ίί, when the difference is 'automatic coating spread can not correct the i : Therefore, when the position of the frame of the anti-lens membrane module is different from that of the self-sewing device, the U*-TAt A ..... The residue is not then, when the bonding agent is from the pellicle frame, these are all inside the _ 秘 ί. The present invention has been made to solve these technical problems. [Technical means for solving the problem] The method for manufacturing the anti-deer dust-proof film module includes the step of coating the bonding agent with the automatic coating device, and the step of coating the bonding agent with the automatic coating device. The joint is dry and _step shot, and the coating operation is accepted = 201128323 The position of the end face of the dust film module frame (4) (4), according to the obtained initial coating position and the coating direction, the coating procedure is applied, and the end face coating bonding agent is mixed. Attention. (4) The position information obtained by the inspection frame should be the position of the plane (XY axis) corrected in the position of the three-dimensional position. The position information of the position information from the dimension should be obtained by using electromagnetic waves or sound waves. Image information should be obtained using a camera. When the greed is taken and the image is taken [in comparison with the efficacy of the prior art], the agent and the agent are coated, and the smear can be properly prevented or the unsold rate remains. Therefore, it can be manufactured by Laisaki. [Embodiment] The present invention will be described in detail based on the drawings, but the combination ===, in the corresponding dustproof or square film 11, in the pellicle frame 13 Spoon?"2 sets of dust-proof parts are attached to the substrate, and the release film of the pellicle group is replaced by the peelable moth cellulose, which can be used well. The transparent film module frame: a synthetic resin such as a vinyl resin. In order to make the chest s stainless _ metal, poly (through the entire circumference of the end surface of the width, the interface), the heat of the material is particularly limited, and a polybutene-based cement, polyacetate 201128323 = a dilute bonding agent, A conventional joint such as a tie-joining agent or an acrylic-based bonding agent (the lower end of the 舰 ΐ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ B is not particularly limited, and it can be used to remove η r K3 , such as polybutyl _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The guanamine component will be removed and removed when it is used. It should be set up as needed; before the use of the dustproof membrane module, the protective agent is attached to the molded dust film component. A conventional material can be used, but the coating point is the coating agent. The embodiment of the automatic coating device is shown in Fig. 2. 23 is 1C 242:=t(f)22 J-gate type The 3-axis mechanical device is attached (the door type is positively f-axis and the g-position is placed on the gantry 21 with the syringe 23. Note) Radiator 23 and dispenser ^ device 2 = its Z-axis front end is wired with J! 2 C ® gantry device 'Listen to anti-blue inspection piece purchase set at 201128323 Not 2 then H tamper-proof thin wire frame set in a fixed position Above, in general, the money can be poor, and the bonding agent can be placed in the fixed temple without special restrictions on the placement of the pellicle frame to the mounting position, and the position signal is transmitted to the self-point. The program reads the position signal in such a manner that the start point and the final frame of the coating operation are automatically performed, even if the dustproof film group is used. Fig. 3 shows an implementation of the position detecting device of the end surface of the pellicle frame. The camera is equipped with a depth gauge such as a laser displacement meter. Only the level of the problem piece frame is set, and there is nothing to be used only by the camera. • The syringe 23 shown in Fig. 2 is centered, and the camera 31 and the field position are arranged. 32. Use the camera to obtain the straight height (Z fiscal position) on the horizontal plane. Use the CCD camera, MOS camera, CMOS camera, etc. If you want to use ^^, you can use it if you want to use it. CCD camera is better, in addition to avoid interference It is better to use a long-focus type CCD camera for the dust mites module frame. A depth gauge for Z-axis direction confirmation can use a laser with a laser or a millimeter wave for electromagnetic waves, and an ultrasonic sensor for ultrasonic waves. In order to correctly measure the distance of the brain, it is advisable to use a laser displacement meter for confirmation in the z-axis direction. y The position of the position confirmation device should be coaxial with the dispenser, but if the OFF setting is set 値There is no need to stick to the coaxial. / ° The description of the end face of the pellicle frame or the adhesive can be explained by using the present invention. First, the coating position confirming device confirms the set coating program 201128323 = pattern and The position of the dust-proof thin-frame member frame is actually set between the two, and the position of the film assembly (4) is confirmed. (4) The movement and movement control, the motion control can be the same as the system or different systems. ^ Considering the simplification of the organization, it should be the same system. Quasi-right & deer ΐ ϊ ϊ ϊ ϊ ϊ ϊ ϊ 四 四 ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ 四 四 四 四 四 四 四 四 四 四 四 四 四 实际上 四 四 实际上 实际上 实际上 实际上 实际上 实际上 实际上 实际上 实际上 实际上 实际上 实际上 实际上 实际上 实际上 实际上The cloth position is the coating direction of the deer ==, and it is expected to be applied at each position. (3) Special supply), and then coating of the bonding agent. The substance > in terms of the position of the dust-proof component frame, the χγ-surface information is complemented. New' plus ζ axis direction _ = _ location information. And the position confirmation of the #plus film module frame of the second 兀 汛 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' . In order to repair = ^ according to the verification of the slaves, the implementation of the joint coating 2 in the ": coating" is to fill the adhesive with the syringe 23 and points; (Figures are intended to be ^ Then, using the white cloth i-4 coating constituting the above position confirmation method, the bonding agent-edge shifting pump 2 control = the amount of supply and the discharge and stop ___^ pump example is the actualization of the present invention, but the hair (4) is not Although the following is an example of applying a bonding agent, in the case of [Embodiment] 201128323, it is mechanically processed to produce an outer dimension of 782_474匪, an inner dimension Γ, a height of 5.0 mm, and an inner dimension of a corner portion. , 尺 R R R R R R R R R R R R R R Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra Ra The water is thoroughly washed and dried. The coating is applied using the bonding agent coating device shown in Fig. 2. The syringe 23 and the air-pressurized dispenser soil (after the rock engineering is released) The film assembly frame % is fixed to the device with a 5 Α彳 coating face up. And the riί dust film assembly frame 2 4Bending due to its own weight ^ Keeping the dry surface level, you can set the support part made of Ρ0Μ resin at intervals of 200mm under the frame of the dustproof (four) module. ··· μΪ后鲁?, diluted with toluene into _ _Injection X-40-3122 [信-站J工ί (share system: product name) is filled in the syringe 23 as a bonding agent. From the pre-bonding agent of = 25, it is coated with dust, membrane module frame The confirmation of the position was performed by a CCD camera 31 (manufactured by Heyen Reading Co., Ltd.) and a laser displacement meter 32 (lk-(10); (4) Continuation Co., Ltd.). Syringe 23, CCD camera shift = 32 It is fixed on the flat plate 33, and is set by the 〇FF between the controller 23 of the same control unit and the CCD camera 31, and the 〇FF setting between the injections 32 is previously measured and reflected to the coating program. The coating pattern is based on the basic program, comparing the pre-built image of the dust-proof thin surface with the coating of the dust-proof film assembly frame of the coating shaft of the actual dust-proof film module frame. The end face is in the XY positive base; ^程^. How many 'or moved' or how much is rotated, and according to Displacement repair 201128323 Next, let the laser displacement gauge 32 calculate the height of the anti-(4) specimen _ along the coating program pattern 与 and 丄 丄 丄 丄 巧 巧 巧 巧 巧 巧 巧 巧 巧 巧How much deviation does the film module frame have in the direction of the x-axis, and the dust in mm is corrected in the XY-axis direction as described above, and the rotation is corrected. After the application pattern of the coating program is added, the coating is started. In the direction of the vehicle, the German-style pattern of the coating position was confirmed by the confirming device according to the above method, and then the bonding agent was applied, and it was found that even if the main cloth setting position and the coating program pattern were framed, Do not check the remaining _ part, and (4) 丨 = = cloth bonding agent will not overflow L, the order of knowledge can also be reversed. In other words: the second correction of the basic program 'following the plane 2 is obtained, the basic program is used to correct the displacement of the y τ direction 罝 [industrial use] and prevent the film module manufacturing method, The pellicle group is coated and coated. Thus, in the case of the pellant film composition and the degreasing agent, the bonding agent and the drying agent do not overflow from the dust and the bonding agent and the coating application position. Or forming an uncoated portion, and also performing coating, so it is more effective in improving the manufacturing rate of the pell film assembly than in the case of the 4 if method without correcting the position before the coating operation, so the technical field is Made a contribution. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a longitudinal sectional explanatory view of a pellicle. Fig. 2 is a view showing an embodiment of the joint coating agent coating apparatus _ schematic description 11 201128323. Fig. 3 is a schematic explanatory view showing a practical example of a position detecting device for the end surface of the pellicle frame. [Main component symbol description] 1 pellicle assembly 11 pell film 12 bonding agent 13 pellicle frame 14 adhesive 15 isolation portion 21 frame · 22 (gate type XYZ orthogonal) 3-axis mechanism 23 syringe 24 pellicle frame 25-pin 31 camera. 32 depth gauge (laser displacement meter) 33 plate
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