JP2011163557A5 - - Google Patents

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Publication number
JP2011163557A5
JP2011163557A5 JP2011021349A JP2011021349A JP2011163557A5 JP 2011163557 A5 JP2011163557 A5 JP 2011163557A5 JP 2011021349 A JP2011021349 A JP 2011021349A JP 2011021349 A JP2011021349 A JP 2011021349A JP 2011163557 A5 JP2011163557 A5 JP 2011163557A5
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JP
Japan
Prior art keywords
axis
support
closing body
valve
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011021349A
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English (en)
Japanese (ja)
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JP2011163557A (ja
JP5777002B2 (ja
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Publication date
Priority claimed from EP10152682.0A external-priority patent/EP2355132B1/de
Application filed filed Critical
Publication of JP2011163557A publication Critical patent/JP2011163557A/ja
Publication of JP2011163557A5 publication Critical patent/JP2011163557A5/ja
Application granted granted Critical
Publication of JP5777002B2 publication Critical patent/JP5777002B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011021349A 2010-02-04 2011-02-03 旋回可能な弁閉鎖体ビームを持つフラップ移送弁 Active JP5777002B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP10152682.0A EP2355132B1 (de) 2010-02-04 2010-02-04 Klappen-Transferventil mit schwenkbarem Ventilverschlussbalken
EP10152682.0 2010-02-04

Publications (3)

Publication Number Publication Date
JP2011163557A JP2011163557A (ja) 2011-08-25
JP2011163557A5 true JP2011163557A5 (enExample) 2014-03-06
JP5777002B2 JP5777002B2 (ja) 2015-09-09

Family

ID=42813443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011021349A Active JP5777002B2 (ja) 2010-02-04 2011-02-03 旋回可能な弁閉鎖体ビームを持つフラップ移送弁

Country Status (5)

Country Link
US (1) US8622368B2 (enExample)
EP (1) EP2355132B1 (enExample)
JP (1) JP5777002B2 (enExample)
KR (1) KR101770990B1 (enExample)
CN (1) CN102192337B (enExample)

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CN103174841A (zh) * 2011-12-21 2013-06-26 麦丰密封科技股份有限公司 密封组件
EP2834545B1 (en) * 2012-04-02 2016-03-30 Velan ABV S.P.A. Joint linkage actuating means for a valve
KR101385132B1 (ko) * 2012-06-18 2014-04-14 주식회사 씨엘디 가압 장치
WO2014085497A1 (en) * 2012-11-30 2014-06-05 Applied Materials, Inc Process chamber gas flow apparatus, systems, and methods
GB2517904A (en) * 2013-07-31 2015-03-11 Ingegneria Ceramica S R L An Improved Obturator and Method of Fabrication Thereof
US9530623B2 (en) * 2013-11-26 2016-12-27 Applied Materials, Inc. Process chamber apparatus, systems, and methods for controlling a gas flow pattern
US9970105B2 (en) * 2013-12-23 2018-05-15 Taiwan Semiconductor Manufacturing Co., Ltd Method for sealing processing module
DE202014005077U1 (de) 2014-06-23 2014-10-01 European Trailer Systems Gmbh Planenaufbau
JP2018520326A (ja) 2015-04-23 2018-07-26 ジェネラル・プラズマ・インコーポレーテッド チャンバ弁
US11629406B2 (en) 2018-03-09 2023-04-18 Asm Ip Holding B.V. Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate
CN208014647U (zh) * 2018-04-24 2018-10-26 君泰创新（北京）科技有限公司 一种沉淀室的隔离设备
US10748727B2 (en) * 2018-05-30 2020-08-18 Mei Mei Memie WONG Electrical switch
EP3587243B1 (en) * 2018-06-29 2022-12-21 Hamilton Sundstrand Corporation Door closure mechanism
CN111089187B (zh) * 2018-10-23 2021-10-29 日扬科技股份有限公司 翻板输送阀
CN114286906A (zh) 2019-07-31 2022-04-05 应用材料公司 隔离阀
US11953113B2 (en) * 2020-02-14 2024-04-09 Crane Chempharma & Energy Corp. Valve with unobstructed flow path having increased flow coefficient
DE102020001179A1 (de) 2020-02-24 2021-08-26 Vat Holding Ag Vakuumventil zur Bereitstellung eines symmetrischen Fluidflusses
US11408530B2 (en) * 2020-08-05 2022-08-09 Applied Materials, Inc. Valve for varying flow conductance under vacuum
DE102021102283A1 (de) * 2021-02-01 2022-08-04 Vat Holding Ag Verschlussvorrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
CN115306905B (zh) * 2022-10-10 2022-12-13 常州市彬达干燥制粒设备有限公司 一种具有阀片组件的排料阀门机构
DE102023000251A1 (de) 2023-01-27 2024-08-01 Vat Holding Ag Klappenventil und Dichtung mit verbesserter Dichtgeometrie für ein solches Ventil
CN118391488A (zh) * 2024-07-01 2024-07-26 艾庞半导体科技(四川)有限公司 一种真空传输阀门自锁装置

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