JP2011161629A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2011161629A5 JP2011161629A5 JP2011125564A JP2011125564A JP2011161629A5 JP 2011161629 A5 JP2011161629 A5 JP 2011161629A5 JP 2011125564 A JP2011125564 A JP 2011125564A JP 2011125564 A JP2011125564 A JP 2011125564A JP 2011161629 A5 JP2011161629 A5 JP 2011161629A5
- Authority
- JP
- Japan
- Prior art keywords
- wall
- turning axis
- turning
- axis
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 claims 48
- 230000032258 transport Effects 0.000 claims 11
- 238000009434 installation Methods 0.000 claims 3
- 230000003028 elevating effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011125564A JP2011161629A (ja) | 2011-06-03 | 2011-06-03 | 基板搬送ロボット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011125564A JP2011161629A (ja) | 2011-06-03 | 2011-06-03 | 基板搬送ロボット |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007114742A Division JP4980127B2 (ja) | 2007-04-24 | 2007-04-24 | 基板搬送ロボット |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013143470A Division JP5819356B2 (ja) | 2013-07-09 | 2013-07-09 | 基板搬送ロボットおよび基板搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011161629A JP2011161629A (ja) | 2011-08-25 |
| JP2011161629A5 true JP2011161629A5 (cg-RX-API-DMAC7.html) | 2011-10-06 |
Family
ID=44592910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011125564A Withdrawn JP2011161629A (ja) | 2011-06-03 | 2011-06-03 | 基板搬送ロボット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011161629A (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5569544B2 (ja) | 2012-01-31 | 2014-08-13 | 株式会社安川電機 | 搬送ロボット |
| JP6235881B2 (ja) * | 2013-08-09 | 2017-11-22 | 日本電産サンキョー株式会社 | 産業用ロボット |
| JP7149792B2 (ja) * | 2018-09-25 | 2022-10-07 | 東京エレクトロン株式会社 | 搬送装置、半導体製造装置及び搬送方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100309932B1 (ko) * | 1986-04-28 | 2001-12-15 | 제임스 엠. 윌리암스 | 웨이퍼 운반 장치 및 방법 |
| JP3539537B2 (ja) * | 1997-11-06 | 2004-07-07 | 株式会社三協精機製作所 | 多関節ロボット |
| US6960057B1 (en) * | 1998-09-30 | 2005-11-01 | Brooks Automation, Inc. | Substrate transport apparatus |
| JP2000133690A (ja) * | 1998-10-26 | 2000-05-12 | Rorze Corp | ウエハ搬送装置 |
| US6297611B1 (en) * | 2000-07-06 | 2001-10-02 | Genmark Automation | Robot having independent end effector linkage motion |
| JP2002166376A (ja) * | 2000-11-30 | 2002-06-11 | Hirata Corp | 基板搬送用ロボット |
| US6752585B2 (en) * | 2001-06-13 | 2004-06-22 | Applied Materials Inc | Method and apparatus for transferring a semiconductor substrate |
| JP2003170384A (ja) * | 2001-12-04 | 2003-06-17 | Rorze Corp | 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム |
| JP4070994B2 (ja) * | 2001-12-20 | 2008-04-02 | 株式会社ダイヘン | ワーク搬送用ロボット及びこのロボットを備えたワーク加工装置 |
| JP4579723B2 (ja) * | 2005-03-07 | 2010-11-10 | 川崎重工業株式会社 | 搬送系ユニットおよび分割体 |
| US9248568B2 (en) * | 2005-07-11 | 2016-02-02 | Brooks Automation, Inc. | Unequal link SCARA arm |
| JP4980127B2 (ja) * | 2007-04-24 | 2012-07-18 | 川崎重工業株式会社 | 基板搬送ロボット |
-
2011
- 2011-06-03 JP JP2011125564A patent/JP2011161629A/ja not_active Withdrawn