JP2011140680A - フッ素ガス生成装置 - Google Patents
フッ素ガス生成装置 Download PDFInfo
- Publication number
- JP2011140680A JP2011140680A JP2010000532A JP2010000532A JP2011140680A JP 2011140680 A JP2011140680 A JP 2011140680A JP 2010000532 A JP2010000532 A JP 2010000532A JP 2010000532 A JP2010000532 A JP 2010000532A JP 2011140680 A JP2011140680 A JP 2011140680A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- fluorine gas
- fluorine
- hydrogen fluoride
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 title claims abstract description 143
- 239000011737 fluorine Substances 0.000 title claims abstract description 143
- 229910052731 fluorine Inorganic materials 0.000 title claims abstract description 143
- 239000007789 gas Substances 0.000 claims abstract description 221
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 77
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims abstract description 76
- 238000000746 purification Methods 0.000 claims abstract description 48
- 150000003839 salts Chemical class 0.000 claims abstract description 34
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000006227 byproduct Substances 0.000 claims abstract description 11
- 238000007670 refining Methods 0.000 claims description 21
- 239000003507 refrigerant Substances 0.000 claims description 14
- 238000001816 cooling Methods 0.000 claims description 12
- 238000009835 boiling Methods 0.000 claims description 7
- 238000007711 solidification Methods 0.000 claims description 7
- 230000008023 solidification Effects 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 6
- 239000012266 salt solution Substances 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000007788 liquid Substances 0.000 abstract description 113
- 239000000047 product Substances 0.000 abstract description 3
- 239000002826 coolant Substances 0.000 abstract 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 314
- 229910052757 nitrogen Inorganic materials 0.000 description 124
- 229910001873 dinitrogen Inorganic materials 0.000 description 66
- 238000000034 method Methods 0.000 description 13
- 238000001514 detection method Methods 0.000 description 11
- 230000008929 regeneration Effects 0.000 description 11
- 238000011069 regeneration method Methods 0.000 description 11
- 239000002994 raw material Substances 0.000 description 9
- 238000007599 discharging Methods 0.000 description 8
- 230000001105 regulatory effect Effects 0.000 description 8
- 239000012159 carrier gas Substances 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 238000011144 upstream manufacturing Methods 0.000 description 6
- 238000009825 accumulation Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- 238000005868 electrolysis reaction Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010790 dilution Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000011698 potassium fluoride Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009897 systematic effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000792 Monel Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/24—Halogens or compounds thereof
- C25B1/245—Fluorine; Compounds thereof
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
- C25B9/01—Electrolytic cells characterised by shape or form
- C25B9/015—Cylindrical cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
- C01B7/20—Fluorine
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/24—Halogens or compounds thereof
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B15/00—Operating or servicing cells
- C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B15/00—Operating or servicing cells
- C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
- C25B15/085—Removing impurities
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
- F17C7/02—Discharging liquefied gases
- F17C7/04—Discharging liquefied gases with change of state, e.g. vaporisation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/32—Hydrogen storage
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Abstract
【解決手段】溶融塩に浸漬された陽極7にて生成されたフッ素ガスを主成分とする主生ガスが導かれる第1気室11aと、溶融塩に浸漬された陰極8にて生成された水素ガスを主成分とする副生ガスが導かれる第2気室12aとが溶融塩液面上に分離して区画された電解槽1と、電解槽1の溶融塩から気化して陽極7から生成された主生ガスに混入したフッ化水素ガスを冷媒を使用して凝固させて捕集してフッ素ガスを精製する精製装置16とを備え、精製装置16にてフッ化水素ガスの凝固のために使用され排出された冷媒をフッ素ガス生成装置100の各所で使用されるユーティリティガスとして再利用する。
【選択図】図1
Description
1 電解槽
2 フッ素ガス供給系統
3 副生ガス処理系統
4 外部装置
5 原料供給系統
7 陽極
8 陰極
13 液面計
15 第1メイン通路
16 精製装置
70a,70b 冷却装置
71a,71b ジャケットチューブ
72a,72b 液体窒素給排系統
79a,79b 窒素ガス排出通路
81a,81b 圧力調整弁
90a,90b 液体窒素排出通路
91a,91b 排出弁
200 窒素回収設備
201 分岐液体窒素供給通路
202 流量制御弁
203 液面計
204 放出通路
205 圧力計
206 圧力制御弁
207 ユーティリティガス供給通路
210 窒素バッファタンク
Claims (3)
- 溶融塩中のフッ化水素を電気分解することによって、フッ素ガスを生成するフッ素ガス生成装置であって、
溶融塩が貯留され、溶融塩に浸漬された陽極にて生成されたフッ素ガスを主成分とする主生ガスが導かれる第1気室と、溶融塩に浸漬された陰極にて生成された水素ガスを主成分とする副生ガスが導かれる第2気室とが溶融塩液面上に分離して区画された電解槽と、
前記電解槽の溶融塩から気化して前記陽極から生成された主生ガスに混入したフッ化水素ガスを冷媒を使用して凝固させて捕集してフッ素ガスを精製する精製装置と、を備え、
前記精製装置にてフッ化水素ガスの凝固のために使用され排出された前記冷媒をフッ素ガス生成装置の各所で使用されるユーティリティガスとして再利用することを特徴とするフッ素ガス生成装置。 - 前記精製装置は、フッ化水素ガスの凝固のために使用され排出された前記冷媒を回収して一時的に保存するバッファタンクを備えることを特徴とする請求項1に記載のフッ素ガス生成装置。
- 前記精製装置は、
フッ化水素ガスを含む主生ガスが流入するガス流入部と、
主生ガスに混入したフッ化水素ガスが凝固する一方、フッ素ガスは前記ガス流入部を通過するように、フッ素の沸点以上かつフッ化水素の融点以下の温度で前記ガス流入部を前記冷媒を用いて冷却する冷却装置と、を備え、
前記冷却装置から排出された前記冷媒がユーティリティガスとして再利用されることを特徴とする請求項1又は請求項2に記載のフッ素ガス生成装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010000532A JP5577705B2 (ja) | 2010-01-05 | 2010-01-05 | フッ素ガス生成装置 |
US13/520,237 US8864961B2 (en) | 2010-01-05 | 2010-11-30 | Fluorine gas generating apparatus |
KR1020127014864A KR101410861B1 (ko) | 2010-01-05 | 2010-11-30 | 불소 가스 생성 장치 |
EP10842154A EP2522761A1 (en) | 2010-01-05 | 2010-11-30 | Fluorine gas generation apparatus |
CN2010800607527A CN102713009A (zh) | 2010-01-05 | 2010-11-30 | 氟气生成装置 |
PCT/JP2010/071338 WO2011083639A1 (ja) | 2010-01-05 | 2010-11-30 | フッ素ガス生成装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010000532A JP5577705B2 (ja) | 2010-01-05 | 2010-01-05 | フッ素ガス生成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011140680A true JP2011140680A (ja) | 2011-07-21 |
JP5577705B2 JP5577705B2 (ja) | 2014-08-27 |
Family
ID=44305377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010000532A Expired - Fee Related JP5577705B2 (ja) | 2010-01-05 | 2010-01-05 | フッ素ガス生成装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8864961B2 (ja) |
EP (1) | EP2522761A1 (ja) |
JP (1) | JP5577705B2 (ja) |
KR (1) | KR101410861B1 (ja) |
CN (1) | CN102713009A (ja) |
WO (1) | WO2011083639A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101411733B1 (ko) * | 2012-07-02 | 2014-06-25 | 최병구 | 삼불화질소 제조 방법 |
WO2020049900A1 (ja) * | 2018-09-03 | 2020-03-12 | 昭和電工株式会社 | フッ素ガス含有ガスの供給方法及び供給設備 |
US12031685B2 (en) | 2018-09-03 | 2024-07-09 | Resonac Corporation | Method and supply equipment for supplying fluorine gas-containing gas |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104350181A (zh) * | 2011-12-22 | 2015-02-11 | 索尔维公司 | 用于产生氟的电解池中的液位控制 |
US11602815B2 (en) * | 2019-01-31 | 2023-03-14 | Fusion Coolant Systems, Inc. | Machining systems utilizing supercritical fluids |
CN113217817A (zh) * | 2021-04-29 | 2021-08-06 | 中国人民解放军63796部队 | 一种大流量低压在线供气系统 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004039740A (ja) * | 2002-07-01 | 2004-02-05 | Research Institute Of Innovative Technology For The Earth | フッ素ガスによるクリーニング機構を備えたcvd装置およびcvd装置のフッ素ガスによるクリーニング方法 |
JP2004043885A (ja) * | 2002-07-11 | 2004-02-12 | L'air Liquide Sa Pour L'etude & L'exploitation Des Procedes Georges Claude | フッ素ガス生成装置 |
JP2004174438A (ja) * | 2002-11-28 | 2004-06-24 | Mitsubishi Electric Corp | オゾン水供給装置及び食品殺菌装置 |
JP2006052880A (ja) * | 2004-08-10 | 2006-02-23 | Ono Reinetsu Kogyo Kk | 冷却水循環システム |
JP2006238570A (ja) * | 2005-02-23 | 2006-09-07 | Sumitomo Electric Ind Ltd | 超電導モータ装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2379018A1 (fr) * | 1976-12-23 | 1978-08-25 | Air Liquide | Procede et installation cryogeniques de distribution de gaz sous pression |
DE2706484C3 (de) * | 1977-02-16 | 1981-12-24 | Messer Griesheim Gmbh, 6000 Frankfurt | Vorrichtung zur Dämpfung von Pulsationen in einer Anlage zur Verdampfung tiefsiedender verflüssigter Gase |
US4590770A (en) * | 1985-06-03 | 1986-05-27 | National Semiconductor Corporation | Cryogenic liquid heat exchanger |
US6843258B2 (en) | 2000-12-19 | 2005-01-18 | Applied Materials, Inc. | On-site cleaning gas generation for process chamber cleaning |
JP3725145B2 (ja) * | 2003-07-14 | 2005-12-07 | 東洋炭素株式会社 | 溶融塩電解浴の制御装置及びその制御方法 |
JP4624699B2 (ja) | 2004-03-18 | 2011-02-02 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | フッ素ガス生成装置 |
-
2010
- 2010-01-05 JP JP2010000532A patent/JP5577705B2/ja not_active Expired - Fee Related
- 2010-11-30 EP EP10842154A patent/EP2522761A1/en not_active Withdrawn
- 2010-11-30 WO PCT/JP2010/071338 patent/WO2011083639A1/ja active Application Filing
- 2010-11-30 KR KR1020127014864A patent/KR101410861B1/ko not_active IP Right Cessation
- 2010-11-30 US US13/520,237 patent/US8864961B2/en not_active Expired - Fee Related
- 2010-11-30 CN CN2010800607527A patent/CN102713009A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004039740A (ja) * | 2002-07-01 | 2004-02-05 | Research Institute Of Innovative Technology For The Earth | フッ素ガスによるクリーニング機構を備えたcvd装置およびcvd装置のフッ素ガスによるクリーニング方法 |
JP2004043885A (ja) * | 2002-07-11 | 2004-02-12 | L'air Liquide Sa Pour L'etude & L'exploitation Des Procedes Georges Claude | フッ素ガス生成装置 |
JP2004174438A (ja) * | 2002-11-28 | 2004-06-24 | Mitsubishi Electric Corp | オゾン水供給装置及び食品殺菌装置 |
JP2006052880A (ja) * | 2004-08-10 | 2006-02-23 | Ono Reinetsu Kogyo Kk | 冷却水循環システム |
JP2006238570A (ja) * | 2005-02-23 | 2006-09-07 | Sumitomo Electric Ind Ltd | 超電導モータ装置 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101411733B1 (ko) * | 2012-07-02 | 2014-06-25 | 최병구 | 삼불화질소 제조 방법 |
WO2020049900A1 (ja) * | 2018-09-03 | 2020-03-12 | 昭和電工株式会社 | フッ素ガス含有ガスの供給方法及び供給設備 |
KR20210033498A (ko) * | 2018-09-03 | 2021-03-26 | 쇼와 덴코 가부시키가이샤 | 불소 가스 함유 가스의 공급 방법 및 공급 설비 |
TWI724493B (zh) * | 2018-09-03 | 2021-04-11 | 日商昭和電工股份有限公司 | 含氟氣之氣體的供給方法以及供給設備 |
JPWO2020049900A1 (ja) * | 2018-09-03 | 2021-08-12 | 昭和電工株式会社 | フッ素ガス含有ガスの供給方法及び供給設備 |
KR102544431B1 (ko) * | 2018-09-03 | 2023-06-20 | 가부시끼가이샤 레조낙 | 불소 가스 함유 가스의 공급 방법 및 공급 설비 |
JP7367681B2 (ja) | 2018-09-03 | 2023-10-24 | 株式会社レゾナック | フッ素ガス含有ガスの供給方法及び供給設備 |
US12031685B2 (en) | 2018-09-03 | 2024-07-09 | Resonac Corporation | Method and supply equipment for supplying fluorine gas-containing gas |
Also Published As
Publication number | Publication date |
---|---|
JP5577705B2 (ja) | 2014-08-27 |
KR20120093341A (ko) | 2012-08-22 |
EP2522761A1 (en) | 2012-11-14 |
KR101410861B1 (ko) | 2014-06-23 |
US20130008781A1 (en) | 2013-01-10 |
CN102713009A (zh) | 2012-10-03 |
WO2011083639A1 (ja) | 2011-07-14 |
US8864961B2 (en) | 2014-10-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5577705B2 (ja) | フッ素ガス生成装置 | |
JP5569116B2 (ja) | フッ素ガス生成装置 | |
US20140360884A1 (en) | Fluorine Gas Generating Device | |
KR20140114001A (ko) | 가스 생성 장치 | |
US9757775B2 (en) | Chamber cleaning method using F2 and a process for manufacture of F2 for this method | |
JP5544895B2 (ja) | フッ素ガス生成装置 | |
WO2010113611A1 (ja) | フッ素ガス生成装置 | |
JP5581676B2 (ja) | フッ素ガス生成装置 | |
JP5375673B2 (ja) | フッ素ガス生成装置 | |
JP5402605B2 (ja) | フッ素ガス生成装置 | |
JP5402608B2 (ja) | フッ素ガス生成装置 | |
JP5402604B2 (ja) | フッ素ガス生成装置 | |
JP5716288B2 (ja) | フッ素ガス生成装置 | |
JP2007292457A (ja) | 蒸気ボイラ装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120221 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20121017 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131203 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140129 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140610 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140623 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5577705 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |