JP2011138582A - 垂直磁気記録媒体の製造方法 - Google Patents
垂直磁気記録媒体の製造方法 Download PDFInfo
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- 230000005291 magnetic effect Effects 0.000 title claims abstract description 69
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 title abstract description 18
- 239000010410 layer Substances 0.000 claims abstract description 143
- 238000010438 heat treatment Methods 0.000 claims abstract description 120
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 239000011241 protective layer Substances 0.000 claims abstract description 33
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 13
- 239000000956 alloy Substances 0.000 claims abstract description 13
- 229910019222 CoCrPt Inorganic materials 0.000 claims abstract description 12
- 239000006249 magnetic particle Substances 0.000 claims abstract description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 9
- 229910000531 Co alloy Inorganic materials 0.000 claims abstract description 4
- 229910000929 Ru alloy Inorganic materials 0.000 claims abstract description 3
- 238000000151 deposition Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 230000008021 deposition Effects 0.000 claims description 8
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 abstract description 6
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 20
- 230000000694 effects Effects 0.000 description 17
- 230000002411 adverse Effects 0.000 description 13
- 239000013078 crystal Substances 0.000 description 12
- 230000006872 improvement Effects 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 230000001050 lubricating effect Effects 0.000 description 6
- 229910010413 TiO 2 Inorganic materials 0.000 description 5
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000000696 magnetic material Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 239000011651 chromium Substances 0.000 description 4
- 230000005389 magnetism Effects 0.000 description 4
- 230000005415 magnetization Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000005354 aluminosilicate glass Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000003618 dip coating Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000010702 perfluoropolyether Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- -1 CoTaZr Inorganic materials 0.000 description 2
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000010952 cobalt-chrome Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000006017 silicate glass-ceramic Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910020599 Co 3 O 4 Inorganic materials 0.000 description 1
- 229910020707 Co—Pt Inorganic materials 0.000 description 1
- 229910002546 FeCo Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 241000849798 Nita Species 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000005407 aluminoborosilicate glass Substances 0.000 description 1
- 230000005316 antiferromagnetic exchange Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000005345 chemically strengthened glass Substances 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 229910000428 cobalt oxide Inorganic materials 0.000 description 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/676—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/672—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having different compositions in a plurality of magnetic layers, e.g. layer compositions having differing elemental components or differing proportions of elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
- H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
- H01F1/06—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys in the form of particles, e.g. powder
Abstract
【解決手段】本発明にかかる垂直磁気記録媒体の製造方法の構成は、基板上に少なくとも、CoCrPt合金を主成分とする磁性粒子と酸化物を主成分とする非磁性の粒界部とからなる主記録層を成膜する主記録層成膜工程と、主記録層上にRu合金またはCo合金を主成分とする分断層を成膜する分断層成膜工程と、分断層成膜工程の後に基板に加熱処理を施す第1加熱工程と、第1加熱工程の後にCoCrPtを主成分とする材料からなる補助記録層を成膜する補助記録層成膜工程と、補助記録層成膜工程の後に基板に加熱処理を施す第2加熱工程と、第2加熱工程の後にCVD法によりカーボンを主成分とする保護層を成膜する保護層成膜工程とを含む。
【選択図】図1
Description
図1は、本実施形態にかかる垂直磁気記録媒体100の構成を説明する図である。図1に示す垂直磁気記録媒体100は、基板110、付着層120、軟磁性層130、前下地層140、下地層150、主記録層160、分断層170、補助記録層180、保護層190、潤滑層200で構成されている。
上記構成の垂直磁気記録媒体100の製造方法の有効性を確かめるために、以下の実施例と比較例を用いて説明する。
Claims (2)
- 基板上に少なくとも、CoCrPt合金を主成分とする磁性粒子と酸化物を主成分とする非磁性の粒界部とからなる主記録層を成膜する主記録層成膜工程と、
前記主記録層上にRu合金またはCo合金を主成分とする分断層を成膜する分断層成膜工程と、
前記分断層成膜工程の後に前記基板に加熱処理を施す第1加熱工程と、
前記第1加熱工程の後にCoCrPtを主成分とする材料からなる補助記録層を成膜する補助記録層成膜工程と、
前記補助記録層成膜工程の後に前記基板に加熱処理を施す第2加熱工程と、
前記第2加熱工程の後にCVD法によりカーボンを主成分とする保護層を成膜する保護層成膜工程と、
を含むことを特徴とする垂直磁気記録媒体の製造方法。 - 前記第1加熱工程において前記基板に与えられる熱量と、前記第2加熱工程において該基板に与えられる熱量との和を総熱量としたときに、
前記第1加熱工程時の熱量は、前記総熱量の10〜20%であることを特徴とする請求項1に記載の垂直磁気記録媒体。
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JP2009297739A JP5643508B2 (ja) | 2009-12-28 | 2009-12-28 | 垂直磁気記録媒体の製造方法 |
US12/980,062 US8883249B2 (en) | 2009-12-28 | 2010-12-28 | Method of producing a perpendicular magnetic recording medium |
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JP2009297739A JP5643508B2 (ja) | 2009-12-28 | 2009-12-28 | 垂直磁気記録媒体の製造方法 |
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JP2011138582A true JP2011138582A (ja) | 2011-07-14 |
JP5643508B2 JP5643508B2 (ja) | 2014-12-17 |
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JP (1) | JP5643508B2 (ja) |
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