JP2011071271A5 - - Google Patents

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Publication number
JP2011071271A5
JP2011071271A5 JP2009220418A JP2009220418A JP2011071271A5 JP 2011071271 A5 JP2011071271 A5 JP 2011071271A5 JP 2009220418 A JP2009220418 A JP 2009220418A JP 2009220418 A JP2009220418 A JP 2009220418A JP 2011071271 A5 JP2011071271 A5 JP 2011071271A5
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Japan
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substrate
container
holder
predetermined slot
storage container
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JP2009220418A
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English (en)
Japanese (ja)
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JP2011071271A (ja
JP5492509B2 (ja
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Publication of JP2011071271A5 publication Critical patent/JP2011071271A5/ja
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JP2009220418A 2009-09-25 2009-09-25 基板移載方法及び半導体装置の製造方法及び基板処理装置及び搬送制御プログラム Active JP5492509B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009220418A JP5492509B2 (ja) 2009-09-25 2009-09-25 基板移載方法及び半導体装置の製造方法及び基板処理装置及び搬送制御プログラム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009220418A JP5492509B2 (ja) 2009-09-25 2009-09-25 基板移載方法及び半導体装置の製造方法及び基板処理装置及び搬送制御プログラム

Publications (3)

Publication Number Publication Date
JP2011071271A JP2011071271A (ja) 2011-04-07
JP2011071271A5 true JP2011071271A5 (enExample) 2012-10-18
JP5492509B2 JP5492509B2 (ja) 2014-05-14

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JP2009220418A Active JP5492509B2 (ja) 2009-09-25 2009-09-25 基板移載方法及び半導体装置の製造方法及び基板処理装置及び搬送制御プログラム

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JP (1) JP5492509B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6572854B2 (ja) * 2016-09-09 2019-09-11 株式会社ダイフク 容器収納設備
US11121014B2 (en) * 2018-06-05 2021-09-14 Asm Ip Holding B.V. Dummy wafer storage cassette
JP7157786B2 (ja) * 2020-09-23 2022-10-20 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2829367B2 (ja) * 1996-03-08 1998-11-25 国際電気株式会社 ウェーハ移載方法

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