JP2011045040A5 - - Google Patents
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- Publication number
- JP2011045040A5 JP2011045040A5 JP2010096557A JP2010096557A JP2011045040A5 JP 2011045040 A5 JP2011045040 A5 JP 2011045040A5 JP 2010096557 A JP2010096557 A JP 2010096557A JP 2010096557 A JP2010096557 A JP 2010096557A JP 2011045040 A5 JP2011045040 A5 JP 2011045040A5
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- upper electrode
- substrate
- cavity
- electrically connect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010096557A JP5495918B2 (ja) | 2009-07-24 | 2010-04-20 | 電気機械変換装置、及び電気機械変換装置の作製方法 |
| US12/839,701 US9143877B2 (en) | 2009-07-24 | 2010-07-20 | Electromechanical transducer device and method of making the same |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009172723 | 2009-07-24 | ||
| JP2009172723 | 2009-07-24 | ||
| JP2010096557A JP5495918B2 (ja) | 2009-07-24 | 2010-04-20 | 電気機械変換装置、及び電気機械変換装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011045040A JP2011045040A (ja) | 2011-03-03 |
| JP2011045040A5 true JP2011045040A5 (enExample) | 2013-05-23 |
| JP5495918B2 JP5495918B2 (ja) | 2014-05-21 |
Family
ID=43496658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010096557A Active JP5495918B2 (ja) | 2009-07-24 | 2010-04-20 | 電気機械変換装置、及び電気機械変換装置の作製方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9143877B2 (enExample) |
| JP (1) | JP5495918B2 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW453207U (en) | 2001-01-18 | 2001-09-01 | Superweigh Entpr Co Ltd | Multifunctional exercise machine |
| JP5436013B2 (ja) * | 2009-04-10 | 2014-03-05 | キヤノン株式会社 | 機械電気変化素子 |
| JP5404365B2 (ja) * | 2009-12-16 | 2014-01-29 | キヤノン株式会社 | 電気機械変換装置及びその製造方法 |
| JP5570311B2 (ja) * | 2010-06-07 | 2014-08-13 | キヤノン株式会社 | 電気機械変換装置、検体診断装置 |
| JP5702966B2 (ja) * | 2010-08-02 | 2015-04-15 | キヤノン株式会社 | 電気機械変換装置及びその作製方法 |
| WO2012127360A2 (en) * | 2011-03-22 | 2012-09-27 | Koninklijke Philips Electronics N.V. | Ultrasonic cmut with suppressed acoustic coupling to the substrate |
| JP6069798B2 (ja) * | 2011-12-20 | 2017-02-01 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | 超音波トランスデューサデバイス及びこれを製造する方法 |
| CN105592941B (zh) * | 2013-09-27 | 2018-01-19 | 皇家飞利浦有限公司 | 超声换能器组件和用于发送和接收超声波的方法 |
| KR102155695B1 (ko) * | 2014-02-12 | 2020-09-21 | 삼성전자주식회사 | 전기 음향 변환기 |
| US9067779B1 (en) | 2014-07-14 | 2015-06-30 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
| JP2016101417A (ja) * | 2014-11-28 | 2016-06-02 | キヤノン株式会社 | 静電容量型音響波トランスデューサ及びこれを備えた被検体情報取得装置 |
| TW201908021A (zh) | 2017-06-21 | 2019-03-01 | 美商蝴蝶網路公司 | 具有電性隔離的電極部分的個別單元的微加工超音波換能器 |
| EP3459646A1 (en) * | 2017-09-22 | 2019-03-27 | Koninklijke Philips N.V. | Ultrasound transducer device and method for controlling the same |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH067719B2 (ja) | 1985-03-26 | 1994-01-26 | 日本電気株式会社 | 超音波トランスジユ−サ |
| JPH11176307A (ja) * | 1997-12-08 | 1999-07-02 | Omron Corp | 静電マイクロリレー |
| US6109113A (en) * | 1998-06-11 | 2000-08-29 | Delco Electronics Corp. | Silicon micromachined capacitive pressure sensor and method of manufacture |
| US6430109B1 (en) * | 1999-09-30 | 2002-08-06 | The Board Of Trustees Of The Leland Stanford Junior University | Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections |
| US7545075B2 (en) * | 2004-06-04 | 2009-06-09 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same |
| JP2006012889A (ja) * | 2004-06-22 | 2006-01-12 | Canon Inc | 半導体チップの製造方法および半導体装置の製造方法 |
| JP4624763B2 (ja) * | 2004-10-27 | 2011-02-02 | オリンパス株式会社 | 静電容量型超音波振動子、及びその製造方法 |
| EP1810619B1 (en) * | 2004-10-27 | 2011-09-14 | Olympus Corporation | Capacitive ultrasonic transducer and endo cavity ultrasonic diagnosis system using the same |
| JP4632853B2 (ja) * | 2005-05-13 | 2011-02-16 | オリンパスメディカルシステムズ株式会社 | 静電容量型超音波振動子とその製造方法 |
| WO2006134580A2 (en) * | 2005-06-17 | 2006-12-21 | Kolo Technologies, Inc. | Micro-electro-mechanical transducer having an insulation extension |
| JP4724505B2 (ja) * | 2005-09-09 | 2011-07-13 | 株式会社日立製作所 | 超音波探触子およびその製造方法 |
| US20070180916A1 (en) * | 2006-02-09 | 2007-08-09 | General Electric Company | Capacitive micromachined ultrasound transducer and methods of making the same |
| JP4699259B2 (ja) * | 2006-03-31 | 2011-06-08 | 株式会社日立製作所 | 超音波トランスデューサ |
| US7745973B2 (en) * | 2006-05-03 | 2010-06-29 | The Board Of Trustees Of The Leland Stanford Junior University | Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion |
| US7741686B2 (en) * | 2006-07-20 | 2010-06-22 | The Board Of Trustees Of The Leland Stanford Junior University | Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame |
| US8087152B2 (en) * | 2008-06-24 | 2012-01-03 | Canon Kabushiki Kaisha | Manufacturing method of an electromechanical transducer |
| JP5376982B2 (ja) * | 2008-06-30 | 2013-12-25 | キヤノン株式会社 | 機械電気変換素子と機械電気変換装置および機械電気変換装置の作製方法 |
| JP5404365B2 (ja) * | 2009-12-16 | 2014-01-29 | キヤノン株式会社 | 電気機械変換装置及びその製造方法 |
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2010
- 2010-04-20 JP JP2010096557A patent/JP5495918B2/ja active Active
- 2010-07-20 US US12/839,701 patent/US9143877B2/en not_active Expired - Fee Related