JP2011023425A5 - - Google Patents
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- Publication number
- JP2011023425A5 JP2011023425A5 JP2009165048A JP2009165048A JP2011023425A5 JP 2011023425 A5 JP2011023425 A5 JP 2011023425A5 JP 2009165048 A JP2009165048 A JP 2009165048A JP 2009165048 A JP2009165048 A JP 2009165048A JP 2011023425 A5 JP2011023425 A5 JP 2011023425A5
- Authority
- JP
- Japan
- Prior art keywords
- plate member
- positioning
- stage
- sealed space
- positioning member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 2
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009165048A JP2011023425A (ja) | 2009-07-13 | 2009-07-13 | ステージ装置、露光装置及びデバイス製造方法 |
| US12/835,465 US8456618B2 (en) | 2009-07-13 | 2010-07-13 | Stage apparatus, exposure apparatus, and method of manufacturing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009165048A JP2011023425A (ja) | 2009-07-13 | 2009-07-13 | ステージ装置、露光装置及びデバイス製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011023425A JP2011023425A (ja) | 2011-02-03 |
| JP2011023425A5 true JP2011023425A5 (enExample) | 2012-08-30 |
Family
ID=43427218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009165048A Pending JP2011023425A (ja) | 2009-07-13 | 2009-07-13 | ステージ装置、露光装置及びデバイス製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8456618B2 (enExample) |
| JP (1) | JP2011023425A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011023425A (ja) * | 2009-07-13 | 2011-02-03 | Canon Inc | ステージ装置、露光装置及びデバイス製造方法 |
| JP2012006088A (ja) * | 2010-06-22 | 2012-01-12 | Hitachi High-Technologies Corp | ワーク端部検出機構及びワーク搬送機構 |
| JP5873251B2 (ja) * | 2011-04-28 | 2016-03-01 | キヤノンアネルバ株式会社 | 基板トレイ及び該トレイを用いた基板処理装置 |
| JP6294636B2 (ja) * | 2013-11-08 | 2018-03-14 | キヤノン株式会社 | 原版保持装置、露光装置、物品の製造方法、および原版保持方法 |
| US10761435B2 (en) | 2017-02-10 | 2020-09-01 | Asml Holding N.V. | Reticle clamping device |
| CN116107156B (zh) * | 2023-04-11 | 2023-06-23 | 深圳市龙图光罩股份有限公司 | 掩模版刻蚀设备、方法、系统及计算机可读存储介质 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08153665A (ja) * | 1994-11-29 | 1996-06-11 | Toshiba Corp | 基板の保持装置 |
| JPH1140657A (ja) * | 1997-07-23 | 1999-02-12 | Nikon Corp | 試料保持装置および走査型露光装置 |
| JPH11226479A (ja) * | 1998-02-18 | 1999-08-24 | Dainippon Screen Mfg Co Ltd | ステージ旋回装置および基板処理システム |
| US6157441A (en) * | 1999-03-11 | 2000-12-05 | Olec Corporation | Film on glass imaging fixtures and method |
| JP4309992B2 (ja) * | 1999-04-16 | 2009-08-05 | キヤノン株式会社 | 試料保持装置およびこの保持装置を用いた露光装置 |
| JP4199494B2 (ja) * | 2002-08-22 | 2008-12-17 | 株式会社日立ハイテクノロジーズ | 露光装置のマスク板固定治具 |
| JP4411100B2 (ja) | 2004-02-18 | 2010-02-10 | キヤノン株式会社 | 露光装置 |
| JP2011023425A (ja) * | 2009-07-13 | 2011-02-03 | Canon Inc | ステージ装置、露光装置及びデバイス製造方法 |
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2009
- 2009-07-13 JP JP2009165048A patent/JP2011023425A/ja active Pending
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2010
- 2010-07-13 US US12/835,465 patent/US8456618B2/en not_active Expired - Fee Related