JP2011014823A5 - - Google Patents

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Publication number
JP2011014823A5
JP2011014823A5 JP2009159656A JP2009159656A JP2011014823A5 JP 2011014823 A5 JP2011014823 A5 JP 2011014823A5 JP 2009159656 A JP2009159656 A JP 2009159656A JP 2009159656 A JP2009159656 A JP 2009159656A JP 2011014823 A5 JP2011014823 A5 JP 2011014823A5
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JP
Japan
Prior art keywords
case
mask
film
inner case
shipping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009159656A
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English (en)
Japanese (ja)
Other versions
JP5393298B2 (ja
JP2011014823A (ja
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Priority to JP2009159656A priority Critical patent/JP5393298B2/ja
Priority claimed from JP2009159656A external-priority patent/JP5393298B2/ja
Publication of JP2011014823A publication Critical patent/JP2011014823A/ja
Publication of JP2011014823A5 publication Critical patent/JP2011014823A5/ja
Application granted granted Critical
Publication of JP5393298B2 publication Critical patent/JP5393298B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009159656A 2009-07-06 2009-07-06 マスクケース Active JP5393298B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009159656A JP5393298B2 (ja) 2009-07-06 2009-07-06 マスクケース

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009159656A JP5393298B2 (ja) 2009-07-06 2009-07-06 マスクケース

Publications (3)

Publication Number Publication Date
JP2011014823A JP2011014823A (ja) 2011-01-20
JP2011014823A5 true JP2011014823A5 (no) 2012-06-14
JP5393298B2 JP5393298B2 (ja) 2014-01-22

Family

ID=43593409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009159656A Active JP5393298B2 (ja) 2009-07-06 2009-07-06 マスクケース

Country Status (1)

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JP (1) JP5393298B2 (no)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102789132B (zh) * 2011-01-28 2014-07-16 家登精密工业股份有限公司 具有固定结构的极紫外光光罩储存传送盒
JP6107305B2 (ja) * 2013-03-27 2017-04-05 大日本印刷株式会社 ケースの洗浄方法およびケースの洗浄装置
CN108375872B (zh) * 2017-01-25 2022-04-15 家登精密工业股份有限公司 极紫外光光罩容器
CN113451223B (zh) * 2021-08-31 2021-11-19 山东普利斯林智能仪表有限公司 一种用于半导体基板的封装机构及封装方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH036915Y2 (no) * 1986-03-07 1991-02-21
JPH0754136Y2 (ja) * 1989-04-28 1995-12-13 旭化成工業株式会社 包装体
JP2506317Y2 (ja) * 1989-12-14 1996-08-07 信越ポリマー株式会社 マスク収納容器
JP3193567B2 (ja) * 1994-04-27 2001-07-30 キヤノン株式会社 基板収容容器
JP3893642B2 (ja) * 1996-07-25 2007-03-14 凸版印刷株式会社 マスク用収納容器
JP3755580B2 (ja) * 2000-11-21 2006-03-15 信越ポリマー株式会社 容器の梱包体及び容器の緩衝体
JP2004119566A (ja) * 2002-09-25 2004-04-15 Toppan Printing Co Ltd マスクケース
JP2005351935A (ja) * 2004-06-08 2005-12-22 Toppan Printing Co Ltd フォトマスクあるいはフォトマスクブランクスを収納する容器
JP4581681B2 (ja) * 2004-12-27 2010-11-17 株式会社ニコン レチクル保護装置および露光装置
US7528936B2 (en) * 2005-02-27 2009-05-05 Entegris, Inc. Substrate container with pressure equalization
US7400383B2 (en) * 2005-04-04 2008-07-15 Entegris, Inc. Environmental control in a reticle SMIF pod
JP2006330421A (ja) * 2005-05-27 2006-12-07 Toppan Printing Co Ltd フォトマスクケース
JP2007057624A (ja) * 2005-08-23 2007-03-08 Matsushita Electric Ind Co Ltd レチクル収納ケース
JP2007141925A (ja) * 2005-11-15 2007-06-07 Nikon Corp マスク収容容器、露光装置
JP4519777B2 (ja) * 2006-01-23 2010-08-04 信越ポリマー株式会社 梱包用緩衝体および包装体
JP4773216B2 (ja) * 2006-01-30 2011-09-14 Ｈｏｙａ株式会社 基板の搬送方法
TWI384322B (zh) * 2008-08-07 2013-02-01 Gudeng Prec Industral Co Ltd 光罩盒之承載盒及其緩衝定位裝置

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