JP2011009575A5 - - Google Patents

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Publication number
JP2011009575A5
JP2011009575A5 JP2009152852A JP2009152852A JP2011009575A5 JP 2011009575 A5 JP2011009575 A5 JP 2011009575A5 JP 2009152852 A JP2009152852 A JP 2009152852A JP 2009152852 A JP2009152852 A JP 2009152852A JP 2011009575 A5 JP2011009575 A5 JP 2011009575A5
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JP
Japan
Prior art keywords
optical element
adjustment
optical
exposure apparatus
characteristic value
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JP2009152852A
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English (en)
Japanese (ja)
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JP2011009575A (ja
JP5418768B2 (ja
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Priority claimed from JP2009152852A external-priority patent/JP5418768B2/ja
Publication of JP2011009575A publication Critical patent/JP2011009575A/ja
Publication of JP2011009575A5 publication Critical patent/JP2011009575A5/ja
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Publication of JP5418768B2 publication Critical patent/JP5418768B2/ja
Expired - Fee Related legal-status Critical Current
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JP2009152852A 2009-06-26 2009-06-26 露光装置、調整方法及びデバイスの製造方法 Expired - Fee Related JP5418768B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009152852A JP5418768B2 (ja) 2009-06-26 2009-06-26 露光装置、調整方法及びデバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009152852A JP5418768B2 (ja) 2009-06-26 2009-06-26 露光装置、調整方法及びデバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2011009575A JP2011009575A (ja) 2011-01-13
JP2011009575A5 true JP2011009575A5 (enExample) 2012-08-16
JP5418768B2 JP5418768B2 (ja) 2014-02-19

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JP2009152852A Expired - Fee Related JP5418768B2 (ja) 2009-06-26 2009-06-26 露光装置、調整方法及びデバイスの製造方法

Country Status (1)

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JP (1) JP5418768B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5969848B2 (ja) * 2012-07-19 2016-08-17 キヤノン株式会社 露光装置、調整対象の調整量を求める方法、プログラム及びデバイスの製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4689081B2 (ja) * 2001-06-06 2011-05-25 キヤノン株式会社 露光装置、調整方法、およびデバイス製造方法
JP4574198B2 (ja) * 2004-03-17 2010-11-04 キヤノン株式会社 露光装置、その調整方法及びデバイス製造方法
JP5213406B2 (ja) * 2007-10-05 2013-06-19 キヤノン株式会社 調整方法、露光装置、およびデバイス製造方法
JP5105474B2 (ja) * 2007-10-19 2012-12-26 国立大学法人東京農工大学 露光装置及びデバイス製造方法
JP5006762B2 (ja) * 2007-11-05 2012-08-22 キヤノン株式会社 露光装置及びデバイス製造方法

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