JP2010541159A - 薄膜封止層を形成する方法 - Google Patents
薄膜封止層を形成する方法 Download PDFInfo
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- JP2010541159A JP2010541159A JP2010526900A JP2010526900A JP2010541159A JP 2010541159 A JP2010541159 A JP 2010541159A JP 2010526900 A JP2010526900 A JP 2010526900A JP 2010526900 A JP2010526900 A JP 2010526900A JP 2010541159 A JP2010541159 A JP 2010541159A
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Abstract
Description
基板-AH + MLx → 基板-AMLx-1 + HL (1)
ただし、HLは反応の副生成物である。反応中、最初の表面リガンドAHが消費されて表面がAMLx-1リガンドで覆われる。このリガンドは、表面は金属前駆体MLxとそれ以上反応することはできない。したがって表面にある最初のAHリガンドがすべてAMLx-1で置換されると、反応は自動的に終了する。この反応段階に続けて一般に不活性ガスでパージする段階を実施して過剰な金属前駆体とHL副生成物をチェンバーから除去した後、他の前駆体を独立に導入する。
基板-A-ML + AHY → 基板-A-M-AH + HL (2)
1.MLx反応;
2.MLxパージ;
3.AHY反応;
4.AHYパージ、その後段階1に戻る。
流量計85:ジエチル亜鉛バブラー流へ
流量計86:トリメチルアルミニウム・バブラー流へ
流量計87:金属前駆体希釈流へ
流量計88:水バブラーへ
流量計89:酸化剤希釈流へ
流量計91:空気流へ
(1)カソードとアノードに電圧を印加して点灯させる。
(2)ソニー社のXC-75黒白CCDカメラを用い、点灯しているデバイスを解像度3.72μm/画素、倍率40倍で写真撮影する。暗いスポットを正確に評価するため、目で見て最良のコントラストを生じさせる電圧をデバイスに印加し、試験アイコン上の暗いスポットの存在を認識して測定できるようにする。
(3)所定の期間にわたってOLEDデバイスを室温24℃かつ相対湿度(RH)50%にする(いくつかのデバイス)か、
(4)湿度/酸素加速耐久試験において85℃/85%RH(相対湿度)(85/85)恒温恒湿室(HC)の中にデバイスを保管する。
(2)Et2Zn(オールドリッチ・ケミカル社から市販されている)
Al2O3 120オングストローム
ZnO 100オングストローム
Al2O3 100オングストローム
ZnO 150オングストローム
Al2O3 200オングストローム
ZnO 200オングストローム
Al2O3 1000オングストローム
2 基板のチャネル領域上方の第1の分子前駆体からなる第1のチャネル流
3 基板とマルチ-チャネル流の相対運動
4 チャネル領域上方の不活性ガスによる第2のチャネル流
5 基板とマルチ-チャネル流の相対運動
6 チャネル領域上方の第2の分子前駆体からなる第3のチャネル流
7 基板とマルチ-チャネル流の相対運動
8 チャネル領域上方の不活性ガスによる第4のチャネル流
9 基板とマルチ-チャネル流の相対運動
10 堆積装置
11 平行なマルチ-チャネル流
12 放出チャネル
14、16、18 ガス導入ポート
15 シークエンス
20 基板
22 隔壁
24 ガス放出ポート
26 排出ポート
28a、28b、28c ガス供給
30 アクチュエータ
32 供給ライン
36 放出面
38 方向変更プレート
40 開口部
42 分離プレート
44 供給プレート
46a、46b、46c ダクト
48 方向変更チェンバー
50 チェンバー
52 輸送用モータ
54 輸送サブシステム
56 制御用論理プロセッサ
58 バッフル
60 原子層堆積(ALD)システム
62 ウェブ・コンベア
64 堆積装置輸送装置
66 ウェブ基板
70 原子層堆積(ALD)システム
72 拡散層
74 基板支持体
81 窒素ガス流
82、83、84 ガス・バブラー
85、86、87、88 流量計
89、91、94 流量計
90 空気流
92 金属前駆体流
93 酸化剤含有流
95 窒素パージ流
96 ギャップ
97 基板
98 矢印
108 OLEDデバイス
110 基板
112 第1の電極
114 有機素子層
116 導電性の第2の電極
117 薄膜封止パッケージ
120 カバー
126 補助電極
130 薄膜電子素子
132 平坦化層
134 ビア
140R カラー・フィルタ
140G カラー・フィルタ
140B カラー・フィルタ
150 発光領域
152 発光領域
154 発光領域
160 接着剤
D 距離
F1、F2、F3、F4 ガス流
FI、FO、FM、FE ガス流
H 高さ
I 不活性ガス材料
L チャネルの長さ
M 第2の反応性ガス材料
O 第1の反応性ガス材料
R 矢印
W チャネルの幅
Claims (20)
- 封止するOLEDデバイスの表面に薄膜材料を原子層堆積させてそのOLEDデバイスを薄膜封止パッケージするため、一連のガス流を実質的に平行な細長い出口開口部に沿った方向に向ける操作を含む方法であって、上記一連のガス流が、順番に、少なくとも1つの第1の反応性ガス材料と、不活性なパージ・ガスと、第2の反応性ガス材料を、場合によっては繰り返して含んでおり、上記第1の反応性ガス材料は、上記第2の反応性ガス材料で処理した基板と反応して封止薄膜を形成することができ、上記第1の反応性ガス材料は、揮発性の有機金属前駆体化合物であり、この方法は、実質的に大気圧で、または大気圧よりも大きな圧力で実施され、堆積中の上記基板の温度は250℃未満である方法。
- 上記OLEDデバイスが、
(a)第1の電極と;
(b)第2の電極と;
(c)上記第1の電極と上記第2の電極の間に形成された1つ以上の有機層とを備えていて、少なくとも1つの有機層が発光層である、請求項1に記載の方法。 - 上記薄膜封止パッケージが、単一の無機化合物からなる単一の層を含む、請求項1に記載の方法。
- 上記薄膜封止パッケージが、(a)第1の無機材料からなる少なくとも1つの第1の層と、第2の無機材料からなる少なくとも1つの第2の層を含むか、(b)第1の無機材料と第2の無機材料の混合物である層を含む、請求項1に記載の方法。
- 上記第1の無機材料と上記第2の無機材料を、独立に、酸化物、窒化物、硫化物、リン化物の中から選択する、請求項4に記載の方法。
- 上記第1の無機材料と上記第2の無機材料の少なくとも一方がアルミニウム酸化物である、請求項4に記載の方法。
- 上記第1の無機材料と上記第2の無機材料の少なくとも一方が酸化物または窒化物である、請求項4に記載の方法。
- 上記第1の無機材料と上記第2の無機材料が、周期表の3A族、3B族、4A族、4B族の元素の中から独立に選択した元素を含む、請求項4に記載の方法。
- 上記第1の無機材料と上記第2の無機材料が、亜鉛、アルミニウム、チタン、ハフニウム、ケイ素、ジルコニウム、イットリウム、インジウムからなるグループの中から独立に選択した元素を含む、請求項4に記載の方法。
- 複数の第1の封止薄膜および/または複数の第2の封止薄膜が存在していて、その1の封止薄膜と第2の封止薄膜が積層体の中で交互になっている、請求項1に記載の方法。
- OLEDデバイスを形成するため、
(a)第1の電極と、その上に形成されて少なくとも1つは発光層になる1つ以上の有機層を設け;
(b)上記1つ以上の有機層の面のうちで上記第1の電極とは反対側に透明な導電性酸化物を含む第2の電極を形成し;
(c)請求項1の薄膜封止パッケージを形成する操作を含む方法。 - 上記薄膜封止パッケージを140℃未満の温度で形成する、請求項11に記載の方法。
- 上記OLEDデバイスがトップ-エミッション型OLEDデバイスであり、上記第1の電極が底部電極であり、上記第2の電極が頂部電極である、請求項11に記載の方法。
- 上記薄膜封止パッケージがパリレン・ポリマーからなる層を含む、請求項11に記載の方法。
- 実質的に平行で、上記基板の上方に、その基板に近接した位置で、堆積を受けるその基板の表面から1mm以内離れて位置する一連の細長い出口開口部を、その放出面の位置に有する堆積装置により、上記一連のガス流を提供する、請求項1に記載の方法。
- 第1の反応性ガス材料と第2の反応性ガス材料のための一連の細長い出口開口部の間に排出チャネルが存在しない、請求項15に記載の方法。
- 上記堆積装置が、第1の反応性ガス材料と第2の反応性ガス材料のための実質的に平行な上記細長い出口開口部の間に排出チャネルをさらに備える、請求項15に記載の方法。
- 薄膜を堆積させるため上記基板の表面に向かう1つ以上の上記ガス材料の流れが、その基板の表面から上記堆積装置の放出面を隔てる力の少なくとも一部を提供する、請求項15に記載の方法。
- 堆積システムにおいて原子層堆積を実施するにあたって、この堆積システムが、順番に、
(A)入口区画と;
(B)被覆区画と;
(C)出口区画と;
(D)基板を移動させて上記被覆区画を一方向に通過させる手段と;
(E)薄膜を堆積させている間は供給ヘッドの堆積用放出面と上記基板の表面の間の距離を実質的に一定に維持する手段とを備えていて、
上記被覆区画は、
(i)上記第1の反応性ガス材料と、上記第2の反応性ガス材料と、上記不活性なパージ・ガスのそれぞれを少なくとも含む複数のガス材料それぞれのための複数の供給源と;
(ii)薄膜堆積を受け入れる上記基板に上記複数のガス材料を供給するための少なくとも1つの供給ヘッドを備えていて、その供給ヘッドは、
(a)上記第1の反応性ガス材料と、上記第2の反応性ガス材料と、上記不活性なパージ・ガスをそれぞれ受け入れる第1、第2、第3の導入ポートを少なくとも含む複数の導入ポートと;
(b)基板から所定の距離離れていて、上記第1の反応性ガス材料と、上記第2の反応性ガス材料と、上記不活性なパージ・ガスそれぞれのための実質的に互いに平行な複数の細長い出口開口部を含む堆積用放出面を備えていて、上記供給ヘッドは、上記第1の反応性ガス材料と、上記第2の反応性ガス材料と、上記不活性なパージ・ガスを上記堆積用放出面の細長い出口開口部から同時に供給する設計にされており;
上記被覆区画の供給ヘッドは、上記ガス材料の1つ以上の流れを上記基板の表面に供給して薄膜を堆積させる設計にされていて、その流れは、その供給ヘッドの堆積用放出面を上記基板の表面から隔てる力の少なくとも一部も提供しており、場合によっては、上記入口区画および/または上記出口区画は、それぞれ、この堆積システムの少なくとも一部を通過する間に上記基板の表面に非反応性ガス流を供給する設計にされた複数の非堆積用出口開口部を有する非堆積用放出面を備える、請求項1に記載の方法。 - 上記基板の表面を1つのチャネル内で100ミリ秒未満ガス流に曝すとともに、その基板を上記堆積装置に対して少なくとも0.1cm/秒の速度で相対運動させる、請求項15に記載の方法。
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Cited By (8)
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JP2012129199A (ja) * | 2010-11-24 | 2012-07-05 | Semiconductor Energy Lab Co Ltd | 有機光デバイス及び有機光デバイスの保護部材 |
JP2012521623A (ja) * | 2009-03-24 | 2012-09-13 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | オプトエレクトロニクス素子のための薄膜カプセル封入並びにその製造方法、及びオプトエレクトロニクス素子 |
WO2013157770A1 (ja) * | 2012-04-18 | 2013-10-24 | 株式会社カネカ | 無機膜を用いた水分透過防止膜の製造方法、無機膜を用いた水分透過防止膜及び電気、電子封止素子 |
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Also Published As
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WO2009042052A3 (en) | 2009-05-22 |
EP2193219A2 (en) | 2010-06-09 |
WO2009042052A2 (en) | 2009-04-02 |
CN101809188A (zh) | 2010-08-18 |
CN101809188B (zh) | 2012-08-08 |
US20090081356A1 (en) | 2009-03-26 |
US8529990B2 (en) | 2013-09-10 |
US20120070942A1 (en) | 2012-03-22 |
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