JP2010539727A - 太陽電池及びその製造方法 - Google Patents
太陽電池及びその製造方法 Download PDFInfo
- Publication number
- JP2010539727A JP2010539727A JP2010525773A JP2010525773A JP2010539727A JP 2010539727 A JP2010539727 A JP 2010539727A JP 2010525773 A JP2010525773 A JP 2010525773A JP 2010525773 A JP2010525773 A JP 2010525773A JP 2010539727 A JP2010539727 A JP 2010539727A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- solar cell
- electrode
- cell according
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 claims abstract description 119
- 238000002161 passivation Methods 0.000 claims abstract description 115
- 238000000034 method Methods 0.000 claims abstract description 60
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 40
- 239000010703 silicon Substances 0.000 claims abstract description 40
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims abstract description 33
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 24
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000007772 electrode material Substances 0.000 claims description 34
- 238000007650 screen-printing Methods 0.000 claims description 14
- 239000011521 glass Substances 0.000 claims description 12
- 239000002003 electrode paste Substances 0.000 claims description 11
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 239000000843 powder Substances 0.000 claims description 7
- 239000002904 solvent Substances 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 238000000608 laser ablation Methods 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims description 2
- 238000000206 photolithography Methods 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 239000010410 layer Substances 0.000 description 356
- 239000000463 material Substances 0.000 description 25
- 238000010438 heat treatment Methods 0.000 description 20
- 239000007789 gas Substances 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 13
- 230000007423 decrease Effects 0.000 description 9
- 230000000149 penetrating effect Effects 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 239000007769 metal material Substances 0.000 description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 5
- 238000005215 recombination Methods 0.000 description 5
- 230000006798 recombination Effects 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
- H01L31/056—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means the light-reflecting means being of the back surface reflector [BSR] type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
【選択図】図1
Description
〔発明の概要〕
Claims (22)
- 第一型半導体と第二型半導体を含む半導体部と、
前記半導体部に電気的に接続される電極と、
前記半導体部と前記電極間のパッシベーション層であって、酸化シリコン(SiOx)を含む第1の層と、窒化シリコン(SiNx)を含む第2の層と、酸化シリコン(SiOx)又は酸窒化シリコン(SiOxNy)を含む第3の層とを含む前記パッシベーション層と、
を備えた太陽電池。 - 前記第1の層は前記半導体部と接触し、前記第2の層は前記第1の層の上にあり、前記第3の層は前記第2の層の上にあって、前記第1の層の屈折率は、前記第2の層の屈折率より小さい、請求項1に記載の太陽電池。
- 前記第3の層の屈折率は、前記第2の層の屈折率より小さく、前記第1の層の屈折率と等しいかまたはより大きい、請求項2に記載の太陽電池。
- 前記第2の層は水素(H2)を含む、請求項1に記載の太陽電池。
- 前記パッシベーション層は、前記半導体部の光入射表面の反対の表面に位置する、請求項1に記載の太陽電池。
- 前記半導体部の前記光入射表面に反射防止層を更に備え、
前記反射防止層は、少なくとも、酸化シリコン(SiOx)、窒化シリコン(SiNx)または酸窒化シリコン(SiOxNy)の内の一つを含む、請求項5に記載の太陽電池。 - 前記電極の一部が前記パッシベーション層を通して前記半導体部に電気的に接続される、請求項1に記載の太陽電池。
- 前記パッシベーション層を通して前記半導体部に電気的に接続される前記電極の一部と前記半導体部の間の裏面電界層を更に備える、請求項7に記載の太陽電池。
- 第一型半導体と第二型半導体を含む半導体部と、
前記半導体部に電気的に接続される電極と、
前記半導体部と前記電極間のパッシベーション層であって、酸化シリコン(SiOx)を含む第1の層と、酸窒化シリコン(SiOxNy)を含む第2の層とを含む前記パッシベーション層と、を備えた太陽電池。 - 前記第1の層は前記半導体部と接触し、前記第2の層は前記第1の層の上にあって、前記第1の層の屈折率は、前記第2の層の屈折率より小さい、請求項9に記載の太陽電池。
- 前記パッシベーション層は、酸化シリコン(SiOx)または酸窒化シリコン(SiOxNy)を含む第3の層を更に含む、請求項9に記載の太陽電池。
- 前記第1の層は前記半導体部と接触し、前記第2の層は前記第1の層の上にあり、前記第3の層は前記第2の層の上にあって、
前記第3の層の屈折率は、前記第2の層の屈折率と等しいか又はより小さく、前記第1の層の屈折率と等しいか又はより大きい、請求項11に記載の太陽電池。 - 半導体部と、電極と、前記半導体部と前記電極との間のパッシベーション層とを備えた太陽電池の製造方法であって、
前記半導体部の上に、前記パッシベーション層であって、酸化シリコン(SiOx)を含む第1の層と、酸窒化シリコン(SiOxNy)を含む第2の層とを含む前記パッシベーションを形成し、
前記パッシベーション層を通して孔を形成し、
前記パッシベーション層上に前記電極を形成するために電極物質層を形成することを含む、太陽電池の製造方法。 - 前記パッシベーション層は、前記第1の層と前記第2の層との間に、窒化シリコン(SiNx)を含む第3の層を更に含む、請求項13に記載の太陽電池の製造方法。
- 前記孔をホトリソグラフィ、機械的スクライビング、エッチングペースト及びレーザアブレーションにより形成する、請求項13に記載の太陽電池の製造方法。
- 前記孔の形成には、前記パッシベーション層上へのレーザビームの照射も含む、請求項13に記載の太陽電池の製造方法。
- 前記孔の形成は、前記電極層の形成の後に起こり、前記電極物質層へのレーザビームの照射も含む、請求項13に記載の太陽電池の製造方法。
- 前記電極物質層は、金属パウダー、溶剤、ガラスパウダーを含んだ電極ペーストを含む、請求項13に記載の太陽電池の製造方法。
- 前記金属パウダーはアルミニウム(Al)を含む、請求項18に記載の太陽電池の製造方法。
- 前記半導体部上に前記パッシベーション層を形成することは、
前記半導体部上に酸化シリコン(SiOx)層を形成し、
前記酸化シリコン層上に窒化シリコン(SiNx)層を形成し、
前記窒化シリコン層上に酸窒化シリコン(SiOxNy)層を形成することを含む、請求項13に記載の太陽電池の製造方法。 - 前記電極物質層を700℃又はそれ以上の温度で熱処理することを含む、請求項13に記載の太陽電池の製造方法。
- 前記電極物質を形成することは、
スクリーン印刷法を用いて前記パッシベーション層上に前記電極ペーストを被覆することを含む、請求項18に記載の太陽電池の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080035607A KR100994924B1 (ko) | 2008-04-17 | 2008-04-17 | 태양전지 및 그 제조방법 |
KR1020090015780A KR20100096746A (ko) | 2009-02-25 | 2009-02-25 | 태양전지 및 그의 제조방법 |
PCT/KR2009/002020 WO2009128678A2 (en) | 2008-04-17 | 2009-04-17 | Solar cell and method of manufacturing the same |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2010539727A true JP2010539727A (ja) | 2010-12-16 |
Family
ID=41199594
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010525773A Pending JP2010539727A (ja) | 2008-04-17 | 2009-04-17 | 太陽電池及びその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20090260685A1 (ja) |
EP (1) | EP2195853B1 (ja) |
JP (1) | JP2010539727A (ja) |
CN (1) | CN101884116A (ja) |
WO (1) | WO2009128678A2 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014039018A (ja) * | 2012-08-13 | 2014-02-27 | Lg Electronics Inc | 太陽電池 |
JP2014524153A (ja) * | 2011-07-28 | 2014-09-18 | ハンファ キュー セルズ ゲーエムベーハー | 太陽電池およびそれを作製する方法 |
JPWO2013157090A1 (ja) * | 2012-04-18 | 2015-12-21 | 株式会社日立製作所 | 太陽電池およびその製造方法 |
KR101776874B1 (ko) * | 2011-12-21 | 2017-09-08 | 엘지전자 주식회사 | 태양 전지 |
KR20180079986A (ko) * | 2017-01-03 | 2018-07-11 | 엘지전자 주식회사 | 태양 전지 |
JPWO2018173125A1 (ja) * | 2017-03-21 | 2019-06-27 | 三菱電機株式会社 | 太陽電池セルおよび太陽電池モジュール |
JP7044938B1 (ja) | 2020-12-29 | 2022-03-30 | ジョジアン ジンコ ソーラー カンパニー リミテッド | 太陽電池及びその製造方法、光起電力モジュール |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8399331B2 (en) | 2007-10-06 | 2013-03-19 | Solexel | Laser processing for high-efficiency thin crystalline silicon solar cell fabrication |
US8193076B2 (en) | 2006-10-09 | 2012-06-05 | Solexel, Inc. | Method for releasing a thin semiconductor substrate from a reusable template |
CN102131950B (zh) * | 2008-06-19 | 2014-05-28 | 实用光有限公司 | 光感应图案 |
KR100984701B1 (ko) * | 2008-08-01 | 2010-10-01 | 엘지전자 주식회사 | 태양 전지의 제조 방법 |
US8652872B2 (en) * | 2008-10-12 | 2014-02-18 | Utilight Ltd. | Solar cells and method of manufacturing thereof |
WO2010057060A2 (en) | 2008-11-13 | 2010-05-20 | Solexel, Inc. | Methods and systems for manufacturing thin-film solar cells |
US9076642B2 (en) | 2009-01-15 | 2015-07-07 | Solexel, Inc. | High-Throughput batch porous silicon manufacturing equipment design and processing methods |
US8906218B2 (en) | 2010-05-05 | 2014-12-09 | Solexel, Inc. | Apparatus and methods for uniformly forming porous semiconductor on a substrate |
US9318644B2 (en) | 2009-05-05 | 2016-04-19 | Solexel, Inc. | Ion implantation and annealing for thin film crystalline solar cells |
GB2471732A (en) * | 2009-06-22 | 2011-01-12 | Rec Solar As | Back surface passivation solar cell |
US20110126877A1 (en) * | 2009-11-27 | 2011-06-02 | Jinah Kim | Solar cell |
US8324015B2 (en) * | 2009-12-01 | 2012-12-04 | Sunpower Corporation | Solar cell contact formation using laser ablation |
DE102009056594A1 (de) * | 2009-12-04 | 2011-06-09 | Q-Cells Se | Antireflexionsbeschichtung sowie Solarzelle und Solarmodul |
WO2011100647A2 (en) | 2010-02-12 | 2011-08-18 | Solexel, Inc. | Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing |
US20110272024A1 (en) * | 2010-04-13 | 2011-11-10 | Applied Materials, Inc. | MULTI-LAYER SiN FOR FUNCTIONAL AND OPTICAL GRADED ARC LAYERS ON CRYSTALLINE SOLAR CELLS |
EP2561558A4 (en) * | 2010-04-23 | 2014-04-16 | Solexel Inc | PASSIVATION METHODS AND APPARATUS FOR OBTAINING ULTRA-SLOW SURFACE RECOMBINATION SPEEDS FOR HIGH-EFFICIENCY SOLAR CELLS |
US20110272008A1 (en) * | 2010-05-07 | 2011-11-10 | Applied Materials, Inc. | Oxide nitride stack for backside reflector of solar cell |
US9991407B1 (en) * | 2010-06-22 | 2018-06-05 | Banpil Photonics Inc. | Process for creating high efficiency photovoltaic cells |
CN101916795A (zh) * | 2010-07-05 | 2010-12-15 | 晶澳太阳能有限公司 | 一种晶体硅太阳电池背面钝化的方法 |
JP5477220B2 (ja) * | 2010-08-05 | 2014-04-23 | 信越化学工業株式会社 | 太陽電池及びその製造方法 |
US10121915B2 (en) | 2010-08-27 | 2018-11-06 | Lg Electronics Inc. | Solar cell and manufacturing method thereof |
US20130139881A1 (en) * | 2010-10-20 | 2013-06-06 | Mitsubishi Electric Corporation | Photovoltaic device and manufacturing method thereof |
DE102010060339A1 (de) * | 2010-11-04 | 2012-05-10 | Q-Cells Se | Solarzelle und Solarzellenherstellungsverfahren |
CN102610662A (zh) * | 2011-01-25 | 2012-07-25 | 东方电气集团(宜兴)迈吉太阳能科技有限公司 | 单晶硅太阳能电池背面用叠层复合钝化膜 |
CN102420194B (zh) * | 2011-04-29 | 2014-06-04 | 上海华力微电子有限公司 | 集成电路钝化层及其制造方法 |
US9748414B2 (en) | 2011-05-20 | 2017-08-29 | Arthur R. Zingher | Self-activated front surface bias for a solar cell |
KR101738000B1 (ko) * | 2011-06-20 | 2017-05-19 | 엘지전자 주식회사 | 태양 전지 및 그 제조 방법 |
CN103022166A (zh) * | 2011-09-28 | 2013-04-03 | 杭州赛昂电力有限公司 | 以覆铜铝线为背极的太阳能电池及其生产工艺 |
KR101860919B1 (ko) | 2011-12-16 | 2018-06-29 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
TWI470816B (zh) * | 2011-12-28 | 2015-01-21 | Au Optronics Corp | 太陽能電池 |
DE102012214253A1 (de) * | 2012-08-10 | 2014-06-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Laserbasiertes Verfahren und Bearbeitungstisch zur Metallisierung der Rückseite eines Halbleiterbauelements |
DE102012016298A1 (de) * | 2012-08-16 | 2014-05-15 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Halbleiterbauelement mit einer Passivierungsschicht aus hydriertem Aluminiumnitrid sowie Verfahren zur Oberflächenpassivierung von Halbleiterbauelementen |
CN102916058A (zh) * | 2012-11-07 | 2013-02-06 | 江苏嘉盛光伏科技有限公司 | 多晶硅太阳能电池用叠层减折射膜 |
CN103022248B (zh) * | 2012-11-27 | 2015-05-06 | 东方日升新能源股份有限公司 | 三层复合结构减反射膜的光伏电池的复合镀膜方法 |
CN102969367A (zh) * | 2012-12-12 | 2013-03-13 | 泰通(泰州)工业有限公司 | 一种晶体硅太阳能电池p型硅背面钝化膜及其制备方法 |
WO2014179368A1 (en) * | 2013-04-29 | 2014-11-06 | Solexel, Inc. | Damage free laser patterning of transparent layers for forming doped regions on a solar cell substrate |
CN104091838B (zh) * | 2014-06-18 | 2017-04-26 | 镇江大全太阳能有限公司 | 高转化效率抗pid晶体硅太阳能电池及其制造方法 |
CN104576770A (zh) * | 2014-12-31 | 2015-04-29 | 江苏顺风光电科技有限公司 | 一种晶硅高效黑电池的钝化减反射多层膜 |
TW201635561A (zh) * | 2015-03-26 | 2016-10-01 | 新日光能源科技股份有限公司 | 具有背面多層抗反射鍍膜的太陽能電池 |
TWI563620B (en) * | 2015-05-12 | 2016-12-21 | Taiwan Green Point Entpr Co | Electronic device and method for making the same |
CN105185851A (zh) * | 2015-09-06 | 2015-12-23 | 浙江晶科能源有限公司 | 一种背面钝化太阳能电池及其制备方法 |
CN106558626A (zh) * | 2016-11-25 | 2017-04-05 | 罗雷 | 晶体硅太阳能电池及其制造方法 |
CN106856214A (zh) * | 2016-12-30 | 2017-06-16 | 浙江晶科能源有限公司 | 一种太阳能电池制备方法 |
CN107706246A (zh) * | 2017-08-21 | 2018-02-16 | 无锡嘉瑞光伏有限公司 | 一种背面浆料直接烧穿的背钝化太阳能电池及其制造方法 |
US20190348548A1 (en) | 2018-05-09 | 2019-11-14 | International Business Machines Corporation | Solar cell with reduced surface recombination |
CN110112243A (zh) * | 2019-06-02 | 2019-08-09 | 苏州腾晖光伏技术有限公司 | 太阳能电池的背面钝化结构及其制备方法 |
CN112531035B (zh) * | 2020-12-03 | 2022-04-29 | 通威太阳能(成都)有限公司 | 太阳电池及其制备方法、太阳电池背面多层复合钝化膜 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5559784A (en) * | 1978-10-23 | 1980-05-06 | Hezel Rudolf | Soalr battery |
JPS63501668A (ja) * | 1985-10-11 | 1988-06-23 | ヌ−ケン・ゲ−・エム・ベ−・ハ− | 太陽電池 |
JPS6419760A (en) * | 1987-07-15 | 1989-01-23 | Fuji Electric Co Ltd | Semiconductor integrated circuit device |
JPH02143569A (ja) * | 1988-11-25 | 1990-06-01 | Agency Of Ind Science & Technol | 光電変換素子 |
WO2006097303A1 (en) * | 2005-03-16 | 2006-09-21 | Interuniversitair Microelektronica Centrum Vzw | Photovoltaic cell with thick silicon oxide and silicon nitride passivation fabrication |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4253881A (en) * | 1978-10-23 | 1981-03-03 | Rudolf Hezel | Solar cells composed of semiconductive materials |
JPS60208813A (ja) * | 1984-04-02 | 1985-10-21 | Mitsubishi Electric Corp | 光電変換装置とその製造方法 |
US5010040A (en) * | 1988-12-30 | 1991-04-23 | Mobil Solar Energy Corporation | Method of fabricating solar cells |
US5356488A (en) * | 1991-12-27 | 1994-10-18 | Rudolf Hezel | Solar cell and method for its manufacture |
US6150190A (en) * | 1999-05-27 | 2000-11-21 | Motorola Inc. | Method of formation of buried mirror semiconductive device |
US6524880B2 (en) * | 2001-04-23 | 2003-02-25 | Samsung Sdi Co., Ltd. | Solar cell and method for fabricating the same |
JP4118187B2 (ja) * | 2003-05-09 | 2008-07-16 | 信越半導体株式会社 | 太陽電池の製造方法 |
JP2006270021A (ja) * | 2005-02-28 | 2006-10-05 | Fuji Photo Film Co Ltd | 積層型光電変換素子 |
US20070023081A1 (en) * | 2005-07-28 | 2007-02-01 | General Electric Company | Compositionally-graded photovoltaic device and fabrication method, and related articles |
CN101840962A (zh) * | 2005-11-08 | 2010-09-22 | Lg电子株式会社 | 高效太阳能电池及其制备方法 |
US20070137699A1 (en) * | 2005-12-16 | 2007-06-21 | General Electric Company | Solar cell and method for fabricating solar cell |
DE102006046726A1 (de) * | 2006-10-02 | 2008-04-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Solarzelle mit strukturierter Rückseitenpassivierungsschicht aus SIOx und SINx sowie Verfahren zur Herstellung |
EP2149155B9 (en) * | 2007-05-07 | 2012-04-25 | Georgia Tech Research Corporation | Formation of high quality back contact with screen-printed local back surface field |
JP2009231549A (ja) * | 2008-03-24 | 2009-10-08 | Toyoda Gosei Co Ltd | 窒化物系半導体発光素子 |
-
2009
- 2009-04-17 JP JP2010525773A patent/JP2010539727A/ja active Pending
- 2009-04-17 US US12/425,749 patent/US20090260685A1/en not_active Abandoned
- 2009-04-17 EP EP09732070.9A patent/EP2195853B1/en active Active
- 2009-04-17 CN CN2009801012198A patent/CN101884116A/zh active Pending
- 2009-04-17 WO PCT/KR2009/002020 patent/WO2009128678A2/en active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5559784A (en) * | 1978-10-23 | 1980-05-06 | Hezel Rudolf | Soalr battery |
JPS63501668A (ja) * | 1985-10-11 | 1988-06-23 | ヌ−ケン・ゲ−・エム・ベ−・ハ− | 太陽電池 |
JPS6419760A (en) * | 1987-07-15 | 1989-01-23 | Fuji Electric Co Ltd | Semiconductor integrated circuit device |
JPH02143569A (ja) * | 1988-11-25 | 1990-06-01 | Agency Of Ind Science & Technol | 光電変換素子 |
WO2006097303A1 (en) * | 2005-03-16 | 2006-09-21 | Interuniversitair Microelektronica Centrum Vzw | Photovoltaic cell with thick silicon oxide and silicon nitride passivation fabrication |
Non-Patent Citations (1)
Title |
---|
JPN6012067548; J. Dupuis et al.: 'Impact of PECVD SiON stoichiometry and post-annealing on the silicon surface passivation' Thin Solid Films vol. 516, 20080122, pp. 6954-6958 * |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014524153A (ja) * | 2011-07-28 | 2014-09-18 | ハンファ キュー セルズ ゲーエムベーハー | 太陽電池およびそれを作製する方法 |
US10256353B2 (en) | 2011-12-21 | 2019-04-09 | Lg Electronics Inc. | Solar cell |
US10903375B2 (en) | 2011-12-21 | 2021-01-26 | Lg Electronics Inc. | Solar cell |
KR101776874B1 (ko) * | 2011-12-21 | 2017-09-08 | 엘지전자 주식회사 | 태양 전지 |
JPWO2013157090A1 (ja) * | 2012-04-18 | 2015-12-21 | 株式会社日立製作所 | 太陽電池およびその製造方法 |
US9349884B2 (en) | 2012-08-13 | 2016-05-24 | Lg Electronics Inc. | Solar cell |
JP2014039018A (ja) * | 2012-08-13 | 2014-02-27 | Lg Electronics Inc | 太陽電池 |
KR20180079986A (ko) * | 2017-01-03 | 2018-07-11 | 엘지전자 주식회사 | 태양 전지 |
KR102624381B1 (ko) | 2017-01-03 | 2024-01-15 | 상라오 신위안 웨동 테크놀러지 디벨롭먼트 컴퍼니, 리미티드 | 태양 전지 |
JPWO2018173125A1 (ja) * | 2017-03-21 | 2019-06-27 | 三菱電機株式会社 | 太陽電池セルおよび太陽電池モジュール |
JP7044938B1 (ja) | 2020-12-29 | 2022-03-30 | ジョジアン ジンコ ソーラー カンパニー リミテッド | 太陽電池及びその製造方法、光起電力モジュール |
JP2022104794A (ja) * | 2020-12-29 | 2022-07-11 | ジョジアン ジンコ ソーラー カンパニー リミテッド | 太陽電池及びその製造方法、光起電力モジュール |
US11437529B2 (en) | 2020-12-29 | 2022-09-06 | Zhejiang Jinko Solar Co., Ltd. | Photovoltaic cell, method for manufacturing same, and photovoltaic module |
US11600731B2 (en) | 2020-12-29 | 2023-03-07 | Zhejiang Jinko Solar Co., Ltd. | Photovoltaic cell, method for manufacturing same, and photovoltaic module |
Also Published As
Publication number | Publication date |
---|---|
EP2195853A2 (en) | 2010-06-16 |
EP2195853B1 (en) | 2015-12-16 |
US20090260685A1 (en) | 2009-10-22 |
EP2195853A4 (en) | 2012-10-17 |
CN101884116A (zh) | 2010-11-10 |
WO2009128678A3 (en) | 2010-01-14 |
WO2009128678A2 (en) | 2009-10-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2010539727A (ja) | 太陽電池及びその製造方法 | |
US8658884B2 (en) | Solar cell including backside reflection layer composed of high-K dielectrics | |
JP5409007B2 (ja) | 高効率の太陽電池及びその調製方法 | |
TWI398004B (zh) | 太陽能電池及其製備方法 | |
JP6671888B2 (ja) | 太陽電池及びその製造方法 | |
JP5815776B2 (ja) | 太陽電池 | |
US20110265866A1 (en) | Solar cell and method for manufacturing the same | |
JP2012525703A (ja) | 裏面反射体を備える両面型太陽電池 | |
JP6392385B2 (ja) | 太陽電池の製造方法 | |
JP2018535554A (ja) | 電荷担体の選択的接合を介して相互接続される複数の吸収体を備えた太陽電池 | |
US20230071754A1 (en) | Solar cell, method for manufacturing the same, and photovoltaic module | |
JP2019004159A (ja) | 太陽電池の製造方法 | |
KR100994924B1 (ko) | 태양전지 및 그 제조방법 | |
US20200343391A1 (en) | Solar cell and manufacturing method thereof | |
KR20100096746A (ko) | 태양전지 및 그의 제조방법 | |
US20050247338A1 (en) | Photovoltaic conversion device, optical power generator and manufacturing method of photovoltaic conversion device | |
CN109041583B (zh) | 太阳能电池元件以及太阳能电池模块 | |
US20140174517A1 (en) | Solar cell and method of manufacturing the same | |
KR100995654B1 (ko) | 태양전지 및 그 제조방법 | |
KR102005444B1 (ko) | 태양 전지 및 태양 전지 제조 방법 | |
CN117276361B (zh) | 太阳能电池及其制作方法、光伏组件及光伏系统 | |
KR101346896B1 (ko) | Ibc형 태양전지의 제조방법 및 ibc형 태양전지 | |
KR101612959B1 (ko) | 태양 전지 및 그 제조 방법 | |
KR102118905B1 (ko) | 터널 산화막을 포함하는 태양 전지 및 이의 제조 방법 | |
TWI603495B (zh) | 太陽能電池結構及其製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120223 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120306 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120606 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130108 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130404 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20131217 |