JP2010511905A - プレパターンされた基板を用いた高解像度インクジェット印刷方法及びこの方法により製造された導電性基板 - Google Patents
プレパターンされた基板を用いた高解像度インクジェット印刷方法及びこの方法により製造された導電性基板 Download PDFInfo
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Abstract
【選択図】図7
Description
110:反射防止層
120:フォトレジスト層
100':プレパターン基板
121、121':谷
122、122':リッジ
200:レーザー干渉リソグラフィー装置
300:インクジェットヘッド
400:吐出インク液滴
400':弾着インク液滴
Claims (13)
- 導電性インクを吐出させるインクジェットヘッドと、上記導電性インクが図化される基板を支持する駆動ステージを備えるインクジェット印刷装置を用いて、上記基板上に微細線幅パターンを図化するインクジェット印刷方法において、
(A)微細線幅パターンを形成する基板の表面に繰り返された帯状のストライプパターンを形成してプレパターン(pre‐pattern)された基板を用意する段階;
(B)上記基板をインクジェット印刷装置にローディングする段階;及び
(C)上記基板の上記ストライプパターンが形成された領域に導電性インクを噴射して微細線幅パターンを図化する段階;を含み、
上記ストライプパターンの等間隔(d)と図化された微細線幅パターンの微細線幅(D)はd<<Dの関係式を満足し、上記基板上に図化される導電性インクは上記ストライプパターンが形成された領域内で異方性流動されることを特徴とするプレパターンされた基板を用いた高解像度インクジェット印刷方法。 - 上記(A)段階のストライプパターンを形成する段階は、
(A1)上記基板上に反射防止層を形成する段階;
(A2)上記反射防止層の上にフォトレジスト層を形成する段階;
(A3)上記フォトレジスト層が上記反射防止層を周期的に露出させる繰り返された帯状のフォトレジストパターンを持つようにレーザー干渉リソグラフィー処理する段階;及び
(A4)上記フォトレジストパターンが形成された上記基板を現像及びエッチングして、上記基板上にストライプパターンを形成する段階;を含むことを特徴とする請求項1に記載のプレパターンされた基板を用いた高解像度インクジェット印刷方法。 - 上記ストライプパターンは、ポジティブまたはネガティブタイプであることを特徴とする請求項1または請求項2に記載のプレパターンされた基板を用いた高解像度インクジェット印刷方法。
- 上記ストライプパターンは、谷とリッジとからなる凹凸形状に形成されることを特徴とする請求項1または請求項2に記載のプレパターンされた基板を用いた高解像度インクジェット印刷方法。
- 上記導電性インクは、上記谷に沿って異方性流動し、上記リッジによって拡散防止されることを特徴とする請求項4に記載のプレパターンされた基板を用いた高解像度インクジェット印刷方法。
- 上記ストライプパターンは、インプリンティングまたはロールプリンティング工程によって形成されることを特徴とする請求項1に記載のプレパターンされた基板を用いた高解像度インクジェット印刷方法。
- 基板上に微細線幅パターンが図化された導電性基板において、
繰り返された帯状のストライプパターンを持つ基板;及び
上記ストライプパターンが形成された領域内で異方性流動して微細線幅パターンを形成した導電性インク;を含み、
上記ストライプパターンの等間隔(d)と微細線幅パターンの微細線(D)はd<<Dの関係式を満足することを特徴とする導電性基板。 - 上記ストライプパターンは、リソグラフィー、インプリンティングまたはロールプリンティング工程によって形成されることを特徴とする 請求項7に記載の導電性基板。
- 上記リースグラフィー工程は、レーザー干渉リソグラフィー工程であることを特徴とする請求項8に記載の導電性基板。
- 上記ストライプパターンは、ポジティブまたはネガティブタイプであることを特徴とする請求項7に記載の導電性基板。
- 上記ストライプパターンは、谷とリッジとからなる凹凸構造であることを特徴とする請求項7に記載の導電性基板。
- 上記導電性インクは、上記谷に沿って異方性流動し、上記リッジによって拡散防止されることを特徴とする請求項11に記載の導電性基板。
- 上記微細線幅パターンは、カラーフィルターパターンまたは電極配線パターンであることを特徴とする請求項7に記載の導電性基板。
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Application Number | Priority Date | Filing Date | Title |
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KR10-2006-0122217 | 2006-12-05 | ||
KR1020060122217A KR100993056B1 (ko) | 2006-12-05 | 2006-12-05 | 프리 패턴된 기판을 이용한 고해상도 잉크젯 인쇄 방법 및이 방법에 의해 제조된 도전성 기판 |
PCT/KR2007/006275 WO2008069565A1 (en) | 2006-12-05 | 2007-12-05 | Method for high resolution ink-jet print using pre-patterned substrate and conductive substrate manufactured using the same |
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JP2010511905A true JP2010511905A (ja) | 2010-04-15 |
JP5230641B2 JP5230641B2 (ja) | 2013-07-10 |
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JP2009540150A Active JP5230641B2 (ja) | 2006-12-05 | 2007-12-05 | プレパターンされた基板を用いた高解像度インクジェット印刷方法 |
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US (2) | US8113648B2 (ja) |
JP (1) | JP5230641B2 (ja) |
KR (1) | KR100993056B1 (ja) |
WO (1) | WO2008069565A1 (ja) |
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