JP2010283108A5 - - Google Patents

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Publication number
JP2010283108A5
JP2010283108A5 JP2009134818A JP2009134818A JP2010283108A5 JP 2010283108 A5 JP2010283108 A5 JP 2010283108A5 JP 2009134818 A JP2009134818 A JP 2009134818A JP 2009134818 A JP2009134818 A JP 2009134818A JP 2010283108 A5 JP2010283108 A5 JP 2010283108A5
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JP
Japan
Prior art keywords
substrate
back surface
holding
imprint apparatus
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009134818A
Other languages
English (en)
Japanese (ja)
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JP5328495B2 (ja
JP2010283108A (ja
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Publication date
Application filed filed Critical
Priority to JP2009134818A priority Critical patent/JP5328495B2/ja
Priority claimed from JP2009134818A external-priority patent/JP5328495B2/ja
Publication of JP2010283108A publication Critical patent/JP2010283108A/ja
Publication of JP2010283108A5 publication Critical patent/JP2010283108A5/ja
Application granted granted Critical
Publication of JP5328495B2 publication Critical patent/JP5328495B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009134818A 2009-06-04 2009-06-04 インプリント装置及び物品の製造方法 Expired - Fee Related JP5328495B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009134818A JP5328495B2 (ja) 2009-06-04 2009-06-04 インプリント装置及び物品の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009134818A JP5328495B2 (ja) 2009-06-04 2009-06-04 インプリント装置及び物品の製造方法

Publications (3)

Publication Number Publication Date
JP2010283108A JP2010283108A (ja) 2010-12-16
JP2010283108A5 true JP2010283108A5 (enExample) 2012-07-19
JP5328495B2 JP5328495B2 (ja) 2013-10-30

Family

ID=43539609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009134818A Expired - Fee Related JP5328495B2 (ja) 2009-06-04 2009-06-04 インプリント装置及び物品の製造方法

Country Status (1)

Country Link
JP (1) JP5328495B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011077882A1 (ja) * 2009-12-25 2011-06-30 株式会社日立ハイテクノロジーズ 両面インプリント装置
JP5438578B2 (ja) 2010-03-29 2014-03-12 富士フイルム株式会社 微細凹凸パターンの形成方法及び形成装置
US20110305787A1 (en) * 2010-06-11 2011-12-15 Satoshi Ishii Stamper for transfer of microscopic structure and transfer apparatus of microscopic structure
JP6497938B2 (ja) * 2015-01-05 2019-04-10 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法。

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0379314A (ja) * 1989-08-22 1991-04-04 Omron Corp 光学部品の製造方法および光学部品製造用金型
JP3456290B2 (ja) * 1995-01-31 2003-10-14 オムロン株式会社 光学素子の製造方法及び光学素子製造装置
JPH09219041A (ja) * 1996-02-13 1997-08-19 Sony Corp 光学記録媒体の製造方法とこれに用いる製造装置
JP4515625B2 (ja) * 2000-12-08 2010-08-04 大日本印刷株式会社 レンズシートの剥離方法及び剥離装置
WO2007007487A1 (ja) * 2005-07-07 2007-01-18 Amano Enzyme Inc. ビール又はビール様飲料の製造方法
JP2007083626A (ja) * 2005-09-22 2007-04-05 Ricoh Co Ltd 微細構造転写装置
JP4987012B2 (ja) * 2005-12-08 2012-07-25 モレキュラー・インプリンツ・インコーポレーテッド 基板の両面パターニングする方法及びシステム
US20090273119A1 (en) * 2006-03-10 2009-11-05 Tetsuya Imai Imprint Method and Imprint Apparatus
JP5088369B2 (ja) * 2007-05-18 2012-12-05 コニカミノルタホールディングス株式会社 インプリント方法
JP2010269580A (ja) * 2009-05-25 2010-12-02 Canon Inc インプリント装置及び物品の製造方法

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