JP2010283108A5

JP2010283108A5 -

Info

Publication number: JP2010283108A5
Application number: JP2009134818A
Authority: JP
Filing date: 2009-06-04
Publication date: 2012-07-19
Anticipated expiration: 2029-06-04

Description

本発明の一実施形態のインプリント装置は、パターンが形成された型を基板上の被転写部材に接触させて前記パターンを前記基板に形成するインプリント装置であって、前記型を前記被転写部材に接触させるときに前記基板の裏面の全域を保持する第１の保持手段と、前記型と前記被転写部材とを引き離す離型手段とを備え、前記離型手段は、前記型と前記被転写部材とを引き離すときに前記基板の裏面を保持する第２の保持手段を備え、前記第２の保持手段は、前記基板の裏面の外周端部に当接する凸状の当接手段を備えることを特徴とする。
An imprint apparatus according to an embodiment of the present invention is an imprint apparatus that forms a pattern on a substrate by bringing a pattern-formed mold into contact with a member to be transferred on the substrate. comprising a first holding means for holding the entire area of the back surface of the substrate when contacting the member, and a releasing means for separating the said transfer target member before and SL-type, said release means, said said mold Second holding means for holding the back surface of the substrate when being separated from the member to be transferred is provided, and the second holding means is provided with convex contact means for contacting the outer peripheral edge of the back surface of the substrate. It is characterized by that.

Claims

An imprint apparatus that forms a pattern on the substrate by bringing a pattern-formed mold into contact with a transfer member on the substrate,
First holding means for holding the entire back surface of the substrate when the mold is brought into contact with the transferred member;
Wherein the front Symbol type and a release means for separating a target transfer member,
The mold release means includes second holding means for holding the back surface of the substrate when the mold and the transferred member are separated from each other.
The imprint apparatus, wherein the second holding unit includes a convex contact unit that contacts an outer peripheral end of the back surface of the substrate.

The contact means is provided so as to contact the entire outer peripheral end portion of the back surface of the substrate,
The second holding means includes a space formed between the back surface of the substrate and the second holding means when the contact means contacts the entire outer peripheral end portion of the back surface of the substrate, and the second holding means. The imprint apparatus according to claim 1, further comprising communication means for communicating with a space in which the holding means is provided.

The substrate is circular;
3. The imprint apparatus according to claim 2, wherein a cross section of the abutment unit included in the second holding unit when cut by a plane parallel to the back surface of the substrate is an annular shape.

The imprint apparatus according to claim 1, wherein the abutting unit is provided so as to abut a part of an outer peripheral end portion of the back surface of the substrate.

The imprint apparatus according to claim 1, wherein the contact means is a flexible member.

Forming the pattern on the substrate using the imprint apparatus according to claim 1;
Processing the substrate on which the pattern is formed in the step;
A method for producing an article comprising: