JP2010281573A - 圧力センサー - Google Patents

圧力センサー Download PDF

Info

Publication number
JP2010281573A
JP2010281573A JP2009132695A JP2009132695A JP2010281573A JP 2010281573 A JP2010281573 A JP 2010281573A JP 2009132695 A JP2009132695 A JP 2009132695A JP 2009132695 A JP2009132695 A JP 2009132695A JP 2010281573 A JP2010281573 A JP 2010281573A
Authority
JP
Japan
Prior art keywords
pressure sensor
pressure
sensor element
diaphragm
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009132695A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010281573A5 (enrdf_load_stackoverflow
Inventor
Yoshikuni Saito
佳邦 齋藤
Toshinobu Sakurai
俊信 櫻井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2009132695A priority Critical patent/JP2010281573A/ja
Publication of JP2010281573A publication Critical patent/JP2010281573A/ja
Publication of JP2010281573A5 publication Critical patent/JP2010281573A5/ja
Withdrawn legal-status Critical Current

Links

Images

Landscapes

  • Measuring Fluid Pressure (AREA)
JP2009132695A 2009-06-02 2009-06-02 圧力センサー Withdrawn JP2010281573A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009132695A JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009132695A JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

Publications (2)

Publication Number Publication Date
JP2010281573A true JP2010281573A (ja) 2010-12-16
JP2010281573A5 JP2010281573A5 (enrdf_load_stackoverflow) 2012-05-31

Family

ID=43538456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009132695A Withdrawn JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

Country Status (1)

Country Link
JP (1) JP2010281573A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012132806A (ja) * 2010-12-22 2012-07-12 Yokogawa Electric Corp 振動式絶対圧トランスデューサ
CN114858326A (zh) * 2021-02-04 2022-08-05 中国航发商用航空发动机有限责任公司 航空发动机机匣轴向力测量装置及航空发动机

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005249795A (ja) * 2004-03-04 2005-09-15 Robert Bosch Gmbh 半導体チップを実装する方法および相応の半導体チップ配置構造
JP2007333452A (ja) * 2006-06-13 2007-12-27 Epson Toyocom Corp 圧力センサ用感圧素子、及び圧力センサ
JP2008241287A (ja) * 2007-03-26 2008-10-09 Epson Toyocom Corp 圧力センサ用の感圧素子、及びその製造方法
JP2009092403A (ja) * 2007-10-04 2009-04-30 Epson Toyocom Corp 圧力センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005249795A (ja) * 2004-03-04 2005-09-15 Robert Bosch Gmbh 半導体チップを実装する方法および相応の半導体チップ配置構造
JP2007333452A (ja) * 2006-06-13 2007-12-27 Epson Toyocom Corp 圧力センサ用感圧素子、及び圧力センサ
JP2008241287A (ja) * 2007-03-26 2008-10-09 Epson Toyocom Corp 圧力センサ用の感圧素子、及びその製造方法
JP2009092403A (ja) * 2007-10-04 2009-04-30 Epson Toyocom Corp 圧力センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012132806A (ja) * 2010-12-22 2012-07-12 Yokogawa Electric Corp 振動式絶対圧トランスデューサ
CN114858326A (zh) * 2021-02-04 2022-08-05 中国航发商用航空发动机有限责任公司 航空发动机机匣轴向力测量装置及航空发动机

Similar Documents

Publication Publication Date Title
CN107445133B (zh) 对热机械封装应力具有低灵敏度的小型负荷传感器装置
US8297124B2 (en) Pressure sensor
JP5305028B2 (ja) 圧力センサー
CN102901493B (zh) 振动器件以及电子设备
JP4754817B2 (ja) 半導体加速度センサ
JP2011221007A (ja) 圧力検出装置
US8850896B2 (en) Physical quantity detector
JP2008232886A (ja) 圧力センサ
CN102455232A (zh) 压力传感器
JP2011145243A (ja) 加速度センサー、及び加速度検出装置
JP2005140720A (ja) 加速度センサ
JP4332859B2 (ja) 圧力センサ
JP2010281573A (ja) 圧力センサー
WO2012098901A1 (ja) 加速度センサ
JP2008170203A (ja) 加速度検知ユニット、及び加速度センサ
JP2008261750A (ja) 圧力センサおよび圧力センサ用ダイヤフラム
CN103363967A (zh) 振动装置
JP5838694B2 (ja) 物理量検出器、物理量検出デバイス及び電子機器
JP2008076075A (ja) 絶対圧センサ
JP5208466B2 (ja) 音叉型振動ジャイロ
RU2753475C1 (ru) Микромеханический акселерометр
JP2013217719A (ja) 圧力センサー及び電子機器
JP5939037B2 (ja) 圧力センサー素子および電子機器
JP2013246121A (ja) 圧力センサー素子およびその製造方法、圧力センサー、並びに電子機器
JP5321812B2 (ja) 物理量センサーおよび物理量測定装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120406

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120406

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130131

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130206

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20130405