JP2010281573A5 - - Google Patents

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Publication number
JP2010281573A5
JP2010281573A5 JP2009132695A JP2009132695A JP2010281573A5 JP 2010281573 A5 JP2010281573 A5 JP 2010281573A5 JP 2009132695 A JP2009132695 A JP 2009132695A JP 2009132695 A JP2009132695 A JP 2009132695A JP 2010281573 A5 JP2010281573 A5 JP 2010281573A5
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JP
Japan
Prior art keywords
pressure sensor
pressure
sensor according
base
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009132695A
Other languages
English (en)
Japanese (ja)
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JP2010281573A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009132695A priority Critical patent/JP2010281573A/ja
Priority claimed from JP2009132695A external-priority patent/JP2010281573A/ja
Publication of JP2010281573A publication Critical patent/JP2010281573A/ja
Publication of JP2010281573A5 publication Critical patent/JP2010281573A5/ja
Withdrawn legal-status Critical Current

Links

JP2009132695A 2009-06-02 2009-06-02 圧力センサー Withdrawn JP2010281573A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009132695A JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009132695A JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

Publications (2)

Publication Number Publication Date
JP2010281573A JP2010281573A (ja) 2010-12-16
JP2010281573A5 true JP2010281573A5 (enrdf_load_stackoverflow) 2012-05-31

Family

ID=43538456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009132695A Withdrawn JP2010281573A (ja) 2009-06-02 2009-06-02 圧力センサー

Country Status (1)

Country Link
JP (1) JP2010281573A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5656070B2 (ja) * 2010-12-22 2015-01-21 横河電機株式会社 振動式絶対圧トランスデューサ
CN114858326B (zh) * 2021-02-04 2024-11-26 中国航发商用航空发动机有限责任公司 航空发动机机匣轴向力测量装置及航空发动机

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004011203B4 (de) * 2004-03-04 2010-09-16 Robert Bosch Gmbh Verfahren zum Montieren von Halbleiterchips und entsprechende Halbleiterchipanordnung
JP2007333452A (ja) * 2006-06-13 2007-12-27 Epson Toyocom Corp 圧力センサ用感圧素子、及び圧力センサ
JP4888715B2 (ja) * 2007-03-26 2012-02-29 セイコーエプソン株式会社 圧力センサ用の感圧素子、及びその製造方法
JP4984068B2 (ja) * 2007-10-04 2012-07-25 セイコーエプソン株式会社 圧力センサ

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