JP2010272702A - Anisotropic conductive material sticking device and method - Google Patents

Anisotropic conductive material sticking device and method Download PDF

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JP2010272702A
JP2010272702A JP2009123487A JP2009123487A JP2010272702A JP 2010272702 A JP2010272702 A JP 2010272702A JP 2009123487 A JP2009123487 A JP 2009123487A JP 2009123487 A JP2009123487 A JP 2009123487A JP 2010272702 A JP2010272702 A JP 2010272702A
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tape
sticking
conductive material
anisotropic conductive
substrate
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Hiroyuki Murata
裕幸 村田
Soichiro Mitsuwaka
壮一郎 満若
Ryoichiro Katano
良一郎 片野
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Panasonic Corp
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Panasonic Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To stick an anisotropic conductive material (ACF) on a sticking part of a substrate in a short tact with a low-costs device configuration. <P>SOLUTION: An ACF sticking device sticks the ACF on the sticking part 2a by pressing an ACF tape 5 by a sticking means 21, and peels a separator tape 5b from the stuck ACF by a peeling means 22. In the ACF sticking device, the sticking means 21, the peeling means 22 and a chuck means 23 for the separator tape 5b are arranged at a moving body 20 capable of moving along a side edge of the substrate 2, the ACF is stuck on the sticking part 2a by the sticking means 21 and the separator tape 5b is peeled by the peeling means 22 during movement of the moving body 20 in one direction, and the separator tape 5b is gripped by the chuck means 23 during return movement of the moving body 20 in the other direction to feed the ACF tape 5, thereby completing the sticking process in the process of moving the moving body 20 forward and backward once. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、セパレータテープに異方性導電材を積層した積層テープを基板の側縁部に配設された貼付部位に押圧し、異方性導電材を貼付部位に貼り付ける異方性導電材貼付装置及び貼付方法に関するものである。   The present invention relates to an anisotropic conductive material in which a laminated tape obtained by laminating an anisotropic conductive material on a separator tape is pressed against an application site disposed on a side edge of a substrate, and the anisotropic conductive material is applied to the application site. The present invention relates to a pasting device and a pasting method.

液晶パネルやPDP(Plasma Display Panel)に代表される表示パネルなどにおける基板に部品を実装する方法として、基板の側縁部に配設された電極部などの貼付部位に異方性導電材(以下、ACFと記すことがある)を貼り付け、そのACFの上に、例えばTCP(Tape Carrier Package)、IC、薄型LSIパッケージ部品、FPC(Flexible Printed Circuits)、COF(Chip On Film)等の部品を温度と圧力を加えて仮圧着した後、仮圧着より高い温度と圧力を加えて本圧着することで、基板に部品を実装する方法が知られている。このような部品実装方法では、上記のように基板の側縁部の貼付部位にACFを貼り付けるために、セパレータテープにACFを積層した積層テープを使用するACF貼付装置が使用されている。   As a method of mounting components on a substrate in a display panel such as a liquid crystal panel or a PDP (Plasma Display Panel), an anisotropic conductive material (hereinafter referred to as an electrode) disposed on the side edge of the substrate is used. , And may be described as ACF), and a part such as TCP (Tape Carrier Package), IC, thin LSI package component, FPC (Flexible Printed Circuits), COF (Chip On Film), etc. A method is known in which a component is mounted on a substrate by applying a temperature and a pressure to perform temporary pressure bonding and then applying a temperature and pressure higher than those of the temporary pressure bonding to perform main pressure bonding. In such a component mounting method, an ACF sticking apparatus using a laminated tape in which an ACF is laminated on a separator tape is used in order to stick an ACF to a sticking portion of a side edge of a substrate as described above.

そのようなACF貼付装置の構成としては、積層テープが巻回されたリールから積層テープを引き出して下受け部上に載置された基板の側縁部の貼付部位に向けて送給する際に、ACFのみを所定の長さに切断した後、基板の貼付部位の上方位置に送給し、圧着手段にて積層テープを押圧して所定長さに切断されたACFを基板の貼付部位に貼り付け、その後貼り付けたACFからセパレータテープを剥離してセパレータテープテープを回収するとともに、次の積層テープの送給を行うという動作を繰り返すようにしたものが知られている。   As a configuration of such an ACF sticking device, when the laminated tape is pulled out from the reel on which the laminated tape is wound and fed toward the sticking portion of the side edge portion of the substrate placed on the receiving portion, After cutting only the ACF to a predetermined length, the ACF is fed to a position above the pasting portion of the substrate, and the laminated tape is pressed by the pressure bonding means to stick the ACF cut to the predetermined length to the pasting portion of the substrate. Then, the separator tape is peeled off from the attached ACF to collect the separator tape tape, and the operation of feeding the next laminated tape is repeated.

この種のACF貼付装置を、図11を参照して説明すると、ACF貼付装置41は、基板42を位置決め手段(図示せず)にて支持して移動・位置決めし、基板42の側端部を下受け部43にて下方から支持した状態で、テープ供給部44から積層テープ45を供給して基板42の側端部上に配置し、圧着機構部46にて積層テープ45を上方から押圧してACFを基板42に貼り付け、剥離機構部47にて基板42に貼付けられたACFからセパレータテープを剥離し、剥離した積層テープ45のセパレータテープをテープ回収部48にて回収するように構成されている。圧着機構部46は、下方に配置された下受け部43と対向する圧着面49aを下面に有し、積層テープ45の貼付動作を行う圧着ヘッド49と、この圧着ヘッド49を昇降駆動するシリンダ装置などのヘッド昇降装置50を備えている。圧着ヘッド49には、図示しない加熱手段が内蔵されており、圧着ヘッド49の圧着面49aを所定温度に加熱することが可能となっている。   This type of ACF sticking apparatus will be described with reference to FIG. 11. The ACF sticking apparatus 41 moves and positions the substrate 42 supported by positioning means (not shown), and the side end of the substrate 42 is moved. While being supported from below by the lower receiving portion 43, the laminated tape 45 is supplied from the tape supply portion 44 and disposed on the side end portion of the substrate 42, and the laminated tape 45 is pressed from above by the crimping mechanism portion 46. The ACF is attached to the substrate 42, the separator tape is peeled off from the ACF attached to the substrate 42 by the peeling mechanism unit 47, and the separator tape of the peeled laminated tape 45 is collected by the tape collecting unit 48. ing. The pressure-bonding mechanism portion 46 has a pressure-bonding surface 49a facing the lower receiving portion 43 disposed below, and a pressure-bonding head 49 that performs a bonding operation of the laminated tape 45, and a cylinder device that drives the pressure-bonding head 49 up and down. The head lifting device 50 is provided. The crimping head 49 incorporates a heating means (not shown) so that the crimping surface 49a of the crimping head 49 can be heated to a predetermined temperature.

一方、長さの異なる貼付部位に単一の加熱ツールでACFを貼り付けることができるACF貼付装置として、基板を支持テーブルにて水平移動可能に支持し、テープガイドと剥離機構の間に加熱ローラを配設するとともに、この加熱ローラを、ACFを貼り付ける圧着位置と剥離機構との干渉を避ける退避位置との間で位置切替可能とし、加熱ローラを圧着位置に位置させて積層テープを加熱加圧した状態で支持テーブルにて基板を移動させて貼付部位にACFを貼り付け、その後圧着ローラを退避位置に退避させた後剥離機構を移動させてセパレータテープを剥離し、その後、剥離機構を復帰移動させた後積層テープを送給するようにしたものが知られている(例えば、特許文献1参照)。   On the other hand, as an ACF sticking device that can stick ACF to sticking parts of different lengths with a single heating tool, the substrate is supported by a support table so as to be horizontally movable, and a heating roller is provided between the tape guide and the peeling mechanism. The heating roller can be switched between a crimping position where the ACF is applied and a retracting position where interference with the peeling mechanism is avoided. The heating roller is positioned at the crimping position to heat the laminated tape. In a pressed state, the substrate is moved on the support table to attach the ACF to the application site, then the pressure roller is retracted to the retracted position, and then the release mechanism is moved to release the separator tape, and then the release mechanism is restored. There is known one in which a laminated tape is fed after being moved (see, for example, Patent Document 1).

また、ACF貼付装置として、少なくとも貼付部位の長さに相当する距離だけ往復移動可能な移動体に、ACFを貼り付ける貼付位置と上方に退避した位置との間で位置切替可
能な貼付ローラと、セパレータテープを剥離する剥離ローラと、積層テープの送給時にセパレータテープを把持するテープ送りチャックとを配設し、貼付時の移動方向前方位置に剥離時にセパレータテープを把持するチャック手段を配設し、テープ送りチャックにてセパレータテープを把持した状態で移動体を前進移動させてテープ送給を行った後、テープ送りチャックを開放して復帰移動させ、次に移動体を前進移動させて貼付ローラにてACFを貼り付けた後、チャック手段でセパレータテープを把持し、貼付ローラを退避させた状態で移動体を後退移動させて剥離ローラにてセパレータテープを剥離するようにしたものが知られている(例えば、特許文献2参照)。
Moreover, as an ACF sticking device, a sticking roller whose position can be switched between a sticking position where the ACF is pasted and a position retracted upwardly on a movable body that can reciprocate at least a distance corresponding to the length of the sticking part; A peeling roller for peeling the separator tape and a tape feed chuck for gripping the separator tape when feeding the laminated tape are arranged, and a chuck means for holding the separator tape at the time of peeling is arranged at the front position in the moving direction at the time of application. After moving the moving body forward while feeding the separator tape with the tape feeding chuck, the tape feeding chuck is opened and returned, and then the moving body is moved forward to apply the application roller. After pasting the ACF with the chuck means, the separator tape is gripped by the chuck means, and the moving body is moved backward with the sticking roller retracted. That so as to peel the separator tape at the release roller is known (e.g., see Patent Document 2).

また、ACF貼付装置として、貼り付けるべきACFが基板の貼付部位上に対向位置するように積層テープを送給し、次に基板の貼付部位を基板支持体にて支持して加熱手段にて加熱し、貼付ローラにて積層テープを押圧した状態で貼付ローラを移動させて貼付部位にACFを貼り付け、その後貼付ローラを上方に退避させるとともに剥離ローラを動作位置に突出させて貼付ローラとともに復帰移動させることでセパレータテープを剥離するようにしたものが知られている(例えば、特許文献3参照)。   Also, as an ACF sticking device, the laminated tape is fed so that the ACF to be stuck is opposed to the sticking part of the substrate, and then the sticking part of the substrate is supported by the substrate support and heated by the heating means. Then, with the laminating tape pressed by the affixing roller, the affixing roller is moved to affix the ACF to the affixing site. The thing which peeled the separator tape by doing is known (for example, refer patent document 3).

特開平9−211485号公報Japanese Patent Laid-Open No. 9-211485 特許第3738603号明細書Japanese Patent No. 3738603 特開2007−324471号公報JP 2007-324471 A

しかしながら、図11に記載の従来例では、基板42の貼付部位の長さに対応した長さの圧着ヘッド49を使用する構成であるため、圧着ヘッド49の圧着面49aと下受け部43の平行度及び平面度を高精度に確保しないと良好な品質の貼付状態が得られず、かつ基板42が大型化して貼付部位の長さが長くなると重厚長大な圧着ヘッド49が必要になって装置構成が大型になり、大型の装置構成でありながら高い精度が要求されるために大変高価な装置になり、また全長にわたって均一に押圧・加熱するための調整やメンテナンスにも手間がかかるという問題がある。また、積層テープの送給工程と、圧着機構部46の圧着ヘッド49が昇降動作する貼付工程と、剥離機構47が往復移動動作するセパレータテープの剥離工程とを順次行う構成であり、3つの往復動作工程を各別に順次行うためにACF貼付工程に時間がかかり、タクトタイムの短縮を図るのが困難であるという問題がある。   However, since the conventional example shown in FIG. 11 uses a crimping head 49 having a length corresponding to the length of the part to be bonded to the substrate 42, the crimping surface 49 a of the crimping head 49 and the lower receiving portion 43 are parallel to each other. If the degree of flatness and flatness are not ensured with a high degree of accuracy, a good quality sticking state cannot be obtained, and if the substrate 42 is enlarged and the length of the sticking part becomes long, a heavy and long pressure bonding head 49 is required. However, there is a problem that adjustment and maintenance for pressing and heating evenly over the entire length are troublesome because of the large size and high accuracy required for the large-sized device configuration. . The laminated tape feeding process, the affixing process in which the crimping head 49 of the crimping mechanism section 46 moves up and down, and the separator tape peeling process in which the peeling mechanism 47 reciprocates are sequentially performed. Since the operation process is sequentially performed separately, the ACF attaching process takes time, and it is difficult to reduce the tact time.

一方、特許文献1に記載の構成では、大型の圧着ヘッドを用いる代わりに加熱ローラを用い、加熱ローラにて積層テープを加熱加圧しつつ基板を支持する基板テーブルを移動させてACFを貼り付けるようにしているので、貼付機構部の装置構成は大型にならず、平行度及び平面度に高い精度が要求されないので、装置構成の低コスト化と保守性の向上を図ることができるが、加熱ローラと基板の相対移動によるACFの貼付工程と、剥離機構の往復移動によるセパレータテープの剥離工程と、積層テープの送給工程とを順次行う構成であるため、ACF貼付工程に時間がかかり、ACF貼付工程のタクト短縮を図るのが困難であるという問題がある。また、加熱ローラにて加圧・加熱するようにしているが、ローラであるため線接触で加熱・ 加圧するので、熱伝達効率が悪くかつ局部的に加熱するので貼付速度を高めつつ所要熱量を伝達しようとすると、熱を受ける部分が逆に過熱されてACFを変質させる恐れがあり、また局部的に加圧した部分を移動させるので加圧された部分のACF中の導電粒子が両側に押し出されて導電粒子の分布密度にばらつきを生じる恐れがあるなどの問題も考えられる。   On the other hand, in the configuration described in Patent Document 1, a heating roller is used instead of using a large pressure bonding head, and the ACF is attached by moving the substrate table that supports the substrate while heating and pressing the laminated tape with the heating roller. Therefore, the apparatus configuration of the sticking mechanism portion is not large, and high accuracy is not required for parallelism and flatness. Therefore, the cost of the apparatus configuration can be reduced and the maintainability can be improved. ACF sticking process by relative movement of substrate and substrate, separator tape peeling process by reciprocating movement of peeling mechanism, and laminated tape feeding process are sequentially performed. There is a problem that it is difficult to shorten the tact time of the process. Also, the heating roller is pressurized and heated, but because it is a roller, it is heated and pressurized by line contact, so the heat transfer efficiency is poor and it heats locally. If the heat transfer is attempted, the heat receiving part may be overheated and the ACF may be altered, and the locally pressurized part is moved, so that the conductive particles in the pressurized part of the ACF are pushed out to both sides. Therefore, there may be a problem that the distribution density of the conductive particles may vary.

また、特許文献2に記載の構成でも、積層テープの送給工程と、移動体の前進時の貼付ローラの移動によるACFの貼付工程と、移動体の後退時の剥離ローラの移動によるセパレータテープの剥離工程とを行う構成であるため、移動体を、積層テープの送給と、ACFの貼付及びセパレータテープの剥離のために2往復させる必要があり、やはりACF貼付工程に時間がかかり、ACF貼付工程のタクト短縮を図るのが困難であるという問題がある。   Also in the configuration described in Patent Document 2, the feeding process of the laminated tape, the application process of the ACF by the movement of the application roller when the moving body moves forward, and the separation of the separator tape by the movement of the peeling roller when the moving body moves backward Since it is configured to perform the peeling process, it is necessary to reciprocate the moving body twice for feeding the laminated tape, sticking the ACF, and peeling the separator tape. There is a problem that it is difficult to shorten the tact time of the process.

また、特許文献3に記載の構成でも、加熱は基板支持体側の加熱手段にて行うようにしているが、積層テープの送給工程と、貼付ローラと剥離ローラの往復移動によるACFの貼付とセパレータテープの剥離の工程とを行うため、やはりACF貼付工程に時間がかかり、ACF貼付工程のタクト短縮を図るのが困難であるという問題がある。   In the configuration described in Patent Document 3, the heating is performed by the heating means on the substrate support side, but the feeding process of the laminated tape, the application of the ACF by the reciprocating movement of the application roller and the release roller, and the separator Since the tape peeling process is performed, the ACF sticking process takes time, and it is difficult to reduce the tact time of the ACF sticking process.

本発明は、上記従来の問題に鑑み、低コストの装置構成によって短いタクトで異方性導電材を貼り付けることができる異方性導電材貼付装置及び貼付方法を提供することを目的とする。   In view of the above-described conventional problems, an object of the present invention is to provide an anisotropic conductive material sticking device and a sticking method capable of sticking an anisotropic conductive material in a short tact with a low-cost device configuration.

本発明の異方性導電材貼付装置は、セパレータテープに異方性導電材を積層した積層テープを供給するテープ供給部と、テープ供給部から供給された積層テープを基板の側縁部にその長手方向に沿って設けられた貼付部位の上に配置するように案内するテープ案内手段と、積層テープをセパレータテープ側から押圧して異方性導電材を貼付部位に貼り付ける貼付手段と、貼り付けられた異方性導電材からセパレータテープを剥離する剥離手段と、剥離したセパレータテープを回収するテープ回収部とを備えた異方性導電材貼付装置において、基板の側縁部の長手方向に沿って移動可能な移動体を設け、移動体に、貼付手段と剥離手段及び異方性導電材を剥離したセパレータテープのチャック手段を配設し、移動体の一方向の移動時に貼付手段にて異方性導電材を貼付部位に貼り付けるとともに剥離手段にて貼り付けられた異方性導電材からセパレータテープを剥離し、移動体の他方向への復帰移動時にチャック手段にてセパレータテープを把持して積層テープを送給するものである。   An anisotropic conductive material pasting apparatus of the present invention includes a tape supply unit that supplies a laminated tape obtained by laminating an anisotropic conductive material on a separator tape, and a laminated tape supplied from the tape supply unit on a side edge of a substrate. A tape guiding means for guiding the tape to be disposed on a sticking site provided along the longitudinal direction; a sticking means for pressing the laminated tape from the separator tape side to stick the anisotropic conductive material to the sticking site; In the anisotropic conductive material pasting apparatus comprising a peeling means for peeling the separator tape from the attached anisotropic conductive material, and a tape collecting unit for collecting the separated separator tape, in the longitudinal direction of the side edge portion of the substrate A moving body movable along the moving body is provided, and a sticking means, a peeling means, and a separator tape chuck means from which the anisotropic conductive material is peeled are arranged on the moving body, and the sticking means is moved in one direction of the moving body. The separator tape is peeled off from the anisotropic conductive material pasted by the peeling means and the separator tape is peeled off by the chuck means when the moving body returns to the other direction. It grips and feeds a laminated tape.

この構成によれば、基板の側縁部の長手方向に沿って移動可能な移動体に貼付手段と剥離手段とチャック手段を配設した構成であるため、高精度の平行度や平面度が要求されず、大型基板を対象とするものでも簡単で低コストの構成とすることができ、かつ移動体の一方向の移動時に異方性導電材の貼り付けとセパレータテープの剥離を行い、移動体の他方向への復帰移動時にチャック手段にてセパレータテープを把持して積層テープを送給するので、移動体の1回の往復移動にて異方性導電材の貼付を完了することができ、短いタクトで異方性導電材を貼り付けることができる。   According to this configuration, since the sticking means, the peeling means, and the chuck means are arranged on the movable body that can move along the longitudinal direction of the side edge portion of the substrate, high precision parallelism and flatness are required. Even if it is a target for a large substrate, it can be a simple and low-cost structure, and when moving the moving body in one direction, the anisotropic conductive material is attached and the separator tape is peeled off. Since the separator tape is gripped by the chuck means during the return movement in the other direction and the laminated tape is fed, the sticking of the anisotropic conductive material can be completed by one reciprocation of the moving body, An anisotropic conductive material can be affixed with a short tact.

また、貼付手段が、積層テープをセパレータテープ側から基板の貼付部位に押圧する平面状の押圧部を有するとともに加熱手段に熱的に結合された押圧ユニットと、押圧ユニットを押圧状態と押圧回避状態との間で切り替える切替手段とを備えていると、平面状の押圧部にて積層テープを押圧するので局部的に過大な荷重が作用する恐れがなく、適正かつ均一に押圧力と熱を付与することができ、異方性導電材中の導電粒子の分布密度に悪影響を与える恐れがなく、品質の高い貼り付け状態を高い信頼性をもって確保することができ、また押圧が不要な位置に達した時点で押圧回避状態に切り替えることで、貼付範囲外に影響を与えることなく確実に貼り付けることができる。なお、押圧ユニットに加熱手段を熱的に結合する方式としては、熱伝達方式でも、熱放射方式でも、電磁誘導加熱方式など任意の方式を適用することができる。   The affixing means has a flat pressing part that presses the laminated tape from the separator tape side to the affixing part of the substrate and is thermally coupled to the heating means, and the pressing unit is in a pressed state and a pressed avoidance state. Switching means to switch between the two, the laminated tape is pressed by a flat pressing part, so there is no risk of excessive load acting locally, and the pressing force and heat are applied appropriately and uniformly. It is possible to secure a high-quality sticking state with high reliability without reaching the position where no pressing is required, without adversely affecting the distribution density of the conductive particles in the anisotropic conductive material. By switching to the pressing avoidance state at that time, it is possible to reliably paste without affecting the outside of the pasting range. As a method of thermally coupling the heating means to the pressing unit, any method such as a heat transfer method, a heat radiation method, or an electromagnetic induction heating method can be applied.

また、押圧ユニットは中間部が支軸回りに揺動自在に支持され、押圧ユニットの一端側
に押圧部が配設されるとともに押圧ユニットの他端側に切替手段が配設され、押圧ユニットを支軸回りに回動付勢して押圧力を付与する押圧力付与手段と押圧力調整手段とが設けられていると、押圧ユニットが支軸回りに揺動自在であることで、押圧ユニットの自重やばねなどで回動付勢力を付与する簡単な構成にて積層テープをセパレータテープ側から基板の貼付部位に押圧する押圧方向の押圧ユニットの押圧力を付与できるとともに逆方向の回動付勢力を付与可能とすることで押圧力調整も容易に行え、また押圧ユニットの他端側を押し下げる簡単な切替手段によって押圧回避状態に切替えることができ、簡単な構成にて容易に適切に押圧力を付与することができる。
Further, the pressing unit is supported so that the intermediate portion can swing around the support shaft, the pressing unit is disposed on one end side of the pressing unit, and the switching unit is disposed on the other end side of the pressing unit. If a pressing force applying means for applying a pressing force by rotating and rotating around the support shaft and a pressing force adjusting means are provided, the pressing unit can swing around the support shaft, With a simple configuration that applies rotational biasing force by its own weight or a spring, etc., it is possible to apply the pressing force of the pressing unit in the pressing direction that presses the laminated tape from the separator tape side to the application part of the substrate, and reverse rotational biasing force It is possible to easily adjust the pressing force, and it is possible to switch to the pressing avoidance state by a simple switching means that pushes down the other end side of the pressing unit. Grant It is possible.

また、基板の側縁部を支持する下受け部に加熱手段を配設すると、貼付部位に異方性導電材を貼り付ける際に、押圧部にて積層テープ側から基板の貼付部位に貼り付ける異方性導電材を加熱するだけでなく、基板の貼付部位もその下面側から加熱することで、高速にて貼り付ける場合にも所要の熱を確実に付与できて品質の良い貼付状態を確保することができる。   In addition, when a heating means is provided in the lower support part that supports the side edge of the substrate, when the anisotropic conductive material is applied to the application site, it is applied to the application site of the substrate from the laminated tape side by the pressing unit. In addition to heating the anisotropic conductive material, the part to be attached to the substrate is also heated from the bottom side, so that the required heat can be reliably applied even when attaching at high speed, ensuring a high quality attachment state. can do.

また、移動体に、貼付移動時の移動方向前方位置で積層テープのセパレータテープに当接して転動するとともに積層テープの両側縁に係合する規制ローラを配設すると、貼付部位が長い場合でも、押圧部にて積層テープを押圧しながら摺動して異方性導電材を貼り付ける間に、積層テープが位置ずれするのを確実に規制することができるため、異方性導電材をその幅方向に精度良く貼り付けることができる。   In addition, if the moving body is provided with a regulating roller that rolls in contact with the separator tape of the laminated tape and engages both side edges of the laminated tape at the forward position in the moving direction during the application movement, even if the application site is long Since the laminating tape can be reliably restrained from being displaced while the anisotropic conductive material is adhered by sliding while pressing the laminated tape at the pressing portion, the anisotropic conductive material It can be applied with high accuracy in the width direction.

また、本発明の異方性導電材貼付方法は、セパレータテープに異方性導電材を積層した積層テープを、基板の側縁部にその長手方向に沿って設けられた貼付部位の上に配置する配置工程と、基板の側縁部の長手方向に沿って移動する貼付手段にて一方向の移動時に積層テープをセパレータテープ側から押圧して貼付部位に異方性導電材を貼り付ける貼付工程と、一方向に、貼付手段とともに移動する剥離手段にて貼り付けられた異方性導電材からセパレータテープを剥離する剥離工程と、貼付手段の他方向への復帰移動時にチャック手段にて異方性導電材を剥離したセパレータテープを把持して積層テープを送給する送給工程とを有するものである。   In the anisotropic conductive material sticking method of the present invention, the laminated tape obtained by laminating the anisotropic conductive material on the separator tape is disposed on the sticking portion provided along the longitudinal direction on the side edge of the substrate. And an attaching step for attaching an anisotropic conductive material to the application site by pressing the laminated tape from the separator tape side when moving in one direction with an attaching means moving along the longitudinal direction of the side edge of the substrate. And a peeling process for peeling the separator tape from the anisotropic conductive material attached by the peeling means that moves in one direction together with the sticking means, and an anisotropy by the chuck means when returning to the other direction of the sticking means A feeding step of gripping the separator tape from which the conductive conductive material has been peeled and feeding the laminated tape.

この構成によると、上記のように貼付手段と剥離手段とチャック手段の1回の往復移動にて異方性導電材の貼付を完了することができ、短いタクトで異方性導電材を貼り付けることができる。   According to this configuration, the sticking of the anisotropic conductive material can be completed by one reciprocating movement of the sticking means, the peeling means, and the chuck means as described above, and the anisotropic conductive material is stuck with a short tact. be able to.

また、貼付工程は、所定温度に加熱制御された平面状の押圧部にてセパレータテープ側から積層テープを基板の貼付部位に押圧すると、平面状の押圧部にて積層テープを押圧するので積層テープの異方性導電材に局部的に過大な荷重が作用する恐れがなく、適正かつ均一に押圧力と熱を付与することができ、また異方性導電材中の導電粒子の分布密度に悪影響を与える恐れもなく、品質の高い貼り付け状態を高い信頼性をもって確保することができる。   In addition, when the laminating tape is pressed against the affixing portion of the substrate from the separator tape side at the flat pressing portion heated and controlled to a predetermined temperature, the laminating tape is pressed at the flat pressing portion. There is no risk of excessive load acting locally on the anisotropic conductive material, and it is possible to apply pressing force and heat appropriately and uniformly, and adversely affect the distribution density of the conductive particles in the anisotropic conductive material It is possible to ensure a high-quality pasting state with high reliability.

また、剥離工程は、一方向に移動時に、貼付手段にて貼付部位に異方性導電材を貼り付けた後、貼付手段を基板の貼付部位から離間する方向に退避させるとともにあるいは、退避させた状態で貼付手段とともに一方向に移動する剥離手段をさらに一方向に移動させることで剥離手段にて貼付部位の端までセパレータテープを剥離すると、次に貼り付けるべき異方性導電材に影響を与えることなく貼付部位の端まで確実に異方性導電材を貼り付けることができる。   Further, in the peeling process, when the anisotropic conductive material is pasted on the pasting site by the pasting means when moving in one direction, the pasting means is retracted in the direction away from the pasting site on the substrate or is retracted. If the separator tape is peeled to the end of the pasting part by the peeling means by further moving the peeling means moving in one direction together with the sticking means in the state, the anisotropic conductive material to be applied next is affected. The anisotropic conductive material can be reliably affixed to the end of the affixed part without any problem.

また、基板の側縁部を所定温度に加熱制御された下受け部にて支持して基板の側縁部の貼付部位を加熱すると、押圧部にて積層テープ側から基板の貼付部位に貼り付ける異方性
導電材を加熱するだけでなく、基板の貼付部位もその下面側から加熱することで、高速にて貼り付ける場合にも所要の熱を確実に付与できて品質の良い貼付状体を確保することができる。
In addition, when the side edge of the substrate is supported by a receiving part controlled to be heated to a predetermined temperature and the application part of the side edge of the board is heated, the pressing part is attached to the application part of the substrate from the laminated tape side. By heating not only the anisotropic conductive material, but also the part where the substrate is applied from the bottom side, the required heat can be reliably applied even when attaching at high speed, and a high-quality paste can be obtained. Can be secured.

本発明の異方性導電材貼付装置及び貼付方法によれば、基板の側縁部に沿って移動する移動体に貼付手段と剥離手段とチャック手段を配設した構成であるため、高精度の平行度や平面度が要求されず、簡単で低コストの構成とすることができ、かつ移動体の1回の往復移動にて異方性導電材の貼り付けとセパレータテープの剥離と積層テープの送給を行って異方性導電材の貼付を完了することができ、短いタクトで異方性導電材を貼り付けることができる。   According to the anisotropic conductive material sticking apparatus and the sticking method of the present invention, the sticking means, the peeling means, and the chuck means are arranged on the moving body that moves along the side edge of the substrate. Parallelism and flatness are not required, and a simple and low-cost configuration can be obtained. Also, the anisotropic conductive material can be attached, the separator tape can be peeled off, and the laminated tape can be removed by one reciprocation of the moving body. The feeding of the anisotropic conductive material can be completed by feeding, and the anisotropic conductive material can be pasted with a short tact.

本発明に係る異方性導電材貼付装置の一実施形態の全体斜視図。The whole perspective view of one embodiment of the anisotropic conductive material sticking device concerning the present invention. 同実施形態の要部構成を示す斜視図。The perspective view which shows the principal part structure of the embodiment. 同実施形態を適用する基板の他の例を示す斜視図。The perspective view which shows the other example of the board | substrate to which the embodiment is applied. 同実施形態の貼付機構部とその周辺構成を示す斜視図。The perspective view which shows the sticking mechanism part of the embodiment, and its periphery structure. 同実施形態の貼付機構部の拡大斜視図。The expansion perspective view of the sticking mechanism part of the embodiment. 同実施形態の貼付機構部の構成を示す三面図で、(a)は平面図、(b)は正面図、(c)は側面図。It is a three-plane figure which shows the structure of the sticking mechanism part of the embodiment, (a) is a top view, (b) is a front view, (c) is a side view. 同実施形態における貼付手段による貼付状態を示し、(a)は正面図、(b)はACFの下面図。The sticking state by the sticking means in the embodiment is shown, (a) is a front view, (b) is a bottom view of the ACF. 同実施形態におけるACF貼付工程の動作フロー図。The operation | movement flowchart of the ACF sticking process in the embodiment. 同実施形態におけるACF貼付工程の前半の動作説明図。Operation | movement explanatory drawing of the first half of the ACF sticking process in the embodiment. 同実施形態におけるACF貼付工程の後半の動作説明図。Operation | movement explanatory drawing of the second half of the ACF sticking process in the embodiment. 従来例の異方性導電材貼付装置の全体概略構成を示す斜視図。The perspective view which shows the whole schematic structure of the anisotropic conductive material sticking apparatus of a prior art example.

以下、本発明を、液晶表示パネルのガラス基板などの基板に、異方性導電材(以下、ACFと称す)を貼り付けるACF貼付装置に適用した一実施形態について、図1〜図10を参照して説明する。   Hereinafter, referring to FIG. 1 to FIG. 10, an embodiment in which the present invention is applied to an ACF attaching apparatus that attaches an anisotropic conductive material (hereinafter referred to as ACF) to a substrate such as a glass substrate of a liquid crystal display panel. To explain.

図1、図2において、本実施形態のACF貼付装置1は、基板2を支持して移動及び位置決めする位置決め手段3と、基板2のACFを貼り付けるべき貼付部位2aが配設されている側端部を下方から支持する下受け部4と、ACF5a(図5〜図7参照)をセパレータテープ5bに積層して成る積層テープ(以下、ACFテープと称す)5を上方から押圧してACF5aを基板2の貼付部位2aに貼り付けた後、ACF5aからセパレータテープ5bを剥離する貼付機構部6と、ACFテープ5を供給するテープ供給部7と、供給されたACFテープ5を下受け部4上に位置決めされた基板2の側縁部にその長手方向に沿って配設されている貼付部位2a上に配置するように案内するテープ案内手段8と、剥離されたセパレータテープ5bを回収するテープ回収部9にて構成されている。10は、ACF貼付装置1の搬入位置に搬入された基板2を位置決め手段3に移載する移載手段、1Aは、ACF貼付装置1の全体の動作制御を行う制御部である。   1 and 2, the ACF sticking apparatus 1 according to the present embodiment includes a positioning means 3 for supporting and moving and positioning the substrate 2, and a side on which the sticking portion 2a to which the ACF is to be stuck is disposed. An ACF 5a is pressed by pressing a lower receiving portion 4 that supports the end portion from below and a laminated tape (hereinafter referred to as an ACF tape) 5 in which an ACF 5a (see FIGS. 5 to 7) is laminated on a separator tape 5b. After affixing to the affixing part 2a of the substrate 2, the affixing mechanism part 6 for peeling the separator tape 5b from the ACF 5a, the tape supply part 7 for supplying the ACF tape 5, and the supplied ACF tape 5 on the lower receiving part 4 The tape guide means 8 for guiding the substrate 2 so as to be disposed on the side portion of the substrate 2 positioned along the longitudinal direction of the substrate 2 and the separated separator tape 5b. It is constituted by a tape recovery section 9 for collecting. Reference numeral 10 denotes a transfer means for transferring the substrate 2 carried into the carry-in position of the ACF sticking apparatus 1 to the positioning means 3, and reference numeral 1 </ b> A denotes a control unit that performs overall operation control of the ACF sticking apparatus 1.

テープ供給部7は、ACFテープ5が巻回された供給リール11と、供給リール11から引き出されて供給されるACFテープ5にテンションを付与するテンションローラ12と、供給されるACFテープ5の終端部を検出する終端検出センサ13と、供給されるACFテープ5においてセパレータテープ5bの片面に連続して積層されているACF5aに対して、基板2の貼付部位2aの長さに応じた長さ毎に切り込みを入れるカッター14とを備えている。なお、ACFテープ5の終端と新たに装着した供給リール11から引き
出したACFテープ5の始端とを、熱溶着や超音波接合等にて接続するテープ接続手段が設けられても良い。
The tape supply unit 7 includes a supply reel 11 around which the ACF tape 5 is wound, a tension roller 12 that applies tension to the ACF tape 5 that is pulled out and supplied from the supply reel 11, and a terminal end of the supplied ACF tape 5. For each length corresponding to the length of the affixed portion 2a of the substrate 2 with respect to the ACF 5a continuously laminated on one surface of the separator tape 5b in the supplied ACF tape 5 And a cutter 14 for making a cut. Note that a tape connecting means for connecting the end of the ACF tape 5 and the starting end of the ACF tape 5 drawn out from the newly mounted supply reel 11 by heat welding, ultrasonic bonding, or the like may be provided.

テープ案内手段8は、下受け部4の上部両側のテープ供給部7とテープ回収部9の下方位置にそれぞれ配設された上下位置切替可能な昇降板15a、15bと、昇降板15a、15bにACFテープ5とセパレータテープ5bをそれぞれ案内するように配設されたガイドローラ16a、16bと、テープ回収部9側の昇降板15bに配設され、セパレータテープ5bを把持固定するチャック17とを備え、昇降板15a、15bが下方位置に位置したときに、ガイドローラ16a、16b間に張設されたACFテープ5が下受け部4上に支持された基板2の貼付部位2a上に当接配置されるように構成されている。なお、基板2の側縁部には、図2に示すように、単一の長い貼付部位2aが配設されている場合に限らず、図3に示すように、基板2の側縁部に配設された電極部に対応する位置に複数の貼付部位2aが適当間隔置きに配設されている場合もある。また、テープ回収部9はセパレータテープ5bを吸引回収する吸引回収手段18にて構成されている。   The tape guiding means 8 is provided on lift plates 15a and 15b, which can be switched up and down, respectively, and on the lift plates 15a and 15b. Guide rollers 16a and 16b disposed so as to guide the ACF tape 5 and the separator tape 5b, respectively, and a chuck 17 disposed on the elevating plate 15b on the tape recovery unit 9 side for gripping and fixing the separator tape 5b. When the elevating plates 15a and 15b are positioned at the lower position, the ACF tape 5 stretched between the guide rollers 16a and 16b is disposed on the affixing portion 2a of the substrate 2 supported on the lower receiving portion 4. It is configured to be. In addition, as shown in FIG. 2, the side edge of the substrate 2 is not limited to the case where a single long sticking part 2 a is provided, but as shown in FIG. In some cases, a plurality of application sites 2a are arranged at appropriate intervals at positions corresponding to the arranged electrode portions. The tape collecting unit 9 is constituted by a suction collecting means 18 for sucking and collecting the separator tape 5b.

次に、本発明の要部である貼付機構部6の詳細構成について、図4〜図7を参照して説明する。貼付機構部6は、貼付位置と上方に退避した退避位置との間で昇降可能でかつ下受け部4上に位置決めされて支持されている基板2の側縁部の長手方向に沿って移動可能な移動体20を備えており、この移動体20に、ACFテープ5をセパレータテープ5a側から押圧してACF5aを貼付部位2aに貼り付ける貼付手段21と、貼り付けられたACF5aからセパレータテープ5bを剥離する剥離手段22と、剥離したセパレータテープ5bを把持固定するチャック手段23とが配設されている。   Next, the detailed structure of the sticking mechanism part 6 which is the principal part of this invention is demonstrated with reference to FIGS. The pasting mechanism portion 6 can be moved up and down between the pasting position and the retracted position retracted upward, and can be moved along the longitudinal direction of the side edge portion of the substrate 2 that is positioned and supported on the lower receiving portion 4. The moving body 20 is provided with an attaching means 21 for pressing the ACF tape 5 from the separator tape 5a side and attaching the ACF 5a to the attaching portion 2a, and the separator tape 5b from the attached ACF 5a. A peeling means 22 for peeling and a chuck means 23 for holding and fixing the peeled separator tape 5b are provided.

貼付手段21は、ACFテープ5をセパレータテープ5b側から押圧する平面状の押圧部25を一端部に有する押圧ユニット24を水平な支軸26回りに揺動自在に支持して成り、押圧部25と支軸26の間に、加熱手段としてのヒータブロック27が配設されている。具体的には、ヒータブロック27の他端側の端部が支軸26にて揺動自在に支持されるとともに、このヒータブロック27から熱伝導率の高い金属材料からなるコテ状部材28が一端側に向けて斜め下方に延出されるとともにその先端部に押圧部25が形成され、かつ押圧部25の先端25aはセパレータテープ5bに引っかかることなく円滑に摺動するようにせり上げられている。また、押圧部25のセパレータテープ5bに接する下面には摩擦抵抗を小さくしかつ押圧によってはみ出したACF5aが付着しないようにフッ素樹脂コーティングがなされている。また、ヒータブロック27は所要の熱容量を確保できるブロック体にヒータ27aを装着して構成されており、かつヒータブロック27はACFテープ5をセパレータテープ5b側から基板2の貼付部位に押圧する押圧方向にかかるその質量に作用する重力、すなわち支軸26にて揺動自在されるヒータブロック27の押圧方向の自重によって押圧部25に所定の押圧力を付与する押圧力付与手段としての機能も併せ持っている。   The affixing means 21 comprises a pressing unit 24 having a flat pressing portion 25 at one end for pressing the ACF tape 5 from the separator tape 5b side so as to be swingable around a horizontal support shaft 26. A heater block 27 as a heating means is disposed between the spindle 26 and the spindle 26. Specifically, the other end of the heater block 27 is swingably supported by the support shaft 26, and a trowel member 28 made of a metal material having a high thermal conductivity is connected to the heater block 27 at one end. The pressing portion 25 is extended obliquely downward toward the side, and a pressing portion 25 is formed at the tip thereof. The tip 25a of the pressing portion 25 is raised so as to slide smoothly without being caught by the separator tape 5b. Further, the lower surface of the pressing portion 25 that is in contact with the separator tape 5b is coated with a fluororesin so as to reduce the frictional resistance and prevent the ACF 5a protruding from the pressing from adhering. The heater block 27 is configured by mounting a heater 27a on a block body capable of securing a required heat capacity, and the heater block 27 is in a pressing direction in which the ACF tape 5 is pressed from the separator tape 5b side to the application site of the substrate 2. Further, it has a function as a pressing force applying means for applying a predetermined pressing force to the pressing portion 25 by gravity acting on the mass of the heater, that is, the weight of the heater block 27 swingable by the support shaft 26 in the pressing direction. Yes.

押圧部25の具体的な数値例を示すと、その幅寸法は通常1〜2mm程度のACFテープ5の幅寸法より若干大きく、例えばACFテープ5の幅が1mmの場合、1.2〜1.5mm程度に設定され、長さは2mm以上で、3±1mm程度に設定するのが好適である。また、付与する押圧力は、ACF5aの物性によるが、1±0.5N/mm2 程度が適切である。ACFテープ5の幅が1mm、押圧部25の長さが3mmの場合、3N(約300g)の荷重を負荷するように設定するのが好適である。また、押圧部25の温度も、ACF5aの物性によるが、60〜100℃、現在汎用されているACF5aでは70℃程度が最適であり、押圧部25の温度がこの温度になるようにヒータブロック27の温度が調整される。このように、押圧部25による押圧力と加熱温度を適切に設定した状態でACF5aを貼り付けることで、図7(a)、(b)に示すように、ACF5a中の特により微細な導電粒子5Aの分布密度に悪影響を与えず、均等な分布密度を維持した状態で、ACF5aを貼付部位2aに適正に貼付けることができる。 As a specific numerical example of the pressing portion 25, the width dimension is usually slightly larger than the width dimension of the ACF tape 5 of about 1 to 2 mm. For example, when the width of the ACF tape 5 is 1 mm, 1.2 to 1. It is preferably set to about 5 mm, and the length is set to about 2 mm or more and about 3 ± 1 mm. Further, the applied pressing force depends on the physical properties of the ACF 5a, but about 1 ± 0.5 N / mm 2 is appropriate. When the width of the ACF tape 5 is 1 mm and the length of the pressing portion 25 is 3 mm, it is preferable to set so that a load of 3N (about 300 g) is applied. Also, the temperature of the pressing portion 25 depends on the physical properties of the ACF 5a, but 60 to 100 ° C., and about 70 ° C. is optimal for the currently used ACF 5a, and the heater block 27 is set so that the temperature of the pressing portion 25 becomes this temperature. The temperature of is adjusted. In this way, by attaching the ACF 5a in a state where the pressing force and the heating temperature by the pressing portion 25 are appropriately set, as shown in FIGS. 7 (a) and 7 (b), particularly finer conductive particles in the ACF 5a. The ACF 5a can be properly applied to the application site 2a while maintaining an even distribution density without adversely affecting the distribution density of 5A.

押圧ユニット24の支軸26より他端側には、押圧部25を押圧状態と押圧回避状態との間で切り替える切替手段29(図5参照)が配設されている。切替手段29は、具体的にはヒータブロック27から他端側に延長片30が延出され、その上部にソレノイドやエアシリンダなどの操作手段31が配設され、操作手段31を突出させて延長片30を押し下げることで、押圧ユニット24が押圧力付与手段による押圧力に抗して支軸26回りに回動し、押圧部25が上方に回動して基板2の貼付部位2aに貼り付けられるACFテープ5から離間するように構成されている。また、押圧ユニット24には、必要に応じて押圧部25の押圧力調整手段32(図6(b)参照)を設けておくのが好ましい。この押圧力調整手段32としては、図6(b)に仮想線で示すように、延長片30に支軸26に対して水平方向の遠近方向に位置調整可能に調整錘32aを装着するのが好適である。   On the other end side of the support shaft 26 of the pressing unit 24, switching means 29 (see FIG. 5) for switching the pressing portion 25 between the pressing state and the pressing avoiding state is disposed. Specifically, the switching means 29 has an extension piece 30 extending from the heater block 27 to the other end side, and an operation means 31 such as a solenoid or an air cylinder is disposed on the upper part, and the operation means 31 is projected to extend. By depressing the piece 30, the pressing unit 24 rotates around the support shaft 26 against the pressing force by the pressing force applying means, and the pressing portion 25 rotates upward and is attached to the attaching portion 2a of the substrate 2. It is comprised so that it may space apart from the ACF tape 5 to be formed. Moreover, it is preferable to provide the pressing unit 24 with the pressing force adjusting means 32 (see FIG. 6B) of the pressing portion 25 as necessary. As the pressing force adjusting means 32, as shown by an imaginary line in FIG. 6B, an adjusting weight 32a is attached to the extension piece 30 so that the position of the extending piece 30 can be adjusted in the horizontal and near directions. Is preferred.

また、貼付部位2aの長手方向の長さが長い場合には、その貼付部位2aにACF5aを貼り付ける移動体20の移動工程中にACFテープ5が位置ずれするのを効果的に防止するため、図4に破線で示すように、移動体20の貼付移動時の移動方向の前方位置に、ACFテープ5のセパレータテープ5bに当接して転動するとともにACFテープ5の両側縁に係合してACFテープ5を貼付部位2aに貼り付ける前に案内する規制ローラ33を配設するのが好適である。また、基板2の側縁部を支持する下受け部4に基板加熱手段34を配設しておくと、基板2の貼付部位2aが加熱されるので、より確実かつ容易にACF5aを貼付けることができて好適である。   In addition, when the length in the longitudinal direction of the application site 2a is long, in order to effectively prevent the ACF tape 5 from being displaced during the moving process of the moving body 20 for applying the ACF 5a to the application site 2a, As indicated by a broken line in FIG. 4, the movable body 20 rolls in contact with the separator tape 5 b of the ACF tape 5 and engages with both side edges of the ACF tape 5 at the front position in the moving direction when the moving body 20 is stuck. It is preferable to arrange a regulating roller 33 that guides the ACF tape 5 before it is applied to the application site 2a. Further, if the substrate heating means 34 is disposed in the lower receiving portion 4 that supports the side edge portion of the substrate 2, the application portion 2a of the substrate 2 is heated, so that the ACF 5a can be applied more reliably and easily. This is preferable.

剥離手段22は、移動体20の移動に伴って基板2の貼付部位2aに貼付けられたACFテープ5の上面に沿って転動しながら移動する押えローラ35と、押えローラ35の斜め上方に配置され、セパレータテープ5bを外周の一部に巻回させて移動体20の移動に伴ってセパレータテープ5bを剥離する剥離ローラ36にて構成されている。また、チャック手段23は、セパレータテープ5bを挟持できるように開閉可能に配設された一対の把持爪23a、23aと、開閉切替を行うソレノイドやエアシリンダなどのアクチュエータ23bにて構成されている。   The peeling means 22 is disposed obliquely above the presser roller 35 that moves while rolling along the upper surface of the ACF tape 5 attached to the application site 2 a of the substrate 2 as the moving body 20 moves. The separator tape 5b is wound around a part of the outer periphery, and is constituted by a peeling roller 36 that peels the separator tape 5b as the moving body 20 moves. The chuck means 23 is composed of a pair of gripping claws 23a, 23a that can be opened and closed so as to sandwich the separator tape 5b, and an actuator 23b such as a solenoid or an air cylinder that switches between opening and closing.

次に、以上の構成のACF貼付装置1にて基板2の側縁部の貼付部位2aにACF5aを貼り付ける工程を、図1および図8の動作フロー図と、図9、図10の動作説明図を参照して説明する。基板2がACF貼付装置1に搬入されると、位置決め手段3(X、Y、Z、θの移動軸を有する)にて基板2の側縁部を下受け部4上に位置決めして支持する。この状態に対応するように、ACFテープ5の送給を開始するため、図9の工程(a)に示すように、ガイドローラ16a、16b及び貼付機構部6の移動体20が退避位置に上昇位置し、貼付手段21の押圧部25を基板2の貼付部位2aに貼り付けられるACFテープ5から上側に離間する方向の退避位置に位置させた状態で、チャック17を開くとともに移動体20のチャック手段23を閉じてセパレータテープ5bを把持固定し、移動体20の矢印A方向への移動を開始する(ステップS1)。これにより、ACFテープ5が送給される。そして、移動体20が貼付部位2aの貼付け位置に対応する距離だけ矢印A方向に移動すると、図9の工程(b)に示すように、ACFテープ5の送給が完了する(ステップS2)。   Next, the process of attaching the ACF 5a to the application site 2a at the side edge of the substrate 2 by the ACF application apparatus 1 having the above-described configuration is described with reference to the operation flowcharts of FIGS. 1 and 8 and the operation descriptions of FIGS. This will be described with reference to the drawings. When the substrate 2 is carried into the ACF sticking apparatus 1, the side edge of the substrate 2 is positioned and supported on the lower receiving portion 4 by positioning means 3 (having X, Y, Z, and θ moving axes). . To start feeding the ACF tape 5 so as to correspond to this state, as shown in step (a) of FIG. 9, the guide rollers 16a and 16b and the moving body 20 of the pasting mechanism portion 6 rise to the retracted position. The chuck 17 is opened and the chuck of the moving body 20 in a state where the pressing portion 25 of the attaching means 21 is located at a retracted position in a direction away from the ACF tape 5 attached to the attaching portion 2 a of the substrate 2. The means 23 is closed and the separator tape 5b is held and fixed, and the movement of the moving body 20 in the direction of arrow A is started (step S1). Thereby, the ACF tape 5 is fed. Then, when the moving body 20 moves in the arrow A direction by a distance corresponding to the pasting position of the pasting site 2a, the feeding of the ACF tape 5 is completed as shown in the step (b) of FIG. 9 (step S2).

次に、図9の工程(c)に示すように、ガイドローラ16a、16b及び貼付機構部6の移動体20を矢印Bのように基板2の貼付部位2aにACFテープ5を貼り付ける高さ位置である貼付位置に下降させた後(ステップS3)、ACF5aの貼付けを開始するため、図9の工程(d)に示すように、チャック17を閉じてセパレータテープ5bを把持固定するとともに移動体20のチャック手段23を開き、切替手段29を動作させて押圧部25にてACFテープ5を押圧し、ACFテープ5に押圧力と熱を付与してACF5a
を貼付部位2aに加熱加圧して圧着するようにし、その状態でACFテープ5のACF5aを貼り付けられる基板2の貼付部位2aの貼付開始位置から矢印Cに示すように、移動体20の移動を開始して、移動体20の押圧部25にてACFテープ5に押圧力と熱を付与しながら移動して基板2の貼付部位2aへのACF5aの貼付けを開始する(ステップS4)。この移動体20の矢印C方向の移動に伴って、図9の工程(e)に示すように、貼付手段21の押圧部25によるACF貼付けと同時に、貼付けられたACF5aからセパレータテープ5bの剥離動作が剥離手段22により行われる(ステップS5)。
Next, as shown in step (c) of FIG. 9, the guide rollers 16 a and 16 b and the moving body 20 of the sticking mechanism 6 are attached to the sticking part 2 a of the substrate 2 as indicated by the arrow B. After being lowered to the application position (step S3), the chuck 17 is closed and the separator tape 5b is held and fixed as shown in step (d) of FIG. The chuck means 23 is opened, the switching means 29 is operated, the ACF tape 5 is pressed by the pressing portion 25, and pressing force and heat are applied to the ACF tape 5, thereby ACF 5a.
As shown by an arrow C from the sticking start position of the sticking part 2a of the substrate 2 to which the ACF 5a of the ACF tape 5 is stuck, the moving body 20 is moved. It starts and moves while applying pressing force and heat to the ACF tape 5 at the pressing portion 25 of the moving body 20 to start the application of the ACF 5a to the application site 2a of the substrate 2 (step S4). With the movement of the moving body 20 in the direction of arrow C, as shown in step (e) of FIG. Is performed by the peeling means 22 (step S5).

次に、押圧部25が貼付部位2aの貼付終了位置を通過し切ると、図10の工程(f)に示すように、切替手段29を動作させて貼付手段21を回動させて押圧部25を基板2の貼付部位2aから離間する上側の方向に退避させるとともに(ステップS6)、その状態で移動体20の矢印C方向の移動はそのまま継続あるいは一旦停止した後、さらに移動し、剥離手段22の押えローラ35が貼付部位2aの貼付終了位置を通過し切ると、図10の工程(g)に示すように、セパレータテープ5bの剥離が完了した状態となり(ステップS7)、その時点で図10の工程(h)に示すように、貼付機構部6の移動体20の矢印C方向の移動を停止して矢印D方向に上昇移動させて退避位置に位置させる(ステップS8)。次に、図10の工程(i)に示すように、移動体20を、ACFテープ5に対して、押圧部25がセパレータテープ側から押圧してACF5aの押圧の開始が可能な位置であるACFテープ送り開始位置まで矢印A方向に移動させ、その後図9の工程(a)に戻って以上の動作を繰り返すことにより、基板2の各貼付部位2aにACF5aが順次貼付けられる。   Next, when the pressing portion 25 has completely passed the pasting end position of the pasting site 2a, the switching means 29 is operated to rotate the pasting means 21 as shown in step (f) of FIG. Is retracted in the upper direction away from the pasting site 2a of the substrate 2 (step S6), and the movement of the moving body 20 in the direction of arrow C is continued or temporarily stopped in that state, and then further moved, and the peeling means 22 is moved. When the presser roller 35 has passed the pasting end position of the pasting part 2a, as shown in the step (g) of FIG. 10, the separation of the separator tape 5b is completed (step S7). As shown in step (h), the movement of the moving body 20 of the sticking mechanism section 6 in the direction of arrow C is stopped and moved upward in the direction of arrow D to be positioned at the retracted position (step S8). Next, as shown in step (i) of FIG. 10, the ACF is a position where the pressing portion 25 can press the moving body 20 against the ACF tape 5 from the separator tape side and the pressing of the ACF 5 a can be started. By moving to the tape feed start position in the direction of arrow A and then returning to step (a) in FIG. 9 and repeating the above operation, the ACFs 5a are sequentially attached to the respective application sites 2a of the substrate 2.

以上のように、本実施形態によれば、貼付機構部6の移動体20の一方向(矢印C方向)の移動時にACF5aの貼り付けとセパレータテープ5bの剥離を行い(図9(d)(e)〜図10(f)(g)参照)、移動体20の他方向(矢印A方向)への復帰移動時にチャック手段23にてセパレータテープ5bを把持してACFテープ5を送給する(図9(a)(b)参照)ので、移動体20の1回の往復移動にて基板2の側縁部の長手方向に沿って配設された貼付部位2aに対するACF5aの貼付を完了することができ、短いタクトでACF5aを貼り付けることができる。   As described above, according to the present embodiment, the ACF 5a is attached and the separator tape 5b is peeled when the moving mechanism 20 of the attaching mechanism 6 moves in one direction (arrow C direction) (FIG. 9D). e) to FIG. 10 (f) and FIG. 10 (g)), the separator tape 5b is gripped by the chuck means 23 when the moving body 20 returns to the other direction (arrow A direction) and the ACF tape 5 is fed (see FIG. 9 (a) and 9 (b)), the application of the ACF 5a to the application site 2a arranged along the longitudinal direction of the side edge of the substrate 2 is completed by one reciprocation of the moving body 20. ACF5a can be pasted with a short tact.

また、貼付機構部6を、基板2の側縁部の長手方向に沿って移動可能な移動体20に貼付手段21と剥離手段22とチャック手段23を配設した構成としているので、コンパクトな構成とすることができるとともに、従来例の圧着ヘッドを備えたものに比して、高精度の平行度や平面度が要求されず、大型基板を対象とするものでも簡単で低コストの構成とすることができ、また調整や保守も格段に簡単になって作業能率が向上し、生産性を向上することができる。   In addition, since the pasting mechanism section 6 has a configuration in which the pasting means 21, the peeling means 22 and the chuck means 23 are disposed on the movable body 20 movable along the longitudinal direction of the side edge of the substrate 2, a compact configuration. Compared to a conventional example equipped with a pressure-bonding head, high precision parallelism and flatness are not required, and even a large substrate is a simple and low-cost configuration. In addition, adjustment and maintenance are greatly simplified, the work efficiency is improved, and the productivity can be improved.

また、貼付手段21を、平面状の押圧部25を有するとともにヒータブロック27を有した押圧ユニット24と、押圧ユニット24を押圧状態と押圧回避状態との間で切り替える切替手段29とを備えた構成としたことで、平面状の押圧部25にて基板2の貼付部位2aにACFテープ5を押圧するので局部的に過大な荷重が作用する恐れがなく、適正な押圧力と熱を均一に付与することができ、またACF5a中の導電粒子5Aの分布密度に悪影響を与える恐れもないため、品質の高い貼り付け状態を高い信頼性をもって確保することができる。また、押圧が不要な位置に達した時点で押圧部25を基板2の貼付部位2aから離間させて押圧回避状態に切り替えるとともに、セパレータテープ5bの剥離動作は貼付部位2aの終端位置まで継続するようにしているので、貼付範囲外に影響を与えることなく貼付部位2aの全長にわたってACF5aを確実に貼り付けることができる。   The pasting means 21 includes a pressing unit 24 having a flat pressing portion 25 and a heater block 27, and a switching means 29 for switching the pressing unit 24 between a pressing state and a pressing avoiding state. As a result, the ACF tape 5 is pressed against the affixing portion 2a of the substrate 2 by the flat pressing portion 25, so that an excessive load is not applied locally, and appropriate pressing force and heat are uniformly applied. In addition, since there is no possibility of adversely affecting the distribution density of the conductive particles 5A in the ACF 5a, it is possible to ensure a high quality attached state with high reliability. Further, when the pressing portion 25 reaches a position where the pressing is unnecessary, the pressing portion 25 is separated from the applying portion 2a of the substrate 2 and switched to the pressing avoidance state, and the separation operation of the separator tape 5b is continued to the end position of the applying portion 2a. Therefore, the ACF 5a can be reliably pasted over the entire length of the pasting site 2a without affecting the outside of the pasting range.

また、押圧ユニット24を中間部の支軸26回りに揺動自在な構成とし、この押圧ユニット24の一端側に押圧部25を配設するとともに押圧ユニット24の他端側に切替手段29を配設し、押圧ユニット24を支軸26回りに回動付勢して押圧力を付与する押圧力付与手段と加熱手段を兼用するヒータブロック27を押圧部25と支軸26の間に配設した構成としたことで、簡単な構成にて押圧部25に対する押圧力の付与と加熱を行うことができる。また押圧ユニット24の他端側を押し下げる簡単な切替手段29によって押圧回避状態に切替えることもできる。また、逆方向の回動付勢力を付与可能とすることで押圧力調整も容易に行うことができる。かくして、簡単な構成にて容易に適切な貼付状態を確保することができる。   Further, the pressing unit 24 is configured to be swingable around the support shaft 26 in the intermediate portion, and the pressing unit 25 is disposed on one end side of the pressing unit 24 and the switching means 29 is disposed on the other end side of the pressing unit 24. And a heater block 27, which serves as both a pressing force applying means for applying a pressing force by rotating the pressing unit 24 around the supporting shaft 26 and a heating means, is disposed between the pressing portion 25 and the supporting shaft 26. With the configuration, it is possible to apply a pressing force to the pressing portion 25 and to perform heating with a simple configuration. It is also possible to switch to the pressing avoidance state by a simple switching means 29 that pushes down the other end side of the pressing unit 24. Moreover, the pressing force can be easily adjusted by making it possible to apply a reverse rotation biasing force. Thus, an appropriate sticking state can be easily ensured with a simple configuration.

また、図4に破線で示すように基板2の側縁部を支持する下受け部4に基板加熱手段34を配設すると、貼付部位2aにACF5aを貼り付ける際に、押圧部25にてACFテープ5側から基板2の貼付部位2aに貼り付けるACF5aを加熱するだけでなく、基板2の貼付部位2aもその下面側から加熱することで、高速にて貼り付ける場合にも所要の熱を確実に付与できて品質の良い貼付状体を確保することができる。   In addition, when the substrate heating means 34 is disposed on the lower receiving portion 4 that supports the side edge portion of the substrate 2 as indicated by a broken line in FIG. 4, the ACF 5 a is applied to the application site 2 a by the pressing portion 25. In addition to heating the ACF 5a to be attached to the attachment part 2a of the substrate 2 from the tape 5 side, the required heat can be ensured even when attaching at high speed by heating the attachment part 2a of the substrate 2 from the lower surface side. It is possible to ensure a high quality paste.

また、移動体20に、図4に破線で示すように貼付移動時の移動方向前方位置でACFテープ5のセパレータテープ5bに当接して転動するとともにACFテープ5の両側縁に係合してACFテープ5を貼付部位2aに貼り付ける前に案内する規制ローラ33を配設すると、貼付部位2aが長い場合でも、押圧部25にてACFテープ5を押圧しながら摺動してACF5aを貼り付ける間に、ACFテープ5が位置ずれするのを確実に規制することができるため、ACF5aをその幅方向に精度良く貼り付けることができる。   Further, as shown by a broken line in FIG. 4, the moving body 20 abuts against the separator tape 5 b of the ACF tape 5 at the front position in the moving direction at the time of sticking movement, and engages with both side edges of the ACF tape 5. If the regulating roller 33 that guides the ACF tape 5 before being applied to the application site 2a is provided, even if the application site 2a is long, the ACF 5a is applied by sliding while pressing the ACF tape 5 at the pressing portion 25. Since the displacement of the ACF tape 5 can be reliably controlled in the meantime, the ACF 5a can be attached in the width direction with high accuracy.

なお、以上の実施形態では、ACFテープ5を押圧する押圧部として平面状の押圧部25を適用した例を示したが、場合によってはローラを適用しても良い。しかし、上述のように平面状の押圧部25を適用することで均一で品質の高い貼付状態を安定して確保することができて好ましい。   In the above embodiment, an example in which the planar pressing portion 25 is applied as the pressing portion that presses the ACF tape 5 has been described. However, a roller may be applied depending on circumstances. However, it is preferable to apply the flat pressing portion 25 as described above, so that a uniform and high quality sticking state can be stably secured.

本発明の異方性導電材貼付装置及び貼付方法によれば、基板の側縁部に沿って移動する移動体に貼付手段と剥離手段とチャック手段を配設した構成であるため、高精度の平行度や平面度が要求されず、簡単で低コストの構成とすることができ、かつ移動体の1回の往復移動にて異方性導電材の貼り付けとセパレータテープの剥離と積層テープの送給を行って異方性導電材の貼付を完了することができ、短いタクトで異方性導電材を貼り付けることができるので、基板に異方性導電材を貼り付けて各種部品を実装する部品実装装置に好適に利用することができる。   According to the anisotropic conductive material sticking apparatus and the sticking method of the present invention, the sticking means, the peeling means, and the chuck means are arranged on the moving body that moves along the side edge of the substrate. Parallelism and flatness are not required, and a simple and low-cost configuration can be obtained. Also, the anisotropic conductive material can be attached, the separator tape can be peeled off, and the laminated tape can be removed by one reciprocation of the moving body. The feeding of the anisotropic conductive material can be completed by feeding, and the anisotropic conductive material can be pasted with a short tact, so the various parts can be mounted by sticking the anisotropic conductive material to the board It can utilize suitably for the component mounting apparatus to do.

1 異方性導電材貼付装置(ACF貼付装置)
1A 制御部
2 基板
2a 貼付部位
4 下受け部
5 積層テープ(ACFテープ)
5a 異方性導電材(ACF)
5b セパレータテープ
6 貼付機構部
7 テープ供給部
8 テープ案内手段
9 テープ回収部
20 移動体
21 貼付手段
22 剥離手段
23 チャック手段
24 押圧ユニット
25 押圧部
26 支軸
27 ヒータブロック(加熱手段、押圧力付与手段)
29 切替手段
31 操作手段(ソレノイド)
32 押圧力調整手段
33 規制ローラ
34 基板加熱手段
1 Anisotropic conductive material sticking device (ACF sticking device)
1A Control unit 2 Substrate 2a Affixed part 4 Bottom receiving part 5 Multilayer tape
5a Anisotropic conductive material (ACF)
5b Separator tape 6 Adhering mechanism 7 Tape supplying unit 8 Tape guiding unit 9 Tape collecting unit 20 Moving body 21 Adhering unit 22 Peeling unit 23 Chuck unit 24 Press unit 25 Press unit 26 Support shaft 27 Heater block (heating unit, applying pressure) means)
29 Switching means 31 Operating means (solenoid)
32 pressing force adjusting means 33 regulating roller 34 substrate heating means

Claims (9)

セパレータテープに異方性導電材を積層した積層テープを供給するテープ供給部と、テープ供給部から供給された積層テープを基板の側縁部にその長手方向に沿って設けられた貼付部位の上に配置するように案内するテープ案内手段と、積層テープをセパレータテープ側から押圧して異方性導電材を貼付部位に貼り付ける貼付手段と、貼り付けられた異方性導電材からセパレータテープを剥離する剥離手段と、剥離したセパレータテープを回収するテープ回収部とを備えた異方性導電材貼付装置において、
基板の側縁部の長手方向に沿って移動可能な移動体を設け、
移動体に、貼付手段と剥離手段及び異方性導電材を剥離したセパレータテープのチャック手段を配設し、
移動体の一方向の移動時に貼付手段にて異方性導電材を貼付部位に貼り付けるとともに剥離手段にて貼り付けられた異方性導電材からセパレータテープを剥離し、移動体の他方向への復帰移動時にチャック手段にてセパレータテープを把持して積層テープを送給することを特徴とする異方性導電材貼付装置。
A tape supply unit that supplies a laminated tape in which an anisotropic conductive material is laminated on a separator tape, and a laminated tape supplied from the tape supply unit on the side edge of the substrate along the longitudinal direction. A tape guiding means for guiding the laminated tape, a sticking means for pressing the laminated tape from the separator tape side to stick the anisotropic conductive material to the sticking site, and a separator tape from the stuck anisotropic conductive material. In an anisotropic conductive material sticking device comprising a peeling means for peeling, and a tape collecting unit for collecting the peeled separator tape,
Provide a movable body movable along the longitudinal direction of the side edge of the substrate,
In the moving body, a sticking means, a peeling means, and a separator tape chuck means from which the anisotropic conductive material has been peeled off,
At the time of moving the moving body in one direction, the anisotropic conductive material is applied to the application site by the attaching means and the separator tape is peeled off from the anisotropic conductive material attached by the removing means, and the moving body is moved in the other direction. An anisotropic conductive material sticking apparatus, wherein the laminated tape is fed by holding the separator tape by the chuck means during the return movement.
貼付手段は、積層テープをセパレータテープ側から基板の貼付部位に押圧する平面状の押圧部を有するとともに加熱手段に熱的に結合された押圧ユニットと、押圧ユニットを押圧状態と押圧回避状態との間で切り替える切替手段とを備えていることを特徴とする請求項1記載の異方性導電材貼付装置。   The affixing means includes a pressing unit that has a flat pressing part that presses the laminated tape from the separator tape side to the affixing part of the substrate and is thermally coupled to the heating means, and the pressing unit is in a pressing state and a pressing avoidance state. The anisotropic conductive material sticking device according to claim 1, further comprising switching means for switching between them. 押圧ユニットは、中間部が支軸回りに揺動自在に支持され、押圧ユニットの一端側に押圧部が配設されるとともに押圧ユニットの他端側に切替手段が配設され、押圧ユニットを支軸回りに回動付勢して押圧力を付与する押圧力付与手段と押圧力調整手段とが設けられていることを特徴とする請求項2記載の異方性導電材貼付装置。   The pressing unit is supported so that the intermediate portion can swing around the support shaft, the pressing unit is disposed on one end side of the pressing unit, and the switching unit is disposed on the other end side of the pressing unit to support the pressing unit. 3. An anisotropic conductive material pasting apparatus according to claim 2, further comprising: a pressing force applying unit that applies a pressing force by rotating and energizing the shaft and a pressing force adjusting unit. 基板の側縁部を支持する下受け部に基板加熱手段を配設したことを特徴とする請求項1〜3の何れか1つに記載の異方性導電材貼付装置。   The anisotropic conductive material sticking device according to any one of claims 1 to 3, wherein a substrate heating means is disposed in a lower receiving portion that supports a side edge portion of the substrate. 移動体に、貼付移動時の移動方向前方位置で積層テープのセパレータテープに当接して転動するとともに積層テープの両側縁に係合する規制ローラを配設したことを特徴とする請求項1〜4の何れか1つに記載の異方性導電材貼付装置。   The moving body is provided with a regulating roller that contacts and rolls against the separator tape of the laminated tape at a forward position in the moving direction during the sticking movement, and engages with both side edges of the laminated tape. The anisotropic conductive material sticking device according to any one of 4. セパレータテープに異方性導電材を積層した積層テープを、基板の側縁部にその長手方向に沿って設けられた貼付部位の上に配置する配置工程と、
基板の側縁部の長手方向に沿って移動する貼付手段にて一方向の移動時に積層テープをセパレータテープ側から押圧して貼付部位に異方性導電材を貼り付ける貼付工程と、
一方向に、貼付手段とともに移動する剥離手段にて貼り付けられた異方性導電材からセパレータテープを剥離する剥離工程と、
貼付手段の他方向への復帰移動時にチャック手段にて異方性導電材を剥離したセパレータテープを把持して積層テープを送給する送給工程とを
有することを特徴とする異方性導電材貼付方法。
An arrangement step of arranging a laminated tape obtained by laminating an anisotropic conductive material on a separator tape on a pasting portion provided along a longitudinal direction of the side edge portion of the substrate;
A sticking step of sticking the anisotropic conductive material to the sticking site by pressing the laminated tape from the separator tape side when moving in one direction with the sticking means moving along the longitudinal direction of the side edge of the substrate;
In one direction, a peeling step of peeling the separator tape from the anisotropic conductive material pasted by the peeling means moving with the sticking means,
An anisotropic conductive material having a feeding step of gripping a separator tape from which the anisotropic conductive material has been peeled off by the chuck means during feeding and returning to the other direction of the sticking means and feeding the laminated tape Pasting method.
貼付工程は、所定温度に加熱制御された平面状の押圧部にてセパレータテープ側から基板の貼付部位に積層テープを押圧することを特徴とする請求項6記載の異方性導電材貼付方法。   The anisotropic conductive material sticking method according to claim 6, wherein the sticking step presses the laminated tape from the separator tape side to the sticking portion of the substrate with a flat pressing portion controlled to be heated to a predetermined temperature. 剥離工程は、一方向に移動時に、貼付手段にて貼付部位に異方性導電材を貼り付けた後、貼付手段を基板の貼付部位から離間する方向に退避させるとともにあるいは、退避させた状態で貼付手段とともに一方向に移動する剥離手段をさらに一方向に移動させることで
剥離手段にて貼付部位の端までセパレータテープを剥離することを特徴とする請求項6又は7記載の異方性導電材貼付方法。
In the peeling process, after the anisotropic conductive material is pasted to the pasting site by the pasting means when moving in one direction, the pasting means is retracted in a direction away from the pasting site of the substrate or in a retracted state. The anisotropic conductive material according to claim 6 or 7, wherein the separator tape is peeled to the end of the pasting portion by the peeling means by further moving the peeling means moving in one direction together with the sticking means. Pasting method.
基板の側縁部を所定温度に加熱制御された下受け部にて支持して基板の側縁部の貼付部位を加熱することを特徴とする請求項6〜8の何れか1つに記載の異方性導電材貼付方法。   The side edge part of a board | substrate is supported by the receiving part by which heating control was carried out to predetermined temperature, and the sticking site | part of the side edge part of a board | substrate is heated, The any one of Claims 6-8 characterized by the above-mentioned. Anisotropic conductive material sticking method.
JP2009123487A 2009-05-21 2009-05-21 Anisotropic conductive material sticking device and method Pending JP2010272702A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014067169A1 (en) * 2012-10-29 2014-05-08 深圳市华星光电技术有限公司 Anisotropic conductive film stretching and clamping device, and clamping drum and clamping head thereof
JP2018047660A (en) * 2016-09-23 2018-03-29 日本ゼオン株式会社 Transfer method and transfer device for heat conductive sheet
TWI671849B (en) * 2014-05-28 2019-09-11 日商荏原製作所股份有限公司 Tape sticking apparatus and tape sticking method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014067169A1 (en) * 2012-10-29 2014-05-08 深圳市华星光电技术有限公司 Anisotropic conductive film stretching and clamping device, and clamping drum and clamping head thereof
TWI671849B (en) * 2014-05-28 2019-09-11 日商荏原製作所股份有限公司 Tape sticking apparatus and tape sticking method
JP2018047660A (en) * 2016-09-23 2018-03-29 日本ゼオン株式会社 Transfer method and transfer device for heat conductive sheet

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