JP2010251704A - 太陽電池の製造方法 - Google Patents
太陽電池の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 claims abstract description 88
- 238000005530 etching Methods 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 238000000059 patterning Methods 0.000 claims abstract description 22
- 239000007769 metal material Substances 0.000 claims abstract description 19
- 230000001678 irradiating effect Effects 0.000 claims abstract description 12
- 238000000151 deposition Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 31
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000000206 photolithography Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 230000000994 depressogenic effect Effects 0.000 abstract 3
- 239000004020 conductor Substances 0.000 description 22
- 238000002425 crystallisation Methods 0.000 description 15
- 230000008025 crystallization Effects 0.000 description 15
- 239000000969 carrier Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000013080 microcrystalline material Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
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Abstract
【解決手段】基板上に、透明導電性酸化物を常温で蒸着して、透明導電性層を形成する段階と、透明導電性層に、第1レーザ装置を利用してレーザビームを照射することによって、透明導電性層を結晶化する段階と、結晶化した透明導電性層を選択的にエッチングすることによって、透明導電性層の表面に多数の凹凸を形成する段階と、多数の凹凸を有する透明導電性層をパターニングして、単位セルに透明電極を形成する段階と、透明電極上に、pn接合半導体層を形成してパターニングする段階と、パターニングされたpn接合半導体層上に金属物質層を形成し、金属物質層をパターニングして、単位セルに対応した背面電極を形成する段階とを含む。
【選択図】図3B
Description
また、透明導電体層の表面結晶化により、透明導電体層自らの透過率、並びに内部及びコンタクト抵抗を減らすことによって、太陽電池の効率をさらに増大させることができる。
図3A〜図3Gは、本発明の実施の形態1に係る太陽電池の製造方法を、段階別に示す工程図である。
Claims (8)
- 基板上に、透明導電性酸化物を常温で蒸着して、透明導電性層を形成する段階と、
前記透明導電性層に、第1レーザ装置を利用してレーザビームを照射することによって、前記透明導電性層を結晶化する段階と、
前記結晶化した透明導電性層を選択的にエッチングすることによって、前記透明導電性層の表面に多数の凹凸を形成する段階と、
前記多数の凹凸を有する透明導電性層をパターニングして、単位セルに透明電極を形成する段階と、
前記透明電極上に、pn接合半導体層を形成してパターニングする段階と、
前記パターニングされたpn接合半導体層上に金属物質層を形成し、前記金属物質層をパターニングして、前記単位セルに対応した背面電極を形成する段階と、
を含むことを特徴とする太陽電池の製造方法。 - 前記透明導電性酸化物は、SnO:XまたはZnO:X(Xは金属物質)であることを特徴とする請求項1に記載の太陽電池の製造方法。
- 前記第1レーザ装置は、40〜60KHzの周波数と5〜10Wのパワーとを有し、1064nm波長帯のレーザビームを発生させるIR(Infra Red)レーザ装置であることを特徴とする請求項1に記載の太陽電池の製造方法。
- 前記透明導電性層及びpn接合半導体層のパターニングは、12W以上のパワーを有する第2レーザ装置を利用してレーザビームを照射することによって行われることを特徴とする請求項1に記載の太陽電池の製造方法。
- 前記pn接合半導体層のパターニング時、互いに隣接するpn接合半導体層の境界には前記透明電極が露出され、前記金属物質層のパターニング時に、その下部に位置する前記pn接合半導体層を共に除去することによって、前記透明電極が露出されることを特徴とする請求項1に記載の太陽電池の製造方法。
- 前記パターニングされたpn接合半導体層を形成する段階は、
前記透明電極上にp型半導体層を形成する段階と、
前記p型半導体層上にn型半導体層を形成する段階と、
前記n型及びp型半導体層にレーザビームを照射し、前記レーザビームが照射された部分を除去することによってパターニングする段階と、
を含むことを特徴とする請求項1に記載の太陽電池の製造方法。 - 前記p型半導体層と前記n型半導体層との間に、純粋非晶質半導体層を形成する段階をさらに含むことを特徴とする請求項6に記載の太陽電池の製造方法。
- 前記背面電極を形成する段階は、前記金属物質層を形成して、前記金属物質層にレーザビームを照射してパターニングを実施するか、または前記金属物質層上へのフォトレジストの塗布、露光、露光されたフォトレジストの現像、エッチング及びストリップの工程を含むフォトリソグラフィによりパターニングを実施することを特徴とする請求項1に記載の太陽電池の製造方法。
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WO2012102469A2 (en) * | 2011-01-24 | 2012-08-02 | Lg Innotek Co., Ltd. | Solar cell and manufacturing method of the same |
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US8563351B2 (en) * | 2010-06-25 | 2013-10-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for manufacturing photovoltaic device |
EP2469603A1 (en) * | 2010-12-27 | 2012-06-27 | Centre National de la Recherche Scientifique | Improved method for manufacturing a photovoltaic device comprising a TCO layer |
KR101283140B1 (ko) | 2011-01-26 | 2013-07-05 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
KR101774278B1 (ko) * | 2011-07-18 | 2017-09-04 | 엘지디스플레이 주식회사 | 플렉서블 표시장치의 제조방법 |
KR101517077B1 (ko) * | 2014-05-23 | 2015-05-04 | 인천대학교 산학협력단 | 고성능 투명 전극 소자 및 그 제조 방법 |
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- 2009-04-17 KR KR1020090033806A patent/KR20100115193A/ko not_active Application Discontinuation
- 2009-12-15 CN CN2009102540376A patent/CN101866979B/zh not_active Expired - Fee Related
- 2009-12-22 US US12/654,493 patent/US8173483B2/en active Active
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WO2012102469A2 (en) * | 2011-01-24 | 2012-08-02 | Lg Innotek Co., Ltd. | Solar cell and manufacturing method of the same |
WO2012102469A3 (en) * | 2011-01-24 | 2012-09-20 | Lg Innotek Co., Ltd. | Solar cell and manufacturing method of the same |
JP2014503132A (ja) * | 2011-01-24 | 2014-02-06 | エルジー イノテック カンパニー リミテッド | 太陽電池及びその製造方法 |
Also Published As
Publication number | Publication date |
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CN101866979B (zh) | 2012-05-23 |
JP5474525B2 (ja) | 2014-04-16 |
TW201039460A (en) | 2010-11-01 |
CN101866979A (zh) | 2010-10-20 |
US8173483B2 (en) | 2012-05-08 |
US20100267193A1 (en) | 2010-10-21 |
KR20100115193A (ko) | 2010-10-27 |
TWI413271B (zh) | 2013-10-21 |
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