JP2010249513A - Visual examination device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a visual examination device for sharply suppressing the effect due to the interference of light, performing the visual examination of an inspection target with extremely high precision, and enhancing inspection processing capacity while ensuring high inspection precision. <P>SOLUTION: The visual examination device 10 includes a transparent table T, a material supply unit A10, outer/inner peripheral side first posture correcting units B10 and B110, outer/inner peripheral side second posture correcting units C10 and C110, outer/inner peripheral side first imaging units D10 and D110, outer/inner peripheral side second imaging units E10 and E110, outer/inner peripheral side third imaging units F10 and F110, outer/inner peripheral side fourth imaging units G10 and G110, outer/inner peripheral side fifth imaging units H10 and H110, outer/inner peripheral side sixth imaging units I10 and I110, outer/inner peripheral side good article recovering units J10 and J110, outer/inner peripheral side defective article recovering units K10 and K110, and a control part 12. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an appearance inspection apparatus.

  2. Description of the Related Art Conventionally, an appearance inspection apparatus that inspects the appearance of a substantially rectangular parallelepiped electronic component such as a chip capacitor or a chip inductor is known (for example, see Patent Document 1 below). This appearance inspection apparatus includes a transparent table, upper and lower imaging blocks, side imaging blocks, and end imaging blocks.

  The upper and lower imaging blocks have a pair of first imaging means (camera and illumination unit) arranged so that the transparent table is placed between them, and simultaneously image the upper and lower surfaces of the electronic components on the transparent table. The side imaging block has a pair of second imaging means (camera and illumination unit) and two prisms, and the optical axes of the two cameras are opposed to each other by the two prisms, on the transparent table. Simultaneously image both sides of the electronic component. The end surface imaging block has a pair of cameras, and the pair of cameras are arranged at a predetermined angle with respect to the transparent table so as to face each end surface of the electronic component. Simultaneously image both end faces of the part.

  In this appearance inspection apparatus, since the electronic component is conveyed by the transparent table, the electronic component can be viewed from any direction toward the outer surface of the electronic component, and it is necessary to change the electronic component when imaging the electronic component. Absent. Therefore, the appearance inspection of electronic parts can be performed efficiently at high speed.

JP 2003-139516 A

  However, in the conventional visual inspection apparatus as described in Patent Document 1 above, since the upper and lower surfaces and both side surfaces of the electronic component are simultaneously imaged, the light from the illumination unit of one imaging means is captured by the other imaging device. It sometimes entered the camera of the means. Therefore, the light from the illumination unit of one imaging unit and the light reflected by the electronic component of the illumination unit of the other imaging unit enter the camera of the other imaging unit at the same time, and the respective lights interfere with each other. As a result, there is a possibility that the defect is erroneously recognized. In addition, the illumination unit of the pair of imaging means illuminates the imaging surface simultaneously with a narrow light projection angle from the opposite direction across the imaging surface of the electronic component. Defect detection accuracy may be reduced.

  Furthermore, in such an appearance inspection apparatus, it is required to increase the inspection processing capacity without increasing the size of the apparatus. However, simply by increasing the speed, the shadow due to the uneven shape existing on the surface of the electronic component is required. This causes a problem that the inspection accuracy is lowered so that the error is erroneously recognized as a defect.

  Therefore, the present invention significantly suppresses the influence of light interference, makes it possible to perform an appearance inspection of an inspection object with extremely high accuracy, and improves inspection processing capability while ensuring high inspection accuracy. An object of the present invention is to provide a visual inspection apparatus capable of performing the above.

  The appearance inspection apparatus according to the present invention has a first side surface, a second side surface, a third side surface, a fourth side surface, a fifth side surface, and a sixth side surface. The first side surface and the third side surface are the second side surface and the second side surface. Connecting the four side surfaces and connecting the fifth side surface and the sixth side surface and facing each other, the second side surface and the fourth side surface connecting the first side surface and the third side surface and the fifth side surface The sixth side surface is coupled to and opposed to each other, and the fifth side surface and the sixth side surface are coupled to the first side surface and the third side surface, and are coupled to the second side surface and the fourth side surface and are opposed to each other. An appearance inspection apparatus for inspecting an appearance of an inspection object having a substantially rectangular parallelepiped shape, a transparent table having a substantially circular shape that can rotate in a fixed direction about its own central axis, and a third side surface being transparent Place the inspection object on the transparent table so that the fourth side faces the center axis and abuts the table. An arrangement means for arranging the inspection object on the peripheral edge on the inner peripheral side of the surface of the transparent table and an image of the first side surface of the outer peripheral inspection object from above the transparent table. The first outer peripheral side imaging means and the inner peripheral side first imaging means for imaging the first side surface of the inner peripheral side inspection object from above the transparent table, and the first outer peripheral side inspection object from the outer side in the radial direction of the transparent table. An outer peripheral side second imaging means for imaging two side surfaces, an inner peripheral side second imaging means for imaging the second side surface of the inner peripheral side inspection object from the outside in the radial direction of the transparent table, and the outer peripheral side inspection object through the transparent table Outer peripheral side third imaging means for imaging the third side surface, inner peripheral side third imaging means for imaging the third side surface of the inner peripheral side inspection object through the transparent table, and outer peripheral side inspection from the inner side in the radial direction of the transparent table. The outer peripheral side fourth imaging means for imaging the fourth side surface of the object, the inner peripheral side fourth imaging means for imaging the fourth side surface of the inner peripheral side inspection object from the inside in the radial direction of the transparent table, and rotation of the transparent table The outer peripheral side fifth imaging means for imaging the fifth side surface of the outer peripheral side inspection object from the front side in the direction and the outer peripheral side fifth image capturing the fifth side surface of the inner peripheral side inspection object from the front side in the rotation direction of the transparent table. The imaging means, the outer peripheral side sixth imaging means for imaging the sixth side surface of the outer peripheral side inspection object from the rear side in the rotation direction of the transparent table, and the sixth of the inner peripheral side inspection object from the rear side in the rotation direction of the transparent table. An inner circumference-side sixth imaging means that images the side surface, and the outer circumference-side first imaging means and the inner circumference-side first imaging means take an image of the first side surface of the outer circumference-side inspection object and the inner circumference-side inspection object. First imaging unit for each and outside A first illumination unit that illuminates the first side surface of each of the circumferential inspection object and the inner circumferential inspection object, and the first illumination unit is provided with a pair of openings. A first holding member including an inner wall surface surrounding the imaging axis of the first imaging unit and a first holding member that is recessed from the one opening toward the other opening and surrounding the imaging axis of the first imaging unit. A plurality of first light projecting members that are held on the inner wall surface of the first holding member and irradiate light toward one opening side of the first holding member, and are positioned on the transparent table rather than the first imaging unit. The outer periphery side inspection object and the inner periphery side inspection object are close to each other, and one opening of the first holding member is on the first side surface of the outer periphery side inspection object and the inner periphery side inspection object located on the transparent table. The outer peripheral side second imaging means and the inner peripheral side second imaging means, which are respectively arranged to face each other , A second imaging unit that images the second side surface of the outer peripheral side inspection object and the inner peripheral side inspection object, respectively, and a pair that performs illumination of the second side surface of the outer peripheral side inspection object and the inner peripheral side inspection object, respectively. Each of the second illuminating sections, and the pair of second illuminating sections has a semi-cylindrical shape and includes a curved inner wall surface whose diameter increases from the proximal end side toward the distal end side. And a plurality of second light projecting members that are held on the inner wall surface of the second holding member and irradiate light toward the distal end side of the second holding member, and are on the transparent table than the second imaging unit. The outer periphery-side inspection object and the inner periphery-side inspection object are arranged near the outer periphery-side inspection object and the inner periphery-side inspection object, respectively, and the tip of the second holding member is positioned on the transparent table. The two inner walls face each other and face each other along the central axis. The outer peripheral side third imaging means and the inner peripheral side third imaging means are arranged on the outer peripheral side inspection object and the inner peripheral side, respectively. A third imaging unit that performs imaging of the third side surface of the inspection object, and a third illumination unit that performs illumination of the third side surface of the outer periphery side inspection object and the inner periphery side inspection object, respectively. The illuminating unit is provided with a pair of openings, and has an inner wall surface surrounding the imaging axis of the third imaging unit and having a concave curved shape that is recessed from one of the pair of openings toward the other opening. And a third holding member including a plurality of third holding members that are held on the inner wall surface of the third holding member so as to surround the imaging axis of the third imaging unit and irradiate light toward one opening side of the third holding member. An outer periphery including a light projecting member and located on the transparent table more than the third imaging unit While being closer to the side inspection object and the inner periphery inspection object, one opening of the third holding member is directed to the third side surface of the outer periphery inspection object and the inner periphery inspection object located on the transparent table. The outer peripheral side fourth imaging means and the inner peripheral side fourth imaging means are respectively provided with a fourth imaging unit for imaging the fourth side surface of the outer peripheral side inspection object and the inner peripheral side inspection object, and the outer peripheral side. A pair of fourth illumination units that respectively illuminate the fourth side surface of the inspection object and the inner periphery side inspection object, and the pair of fourth illumination units has a semi-cylindrical shape, from the base end side A fourth holding member including a curved inner wall surface that is enlarged in diameter toward the front end side, and a plurality of second members that are held on the inner wall surface of the fourth holding member and irradiate light toward the front end side of the fourth holding member. 4 light projecting members, and located on the transparent table than the fourth imaging unit. The outer peripheral side inspection object and the fourth side surface of the inner peripheral side inspection object, which are arranged near the peripheral side inspection object and the inner peripheral side inspection object, respectively, and the tip of the fourth holding member is located on the transparent table The outer peripheral side fifth imaging means and the inner peripheral side fifth imaging means are arranged on the outer peripheral side inspection object, respectively, so that the inner wall faces each other and the transparent table is placed along the central axis. And a fifth imaging unit that respectively images the fifth side surface of the inner peripheral side inspection object, and a pair of fifth illumination units that respectively illuminate the fifth side surface of the outer peripheral side inspection object and the inner peripheral side inspection object. And the pair of fifth illuminating portions has a semi-cylindrical shape, and includes a fifth holding member including a curved inner wall whose diameter is increased from the proximal end side toward the distal end side, and a fifth holding member Held on the inner wall surface of the fifth holding member toward the front end side of the fifth holding member And a plurality of fifth light projecting members that respectively irradiate the outer peripheral side inspection object and the inner peripheral side inspection object that are positioned on the transparent table with respect to the fifth imaging unit. The front end of the holding member is directed to the fifth side surface of the outer peripheral side inspection object and the inner peripheral side inspection object positioned on the transparent table, and the inner wall surfaces thereof face each other and the transparent table is placed along the central axis. The outer peripheral side sixth imaging means and the inner peripheral side sixth imaging means are respectively arranged, and the outer peripheral side inspection object and the inner peripheral side inspection object respectively capture the sixth imaging unit that images the sixth side surface, and the outer periphery side. A pair of sixth illumination units that respectively illuminate the sixth side surface of the side inspection object and the inner periphery side inspection object, and the pair of sixth illumination units has a semi-cylindrical shape and is on the proximal side The inner wall with a curved surface that is expanded in diameter from the Including a sixth holding member, and a plurality of sixth light projecting members that are held on the inner wall surface of the sixth holding member and irradiate light toward the distal end side of the sixth holding member. The outer periphery side inspection object and the inner periphery side inspection object which are respectively arranged near the outer periphery side inspection object and the inner periphery side inspection object located on the transparent table, and the tip of the sixth holding member is positioned on the transparent table. Facing the sixth side surface of the object, the inner wall faces each other and arranged so that the transparent table is placed along the central axis, respectively, the outer peripheral side first imaging means, the outer peripheral side second imaging means, the outer periphery The side third imaging means, the outer circumference side fourth imaging means, the outer circumference side fifth imaging means, and the outer circumference side sixth imaging means are arranged side by side along the peripheral edge of the transparent table so that they are in different positions. Rotating transparent table The outer peripheral side fifth imaging means and the outer peripheral side sixth imaging means are arranged side by side in the order of the direction, and the outer peripheral side fourth imaging means is adjacent to the outer peripheral side fifth imaging means or the outer peripheral side sixth imaging means. The outer peripheral side first imaging unit, the outer peripheral side second imaging unit, and the outer peripheral side third imaging unit are arranged to match the outer peripheral side fourth imaging unit, and the outer peripheral side fifth imaging unit and the outer peripheral side sixth imaging unit. On the opposite side, the outer peripheral side first imaging means and the outer peripheral side third imaging means are arranged side by side so as to be adjacent to each other with the outer peripheral side second imaging means interposed therebetween, and the inner peripheral side first imaging means The inner peripheral side second imaging means, the inner peripheral side third imaging means, the inner peripheral side fourth imaging means, the inner peripheral side fifth imaging means, and the inner peripheral side sixth imaging means are located at different positions. Outer peripheral side first imaging means, outer peripheral side second imaging means, outer peripheral side third imaging means, The side fourth imaging means, the outer peripheral side fifth imaging means, and the outer peripheral side sixth imaging means are arranged side by side along the peripheral edge of the transparent table on the inner peripheral side. The fifth imaging means and the inner circumference side sixth imaging means are arranged side by side so that the inner circumference side fourth imaging means is adjacent to the inner circumference side fifth imaging means or the inner circumference side sixth imaging means. The inner peripheral side first imaging means, the inner peripheral side second imaging means, and the inner peripheral side third imaging means are arranged with respect to the inner peripheral side fourth imaging means, and the inner peripheral side fifth imaging means and the inner peripheral side. On the side opposite to the sixth imaging means, the inner circumference side first imaging means and the inner circumference side third imaging means are arranged side by side so as to be adjacent to each other with the inner circumference side second imaging means interposed therebetween. It is characterized by.

  In recent years, electronic components that are inspection objects are required to be further downsized. However, as the inspection object becomes smaller, the proportion of the shadow caused by the unevenness of the surface of the inspection object becomes relatively larger, and it tends to be difficult to identify the shadow caused by the defect. However, in the appearance inspection apparatus according to the present invention, the illuminating units respectively included in the outer peripheral side / inner peripheral side first imaging means and the outer peripheral side / inner peripheral side third imaging means are changed from one opening to the other. A holding member including a concave curved surface (so-called dome shape) recessed toward the opening and including an inner wall surface surrounding the imaging axis, and one of the holding members held on the inner wall surface of the holding member so as to surround the imaging axis And a plurality of light projecting members that irradiate light toward the opening side. Also, a pair of outer imaging side / inner circumferential side second imaging means, outer circumferential side / inner circumferential side fourth imaging means, outer circumferential side / inner circumferential side fifth imaging means and outer circumferential side / inner circumferential side sixth imaging means respectively. The illumination unit has a semi-cylindrical shape, and includes a holding member including a curved inner wall whose diameter is increased from the base end side toward the tip end side, and is held on the inner wall surface of the holding member. And a plurality of light projecting members that irradiate light toward each other, and the tip of the holding member is arranged so as to face the side surface of the inspection object located on the transparent table, and the inner wall surfaces thereof face each other. Therefore, each side surface of the inspection object is irradiated with light from the light projecting member from various directions (angles). As a result, the influence of shading caused by the unevenness of the surface of the inspection object is reduced, so that the appearance inspection of the inspection object can be performed with extremely high accuracy. Further, in the appearance inspection apparatus according to the present invention, the outer peripheral side / inner peripheral side first imaging means, the outer peripheral side / inner peripheral side second imaging means, the outer peripheral side / inner peripheral side third imaging means, the outer peripheral side / inner peripheral side. The fourth imaging means, the outer peripheral side / inner peripheral side fifth imaging means and the outer peripheral side / inner peripheral side sixth imaging means are arranged side by side along the peripheral edge of the transparent table so that they are in different positions. ing. For this reason, as in the conventional appearance inspection apparatus described in Patent Document 1, a plurality of imaging means provided for imaging different surfaces of the electronic component are provided for the inspection object on the transparent table. The pair of opposing side surfaces are not imaged simultaneously. As a result, it is possible to greatly suppress the influence of light interference and perform an appearance inspection of an inspection object with extremely high accuracy.

  Further, at the peripheral edge of the transparent table, the outer peripheral side / inner peripheral side fifth imaging means and the outer peripheral side / inner peripheral side sixth imaging means are arranged in the order of rotation of the transparent table for both the outer peripheral side and the inner peripheral side. The transparent table is arranged side by side so that the outer peripheral side / inner peripheral side fourth imaging means is adjacent to the outer peripheral side / inner peripheral side fifth imaging means or the outer peripheral side / inner peripheral side sixth imaging means. The outer peripheral side / inner peripheral side first imaging means, the outer peripheral side / inner peripheral side second imaging means, and the outer peripheral side / inner peripheral side third imaging means are the outer peripheral side / inner peripheral side fourth imaging means. On the opposite side of the outer peripheral side / inner peripheral side fifth imaging means and the outer peripheral side / inner peripheral side sixth imaging means, the outer peripheral side / inner peripheral side first imaging means and the outer peripheral side / inner peripheral side third At the peripheral edge of the transparent table, the imaging means is placed between the outer peripheral side and inner peripheral side second imaging means and adjacent to each other. Nde is located. In this way, the outer peripheral side / inner peripheral side fifth imaging means and the outer peripheral side / inner peripheral side sixth imaging means are arranged side by side in the order of the rotation direction of the transparent table, and arranged at the peripheral edge of the transparent table. Therefore, the illumination part of the outer periphery side / inner periphery side fifth image pickup means and the illumination part of the outer periphery side / inner periphery side sixth image pickup means are back to back. Therefore, even if the outer circumference side / inner circumference side fifth imaging means and the outer circumference side / inner circumference side sixth imaging means are arranged side by side, the outer circumference side / inner circumference side fifth imaging means and the outer circumference side / inner circumference side are arranged. Light from the illumination unit in one of the sixth imaging units is difficult to enter the imaging unit in the other imaging unit.

  Further, the outer peripheral side / inner peripheral side fourth imaging means is arranged on the peripheral portion of the transparent table so as to be adjacent to the outer peripheral side / inner peripheral side fifth imaging means or the outer peripheral side / inner peripheral side sixth imaging means. Yes. Therefore, the light from the illuminating part of the outer peripheral side / inner peripheral side fifth imaging means or the illuminating part of the outer peripheral side / inner peripheral side sixth imaging means is mainly directed in the tangential direction of the outer periphery of the transparent table, and the outer peripheral side / inner peripheral side. The light from the illumination unit of the fourth imaging unit on the outer peripheral side / inner peripheral side is mainly directed in the radial direction of the transparent table, and the outer peripheral side / inner peripheral side fifth is not easily incident on the imaging unit of the fourth imaging unit. It is difficult to enter the imaging unit of the imaging unit or the imaging unit of the outer peripheral side / inner peripheral side sixth imaging unit.

  Further, the outer peripheral side / inner peripheral side fourth imaging means is opposite to the outer peripheral side / inner peripheral side fifth imaging means and the outer peripheral side / inner peripheral side sixth imaging means. The outer peripheral side / inner peripheral side first imaging means, the outer peripheral side / inner side third imaging means, with the outer peripheral side / inner peripheral side second imaging means in between and adjacent to each other. The peripheral second imaging means and the outer peripheral / inner peripheral third imaging means are arranged side by side along the peripheral edge of the transparent table. Therefore, one of the first imaging means on the outer peripheral side / inner peripheral side, the second imaging means on the outer peripheral side / inner peripheral side, the third imaging means on the outer peripheral side / inner peripheral side, and the fourth imaging means on the outer peripheral side / inner peripheral side. The illumination direction by the illumination unit in the unit and the illumination direction by the illumination unit in the imaging unit adjacent to the one imaging unit are spatially twisted. Therefore, one of the first imaging means on the outer peripheral side / inner peripheral side, the second imaging means on the outer peripheral side / inner peripheral side, the third imaging means on the outer peripheral side / inner peripheral side, and the fourth imaging means on the outer peripheral side / inner peripheral side. It is difficult for light from the illumination unit in the means to enter the imaging unit in the imaging unit adjacent to the one imaging unit. As a result, it is possible to further eliminate light interference between the imaging means.

  Further, the arrangement means arranges the inspection objects on the outer peripheral side and the inner peripheral side of the peripheral portion of the transparent table and arranges them in two rows, and arranges them on each of the outer peripheral inspection object and the inner peripheral inspection object. Since it is possible to perform parallel processing in each imaging unit, it is possible to improve the inspection processing capacity per unit time as compared with the case where processing is performed in a single row. As described above, it is possible to greatly suppress the influence of light interference, to perform the appearance inspection of the inspection object with extremely high accuracy, and to improve the inspection processing capability while ensuring high inspection accuracy.

  In the appearance inspection apparatus according to the present invention, a group including the outer peripheral side first imaging unit, the outer peripheral side second imaging unit, the outer peripheral side third imaging, and the outer peripheral side fourth imaging is defined as the outer peripheral side first group. The group composed of the fifth side imaging unit and the sixth side imaging unit on the outer side is defined as the second group on the outer side, and the first inner side imaging unit, the second inner side imaging unit, the third inner side imaging unit, and the inner side. When the group composed of the fourth peripheral imaging is the inner first group, and the group composed of the fifth inner imaging means and the sixth inner imaging means is the second inner group. It is preferable that the outer peripheral side first group and the outer peripheral side second group are arranged in this order in the rotation direction of the transparent table, and the inner peripheral side second group and the inner peripheral side first group are arranged in this order. Or it is preferable to arrange | position in order of an outer peripheral side 1st group and an inner peripheral side 2nd group in order of an outer peripheral side 2nd group and an outer peripheral side 1st group in the rotation direction of a transparent table. In this way, by changing the group arrangement on the outer peripheral side and the group arrangement on the inner peripheral side, the imaging means arranged on the same phase in consideration of the phase (angular position) around the rotation axis of the transparent table. (For example, the outer periphery side first imaging means and the inner periphery side first imaging means are of the same type) can be different between the outer periphery side and the inner periphery side. Thereby, it is possible to avoid interference between the imaging means on the outer peripheral side and the imaging means on the inner peripheral side in arrangement, and the entire apparatus can be made compact.

  In the appearance inspection apparatus according to the present invention, in the radial direction of the transparent table, the outer peripheral first imaging unit is adjacent to the inner peripheral imaging unit other than the inner peripheral third imaging unit, and the outer peripheral second imaging. The means may be adjacent to an inner peripheral imaging means other than the inner peripheral fourth imaging means, and the outer peripheral third imaging means may be adjacent to an inner peripheral imaging means other than the inner peripheral first imaging means. preferable. By arranging the imaging means whose imaging directions are opposite to each other on the outer peripheral side and the inner peripheral side so as not to be adjacent in the radial direction of the transparent table, light from the illumination unit in one imaging means is imaged in the other imaging means. It is difficult to enter the part.

  According to the present invention, it is possible to significantly suppress the influence of light interference, to perform an appearance inspection of an inspection object with extremely high accuracy, and to improve inspection processing capability while ensuring high inspection accuracy. Can do.

FIG. 1 is a top view showing the entire appearance inspection apparatus according to the present embodiment. FIG. 2 is a block diagram showing an appearance inspection apparatus according to the present embodiment. FIG. 3 is a perspective view showing the element supply unit. FIG. 4 is a perspective view showing the first posture correction unit. FIG. 5 is a perspective view showing the second posture correction unit. FIG. 6 is a diagram showing the first imaging unit in a partially broken view. FIG. 7 is a partially broken view showing the second imaging unit. FIG. 8 is a partially broken view showing the third imaging unit. FIG. 9 is a diagram illustrating a partially broken fourth imaging unit. FIG. 10 is a diagram showing the fifth imaging unit in a partially broken view. FIG. 11 is a partially broken view of the sixth imaging unit. FIG. 12 is a diagram showing a non-defective product collection box or a defective product collection box partially broken. FIG. 13 is a perspective view showing an element body that is an inspection object of the appearance inspection apparatus according to the present embodiment. FIG. 14 is a top view showing the whole of another example of the appearance inspection apparatus according to the present embodiment. FIG. 15 is a top view showing the entirety of another example of the appearance inspection apparatus according to the present embodiment. FIG. 16 is a top view showing the whole of another example of the appearance inspection apparatus according to the present embodiment.

  A preferred embodiment of an appearance inspection apparatus 10 according to the present invention will be described with reference to the drawings. The appearance inspection apparatus 10 arranges an element body (outer periphery side inspection object) 1 and an element body (inner periphery side inspection object) 101 constituting electronic components such as a chip capacitor and a chip inductor in a circular shape in two rows. The presence or absence of defects on the surfaces of the element bodies 1 and 101 is detected. In the description, the same reference numerals are used for the same elements or elements having the same function, and a duplicate description is omitted.

[Element structure]
First, the element body 1 arranged on the outer peripheral side and the element body 101 arranged on the inner peripheral side will be described with reference to FIG. The element bodies 1 and 101 function as an electrode pattern serving as an internal electrode for functioning as a capacitor when the element bodies 1 and 101 become electronic parts, and function as inductors when the element bodies 1 and 101 become electronic parts. A plurality of ceramic green sheets on which a conductor pattern to be an inner conductor is formed are laminated and pressure-bonded, fired at a predetermined temperature for a predetermined time, and then barrel-polished.

  The element body 1 has a substantially rectangular parallelepiped shape. The element body 1 includes a pair of side surfaces s1 (first side surface) and s3 (third side surface) facing the X-axis direction (hereinafter referred to as “height direction”) and a Y-axis direction (hereinafter referred to as “width direction”). ) Facing a pair of side surfaces s2 (second side surface), s4 (fourth side surface) and a pair of side surfaces s5 (fifth side surface), s6 ( 6th side). Therefore, the side surfaces s1, s2 and the side surfaces s3, s4 are positioned adjacent to each other, the side surfaces s1, s2, and the side surfaces s5, s6 are positioned adjacent to each other, and the side surfaces s3, s4 and the side surfaces s5, It is located adjacent to s6. The side surfaces s1 and s2 connect the side surface s3 and the side surface s4 and connect the side surface s5 and the side surface s6, and the side surfaces s3 and s4 connect the side surface s1 and the side surface s2 and connect the side surface s5 and the side surface s6. The side surfaces s5 and s6 connect the side surface s1 and the side surface s2 and connect the side surface s3 and the side surface s4.

  Here, it is preferable to set the size of the element body 1 so that the element body 1 has a size called 0402 or 0603 when the element body 1 becomes an electronic component. The height of the element body 1 is, for example, 0.2 mm. The width of the element body 1 can be set to, for example, about 0.2 mm to 0.5 mm, and the length of the element body 1 can be set to, for example, about 0.4 mm to 1 mm. Can be set to The ridge portion of the element body 1 is chamfered by a barrel polishing process when the element body 1 is formed, and is rounded.

  The element body 101 arranged on the inner peripheral side has the same configuration as that of the element body 1, and has a pair of side surfaces s1 (first side surface) and s3 (third side surface) opposed in the height direction, and a width. It has a pair of side surfaces s2 (second side surface) and s4 (fourth side surface) facing in the direction and a pair of side surfaces s5 (fifth side surface) and s6 (sixth side surface) facing in the length direction. .

[Configuration of visual inspection equipment]
Next, the configuration of the appearance inspection apparatus 10 will be described with reference to FIGS. 1 and 2. As shown in FIGS. 1 and 2, the appearance inspection apparatus 10 includes a transparent table T, an element body supply unit A10 (arranging means), an outer peripheral first posture correcting unit B10, and an inner peripheral first posture correcting device. Unit B110, outer peripheral side second posture correcting unit C10, inner peripheral side second posture correcting unit C110, outer peripheral side first imaging unit D10 (outer peripheral side first imaging means), and inner peripheral side first imaging unit D110. (Inner circumference first imaging means), outer circumference second imaging unit E10 (outer circumference second imaging means), inner circumference second imaging unit E110 (inner circumference second imaging means), and outer circumference side second imaging means. Three imaging units F10 (outer peripheral side third imaging means), inner peripheral side third imaging unit F110 (inner peripheral side third imaging means), outer peripheral side fourth imaging unit G10 (outer peripheral side fourth imaging means), Inner circumferential side fourth imaging unit G11 (Inner circumference side fourth imaging means), outer circumference side fifth imaging unit H10 (outer circumference side fifth imaging means), inner circumference side fifth imaging unit H110 (inner circumference side fifth imaging means), and outer circumference side fifth imaging means. 6 imaging units I10 (outer peripheral side sixth imaging means), inner peripheral side sixth imaging unit I110 (inner peripheral side sixth imaging means), outer peripheral side non-defective product recovery unit J10, inner peripheral side non-defective product recovery unit J110, An outer peripheral defective product recovery unit K10, an inner peripheral defective product recovery unit K110, and a control unit 12 are provided.

  The transparent table T is made of, for example, glass or synthetic resin. As shown in FIG. 1, the transparent table T has a substantially circular shape when viewed from above, and the diameter thereof can be set to, for example, about 40 cm to 50 cm.

  On the lower surface side of the transparent table T, for example, a servo motor (not shown) is disposed. The transparent table T is driven by this servo motor and rotates (spins) in the direction of arrow R in FIG. 1 about its own central axis A.

  In the vicinity of the periphery of the transparent table T, an element body supply unit A10 is disposed, and further along the rotation direction (arrow R direction) of the transparent table T, the outer peripheral side first posture correcting unit B10 and the outer peripheral side second posture. Correction unit C10, outer peripheral side first imaging unit D10, outer peripheral side second imaging unit E10, outer peripheral side third imaging unit F10, outer peripheral side fourth imaging unit G10, outer peripheral side fifth imaging unit H10, outer peripheral side sixth imaging unit I10, outer peripheral non-defective product recovery unit J10 and outer peripheral defective product recovery unit K10 are arranged in this order, and further, on the inner peripheral side thereof, an inner peripheral first posture correcting unit B110 and an inner peripheral second posture correcting unit. C110, inner circumference side first imaging unit D110, inner circumference side second imaging unit E110, inner circumference side third imaging unit F110, inner circumference side fourth imaging unit. DOO G110, fifth imaging unit H110 inner circumferential side, inner circumferential side sixth imaging unit I 110, the inner circumferential side non-defective recovering unit J110 and the inner circumferential side defective recovery unit K110 are arranged in this order (see FIG. 1).

[Configuration of element supply unit]
Next, the configuration of the element body supply unit A10 will be described with reference to FIG. The element body supply unit A10 includes a hopper A12, a first linear feeder A14, a ball feeder A16, an outer peripheral side second linear feeder A18, and an inner peripheral side second linear feeder A118.

  The hopper A12 has a funnel shape, and stores a predetermined amount of the element bodies 1 and 101. The bottom of the hopper A12 can be opened and closed. When the bottom is opened, the stored element bodies 1 and 101 are supplied to the first linear feeder A14. The hopper A12 is supplied with a large number of element bodies 1 and 101 by hand.

  The first linear feeder A14 includes a chute A14a and a drive unit A14b. The chute A14a has a U-shaped or V-shaped groove extending in the longitudinal direction, and the element body 1 is directed toward the ball feeder 14c by guiding the element bodies 1 and 101 along the groove. Transport. The drive unit A14b is an electromagnetic type having an electromagnet and a leaf spring (not shown), and vibrates by itself when the vibration of the electromagnet is amplified by the leaf spring. The drive unit A14b vibrates itself to vibrate the chute A14a and pushes the element body 1,101 supplied from the hopper A12 along the groove formed in the chute A14a to the ball feeder A16.

  The ball feeder A16 includes a ball A16a and a drive unit A16b, and is a so-called rotary feeder. The ball A16a has a mortar-shaped inclined surface whose diameter decreases as the side surface in the circumferential direction of the ball moves downward, and a spiral groove is formed on the side surface in the circumferential direction. The drive unit A16b is an electromagnetic type having an electromagnet and a leaf spring (not shown), and vibrates by itself when the vibration of the electromagnet is amplified by the leaf spring. The drive unit A16b vibrates the ball A16a by vibrating itself, aligns the posture of the element body 1 while gradually raising the element bodies 1 and 101 along the spiral groove formed in the ball A16a, The bodies 1 and 101 are pushed out to the outer peripheral side second linear feeder A18 or the inner peripheral side second linear feeder A118. It should be noted that the element body 1 and the element body 101 are not distinguished at the stage until they are pushed out to the outer circumference side second linear feeder A18 or the inner circumference side second linear feeder A118, and the outer circumference side second linear feeder A18 and The outer peripheral side and the inner peripheral side are distinguished by being pushed out to either the inner peripheral second linear feeder A118.

  The outer peripheral side second linear feeder A18 includes a chute A18a and a drive unit A18b. The chute A18a has a U-shaped or V-shaped groove extending in the longitudinal direction thereof, and the element body 1 is directed toward the transparent table T by guiding the outer element body 1 along the groove. Transport. The chute A18a extends along the tangential direction of the outer periphery of the transparent table T, and the tip thereof is located on the surface of the transparent table T. The drive unit A18b is an electromagnetic type having an electromagnet and a leaf spring (not shown), and vibrates by itself when the vibration of the electromagnet is amplified by the leaf spring. The drive unit A18b vibrates itself to vibrate the chute A18a and pushes the element body 1 supplied from the ball feeder A16 along the groove formed in the chute A18a onto the transparent table T. Thereby, the element body 1 is supplied to the peripheral edge portion on the surface of the transparent table T. In the present embodiment, the element body 1 is moved to the second side so that the side surface s3 of the element body 1 abuts on the surface of the transparent table T and the side surface s4 of the element body 1 faces the central axis A side of the transparent table T. It is supplied to the transparent table T by the linear feeder A18.

  The inner peripheral side second linear feeder A118 includes a chute A118a and a drive unit A118b. The chute A 118a has a U-shaped or V-shaped groove extending in the longitudinal direction thereof, and guides the element body 101 on the inner peripheral side along the groove, whereby the element body 101 is placed on the transparent table T. Transport toward. The chute A118a is arranged in parallel to the chute A18a on the inner peripheral side with respect to the chute A18a of the second outer linear feeder A18, and the tip thereof is located on the surface of the transparent table T. The drive unit A 118b is an electromagnetic type having an electromagnet and a leaf spring (not shown), and vibrates by itself when the vibration of the electromagnet is amplified by the leaf spring. The drive unit A118b vibrates itself to vibrate the chute A118a and pushes the element body 101 supplied from the ball feeder A16 along the groove formed in the chute A118a onto the transparent table T. As a result, the element body 101 is supplied to the inner peripheral side of the periphery of the surface of the transparent table T and from the position where the element body 1 is supplied. The distance between the element body 1 and the element body 101 in the radial direction is about 5 to 15 mm. In the present embodiment, the element body 101 is arranged on the inner periphery so that the side surface s103 of the element body 101 abuts the surface of the transparent table T and the side surface s104 of the element body 101 faces the central axis A side of the transparent table T. It is supplied to the transparent table T by the side second linear feeder A118.

  As shown in FIG. 1, the element supply unit A10 has a phase around the central axis A between the element 1 arranged on the outer peripheral side of the transparent table T and the element 101 arranged on the inner peripheral side. The element body 1 and the element body 101 can be supplied so as to have different arrangements. Specifically, the element body supply unit A10 supplies the element body 101 on the inner peripheral side so as to be arranged on the phase line PHL1 extending in the radial direction from the center axis A and having an equal interval around the center axis A. The outer peripheral element 1 is supplied so as to be arranged on the phase line PHL2 extending in the radial direction from the central axis A so as to pass through the gap between the element bodies 101 and having an equal interval around the central axis A. Can do. The element body supply unit A10 adjusts the supply speeds of the element body 1 and the element body 101 by adjusting the vibration speeds of the drive unit A18b and the drive unit A118b, and supplies them so that the phases are different from each other. In FIG. 1, for convenience of explanation, the elements after being recovered by the outer peripheral side non-defective product recovery unit J10, the inner peripheral side non-defective product recovery unit J110, the outer peripheral side defective product recovery unit K10, and the inner peripheral side defective product recovery unit K110. The positional relationship between the bodies 1 and 101 is indicated by phantom lines, and the phase lines PHL1 and PHL2 are given to these elementary bodies 1 and 101. The same positional relationship holds for the elementary bodies 1 and 101 before recovery.

[Configuration of first posture correction unit]
Subsequently, configurations of the outer peripheral side first posture correcting unit B10 and the inner peripheral side first posture correcting unit B110 will be described with reference to FIG. The outer peripheral first posture correction unit B10 includes a pair of posture correction arms B12 and B14.

  As shown in FIG. 4, the posture correction arm B12 includes a base B12a, an arm B12b, and a protrusion B12c. The base B12a extends in the radial direction of the transparent table T from the outside of the transparent table T toward the transparent table T so as to be substantially parallel to the surface of the transparent table T. The arm B12b is connected to the tip of the base B12a and extends along the tangential direction of the outer periphery of the transparent table T so as to be substantially parallel to the surface of the transparent table T. The protrusion B12c is connected to the tip of the arm B12b, and protrudes downward (on the surface side of the transparent table T) from the tip of the arm B12b.

  Here, both the base B12a and the arm B12b are disposed on the transparent table T in a state of being separated from the surface of the transparent table T by a predetermined distance. The separation distance between the base B12a and the arm B12b and the surface of the transparent table T is such that when the element 1 supplied on the transparent table T passes through the first posture correcting unit B10, the element 1 becomes the base B12a and the arm. It is set to such an extent that it does not come into contact with the portion B12b (in the present embodiment in which the side surface s1 of the element body 1 is in contact with the surface of the transparent table T, at least exceeding the height of the element body 1). On the other hand, the lower surface of the protrusion B12c (the surface facing the surface of the transparent table T) is slightly separated from the surface of the transparent table T.

  The posture correction arm B14 includes a base part B14a and an arm part B14b. The base B14a extends in the radial direction of the transparent table T from the outside of the transparent table T toward the transparent table T so as to be substantially parallel to the surface of the transparent table T. The arm portion B14b is connected to the tip of the base portion B14a and extends along the tangential direction of the outer periphery of the transparent table T so as to be substantially parallel to the surface of the transparent table T. The arm part B14b protrudes downward (surface side of the transparent table T) from the base part B14a.

  Here, the base B14a is arranged on the transparent table T in a state of being separated from the surface of the transparent table T by a predetermined distance. The separation distance between the base B14a and the surface of the transparent table T is such that the base body 1 does not contact the base B14a when the base body 1 supplied on the transparent table T passes through the first posture correcting unit B10. In the present embodiment in which the side surface s3 of the body 1 is in contact with the surface of the transparent table T, it is set to be at least about the height of the element body 1). On the other hand, the lower surface (the surface facing the surface of the transparent table T) of the arm portion B14b is slightly separated from the surface of the transparent table T.

  The tip of the posture correcting arm B12 (the end of the protruding portion B12c on the side facing the rotational direction of the transparent table T) B12d and the tip of the posture correcting arm B14 (the side of the arm B14b facing the rotating direction of the transparent table T) End B14c is directed toward the tip of the chute A18a of the outer peripheral second linear feeder A18 and is slightly separated from the tip. Further, the separation distance between the distal end B12d (protrusion B12c) of the posture correction arm B12 and the distal end B14c (arm B14b) of the posture correction arm B14 is such that the element body 1 can pass and the element body 1 that passes therethrough. It is set to such an extent that the posture is not greatly collapsed (in the present embodiment in which the side surface s4 of the element body 1 faces the central axis A side of the transparent table T, it is slightly wider than the width of the element body 1). .

  Since the posture correcting arms B12 and B14 are configured as described above, the projecting portion B12c and the arm portion B14b exhibit a function of guiding the element body 1, so that the element body 1 is moved from the chute A18a to the transparent table T. When the element body 1 passes through the step formed between the groove of the chute A 18a and the surface of the transparent table T when the element body 1 is supplied to the transparent table, the posture of the element body 1 is not destroyed by the step. Element body 1 is supplied to T. Further, since the base B12a is separated from the surface of the transparent table T by a predetermined distance, the base body 1 is inhibited by the base B12a of the posture correcting arm B12 after passing between the protrusion B12c and the arm B14b. The element body 1 is conveyed by the transparent table T without any change.

  The inner circumference first posture correction unit B110 is disposed at a position adjacent to the outer circumference first posture correction unit B10 on the inner circumference side, and has a pair of posture correction arms B112 and B114. The inner peripheral first posture correcting unit B110 has the same configuration as the outer peripheral first posture correcting unit B10, and the posture correcting arm B112 includes a base portion B112a, an arm portion B112b, and a protruding portion B112c. B114 also includes a base B114a, an arm B114b, and a tip B114c (toward the tip of the chute A118a of the inner peripheral second linear feeder A118). Since the posture correcting arms B112 and B114 are configured as described above, the projecting portion B112c and the arm portion B114b exhibit a function of guiding the element body 101. Therefore, the element body 101 is moved from the chute A 118a to the transparent table T. When the element body 101 passes through the step formed between the groove of the chute A 118a and the surface of the transparent table T when being supplied to the transparent table, the step of the element body 101 is not destroyed by the step. The element body 101 is supplied to T. Further, since the base B112a is separated from the surface of the transparent table T by a predetermined distance, the base body 101 is hindered by the base B112a of the posture correcting arm B112 after passing between the protrusion B112c and the arm B114b. The element body 101 is conveyed by the transparent table T without any change.

[Configuration of the second posture correction unit]
Subsequently, configurations of the outer peripheral side second posture correcting unit C10 and the inner peripheral side second posture correcting unit C110 will be described with reference to FIG. As shown in FIG. 5, the outer peripheral side second posture correcting unit C10 and the inner peripheral side second posture correcting unit C110 are configured integrally with each other, and the outer peripheral side second posture correcting unit C10 is a posture correcting member. C12, a pair of arms C14 and 16, an outer peripheral laser emitter C18, and an outer peripheral laser receiver C20. The inner peripheral second posture correcting unit C110 includes an attitude correcting member C112 and an inner peripheral side. It has a laser emitter C118 and an inner peripheral laser receiver C120.

  The posture correction member C12 of the outer peripheral side second posture correction unit C10 includes a base C12a having a substantially rectangular parallelepiped shape and a posture correction unit C12b provided at the tip of the base C12a. The posture correction member C12 is disposed on the periphery of the transparent table T so that the posture correction portion C12b is directed to the central axis A side of the transparent table T.

  The posture correction part C12b becomes thinner as it goes from the base end part connected to the base part C12a to the front end part on the central axis A side of the transparent table T. Therefore, the posture correction unit C12b has a triangular shape when viewed from the side. The tip C12c of the posture correction unit C12b has an arcuate shape that protrudes toward the central axis A side of the transparent table T (the direction from the base C12a toward the posture correction unit C12b). As the element body 1 is conveyed by the transparent table T while the side surface s2 of the outer element body 1 is in contact with the arcuate tip C12c, the inclination of the element body 1 is corrected. By correcting the posture of the element body 1 by the posture correction member C12, all the element bodies 1 passing through the posture correction member C12 have a desired posture (specifically, the width of the element body 1 with respect to the radial direction of the transparent table T). The inclination of the direction is within ± 5 °. Thereby, in any element body 1, it becomes possible to make imaging conditions substantially uniform.

  The posture correction member C112 of the inner peripheral side second posture correction unit C110 includes a base C112a having a substantially rectangular parallelepiped shape and a posture correction unit C112b provided at the tip of the base C112a. The posture correction member C112 is disposed at a position adjacent to the posture correction member C12 on the inner peripheral side of the transparent table T so that the posture correction portion C112b faces the central axis A side of the transparent table T. . A gap is formed between the tip C12c of the posture correcting member C12 and the outer peripheral end surface of the posture correcting member C112 so that the outer element body 1 can pass therethrough.

  The posture correction part C112b becomes thinner as it goes from the base end part connected to the base part C112a to the front end part on the central axis A side of the transparent table T. Therefore, the posture correction unit C112b has a triangular shape when viewed from the side. The tip C112c of the posture correction unit C112b has an arc shape that protrudes toward the central axis A side of the transparent table T (the direction from the base C112a toward the posture correction unit C112b). The element body 101 is conveyed by the transparent table T while the side surface s102 of the inner peripheral element body 101 is in contact with the arcuate tip C112c, whereby the inclination of the element body 101 is corrected. By correcting the posture of the element body 101 by the posture correction member C112, all the element bodies 101 passing through the posture correction member C112 have a desired posture (specifically, the width of the element body 101 with respect to the radial direction of the transparent table T). The inclination of the direction is within ± 5 °. Thereby, in any element body 101, it is possible to make the imaging conditions substantially uniform.

  The arm C14 has an L-shape when viewed from the side, and one end thereof is connected to the upper surface side of the base C12a of the posture correcting member C12, and the other end is the central axis A side of the transparent table T (posture from the base C12a). Extending in the direction toward the correction portion C12b). Therefore, the arm C14 is positioned on the surface side of the transparent table T. Further, a support portion C14a is formed at a substantially central position of the arm C14 so as to extend downward and to fix the base portion C112a of the posture correction member C112 to the distal end portion. An outer peripheral laser emitter C18 is provided between the support C14a of the arm C14 and the posture correcting member C12. The outer peripheral laser emitter C18 irradiates the laser beam L from the arm C14 toward the transparent table T and the outer peripheral laser receiver C20. The irradiation position of the laser beam L is slightly closer to the central axis A side of the transparent table T than the top of the tip C12c of the posture correction unit C12b, and the element body 1 on the outer peripheral side is located at the top of the tip C12c of the posture correction unit C12b When they are in contact with each other, the position is such that the laser beam L strikes the element body 1. Further, an inner peripheral laser light emitter C118 is provided at the other end of the arm C14. The inner peripheral laser emitter C118 irradiates the laser beam L100 from the arm C14 toward the transparent table T and the inner peripheral laser receiver C120. The irradiation position of the laser beam L100 is slightly closer to the central axis A side of the transparent table T than the top of the tip C112c of the posture correction unit C112b, and the element body 101 on the inner peripheral side is the top of the tip C112c of the posture correction unit C112b. Is in a position where the laser beam L100 strikes the element body 101.

  The arm C16 has an L shape when viewed from the side, and one end of the arm C16 is connected to the lower surface side of the base C12a of the posture correcting member C12, and the other end is the central axis A side of the transparent table T (posture from the base C12a). Extending in the direction toward the correction portion C12b). Therefore, the arm C16 is positioned on the back side of the transparent table T. An outer peripheral laser receiver C20 is provided at a position below the outer peripheral laser emitter C18 in the arm C16. The outer peripheral side laser receiver C20 detects whether or not the outer peripheral element body 1 has passed through the apex at the tip C12c of the posture correcting unit C12b, depending on whether or not the laser beam L from the outer peripheral side laser emitter C18 is incident. . Further, an inner circumferential laser receiver C120 is provided at the other end of the arm C16. The inner circumferential laser receiver C120 detects whether or not the element body 101 has passed through the apex at the tip C112c of the posture correcting section C112b, depending on whether or not the laser light L100 from the inner circumferential laser emitter C118 is incident.

[Configuration of the first imaging unit]
Next, configurations of the outer peripheral first imaging unit D10 and the inner peripheral first imaging unit D110 will be described with reference to FIG. The outer peripheral first imaging unit D10 is for imaging the side surface s1 of the outer peripheral element body 1, and the inner peripheral first imaging unit D110 images the side surface s101 of the inner peripheral element body 101. Is for. Imaging of the side surface s1 of the element body 1 by the outer peripheral side first imaging unit D10 is performed from above the transparent table T, and imaging of the side surface s101 of the element body 101 by the outer peripheral side first imaging unit D110 is performed above the transparent table T. Is done from. In addition, the inner peripheral first imaging unit D110 is disposed at a position adjacent to the outer peripheral first imaging unit D10 on the inner peripheral side of the transparent table T.

  As shown in FIG. 6, the outer peripheral first imaging unit D10 includes a camera D12 (first imaging unit) that performs imaging, a lens barrel D14 that houses a lens (not shown), and a dome-shaped illumination D16 (first illumination). The dome-shaped illumination D16 is disposed above the transparent table T so as to be closer to the outer element body 1 located on the transparent table T than the camera D12 and the lens barrel D14.

  The dome-shaped illumination D16 includes a bowl-shaped member D16a (first holding member) and a plurality of light projecting members D16b (first light projecting members). The bowl-shaped member D16a includes a side wall portion D16d provided with an opening D16c (one opening) and a base portion D16f provided with an opening D16e (the other opening) communicating with the lens barrel D14 in the central portion. The side wall portion D16d has a concave curved surface shape (for example, a spherical surface shape or a parabolic surface shape) whose inner wall surface is recessed toward the side from the opening D16c toward the opening D16e. The base D16f has a flat plate shape and is disposed on the side opposite to the opening D16c.

  The dome-shaped illumination D16 is disposed above the transparent table T so that the opening D16c of the bowl-shaped member D16a faces the side surface s1 of the outer element body 1 positioned on the transparent table T. Therefore, the imaging axis DL of the camera D12 is directed to the element body 1 on the outer peripheral side through the lens barrel D14, the opening D16e of the base portion D16f, the side wall portion D16d, and the opening D16c. That is, the imaging axis DL of the camera D12 is surrounded by the inner wall surface of the side wall portion D16d.

  The light projecting member D16b is, for example, a light emitting LED (Light Emitting Diode). The light projecting member D16b is disposed over the entire inner wall surface of the side wall portion D16d and the entire inner wall surface of the base portion D16f. Therefore, the light projecting member D16b also surrounds the imaging axis DL of the camera D12, and the light emitting member D16b disposed on the inner wall surface of the base D16f from the direction along the vertical line of the side surface s1 of the base body 1 The side surface s1 of the element body 1 is illuminated, and by the light projecting member D16b disposed on the inner wall surface of the side wall portion D16d, the element body from a direction exceeding 0 ° and less than 90 ° with respect to the normal of the side surface s1 of the element body 1 The side surface s1 of the element body 1 is illuminated, the reflected light from the side surface s1 of the element body 1 is introduced into the lens barrel D14 and the camera D12, and the side surface s1 of the element body 1 is imaged.

  Thus, the side surface s1 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s1 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s1 of the element body 1 can be clearly projected. . Further, the side surface s1 of the element body 1 is illuminated from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s1 of the element body 1, so that the side surface s1 of the element body 1 has various directions (angles). It is possible to clearly show defects that are illuminated from the side and connected from the side surface s1 of the element body 1 to the inside, such as cracks and chipping.

  The inner peripheral first imaging unit D110 has the same configuration as that of the outer peripheral first imaging unit D10 except that the position where the inner peripheral first imaging unit D110 is arranged and the imaging target are the inner peripheral element body 101. Camera D112 (first imaging unit) having the same configuration as D12, lens barrel D14, dome-shaped illumination D16, bowl-shaped member D16a, multiple light projecting members D16b, opening D16c, side wall D16d, opening D16e, and base D16f , Lens barrel D114, dome-shaped illumination D116 (first illumination portion), bowl-shaped member D116a (first holding member), multiple light projecting members D116b (first light projecting member), opening D116c (one opening), side wall A portion D116d, an opening D116e (the other opening), and a base D116f are provided.

[Configuration of Second Imaging Unit]
Next, configurations of the outer peripheral second imaging unit E10 and the inner peripheral second imaging unit E110 will be described with reference to FIG. The outer peripheral side second imaging unit E10 is for imaging the side surface s2 of the outer peripheral element body 1, and the inner peripheral second imaging unit E110 images the side surface s102 of the inner peripheral element body 101. Is for. Imaging of the side surface s2 of the element body 1 by the outer peripheral side second imaging unit E10 is performed from the outside in the radial direction of the transparent table T, and imaging of the side surface s102 of the element body 101 by the inner peripheral side second imaging unit E110 is performed. It is performed from the outside in the radial direction of the transparent table T. Further, the inner peripheral second imaging unit E110 is arranged at a position adjacent to the outer peripheral second imaging unit E10 on the inner peripheral side of the transparent table T. More specifically, the inner peripheral second imaging unit E110 is disposed between the array of the outer peripheral element body 1 and the inner peripheral element body 101 in the radial direction of the transparent table T.

  As shown in FIG. 7, the outer peripheral second imaging unit E10 includes a camera E12 (second imaging unit) that performs imaging, a lens barrel E14 that accommodates a lens (not shown), a prism adapter E16, and a pair of half-cameras. It has cylindrical illuminations E18 and E20 (second illumination part), and the pair of semi-cylindrical illuminations E18 and E20 are located on the inner peripheral side located on the transparent table T with respect to the camera E12, the lens barrel E14, and the prism adapter E16. The transparent table T is disposed outside the periphery of the transparent table T so as to be positioned closer to the element body 1.

  The prism adapter E16 is connected to the opening E16a into which the reflected light from the side surface s2 of the element body 1 is introduced, the right-angle prism E16b that reflects the reflected light introduced from the opening E16a, and the tip of the lens barrel E14. In addition, it includes an opening E16c that guides the reflected light reflected by the right-angle prism E16b toward the lens barrel E14 and the camera E12.

  The pair of semi-cylindrical lamps E18 and E20 are respectively composed of semi-cylindrical members E18a and E20a (second holding member) and a plurality of light projecting members E18b and E20b (second light projecting member). The semi-cylindrical members E18a and E20a include side wall portions E18c and E20c and base portions E18d and E20d, respectively. The side wall portions E18c and E20c have curved surfaces (for example, a spherical shape or a paraboloid shape) whose inner wall surfaces are increased in diameter from the base ends E18e and E20e of the semi-cylindrical members E18a and E20a toward the distal ends E18f and E20f. It is said that. The bases E18d and E20d have a flat plate shape and are arranged on the base ends E18e and E20e side of the semi-cylindrical members E18a and E20a. That is, the pair of semi-cylindrical lamps E18 and E20 are divided into two on a plane where the dome-shaped lamp D16 intersects both the opening D16c and the opening D16e. Therefore, the pair of semi-cylindrical illuminations E18 and E20 have division surfaces E18g and E20g, respectively.

  The pair of semi-cylindrical lamps E18 and E20 are arranged such that the dividing surfaces E18g and E20g are substantially parallel to the surface of the transparent table T. Further, the pair of semi-cylindrical illuminations E18, E20 has the end E18f, E20f of the semi-cylindrical members E18a, E20a toward the side surface s2 of the element body 1 located on the transparent table T, and the inner wall surfaces thereof face each other. The virtual plane V including the surface of the transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis EL of the camera E12 is changed by the right angle prism E16b through the lens barrel E14 and the opening E16c of the prism adapter E16, and then the opening E16a of the prism adapter E16 and the semi-cylindrical illumination E18 and the half It goes to the element body 1 through the space between the cylindrical illumination E20.

  The light projecting members E18b and E20b are, for example, light emitting LEDs. The light projecting members E18b and E20b are disposed over the entire inner wall surface of the side wall portions E18c and E20c and the entire inner wall surface of the base portions E18d and E20d. Therefore, the light projecting members E18b and E20b arranged on the inner wall surfaces of the base portions E18d and E20d illuminate the side surface s2 of the element body 1 from the direction along the perpendicular to the side surface s2 of the element body 1, and the side wall portion E18c. The side surface s2 of the element body 1 is illuminated from the direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s2 of the element body 1 by the light projecting members E18b and E20b arranged on the inner wall surface of the E20c. Reflected light from the side surface s2 of the element body 1 is introduced into the lens barrel E14 and the camera E12, and the side surface s2 of the element body 1 is imaged.

  Thus, the side surface s2 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s2 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s2 of the element body 1 can be clearly projected. . Further, the side surface s2 of the element body 1 is illuminated from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s2 of the element body 1, so that the side surface s2 of the element body 1 has various directions (angles). It is possible to clearly show a defect that is illuminated from the side and connected from the side surface s2 of the element body 1 to the inside, such as a crack or chipping.

  The inner peripheral second imaging unit E110 is disposed except for the position where the inner peripheral side second imaging unit E110 is disposed, the imaging target is the side surface s102 of the inner peripheral element body 101, and the position where the pair of semi-cylindrical illuminations E18 and E20 are disposed. Has the same configuration as that of the outer peripheral second imaging unit E10, and includes a camera E12, a lens barrel E14, a prism adapter E16, a pair of semi-cylindrical illuminations E18 and E20, an opening E16a, a right-angle prism E16b, and an opening E16c. , Semi-cylindrical members E18a and E20a, a plurality of light projecting members E18b and E20b, side wall portions E18c and E20c, base portions E18d and E20d, base ends E18e and E20e, tip ends E18f and E20f, and divided surfaces E18g and E20g. Camera E112 (second imaging unit), lens barrel E114, prism adapter E116, a pair of semi-cylindrical illuminations E118, E120 ( 2 illumination parts), an opening E116a, a right-angle prism E116b, an opening E116c, semi-cylindrical members E118a and E120a (second holding member), a plurality of light projecting members E118b and E120b (second light projecting member), and a side wall E118c. , E120c, bases E118d, E120d, base ends E118e, E120e, tips E118f, E120f, and split surfaces E118g, E120g. In the inner peripheral second imaging unit E100, the camera E112, the lens barrel E114, the prism adapter E116, and the semi-cylindrical illumination E118 are arranged above the transparent table T, and the semi-cylindrical illumination E120 is more than the transparent table T. It is arranged below. Specifically, the division surfaces E18g and E20g of the semi-cylindrical illumination E118 are arranged so as to be substantially parallel to the surface of the transparent table T, and the division surface E120g of the semi-cylindrical illumination E120 is substantially parallel to the lower surface of the transparent table T. Has been. Further, the pair of semi-cylindrical illuminations E18, E20 are such that the tips E18f, E20f of the semi-cylindrical members E18a, E20a face the side surface s102 of the element body 101 located on the transparent table T, and the inner wall faces each other. The transparent table T is disposed along the central axis A of the transparent table T. Therefore, the imaging axis EL100 of the camera E112 passes through the lens barrel E114 and the opening E116c of the prism adapter E116 and is changed in its direction by the right-angle prism E116b, and then transparent with the opening E116a and the semi-cylindrical illumination E118 of the prism adapter E116. It goes to the base body 101 through the table T.

[Configuration of Third Imaging Unit]
Next, configurations of the outer peripheral side third imaging unit F10 and the inner peripheral side third imaging unit F110 will be described with reference to FIG. The outer peripheral side third imaging unit F10 is for imaging the side surface s3 of the outer peripheral element body 1, and the inner peripheral third imaging unit F110 images the side surface s103 of the inner peripheral element body 101. Is for. Imaging of the side surface s3 of the element body 1 by the outer peripheral side third imaging unit F10 is performed from below the transparent table T through the transparent table T, and imaging of the side surface s103 of the element body 101 by the inner peripheral side third imaging unit F110 is performed. This is performed through the transparent table T from below the transparent table T. In addition, the inner peripheral third imaging unit F110 is arranged at a position adjacent to the outer peripheral third imaging unit F10 on the inner peripheral side of the transparent table T.

  As shown in FIG. 8, the outer peripheral side third imaging unit F10 includes a camera F12 (third imaging unit) that performs imaging, a lens barrel F14 that accommodates a lens (not shown), a prism adapter F16, and a dome-shaped illumination. F18 (third illuminating unit) and below the transparent table T so that the dome-shaped illumination F18 is located closer to the element body 1 located on the transparent table T than the camera F12, the lens barrel F14, and the prism adapter F16. Is arranged.

  The prism adapter F16 is connected to the opening F16a into which the reflected light from the side surface s3 of the element body 1 is introduced, the right angle prism F16b that reflects the reflected light introduced from the opening F16a, and the tip of the lens barrel F14. And an opening F16c that guides the reflected light reflected by the right-angle prism F16b toward the lens barrel F14 and the camera F12.

  The dome-shaped illumination F18 includes a flange-shaped member F18a (third holding member) and a plurality of light projecting members F18b (third light projecting members). The flange-shaped member F18a includes a side wall portion F18d provided with an opening F18c (one opening) and a base portion F18f provided with an opening F18e (the other opening) in the center portion. The side wall portion F18d has a concave curved surface shape (for example, a spherical surface shape or a parabolic surface shape) whose inner wall surface is recessed toward the side from the opening F18c toward the opening F18e. The base F18f has a flat plate shape and is disposed on the side opposite to the opening F18c.

  The dome-shaped illumination F18 is disposed below the transparent table T so that the opening F18c of the bowl-shaped member F18a faces the side surface s3 of the element body 1 located on the transparent table T. Therefore, the orientation of the imaging axis FL of the camera F12 is changed by the right angle prism F16b through the lens barrel F14 and the opening F16c of the prism adapter F16, and then the opening F16a of the prism adapter F16, the opening F18e of the base F18f, and the side wall. It goes to the element body 1 through the part F18d and the opening F18c. That is, the imaging axis FL of the camera F12 is surrounded by the inner wall surface of the side wall portion F18d.

  The light projecting member F18b is, for example, a light emitting LED. The light projecting member F18b is disposed over the entire inner wall surface of the side wall portion F18d and the entire inner wall surface of the base portion F18f. Therefore, the light projecting member F18b also surrounds the imaging axis FL of the camera F12, and the light emitting member F18b disposed on the inner wall surface of the base F18f from the direction along the vertical line of the side surface s3 of the element body 1 The side surface s3 of the element body 1 is illuminated, and by the light projecting member F18b disposed on the inner wall surface of the side wall portion F18d, the element body from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s3 of the element body 1 The side surface s3 of the element body 1 is illuminated, the reflected light from the side surface s3 of the element body 1 is introduced into the lens barrel F14 and the camera F12 via the right-angle prism F16b, and the side surface s3 of the element body 1 is imaged. .

  In this way, the side surface s3 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s3 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s3 of the element body 1 can be clearly projected. . Further, the side surface s3 of the element body 1 is illuminated from a direction that exceeds 0 ° and less than 90 ° with respect to the perpendicular to the side surface s3 of the element body 1, so that the side surface s3 of the element body 1 has various directions (angles). It is possible to clearly show defects that are illuminated from the side and connected from the side surface s3 of the element body 1 to the inside, such as cracks and chipping.

  The inner circumference side third imaging unit F110 has the same configuration as the outer circumference side third imaging unit F10 except that the position and the imaging target of the inner circumference side imaging unit F110 are the inner circumference side element body 101. F12, lens barrel F14, prism adapter F16, dome-shaped illumination F18, opening F16a, right angle prism F16b, opening F16c, bowl-shaped member F18a, multiple light projecting members F18b, opening F18c, side wall F18d, opening F18e, A camera F112 (third imaging unit) having the same configuration as the base F18f, a lens barrel F114, a prism adapter F116, a dome-shaped illumination F118 (third illumination unit), an opening F116a, a right-angle prism F116b, an opening F116c, and a bowl shape A member F118a (third holding member), a plurality of light projecting members F118b (third light projecting member), and an opening F118c (one opening) ), The side wall portion F118d, opening F118e (other opening), and a base F118f.

[Configuration of Fourth Imaging Unit]
Next, configurations of the outer peripheral side fourth imaging unit G10 and the inner peripheral side fourth imaging unit G110 will be described with reference to FIG. The outer peripheral side fourth imaging unit G10 is for imaging the side surface s4 of the outer peripheral element body 1, and the inner peripheral side fourth imaging unit G110 images the side surface s104 of the inner peripheral element body 101. Is for. Imaging of the side surface s4 of the element body 1 by the outer peripheral side fourth imaging unit G10 is performed from the inside in the radial direction of the transparent table T, and imaging of the side surface s104 of the element body 101 by the inner peripheral side fourth imaging unit G110 is performed. It is performed from the inside in the radial direction of the transparent table T. Further, the inner peripheral side fourth imaging unit G110 is disposed at a position adjacent to the outer peripheral side fourth imaging unit G10 on the inner peripheral side of the transparent table T. Further, the outer peripheral side fourth imaging unit G10 is disposed between the array of the outer peripheral element body 1 and the inner peripheral element body 101 in the radial direction of the transparent table T.

  As shown in FIG. 9, the outer peripheral side fourth imaging unit G10 includes a camera G12 (fourth imaging unit) that performs imaging, a lens barrel G14 that houses a lens (not shown), a prism adapter G16, and a pair of halves. It has cylindrical illuminations G18 and G20 (fourth illumination unit), and the pair of semi-cylindrical illuminations G18 and G20 is closer to the element body 1 located on the transparent table T than the camera G12, the lens barrel G14, and the prism adapter G16. It is arrange | positioned in the periphery vicinity of the transparent table T so that it may be located in.

  The prism adapter G16 is connected to the opening G16a into which the reflected light from the side surface s4 of the element body 1 is introduced, the right angle prism G16b that reflects the reflected light introduced from the opening G16a, and the tip of the lens barrel G14. In addition, it includes an opening G16c that guides the reflected light reflected by the right-angle prism G16b toward the lens barrel G14 and the camera G12. Since the element body 1 is smaller than the prism adapter G16, the right-angle prism G16b is slightly inclined toward the surface side of the transparent table T in the prism adapter G16 as shown in FIG. It has become.

  The pair of semi-cylindrical lights G18 and G20 are configured by semi-cylindrical members G18a and G20a (fourth holding member) and a plurality of light projecting members G18b and G20b (fourth light projecting member), respectively. The semi-cylindrical members G18a and G20a include side wall portions G18c and G20c and base portions G18d and G20d, respectively. The side wall portions G18c and G20c are curved surfaces (for example, spherical surfaces and parabolic surfaces) whose inner wall surfaces are expanded in diameter from the base ends G18e and G20e of the semi-cylindrical members G18a and G20a toward the distal ends G18f and G20f. It is said that. The bases G18d and G20d have a flat plate shape and are disposed on the base ends G18e and G20e side of the semi-cylindrical members G18a and G20a. That is, the pair of semi-cylindrical illuminations G18 and G20 is divided into two on a plane where the dome-shaped illumination D16 intersects both the opening D16c and the opening D16e. Therefore, the pair of semi-cylindrical lights G18 and G20 have division surfaces G18g and G20g, respectively.

  The pair of semi-cylindrical lights G18 and G20 are arranged such that the dividing surfaces G18g and G20g are substantially parallel to the surface of the transparent table T. In addition, the pair of semi-cylindrical lights G18 and G20 are arranged such that the tips G18f and G20f of the semi-cylindrical members G18a and G20a face the side surface s4 of the element body 1 positioned on the transparent table T, and the inner wall faces each other. The transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis GL of the camera G12 is changed by the right angle prism G16b through the lens barrel G14 and the opening G16c of the prism adapter G16, and then the opening G16a of the prism adapter G16 and the semi-cylindrical illumination G18 and the half It goes to the element body 1 through the space between the cylindrical illumination G20.

  The light projecting members G18b and G20b are, for example, light emitting LEDs. The light projecting members G18b and G20b are disposed over the entire inner wall surface of the side wall portions G18c and G20c and the entire inner wall surface of the base portions G18d and G20d. Therefore, the light projecting members G18b and G20b arranged on the inner wall surfaces of the base portions G18d and G20d illuminate the side surface s4 of the element body 1 from the direction along the perpendicular to the side surface s4 of the element body 1, and also the side wall portion G18c. The side surface s4 of the element body 1 is illuminated from the direction exceeding 0 ° and less than 90 ° with respect to the normal of the side surface s4 of the element body 1 by the light projecting members G18b and G20b arranged on the inner wall surface of the G20c. Reflected light from the side surface s4 of the element body 1 is introduced into the lens barrel G14 and the camera G12 via the right-angle prism G16b, and the side surface s4 of the element body 1 is imaged.

  In this way, the side surface s4 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s4 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s4 of the element body 1 can be clearly projected. . Further, the side surface s4 of the element body 1 is illuminated from the direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s4 of the element body 1, so that the side surface s4 of the element body 1 has various directions (angles). The defects connected to the inside from the side surface s4 of the element body 1 such as cracks and chipping can be clearly projected.

  The inner circumference side fourth imaging unit G110 has the same configuration as the outer circumference side fourth imaging unit G10 except that the arrangement position and the imaging target are the side surface s104 of the inner circumference side element body 101. A camera G12, a lens barrel G14, a prism adapter G16, a pair of semi-cylindrical illuminations G18 and G20, an opening G16a, a right-angle prism G16b, an opening G16c, semi-cylindrical members G18a and G20a, a plurality of light projecting members G18b, G20b, side walls G18c, G20c, bases G18d, G20d, base ends G18e, G20e, tips G18f, G20f, camera G112 (fourth image pickup unit) having the same configuration as the divided surfaces G18g, G20g, lens barrel G114, prism adapter G116, a pair of semi-cylindrical illuminations G118 and G120 (fourth illumination part), an opening G16a, and a right-angle prism G116. , Opening G116c, semi-cylindrical members G118a, G120a (fourth holding member), a plurality of light projecting members G118b, G120b (fourth light projecting member), side walls G118c, G120c, bases G118d, G120d, base ends G118e, G120e, tips G118f and G120f, and dividing surfaces G118g and G120g are provided.

[Configuration of Fifth Imaging Unit]
Next, configurations of the outer peripheral side fifth imaging unit H10 and the inner peripheral side fifth imaging unit H110 will be described with reference to FIG. The outer peripheral side fifth imaging unit H10 is for imaging the side surface s5 of the outer peripheral side element body 1, and the inner peripheral side fifth imaging unit H110 images the side surface s105 of the inner peripheral side element body 101. Is for. Imaging of the side surface s5 of the element body 1 by the outer peripheral side fifth imaging unit H10 is performed from the front side in the rotation direction R of the transparent table T, and imaging of the side surface s105 of the element body 101 by the inner periphery side fifth imaging unit H110 is performed. This is performed from the front side in the rotation direction R of the transparent table T.

  As shown in FIG. 10, the outer peripheral side fifth imaging unit H10 includes a camera H12 (fifth imaging unit) that performs imaging, a lens barrel H14 that accommodates a lens (not shown), a prism adapter H16, and a pair of halves. It has cylindrical illuminations H18 and H20 (fifth illumination unit), and the pair of semi-cylindrical illuminations H18 and H20 is closer to the element body 1 located on the transparent table T than the camera H12, the lens barrel H14, and the prism adapter H16. It is arrange | positioned in the periphery vicinity of the transparent table T so that it may be located in.

  The prism adapter H16 is connected to the opening H16a into which the reflected light from the side surface s5 of the element body 1 is introduced, the right-angle prism H16b that reflects the reflected light introduced from the opening H16a, and the tip of the lens barrel H14. And an opening H16c that guides the reflected light reflected by the right-angle prism H16b toward the lens barrel H14 and the camera H12. Since the element body 1 is smaller than the prism adapter H16 and the imaging of the side surface s5 of the element body 1 is performed from the front side in the rotation direction R of the transparent table T, the camera H12, the lens barrel H14, and the prism adapter are performed. The prism adapter H16 located at the most transparent table T side among the camera H12, the lens barrel H14, and the prism adapter H16 is tilted slightly toward the surface side of the transparent table T. Is separated from the surface by a predetermined distance (specifically, a distance through which the element body 1 can pass between the prism adapter H16 and the surface of the transparent table T).

  The pair of semi-cylindrical lamps H18 and H20 are respectively composed of semi-cylindrical members H18a and H20a (fifth holding member) and a plurality of light projecting members H18b and H20b (fifth light projecting member). The semi-cylindrical members H18a and H20a include side wall portions H18c and H20c and base portions H18d and H20d, respectively. The side wall portions H18c, H20c are curved surfaces (for example, spherical surfaces or parabolic surfaces) whose inner wall surfaces are expanded in diameter from the base end H18e, H20e side of the semi-cylindrical members H18a, H20a toward the distal end H18f, H20f side. It is said that. The base portions H18d and H20d have a flat plate shape and are disposed on the base ends H18e and H20e side of the semi-cylindrical members H18a and H20a. That is, the pair of semi-cylindrical lamps H18 and H20 is divided into two on a plane where the dome-shaped lamp D16 intersects both the opening D16c and the opening D16e. Therefore, the pair of semi-cylindrical lights H18 and H20 have division surfaces H18g and H20g, respectively.

  The pair of semi-cylindrical lamps H18, H20 is in a state in which the dividing surfaces H18g, H20g are inclined at a predetermined angle with respect to the surface of the transparent table T, specifically, the distal end H18f, H20f side is more proximal than the proximal end H18e, H20e side. Are also arranged so as to approach the transparent table T. Further, the pair of semi-cylindrical illuminations H18, H20 are arranged such that the tips H18f, H20f of the semi-cylindrical members H18a, H20a face the side surface s5 of the element body 1 located on the transparent table T, and the inner wall faces each other. The transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis HL of the camera H12 is changed by the right-angle prism H16b through the opening H16c of the lens barrel H14 and the prism adapter H16, and then the opening H16a of the prism adapter H16 and the semi-cylindrical illumination H18. It goes to the element body 1 through the space between the cylindrical illumination H20.

  The light projecting members H18b and H20b are, for example, light emitting LEDs. The light projecting members H18b and H20b are disposed over the entire inner wall surface of the side wall portions H18c and H20c and the entire inner wall surface of the base portions H18d and H20d. Therefore, the light projecting members H18b and H20b disposed on the inner wall surfaces of the base portions H18d and H20d illuminate the side surface s5 of the element body 1 from the direction along the perpendicular to the side surface s5 of the element body 1 and also the side wall portion H18c. The light projecting members H18b and H20b arranged on the inner wall surface of H20c illuminate the side surface s5 of the element body 1 from the direction of more than 0 ° and about 90 ° with respect to the perpendicular to the side surface s5 of the element body 1, Reflected light from the side surface s5 of the element body 1 is introduced into the lens barrel H14 and the camera H12 via the right-angle prism H16b, and the side surface s5 of the element body 1 is imaged.

  In this way, the side surface s5 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s5 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s5 of the element body 1 can be clearly projected. . Further, the side surface s5 of the element body 1 is illuminated from a direction that exceeds 0 ° and about 90 ° with respect to the perpendicular to the side surface s5 of the element body 1, so that the side surface s5 of the element body 1 has various directions (angles). It is possible to clearly project defects that are illuminated from the side and connected from the side surface s5 of the element body 1 to the inside, such as cracks and chipping.

  The inner circumference side fifth imaging unit H110 has the same configuration as the outer circumference side fifth imaging unit H10 except that the arrangement position and the imaging target are the side surface s105 of the inner circumference side element body 101. A camera H12, a prism adapter H16, a pair of semi-cylindrical lights H18, H20, an opening H16a, a right-angle prism H16b, a lens barrel H14, an opening H16c, semi-cylindrical members H18a, H20a, a plurality of light projecting members H18b, H20b, side walls H18c, H20c, bases H18d, H20d, base ends H18e, H20e, tips H18f, H20f, camera H112 (fifth image pickup unit) having the same configuration as the divided surfaces H18g, H20g, prism adapter H116, a pair of Semi-cylindrical illuminations H118, H120 (fifth illumination part), opening H116a, right-angle prism H116b, lens barrel H1 4, opening H116c, semi-cylindrical members H118a, H120a (fifth holding member), a plurality of light projecting members H118b, H120b (fifth light projecting member), side wall portions H118c, H120c, base portions H118d, H120d, base end H118e , H120e, tips H118f, H120f, and dividing surfaces H118g, H120g.

[Configuration of Sixth Imaging Unit]
Next, the configuration of the outer peripheral side sixth imaging unit I10 and the inner peripheral side sixth imaging unit I110 will be described with reference to FIG. The outer periphery side sixth imaging unit I10 is for imaging the side surface s6 of the element body 1, and the inner periphery side sixth imaging unit I110 is for imaging the side surface s106 of the element body 101. Imaging of the side surface s6 of the element body 1 by the outer periphery side sixth imaging unit I10 is performed from the rear side in the rotation direction R of the transparent table T, and imaging of the side surface s106 of the element body 101 by the inner periphery side sixth imaging unit I110 is performed. This is performed from the rear side in the rotation direction R of the transparent table T.

  As shown in FIG. 11, the outer peripheral side sixth imaging unit I10 includes a camera I12 (sixth imaging unit) that performs imaging, a lens barrel I14 that houses a lens (not shown), a prism adapter I16, and a pair of half It has cylindrical illuminations I18 and I20 (sixth illumination unit), and the pair of semi-cylindrical illuminations I18 and I20 is closer to the element body 1 located on the transparent table T than the camera I12, the lens barrel I14, and the prism adapter I16. It is arrange | positioned in the periphery vicinity of the transparent table T so that it may be located in.

  The prism adapter I16 is connected to the opening I16a into which the reflected light from the side surface s6 of the element body 1 is introduced, the right angle prism I16b that reflects the reflected light introduced from the opening I16a, and the tip of the lens barrel I14. And an opening I16c that guides the reflected light reflected by the right-angle prism I16b toward the lens barrel I14 and the camera I12. Since the element body 1 is smaller than the prism adapter I16 and the side surface s6 of the element body 1 is imaged from the rear side in the rotation direction R of the transparent table T, the camera I12, lens barrel I14, and prism adapter are used. The prism adapter I16 located at the most transparent table T side among the camera I12, the lens barrel I14, and the prism adapter I16 is tilted so that I16 is slightly inclined toward the surface side of the transparent table T. Is separated from the surface by a predetermined distance (specifically, a distance through which the element body 1 can pass between the prism adapter I16 and the surface of the transparent table T).

  The pair of semi-cylindrical illuminations I18 and I20 are respectively composed of semi-cylindrical members I18a and I20a (sixth holding member) and a plurality of light projecting members I18b and I20b (sixth light projecting member). The semi-cylindrical members I18a and I20a include side wall portions I18c and I20c and base portions I18d and I20d, respectively. The side wall portions I18c and I20c are curved surfaces (for example, spherical surfaces or parabolic surfaces) whose inner wall surfaces are expanded in diameter from the base ends I18e and I20e of the semi-cylindrical members I18a and I20a toward the distal ends I18f and I20f. It is said that. The bases I18d and I20d have a flat plate shape and are arranged on the base ends I18e and I20e side of the semi-cylindrical members I18a and I20a. That is, the pair of semi-cylindrical lamps I18 and I20 is divided into two on a plane where the dome-shaped lamp D16 intersects both the opening D16c and the opening D16e. Therefore, the pair of semi-cylindrical illuminations I18 and I20 have division surfaces I18g and I20g, respectively.

  The pair of semi-cylindrical lamps I18 and I20 are in a state where the dividing surfaces I18g and I20g are inclined at a predetermined angle with respect to the surface of the transparent table T, specifically, the distal ends I18f and I20f are closer to the proximal ends I18e and I20e. Are also arranged so as to approach the transparent table T. The pair of semi-cylindrical illuminations I18, I20 has semi-cylindrical members I18a, I20a with their tips I18f, I20f facing the side surface s6 of the element body 1 located on the transparent table T, and the inner wall surfaces of each other. The transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis IL of the camera I12 passes through the lens barrel I14 and the opening I16c of the prism adapter I16 and is changed by the right-angle prism I16b, and then the opening I16a and the semi-cylindrical illumination I18 of the prism adapter I16 and the half It goes to the element body 1 through the space between the cylindrical illumination I20.

  The light projecting members I18b and I20b are, for example, light emitting LEDs. The light projecting members I18b and I20b are arranged over the entire inner wall surface of the side wall portions I18c and I20c and the entire inner wall surface of the base portions I18d and I20d. Therefore, the light projecting members I18b and I20b arranged on the inner wall surfaces of the base portions I18d and I20d illuminate the side surface s6 of the element body 1 from the direction along the perpendicular to the side surface s6 of the element body 1, and the side wall portion I18c. The side surface s6 of the element body 1 is illuminated from the direction of more than 0 ° and about 90 ° with respect to the perpendicular to the side surface s6 of the element body 1 by the light projecting members I18b and I20b arranged on the inner wall surface of the I20c, Reflected light from the side surface s6 of the element body 1 is introduced into the lens barrel I14 and the camera I12 via the right-angle prism I16b, and the side surface s6 of the element body 1 is imaged.

  In this way, the side surface s6 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s6 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s6 of the element body 1 can be clearly projected. . Further, the side surface s6 of the element body 1 is illuminated from a direction exceeding 0 ° and approximately 90 ° with respect to the perpendicular to the side surface s6 of the element body 1, whereby the side surface s6 of the element body 1 has various directions (angles). The defect connected to the inside from the side surface s6 of the element body 1 such as cracks and chipping can be clearly projected.

  The inner circumference-side sixth imaging unit I110 has the same configuration as that of the outer circumference-side sixth imaging unit I10 except that the arrangement position and the imaging target are the side surface s106 of the inner circumference-side element body 101. A camera I12, a prism adapter I16, a pair of semi-cylindrical illuminations I18, H20, an opening I16a, a right-angle prism I16b, a lens barrel I14, an opening I16c, semi-cylindrical members I18a, I20a, a plurality of light projecting members I18b, I20b, side walls I18c, I20c, bases I18d, I20d, base ends I18e, I20e, tips I18f, I20f, camera I112 (sixth image pickup unit) having the same configuration as the divided surfaces I18g, I20g, prism adapter I116, a pair of Semi-cylindrical illuminations I118 and I120 (sixth illumination part), opening I116a, right-angle prism I116b, lens barrel I1 4, opening portion I116c, semi-cylindrical members I118a and I120a (sixth holding member), a plurality of light projecting members I118b and I120b (sixth light projecting member), side wall portions I118c and I120c, base portions I118d and I120d, base end I118e , I120e, tips I118f, I120f, and dividing surfaces I118g, I120g.

[Configuration of good product collection unit and defective product collection unit]
Next, the configuration of the outer peripheral side non-defective product recovery unit J10, the outer peripheral side defective product recovery unit K10, the inner peripheral side non-defective product recovery unit J110, and the inner peripheral side defective product recovery unit K110 will be described with reference to FIG. The outer peripheral side non-defective product collecting unit J10 is for recovering the outer peripheral side element body 1 determined to be a non-defective product as a result of the appearance inspection. This is for collecting the outer peripheral element body 1 determined to be non-defective. The inner peripheral side non-defective product recovery unit J110 is for recovering the inner peripheral side element body 101 that is determined to be a non-defective product as a result of the visual inspection, and the inner peripheral side defective product recovery unit K110 is used for visual inspection. As a result, the inner peripheral element body 101 determined to be defective is collected. The inner peripheral side non-defective product recovery unit J110 and the inner peripheral side defective product recovery unit K110 are located on the inner peripheral side of the outer peripheral side non-defective product recovery unit J10 and the outer peripheral side defective product recovery unit K10 and at a position out of phase in the rotational direction R. Has been placed.

  The outer peripheral side non-defective product recovery unit J10 and the outer peripheral side defective product recovery unit K10 include outer peripheral side ionizers J12 and K12 and recovery boxes J14 and K14, respectively. The outer peripheral side ionizer J12 (K12) is a device that ionizes the atmosphere and sprays a gas for neutralizing charges generated on the surface of the transparent table T. The outer peripheral side ionizer J12 (K12) is disposed above the periphery of the transparent table T. The nozzles of the outer peripheral side ionizer J12 (K12) are directed slightly toward the collection box J14 (K14) and slightly inclined toward the surface of the transparent table T. Therefore, when the ionized gas is blown out from the nozzle of the outer peripheral side ionizer J12 (K12), the gas is directed from the surface of the transparent table to the recovery box J14 (K14).

  The collection box J14 (K14) includes a housing J14a (K14a), a chute J14b (K14b) and a buffer sheet J14c (K14c) provided inside the housing J14a (K14a). The casing J14a (K14a) is a hollow member having a rectangular parallelepiped shape, and is formed of a conductive resin material. The casing J14a (K14a) has an opening J14d (K14d) formed by cutting out one ridge of the casing J14a (K14a). The housing J14a (K14a) is disposed outward from the periphery of the transparent table T so that the opening J14d (K14d) faces the periphery of the transparent table T. Note that the casing J14a (K14a) is grounded (grounded) so that electric charges can be released to the outside of the casing J14a (K14a).

  The chute J14b (K14b) has a triangular prism shape and is formed of a conductive resin material. The chute J14b (K14b) is inclined so as to go downward as it approaches the transparent table T in the housing J14a (K14a). Therefore, the element body 1 blown off into the casing J14a (K14a) by the outer peripheral side ionizer J12 (K12) is collected near the transparent table T in the casing J14a (K14a) by the chute J14b (K14b). At this time, since the element body 1 slides down the slope of the chute J14b (K14b), the impact generated in the element body 1 is reduced by blowing the element body 1 into the housing J14a (K14a). It has become.

  The buffer sheet J14c (K14c) is formed in a sheet shape from a conductive flexible material. The buffer sheet J14c (K14c) is attached to the top plate of the casing J14a (K14a) so that one main surface thereof faces the wall portion near the transparent table T in the casing J14a (K14a). Therefore, the element body 1 blown into the casing J14a (K14a) by the outer peripheral side ionizer J12 (K12) first collides with the buffer sheet J14c (K14c), and then slides down the slope of the chute J14b (K14b). It is recovered in J14a (K14a).

  The inner peripheral side non-defective product recovery unit J110 and the inner peripheral side defective product recovery unit K110 have the same configuration as the outer peripheral side non-defective product recovery unit J10 and the outer peripheral side defective product recovery unit K10, and the outer peripheral side ionizers J12, K12, Recovery boxes J14, K14, casings J14a, K14a, chutes J14b, K14b, buffer sheets J14c, K14c, openings J14d, K14d, inner peripheral side ionizers J112, K112, recovery boxes J114, K114, casing J114a , K114a, chutes J114b and K114b, buffer sheets J114c and K114c, and openings J114d and K114d.

[Configuration of control unit]
Next, the configuration of the control unit 12 will be described with reference to FIG. As shown in FIG. 2, the control unit 12 includes a servo motor connected to the transparent table T, a first linear feeder A14, a ball feeder A16, an outer peripheral side second linear feeder A18, an inner peripheral side second linear feeder A118, Outer peripheral laser emitter C18, inner peripheral laser emitter C118, outer peripheral laser receiver C20, inner peripheral laser receiver C120, outer peripheral first imaging unit D10, inner peripheral first imaging unit D110, outer peripheral first 2 imaging unit E10, inner circumference side second imaging unit E110, outer circumference side third imaging unit F10, inner circumference side third imaging unit F110, outer circumference side fourth imaging unit G10, inner circumference side fourth imaging unit G110, outer circumference side 5th imaging unit H10, inner circumference side fifth imaging unit H110, outer circumference side sixth imaging unit I10, inner circumference side sixth imaging unit I11 And the outer ionizer J12, K12, and is connected to the inner circumferential side ionizer J112, K112.

  The control unit 12 outputs a signal to the servo motor of the transparent table T, and controls the rotation and stop of the transparent table T. The control unit 12 outputs signals to the first linear feeder A14, the ball feeder A16, the outer peripheral side second linear feeder A18, and the inner peripheral side second linear feeder A118, and the first linear feeder A14, the ball feeder A16, and the outer peripheral side. The driving and stopping of the second linear feeder A18 and the inner peripheral side second linear feeder A118 are controlled.

  The control unit 12 outputs a signal to the outer peripheral side laser light emitter C18 and irradiates the outer peripheral side laser light receiver C20 with the laser light L. The outer laser receiver C20 receives the laser light L from the outer laser emitter C18 (when the outer element 1 does not pass through the outer second posture correcting unit C10). When a signal is output to the control unit 12 and the laser beam L from the outer peripheral laser emitter C18 is not received (with the passage of the outer peripheral second posture correcting unit C10 of the outer peripheral element 1, When the laser beam L is irradiated onto the element body 1), signal output to the control unit 12 is stopped. Here, the control unit 12 determines that the outer peripheral element body 1 has passed through the outer peripheral second posture correcting unit C10 when the signal output from the outer peripheral laser receiver C20 is stopped (trigger). In addition, it is necessary to rotate the transparent table T for the element body 1 to reach each of the outer peripheral imaging units D10, E10, F10, G10, H10, I10 and each of the outer peripheral recovery units J10, K10. Is calculated.

  When the control unit 12 determines that the element body 1 has reached each of the outer peripheral imaging units D10, E10, F10, G10, H10, and I10 based on the calculated rotation amount of the transparent table T, each illumination A signal is output to D16, E18, E20, F16, G18, G20, H18, H20, I18, and I20 to perform illumination with strobe light, and each camera D12, E12, F12, G12, H12, and I12 has a signal. Is output, and the side surfaces s1 to s6 of the element body 1 are imaged. And the control part 12 performs an image process based on the picked-up image data of the side surface s1-s6 of the element | base_body 1 imaged with each camera D12, E12, F12, G12, H12, I12, and the damage | wound etc. of the element | base_body 1 etc. The presence or absence of defects is inspected to determine whether the element body 1 is defective.

  If the control unit 12 determines that the element body 1 is a non-defective product and reaches the outer peripheral non-defective product recovery unit J10 based on the calculated rotation amount of the transparent table T and the appearance inspection result, a signal is sent to the outer peripheral ionizer J12. Then, the ionized gas is injected to the outer peripheral side ionizer J12. Thereby, the non-defective element body 1 on the outer peripheral side is blown off into the recovery box J14 by the ionized gas from the outer peripheral side ionizer J12 and recovered in the recovery box J14. On the other hand, if the control unit 12 determines that the element body 1 is a defective product and has reached the outer peripheral defective product recovery unit K10 based on the calculated rotation amount of the transparent table T and the appearance inspection result, the outer peripheral side ionizer A signal is output to K12, and the ionized gas is injected to the outer peripheral side ionizer K12. Thereby, the defective body 1 on the outer peripheral side is blown off into the recovery box K14 by the ionized gas from the outer peripheral side ionizer K12 and recovered in the recovery box K14.

  The control unit 12 outputs a signal to the inner circumferential laser light emitter C118 and irradiates the laser light L100 toward the inner circumferential laser receiver C120. In the inner peripheral laser receiver C120, when the laser beam L from the inner peripheral laser emitter C118 is received (the inner peripheral element 101 passes through the inner peripheral second posture correcting unit C110). If not, a signal is output to the control unit 12 and the laser beam L from the inner peripheral laser emitter C118 is not received (the inner peripheral second posture correction of the inner peripheral element 101). When the laser beam L is applied to the element body 101 as the unit C110 passes through, the signal output to the control unit 12 is stopped. Here, in the control unit 12, the inner peripheral element body 101 passes through the inner peripheral second posture correcting unit C110 when the signal output from the inner peripheral laser receiver C120 is stopped (trigger). And the transparent table T for how long the element body 101 reaches each of the inner peripheral imaging units D110, E110, F110, G110, H110, I110 and the inner peripheral recovery units J110, K110. Calculate whether it is necessary to rotate.

  When the control unit 12 determines that the element body 101 has reached each of the inner peripheral imaging units D110, E110, F110, G110, H110, and I110 based on the calculated rotation amount of the transparent table T, Signals are output to the illuminations D116, E118, E120, F116, G118, G120, H118, H120, I118, and I120 to perform illumination with strobe light, and the cameras D112, E112, F112, G112, H112, and I112 A signal is output to image each of the side surfaces s1 to s6 of the element body 101. Then, the control unit 12 performs image processing based on the captured image data of the side surfaces s101 to s106 of the element body 101 imaged by the cameras D112, E112, F112, G112, H112, and I112, and the element body 101 is scratched. The presence or absence of defects is inspected, and it is determined whether or not the element body 101 is defective.

  When the control unit 12 determines that the element body 101 is a non-defective product and has reached the inner peripheral side non-defective product recovery unit J110 based on the calculated rotation amount of the transparent table T and the appearance inspection result, the control unit 12 controls the inner peripheral side ionizer J112. A signal is output, and the ionized gas is injected to the inner peripheral side ionizer J112. Thereby, the non-defective element body 101 on the inner peripheral side is blown off into the recovery box J114 by the ionized gas from the inner peripheral side ionizer J112 and recovered in the recovery box J114. On the other hand, if the control unit 12 determines that the element body 101 is a defective product and reaches the inner peripheral defective product recovery unit K110 based on the calculated rotation amount of the transparent table T and the appearance inspection result, A signal is output to the side ionizer K112, and the ionized gas is injected to the inner circumference side ionizer K112. As a result, the defective inner body 101 on the inner peripheral side is blown off into the recovery box K114 by the ionized gas from the inner peripheral side ionizer K112 and recovered in the recovery box K114.

  In the present embodiment as described above, the element body 1 is arranged on the peripheral portion of the transparent table T so that the side surface s3 of the element body 1 is in contact with the transparent table T by the element body supply unit A10. The element body 1 and the element body 101 are transported by the transparent table T in which the element body 101 is arranged at the peripheral edge of the transparent table T so that the side surface s103 of the element body 101 is in contact with the transparent table T on the inner peripheral side of . Therefore, since the element body 1 can be visually recognized from any direction toward the six side surfaces s1 to s6 of the element body 1, each side surface of the element body 1 by the outer peripheral imaging units D10, E10, F10, G10, H10, and I10. It is no longer necessary to change the element body 1 when imaging s1 to s6. In addition, since the element body 101 can be viewed from any direction toward the six side surfaces s101 to s106 of the element body 101, each element 101 of the element body 101 by the respective inner peripheral imaging units D110, E110, F110, G110, H110, and I110. It is no longer necessary to change the element body 101 when imaging the side surfaces s101 to s106. As a result, the appearance inspection of the element body 101 can be performed efficiently at high speed.

  By the way, in recent years, the element bodies 1 and 101 which are electronic components are required to be further downsized. However, as the element bodies 1 and 101 become smaller, the proportion of shadows caused by the unevenness of the surfaces of the element bodies 1 and 101 increases relatively, and the shadows caused by defects tend to become difficult to identify. However, in this embodiment, the dome-shaped illuminations D16, D116, F16, and F116 that the outer peripheral side / inner peripheral side first imaging units D10, D110 and the outer peripheral side / inner peripheral side third imaging units F10, F110 have, respectively, A bowl-shaped member D16a, D116a, F16a, F116a including a concave curved inner wall surface recessed toward the openings D16e, D116e, F16e, F116e from the openings D16c, D116c, F16c, F116c, and a bowl-shaped member A plurality of light projecting members D16b, D116b, F16b, and F116b that irradiate light toward the openings D16c, D116c, F16c, and F116c of D16a, D116a, F16a, and F116a are included. Also, the outer peripheral side / inner peripheral side second imaging units E10, E110, the outer peripheral side / inner peripheral side fourth imaging units G10, G110, the outer peripheral side / inner peripheral side fifth imaging units H10, H110, and the outer peripheral side / inner peripheral side. A pair of semi-cylindrical illuminations E18, E118, E20, E120, G18, G118, G20, G120, H18, H118, H20, H120, I18, I118, I20, and I120 included in each of the sixth imaging units I10 and I110 are half. It has a cylindrical shape, and base ends E18e, E118e, E20e of semi-cylindrical members E18a, E118a, E20a, E120a, G18a, G118a, G20a, G120a, H18a, H118a, H20a, H120a, I18a, I118a, I20a, I120a. , E120e, G18e, G118e, G20e, G1 0e, H18e, H118e, H20e, H120e, I18e, I118e, I20e, I120e to tip E18f, E118f, E20f, E120f, G18f, G118f, G20f, G120f, H18f, H118f, H20f, H120f, I18f, I118f, I18f Semi-cylindrical members E18a, E118a, E20a, E120a, G18a, G118a, G20a, G120a, H18a, H118a, H20a, H120a, I18a, I118a, I20a, including a curved inner wall whose diameter is increased toward the I120f side, I120a and semi-cylindrical members E18a, E118a, E20a, E120a, G18a, G118a, G20a, G120a, H18a, H118a, H20a, H120a, I18a, 118a, I20a, I120a tips E18f, E118f, E20f, E120f, G18f, G118f, G20f, G120f, H18f, H118f, H20f, H120f, I18f, I118f, I118f, I20f, I120f Members E18b, E118b, E20b, E120b, G18b, G118b, G20b, G120b, H18b, H118b, H20b, H120b, I18b, I118b, I20b, I120b, respectively, and semi-cylindrical members E18a, E118a, E20a, E120a, G18a , G118a, G20a, G120a, H18a, H118a, H20a, H120a, I18a, I118a, I20a, I120a tips E18f, E118f, E20f, E12 0f, G18f, G118f, G20f, G120f, H18f, H118f, H20f, H120f, I18f, I118f, I20f, and I120f are side surfaces s1 to s6 of the element body 1 positioned on the transparent table T and each side surface s101 of the element body 101. It is arranged so that the inner wall faces each other as it goes to each of ˜s106. Therefore, the light projecting members D16b, D116b, E18b, E118b, E20b, E120b, F16b, F116b, G18b are applied to the side surfaces s1 to s6 of the element body 1 and the side surfaces s101 to s106 of the element body 101 from various directions (angles). , G118b, G20b, G120b, H18b, H118b, H20b, H120b, I18b, I118b, I20b, and I120b are respectively irradiated. As a result, the influence of shading caused by the unevenness of the surfaces of the element bodies 1 and 101 is reduced, so that the appearance inspection of the element bodies 1 and 101 can be performed with extremely high accuracy.

  In the present embodiment, the outer peripheral side first imaging unit D10, the outer peripheral side second imaging unit E10, on the outer peripheral side in the vicinity of the periphery of the transparent table T along the rotation direction (arrow R direction) of the transparent table T, The outer peripheral side third imaging unit F10, the outer peripheral side fourth imaging unit G10, the outer peripheral side fifth imaging unit H10, and the outer peripheral side sixth imaging unit I10 are arranged in this order, and the inner peripheral side first imaging unit D110, The inner circumference side second imaging unit E110, the inner circumference side third imaging unit F110, the inner circumference side fourth imaging unit G110, the inner circumference side fifth imaging unit H110, and the inner circumference side sixth imaging unit I110 are arranged in this order. For this reason, like the conventional appearance inspection apparatus described in Patent Document 1, the pair of opposing side surfaces of the element bodies 1 and 101 on the transparent table T are the same. It is not possible to capture to. As a result, the influence of light interference is greatly suppressed, and the appearance inspection of the element bodies 1 and 101 can be performed with extremely high accuracy.

  In particular, in order of the rotation direction (arrow R direction) of the transparent table T, the outer / inner peripheral fifth imaging units H10, H110 and the outer / inner peripheral sixth imaging units I10, I110 are arranged side by side so as to be adjacent to each other. Since they are arranged at the periphery of T, the semi-cylindrical illuminations H18, H118, H20, H120 and the semi-cylindrical illuminations I18, I118, I20, I120 are back to back. Therefore, even if the outer and inner peripheral fifth imaging units H10 and H110 and the outer and inner peripheral sixth imaging units I10 and I110 are arranged side by side, the outer and inner peripheral fifth imaging units H10 and H110 and Light from the semi-cylindrical illumination in one of the outer and inner peripheral sixth imaging units I10 and I110 is difficult to enter the camera in the other imaging unit.

  Further, the outer / inner periphery side fourth imaging units G10, G110 are arranged on the periphery of the transparent table T so as to be adjacent to the outer / inner periphery side fifth imaging units H10, H110. Therefore, the light from the semi-cylindrical illuminations H18, H118, H20, H120 is mainly directed in the tangential direction of the outer periphery of the transparent table T, and is difficult to enter the cameras G12, G112, and the semi-cylindrical illuminations G18, G118, Light from G20 and G120 is mainly directed in the radial direction of the transparent table T, and is difficult to enter the cameras H12 and H112.

  Further, on the opposite side of the outer / inner periphery side fourth imaging units G10, G110 from the outer / inner periphery side fifth imaging units H10, H110 and the outer / inner periphery side sixth imaging units I10, I110, The inner and outer first imaging units D10 and D110 and the outer / inner peripheral third imaging units F10 and F110 are arranged so that the outer / inner peripheral second imaging units E10 and E110 are in between and adjacent to each other. The circumferential first imaging units D10 and D110, the outer and inner circumferential second imaging units E10 and E110, and the outer and inner circumferential third imaging units F10 and F110 are arranged side by side on the periphery of the transparent table T. Therefore, the first imaging units D10 and D110 on the outer / inner circumferential side, the second imaging units E10 and E110 on the outer / inner circumferential side, the third imaging units F10 and F110 on the outer / inner circumferential side, and the fourth imaging unit on the outer / inner circumferential side. The illumination direction by the dome-shaped illumination or the semi-cylindrical illumination in one imaging unit of G10 and G110 and the illumination direction by the dome-shaped illumination or the semi-cylindrical illumination in the imaging unit adjacent to the one imaging unit are spatial to each other. There is a relationship of twist position. Accordingly, the first imaging units D10 and D110 on the outer / inner circumferential side, the second imaging units E10 and E110 on the outer / inner circumferential side, the third imaging units F10 and F110 on the outer / inner circumferential side, and the fourth imaging unit on the outer / inner circumferential side. Light from the dome-shaped illumination or the semi-cylindrical illumination in one of the imaging units G10 and G110 is difficult to enter the camera in the imaging unit adjacent to the one imaging unit. As a result, it is possible to further eliminate light interference between the imaging units.

  Here, since the refractive index in the atmosphere of the appearance inspection apparatus 10 and the refractive index in the transparent table T are generally different from each other, the light that passes through the inside of the transparent table T and reaches the element body 1 101 is the appearance inspection apparatus. The light is refracted at the boundary surface between the atmosphere 10 and the transparent table T. Therefore, the illumination conditions between the light that passes through the transparent table T and reaches the element bodies 1 and 101 and the light that does not pass through the transparent table T and reaches the element bodies 1 and 101 directly are different. Can happen. However, in the present embodiment, the outer and inner peripheral second imaging units E10 and E110, the outer and inner peripheral fourth imaging units G10 and G110, the outer and inner peripheral fifth imaging units H10 and H110, and the outer and inner The sixth peripheral imaging units I10 and I110 have a pair of semi-cylindrical illuminations E18, E118, E20, E120, G18, G118, G20, G120, H18, H118, H20, H120, I18, I118, I20, I120, respectively. Each pair of semi-cylindrical lights E18, E118, E20, E120, G18, G118, G20, G120, H18, H118, H20, H120, I18, I118, I20, I120 are facing each other. In addition, the transparent table T or the virtual plane V including the surface of the transparent table T is interposed along the central axis A. It is arranged to. Therefore, the angle, position, etc. of one or both of the pair of semi-cylindrical lights E18, E118, E20, E120, G18, G118, G20, G120, H18, H118, H20, H120, I18, I118, I20, I120 By arranging a pair of semi-cylindrical illuminations E18, E118, E20, E120, G18, G118, G20, G120, H18, H118, H20, H120, I18, I118, I20, I120 due to light interference It becomes possible to make the illumination conditions of the element bodies 1 and 101 closer to each other while suppressing the influence.

  Further, in the element supply unit A10, the element bodies 1 and 101 are arranged on the outer peripheral side and the inner peripheral side of the peripheral portion of the transparent table and arranged in two rows, and are arranged for each of the element body 1 and the element body 101. Since each imaging unit can perform parallel processing, the inspection processing capability per unit time can be improved as compared with the case where processing is performed in a single row. As described above, it is possible to greatly suppress the influence of light interference, to perform the appearance inspection of the inspection object with extremely high accuracy, and to improve the inspection processing capability while ensuring high inspection accuracy.

  In addition, here, the outer peripheral second imaging unit E10 images the side surface s2 of the element body 1 from the outside in the radial direction of the transparent table T, and the tips of the semi-cylindrical members E18a and E20a are located on the transparent table T. Since the pair of semi-cylindrical illuminations E18 and E20 are arranged so as to face the side surface s2 of the body 1, the pair of semi-cylindrical illuminations E18 and E20 are located outward in the radial direction of the transparent table T. It will be. In the present embodiment, the pair of semi-cylindrical lights E18 and E20 are arranged so as to place a virtual plane V including the surface of the transparent table T along the central axis A of the transparent table T. Therefore, when removing the transparent table T and maintaining the appearance inspection apparatus 10, the transparent table T can be passed between the pair of semi-cylindrical lights E18 and E20. Therefore, maintenance of the appearance inspection apparatus 10 can be easily performed.

  In the present embodiment, the imaging units D10, E10, F10, G10, H10, I10, D110 are obtained by the outer / inner peripheral good product recovery units J10, J110 and the outer / inner peripheral defective products recovery units K10, K110. , E110, F110, G110, H110, and I110, the ionized gas is sprayed onto the element bodies 1 and 101 after the side surfaces s1 to s6 and s101 to s106 have been imaged. The body 1,101 is removed and collected in the collection boxes J14, K14, J114, and K114. Here, when non-ionized gas is sprayed on the transparent table T, friction may be generated between the sprayed gas and the surface of the transparent table T, and the surface of the transparent table T may be charged. In this way, when the surface of the transparent table T is charged, foreign matters such as dust in the atmosphere of the appearance inspection apparatus 10 and broken pieces of the element body 1 101 adhere to the surface of the transparent table T, and the transparent table T is contaminated. There is a concern that the element bodies 1, 101 themselves adhere to the surface of the transparent table T, making it difficult to remove the element bodies 1, 101 from the transparent table T. However, in the present embodiment, since ionized gas is blown against the element bodies 1, 101, charging of the surface of the transparent table T can be removed (static elimination), and foreign objects and elements 1, 101 can be removed. Adhesion to the transparent table T can be suppressed, and charging of the surface of the transparent table T itself can be prevented.

  Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments. For example, in the present embodiment, the appearance of the element body 1, 101 is inspected by the appearance inspection apparatus 10, but the present invention is also applied to various electronic components completed by further providing electrodes on the outer surface of the element body 1, 101. The invention can be applied.

  In the present embodiment, the side surfaces s3 and s103 of the element bodies 1 and 101 are in contact with the surface of the transparent table T, and the side surfaces s4 and s104 of the element bodies 1 and 101 are directed toward the central axis A side of the transparent table T. The element bodies 1, 101 are transparent tables (so that the width direction of the element bodies 1, 101 is along the radial direction of the transparent table T and the height direction of the element bodies 1, 101 is along the perpendicular of the surface of the transparent table T). Although it was supplied to T, the postures of the element bodies 1 and 101 supplied to the transparent table T may be other than this. For example, the side surfaces s3 and s103 of the element bodies 1 and 101 are in contact with the surface of the transparent table T, and the side surfaces s6 and s106 of the element bodies 1 and 101 are directed toward the central axis A side of the transparent table T (element bodies 1 and 101). May be along the radial direction of the transparent table T and the length direction of the element body 1,101 may be along the perpendicular of the surface of the transparent table T), and the side surfaces s4, s104 of the element body 1,101 may be transparent. The side surfaces s1 and s101 of the element bodies 1 and 101 are in contact with the surface of the table T and face the central axis A side of the transparent table T (the height direction of the element bodies 1 and 101 is along the radial direction of the transparent table T). The width direction of the element bodies 1, 101 may be along the perpendicular of the surface of the transparent table T), and the side surfaces s 4, s 104 of the element bodies 1, 101 abut against the surface of the transparent table T and Side surface s6, s1 6 is directed to the central axis A side of the transparent table T (the length direction of the elements 1, 101 is along the radial direction of the transparent table T, and the width direction of the elements 1, 101 is perpendicular to the surface of the transparent table T. The side surfaces s6, s106 of the element body 1,101 abut against the surface of the transparent table T, and the side surfaces s1, s101 of the element body 1,101 are directed toward the central axis A side of the transparent table T (see FIG. The height direction of the element bodies 1, 101 may be along the radial direction of the transparent table T and the length direction of the element bodies 1, 101 may be along the perpendicular of the surface of the transparent table T). The side surfaces s6 and s106 are in contact with the surface of the transparent table T, and the side surfaces s4 and s104 of the element bodies 1 and 101 are directed toward the central axis A side of the transparent table T (the width direction of the element bodies 1 and 101 is that of the transparent table T). Body 1 along the radial direction The length direction of 101 may have been) along the normal of the surface of the transparent table T.

  In the present embodiment, the outer and inner peripheral first imaging units D10 and D110 and the outer and inner peripheral second are disposed in the vicinity of the peripheral edge of the transparent table T along the rotation direction (arrow R direction) of the transparent table T. Imaging units E10 and E110, outer and inner peripheral third imaging units F10 and F110, outer and inner peripheral fourth imaging units G10 and G110, outer and inner peripheral fifth imaging units H10 and H110, and outer and inner peripheral sides The sixth imaging units I10 and I110 are arranged in this order, but are not limited to this arrangement. Here, the outer / inner peripheral side fifth imaging units H10, H110 and the outer / inner peripheral side sixth imaging units I10, I110 are configured, and the outer / inner peripheral side fifth in order of the rotation direction of the transparent table T. The arrangement groups in which the imaging units H10 and H110 and the outer and inner peripheral side sixth imaging units I10 and I110 are arranged side by side are defined as an outer peripheral side second group and an inner peripheral side second group, respectively. Side first imaging units D10 and D110, outer and inner peripheral second imaging units E10 and E110, outer and inner peripheral third imaging units F10 and F110, and outer and inner peripheral fourth imaging units G10 and G110. The outer and inner peripheral fourth imaging units G10 and G110 are adjacent to the outer and inner peripheral fifth imaging units H10 and H110 or the outer and inner peripheral sixth imaging units I10 and I110. The outer / inner peripheral first imaging units D10, D110, the outer / inner peripheral second imaging units E10, E110 and the outer / inner peripheral third imaging units F10, F110 are arranged on the outer / inner periphery. The outer and inner peripheral first imaging on the side opposite to the outer and inner peripheral fifth imaging units H10 and H110 and the outer and inner peripheral sixth imaging units I10 and I110 with respect to the side fourth imaging units G10 and G110. Units D10, D110 and outer / inner peripheral third imaging units F10, F110 have outer / inner peripheral second imaging units E10, E110 in between and array groups arranged side by side adjacent to each other. The first side group and the inner peripheral side first group will be described. First, in the above-described embodiment, the pattern is arranged in the order of the outer peripheral side first group and the outer peripheral side second group in the rotation direction of the transparent table, and in the order of the inner peripheral side first group and the inner peripheral side second group. However, instead of this, in the rotation direction of the transparent table T, the outer peripheral side second group and the outer peripheral side first group are arranged in this order, and the inner peripheral side second group and The pattern may be arranged in the order of the inner peripheral side first group (referred to as the second arrangement pattern), or in the rotation direction of the transparent table T, the outer peripheral side first group and the outer peripheral side second group are arranged in this order. A pattern arranged in the order of the second group on the circumferential side and the first group on the inner circumferential side (referred to as a third arrangement pattern) may be used. Together arranged in the order of flops and the outer first group may be a pattern to place in the order of the inner peripheral side first group and the inner circumference side second group (the fourth arrangement pattern).

  The second arrangement pattern will be specifically described. In the second arrangement pattern, as shown in FIG. 14, the outer peripheral side fifth imaging unit H <b> 10, the outer peripheral side sixth imaging unit I <b> 10, and the outer peripheral side in the vicinity of the periphery of the transparent table T along the rotation direction of the transparent table T. The fourth imaging unit G10, the outer peripheral side first imaging unit D10, the outer peripheral side second imaging unit E10, and the outer peripheral side third imaging unit F10 are arranged in this order, and the inner peripheral side fifth imaging unit on the inner peripheral side thereof. H110, inner circumference side sixth imaging unit I110, inner circumference side fourth imaging unit G110, inner circumference side first imaging unit D110, inner circumference side second imaging unit E110, and inner circumference side third imaging unit F110 are arranged in this order. Is done.

  The third arrangement pattern will be specifically described. In the third arrangement pattern, as shown in FIG. 15, the outer peripheral side first imaging unit D10, the outer peripheral side second imaging unit E10, and the outer peripheral side in the vicinity of the periphery of the transparent table T along the rotation direction of the transparent table T. The third imaging unit F10, the outer peripheral side fourth imaging unit G10, the outer peripheral side fifth imaging unit H10, and the outer peripheral side sixth imaging unit I10 are arranged in this order, and the inner peripheral side fifth imaging on the inner peripheral side thereof. The unit H110, the inner circumference side sixth imaging unit I110, the inner circumference side fourth imaging unit G110, the inner circumference side first imaging unit D110, the inner circumference side second imaging unit E110, and the inner circumference side third imaging unit F110 are arranged in this order. Be placed.

  The fourth arrangement pattern will be specifically described. In the fourth arrangement pattern, as shown in FIG. 16, the outer peripheral side fifth imaging unit H <b> 10, the outer peripheral side sixth imaging unit I <b> 10, and the outer peripheral side in the vicinity of the periphery of the transparent table T along the rotation direction of the transparent table T. The fourth imaging unit G10, the outer circumferential side first imaging unit D10, the outer circumferential side second imaging unit E10, and the outer circumferential side third imaging unit F10 are arranged in this order, and the inner circumferential side first imaging unit on the inner circumferential side thereof. D110, inner circumference side second imaging unit E110, inner circumference side third imaging unit F110, inner circumference side fourth imaging unit G110, inner circumference side fifth imaging unit H110, inner circumference side sixth imaging unit I110 are arranged in this order. Is done.

  In particular, when the third arrangement pattern and the fourth arrangement pattern are adopted, the phase around the rotation axis of the transparent table T (angular position) is changed by staggering the outer peripheral group arrangement and the inner peripheral group arrangement. In consideration of the types of imaging units arranged on the same phase (for example, the outer peripheral side first imaging unit D10 and the inner peripheral side first imaging unit D110 are the same type) on the outer peripheral side and the inner peripheral side. Can be different. Thereby, it is possible to avoid the arrangement of the imaging units on the outer peripheral side and the imaging units on the inner peripheral side from interfering with each other, and to make the entire apparatus compact.

  In any case of the first array pattern, the second array pattern, the third array pattern, and the fourth array pattern, the outer peripheral first imaging unit D10 and the outer peripheral third imaging unit H10 in the outer peripheral first group. And the inner periphery side third imaging unit H110 may be replaced with the inner periphery side first imaging unit D110 in the inner periphery side first group.

  Further, in the examples of FIGS. 1 and 14 to 16, the phases of the six outer peripheral imaging units and the six inner peripheral imaging units are the same (the first outer periphery in the order of the rotation direction). Side imaging unit and the first inner circumference imaging unit are adjacent to each other in the radial direction, and the same relationship holds true for the second to sixth imaging units), and the phase of the imaging unit on the outer circumference side and the inner circumference side May be off. Further, the imaging unit on the outer peripheral side or the inner peripheral side may be shifted in phase by one imaging unit in the rotation direction, or two or more phases may be shifted. For example, when the inner peripheral imaging unit is out of phase by one imaging unit in the rotational direction, the first inner peripheral imaging unit in the order of the rotational direction is the radial direction of the second outer peripheral imaging unit. It becomes the positional relationship adjacent to. However, in this case, in the radial direction of the transparent table T, the outer peripheral first imaging unit D10 is adjacent to the inner peripheral imaging unit other than the inner peripheral third imaging unit F110, and the outer peripheral second imaging unit E10 is , Adjacent to the inner peripheral imaging unit other than the inner peripheral fourth imaging unit G110, and the outer peripheral third imaging unit F10 is adjacent to the inner peripheral imaging unit other than the inner peripheral first imaging unit D10. Must be related. By arranging the imaging units whose imaging directions face each other on the outer peripheral side and the inner peripheral side are not adjacent to each other in the radial direction of the transparent table T, the light from the illumination unit in one imaging unit is transmitted in the other imaging unit. It is difficult to enter the camera.

  Further, the shapes of the dome-shaped illuminations D16, F16, D116, F116 and the semi-cylindrical illuminations E18, E20, G18, G20, H18, H20, I18, I20, E118, E120, G118, G120, H118, H120, I118, I120 In addition to eliminating light interference between imaging units, a light shielding plate or the like may be disposed between adjacent imaging units to further eliminate light interference.

  In the present embodiment, the dome-shaped illuminations D16, F16, D116, F116 and the semi-cylindrical illuminations E18, E20, G18, G20, H18, H20, I18, I20, E118, E120, G118, G120, H118, H120, I118 and I120 both have a flat base, but the base may not be flat.

  Further, the positions of the dome-shaped lights D16, F16, D116, F116 and the semi-cylindrical lights E18, E20, G18, G20, H18, H20, I18, I20, E118, E120, G118, G120, H118, H120, I118, I120 Further, an adjustment mechanism for adjusting the angle and angle may be provided, and the position and angle may be changed according to the size of the element bodies 1 and 101. In particular, by adjusting the position and angle of the semi-cylindrical lights E18, E20, G18, G20, H18, H20, I18, I20, E118, E120, G118, G120, H118, H120, I118, and I120 by the adjusting mechanism, It becomes possible to reduce the influence of light refraction occurring at the boundary surface between the atmosphere of the appearance inspection apparatus 10 and the transparent table T.

  The surface of the transparent table T may be covered with a transparent conductive film. In this case, the electric charge easily moves in the conductive film, so that it is possible to suppress the charging of the surface on which the element body 1 is placed. It is preferable that the transparent conductive film covering the surface of the transparent table T is grounded (grounded) because the charge can be released to the outside.

  Further, in the present embodiment, when the respective side surfaces s1 to s6 and s101 to 106 of the element body 1 are imaged, the control unit 12 performs illuminations D16, E18, E20, F16, G18, G20, H18, H20, I18, I20, D116, E118, E120, F116, G118, G120, H118, H120, I118, and I120 are illuminated with strobe light, but each illumination D16, E18, E20, F16, G18, G20, H18, H20, I18, I20, D116, E118, E120, F116, G118, G120, H118, H120, I118, and I120 may be constantly lit. However, since a larger amount of light can be instantaneously obtained by using the strobe light, the side surfaces s1 to s6 and s101 to s106 of the element body 1 101 can be illuminated uniformly.

  Further, in the present embodiment, the case of performing the two-row parallel processing on the outer peripheral side and the inner peripheral side has been described, but it is also possible to add more columns on the outer peripheral side and the inner peripheral side and perform parallel processing on three or more columns. Good. As a result, the processing capability can be further improved.

  DESCRIPTION OF SYMBOLS 1 ... Element (inspection object), 10 ... Appearance inspection apparatus, 12 ... Control part, s1 ... Side surface (1st side surface), s2 ... Side surface (2nd side surface), s3 ... Side surface (3rd side surface), s4 ... Side surface (fourth side surface), s5 ... side surface (fifth side surface), s6 ... side surface (sixth side surface), A ... central axis, A10 ... element body supply unit (placement means), D10 ... first imaging unit (first Imaging means), D12 ... camera (first imaging unit), D16 ... dome-shaped illumination (first illumination unit), D16a ... bowl-shaped member (first holding member), D16b ... projecting member (first projecting member) , D16c ... opening (one opening), D16e ... opening (the other opening), E10 ... second imaging unit (second imaging means), E12 ... transparent table T camera (second imaging unit), E18, E20 ... half Cylindrical illumination (second illumination part), E18a, E20a ... Semi-cylindrical member (second holding member) E18b, E20b ... light projecting member (second light projecting member), F10 ... third imaging unit (third imaging means), F12 ... camera (third imaging unit), F18 ... dome-shaped illumination (third illumination unit), F18a: bowl-shaped member (third holding member), F18b: light projecting member (third light projecting member), F18c: opening (one opening), F18e ... opening (other opening), G10: fourth imaging unit ( (Fourth imaging means), G12 ... camera (fourth imaging unit), G18, G20 ... semi-cylindrical illumination (fourth illumination unit), G18a, G20a ... semi-cylindrical member (fourth holding member), G18b, G20b ... Light projecting member (fourth light projecting member), H10 ... fifth imaging unit (fifth imaging means), H12 ... camera (fifth imaging unit), H18, H20 ... semi-cylindrical illumination (fifth illumination unit), H18a , H20a ... Semi-cylindrical member (fifth holding member), H18b H20b: Projecting member (fifth projecting member), I10: Sixth imaging unit (sixth imaging means), I12: Camera (sixth imaging unit), I18, I20: Semi-cylindrical illumination (sixth illumination unit) , I18a, I20a ... semi-cylindrical member (sixth holding member), I18b, I20b ... light projecting member (sixth light projecting member), J10 ... non-defective product recovery unit (removing means), K10 ... defective product recovery unit (removing means) ), T ... Transparent table.

Claims (4)

A first side surface, a second side surface, a third side surface, a fourth side surface, a fifth side surface, and a sixth side surface; the first side surface and the third side surface connect the second side surface and the fourth side surface; And the fifth side surface and the sixth side surface are connected to and opposed to each other, and the second side surface and the fourth side surface connect the first side surface and the third side surface and the fifth side surface. The side surface and the sixth side surface are connected and opposed to each other, and the fifth side surface and the sixth side surface connect the first side surface and the third side surface and the second side surface and the fourth side surface. An appearance inspection apparatus for performing an appearance inspection of an inspection object having a substantially rectangular parallelepiped shape, which connects the side surfaces and faces each other,
A substantially circular transparent table that can rotate in a certain direction around its central axis;
The inspection object is arranged at a peripheral edge on the outer peripheral side of the surface of the transparent table so that the third side surface abuts on the transparent table and the fourth side surface faces the central axis. Arranging means for arranging an object on the inner peripheral edge of the surface of the transparent table;
An outer peripheral first imaging unit that images the first side surface of the outer peripheral inspection object from above the transparent table and an inner peripheral side first image that images the first side surface of the inner peripheral inspection object from above the transparent table. One imaging means;
Outer peripheral side second imaging means for imaging the second side surface of the outer peripheral side inspection object from the outer side in the radial direction of the transparent table, and the second of the inner peripheral side inspection object from the outer side in the radial direction of the transparent table. An inner peripheral second imaging means for imaging a side surface;
An outer peripheral side third imaging unit that images the third side surface of the outer peripheral side inspection object through the transparent table, and an inner peripheral side third image pickup that images the third side surface of the inner peripheral side inspection object through the transparent table. Means,
Outer peripheral side fourth imaging means for imaging the fourth side surface of the outer peripheral side inspection object from the inner side in the radial direction of the transparent table, and the fourth of the inner peripheral side inspection object from the inner side in the radial direction of the transparent table. An inner peripheral side fourth imaging means for imaging a side surface;
The outer peripheral side fifth imaging means for imaging the fifth side surface of the outer peripheral side inspection object from the front side in the rotation direction of the transparent table, and the inner peripheral side inspection object from the front side in the rotation direction of the transparent table. An outer peripheral side fifth imaging means for imaging the fifth side surface;
The outer peripheral side sixth imaging means for imaging the sixth side surface of the outer peripheral side inspection object from the rear side in the rotation direction of the transparent table, and the inner peripheral side inspection object from the rear side in the rotation direction of the transparent table. An inner peripheral side sixth imaging means for imaging the sixth side surface,
The outer peripheral side first imaging means and the inner peripheral side first imaging means are:
A first imaging unit that performs imaging of the first side surface of the outer circumferential inspection object and the inner circumferential inspection object;
A first illumination unit that illuminates the first side surface of each of the outer peripheral inspection object and the inner peripheral inspection object;
The first illumination unit includes:
A pair of openings is provided, and a first curved surface that is recessed from one of the pair of openings toward the other opening and includes an inner wall surface that surrounds the imaging axis of the first imaging unit. 1 holding member;
A plurality of first light projecting members that are held on the inner wall surface of the first holding member so as to surround the imaging axis of the first imaging unit and irradiate light toward the one opening side of the first holding member; Including
It is closer to the outer periphery side inspection object and the inner periphery side inspection object located on the transparent table than the first imaging unit, and the one opening of the first holding member is located on the transparent table. Arranged to face the first side surface of the outer peripheral side inspection object and the inner peripheral side inspection object,
The outer peripheral side second imaging means and the inner peripheral side second imaging means are:
A second imaging unit that images each of the second side surface of the outer peripheral side inspection object and the inner peripheral side inspection object;
A pair of second illumination units that respectively illuminate the second side surface of the outer periphery side inspection object and the inner periphery side inspection object;
The pair of second illumination units includes:
A second holding member that has a semi-cylindrical shape and includes a curved inner wall surface that is enlarged in diameter from the proximal end side toward the distal end side;
A plurality of second light projecting members that are held on the inner wall surface of the second holding member and irradiate light toward the tip side of the second holding member;
The distal end of the second holding member is located on the transparent table, and is disposed closer to the outer peripheral side inspection object and the inner peripheral side inspection object located on the transparent table than the second imaging unit. A virtual plane that faces the second side surface of the outer peripheral side inspection object and the inner peripheral side inspection object located at each other, the inner wall faces each other, and includes the surface of the transparent table along the central axis, and Each is placed with a transparent table in between,
The outer peripheral side third imaging means and the inner peripheral side third imaging means are:
A third imaging unit that performs imaging of the third side surface of the outer circumferential inspection object and the inner circumferential inspection object;
A third illumination unit that performs illumination of the third side surface of the outer peripheral side inspection object and the inner peripheral side inspection object,
The third illumination unit includes
A pair of openings is provided, and a first curved surface that is recessed from one of the pair of openings toward the other opening and includes an inner wall surface that surrounds the imaging axis of the third imaging unit. 3 holding members;
A plurality of third light projecting members that are held on an inner wall surface of the third holding member so as to surround an imaging axis of the third imaging unit and irradiate light toward the one opening side of the third holding member; Including
It is closer to the outer periphery side inspection object and the inner periphery side inspection object located on the transparent table than the third imaging unit, and the one opening of the third holding member is located on the transparent table. Arranged to face the third side surface of the outer peripheral side inspection object and the inner peripheral side inspection object,
The outer circumference side fourth imaging means and the inner circumference side fourth imaging means are:
A fourth imaging unit that respectively images the fourth side surface of the outer peripheral side inspection object and the inner peripheral side inspection object;
A pair of fourth illumination units that respectively illuminate the fourth side surface of the outer periphery side inspection object and the inner periphery side inspection object;
The pair of fourth illumination units includes:
A fourth holding member that has a semi-cylindrical shape and includes a curved inner wall surface that is enlarged in diameter from the proximal end side toward the distal end side;
A plurality of fourth light projecting members that are held on the inner wall surface of the fourth holding member and irradiate light toward the front end side of the fourth holding member,
The distal end of the fourth holding member is located on the transparent table, and is disposed closer to the outer peripheral side inspection object and the inner peripheral side inspection object located on the transparent table than the fourth imaging unit. Facing the fourth side surface of the outer peripheral side inspection object and the inner peripheral side inspection object positioned at each other, the inner wall faces each other, and the transparent table is placed along the central axis. And
The outer peripheral side fifth imaging means and the inner peripheral side fifth imaging means are:
A fifth imaging unit that performs imaging of the fifth side surface of the outer peripheral side inspection object and the inner peripheral side inspection object;
A pair of fifth illumination units that respectively illuminate the fifth side surface of the outer periphery side inspection object and the inner periphery side inspection object;
The pair of fifth illumination units includes:
A fifth holding member that has a semi-cylindrical shape and includes a curved inner wall surface that is enlarged in diameter from the proximal end side toward the distal end side;
A plurality of fifth light projecting members that are held on the inner wall surface of the fifth holding member and irradiate light toward the tip side of the fifth holding member;
The distal end of the fifth holding member is disposed on the transparent table, and is disposed closer to the outer peripheral side inspection object and the inner peripheral side inspection object located on the transparent table than the fifth imaging unit. The outer peripheral side inspection object and the inner peripheral side inspection object located at the fifth side surface of the outer peripheral side inspection object and the inner peripheral side inspection object are arranged so that their inner wall surfaces face each other and the transparent table is interposed along the central axis. And
The outer circumference side sixth imaging means and the inner circumference side sixth imaging means are:
A sixth imaging unit that performs imaging of the sixth side surface of the outer circumferential inspection object and the inner circumferential inspection object;
A pair of sixth illumination units that respectively illuminate the sixth side surface of the outer periphery side inspection object and the inner periphery side inspection object;
The pair of sixth illumination units includes:
A sixth holding member that has a semi-cylindrical shape and includes a curved inner wall surface that is enlarged in diameter from the proximal end side toward the distal end side;
A plurality of sixth light projecting members that are held on the inner wall surface of the sixth holding member and irradiate light toward the tip side of the sixth holding member,
The outer periphery side inspection object and the inner periphery side inspection object which are located on the transparent table with respect to the sixth imaging unit are disposed closer to each other, and the tip of the sixth holding member is on the transparent table. Facing the sixth side surface of the outer peripheral side inspection object and the inner peripheral side inspection object located at the inner surface, the inner wall faces each other, and the transparent table is disposed between the inner surfaces along the central axis. And
The outer circumference side first imaging means, the outer circumference side second imaging means, the outer circumference side third imaging means, the outer circumference side fourth imaging means, the outer circumference side fifth imaging means, and the outer circumference side sixth imaging means, Are arranged side by side along the peripheral edge of the transparent table, so that they are different from each other,
The outer peripheral side fifth imaging means and the outer peripheral side sixth imaging means are arranged side by side in the order of the rotation direction of the transparent table,
The outer peripheral side fourth imaging means is disposed adjacent to the outer peripheral side fifth imaging means or the outer peripheral side sixth imaging means,
The outer circumference side first imaging means, the outer circumference side second imaging means, and the outer circumference side third imaging means are different from the outer circumference side fourth imaging means in the outer circumference side fifth imaging means and the outer circumference side sixth imaging means. On the opposite side, the outer peripheral side first imaging means and the outer peripheral side third imaging means are arranged side by side so as to be adjacent to each other with the outer peripheral side second imaging means interposed therebetween,
The first inner imaging means, the second inner imaging means, the third inner imaging means, the fourth inner imaging means, the fifth inner imaging means, and the first inner imaging means. 6 imaging means, the outer circumference side first imaging means, the outer circumference side second imaging means, the outer circumference side third imaging means, the outer circumference side fourth imaging means, and the outer circumference side, so that they are located at different positions. On the inner peripheral side of the fifth imaging means and the outer peripheral side sixth imaging means, are arranged side by side along the peripheral edge of the transparent table,
In order of the rotation direction of the transparent table, the inner peripheral side fifth imaging means and the inner peripheral side sixth imaging means are arranged side by side so as to be adjacent to each other,
The inner circumference side fourth imaging means is disposed adjacent to the inner circumference side fifth imaging means or the inner circumference side sixth imaging means,
The inner circumference side first imaging means, the inner circumference side second imaging means, and the inner circumference side third imaging means are set to the inner circumference side fifth imaging means and the inner circumference side fourth imaging means. On the opposite side of the peripheral sixth imaging means, the inner peripheral first imaging means and the inner peripheral third imaging means are arranged adjacent to each other with the inner peripheral second imaging means in between. An appearance inspection apparatus characterized by being arranged. The outer peripheral side first imaging means, the outer peripheral side second imaging means, the outer peripheral side third imaging and the outer peripheral side fourth imaging are defined as an outer peripheral side first group, and the outer peripheral side fifth imaging means, A group composed of the outer periphery side sixth imaging means is referred to as an outer periphery side second group,
The inner circumference side first imaging means, the inner circumference side second imaging means, the inner circumference side third imaging means, and the inner circumference side fourth imaging are defined as an inner circumference side first group, When a group composed of the circumferential fifth imaging means and the inner circumferential sixth imaging means is an inner circumferential second group,
In the rotation direction of the transparent table, the outer peripheral side first group and the outer peripheral side second group are arranged in this order, and the inner peripheral side second group and the inner peripheral side first group are arranged in this order. The visual inspection apparatus according to claim 1. The outer peripheral side first imaging means, the outer peripheral side second imaging means, the outer peripheral side third imaging and the outer peripheral side fourth imaging are defined as an outer peripheral side first group, and the outer peripheral side fifth imaging means, A group composed of the outer periphery side sixth imaging means is referred to as an outer periphery side second group,
The inner circumference side first imaging means, the inner circumference side second imaging means, the inner circumference side third imaging means, and the inner circumference side fourth imaging are defined as an inner circumference side first group, When a group composed of the circumferential fifth imaging means and the inner circumferential sixth imaging means is an inner circumferential second group,
In the rotation direction of the transparent table, the outer peripheral side second group and the outer peripheral side first group are arranged in this order, and the inner peripheral side first group and the inner peripheral side second group are arranged in this order. The visual inspection apparatus according to claim 1. In the radial direction of the transparent table,
The outer peripheral side first imaging means is adjacent to an inner peripheral side imaging means other than the inner peripheral side third imaging means,
The outer peripheral side second imaging means is adjacent to the inner peripheral side imaging means other than the inner peripheral side fourth imaging means,
The appearance inspection apparatus according to claim 1, wherein the outer peripheral side third imaging unit is adjacent to an inner peripheral side imaging unit other than the inner peripheral side first imaging unit.

Images