JP2010160083A - プローブ組立体 - Google Patents

プローブ組立体 Download PDF

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Publication number
JP2010160083A
JP2010160083A JP2009003103A JP2009003103A JP2010160083A JP 2010160083 A JP2010160083 A JP 2010160083A JP 2009003103 A JP2009003103 A JP 2009003103A JP 2009003103 A JP2009003103 A JP 2009003103A JP 2010160083 A JP2010160083 A JP 2010160083A
Authority
JP
Japan
Prior art keywords
probe
slit
probes
needle tip
longitudinal direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009003103A
Other languages
English (en)
Japanese (ja)
Inventor
Yoshie Hasegawa
義栄 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP2009003103A priority Critical patent/JP2010160083A/ja
Priority to KR1020090133894A priority patent/KR20100082712A/ko
Publication of JP2010160083A publication Critical patent/JP2010160083A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Liquid Crystal (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
JP2009003103A 2009-01-09 2009-01-09 プローブ組立体 Pending JP2010160083A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009003103A JP2010160083A (ja) 2009-01-09 2009-01-09 プローブ組立体
KR1020090133894A KR20100082712A (ko) 2009-01-09 2009-12-30 프로브 조립체

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009003103A JP2010160083A (ja) 2009-01-09 2009-01-09 プローブ組立体

Publications (1)

Publication Number Publication Date
JP2010160083A true JP2010160083A (ja) 2010-07-22

Family

ID=42577344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009003103A Pending JP2010160083A (ja) 2009-01-09 2009-01-09 プローブ組立体

Country Status (2)

Country Link
JP (1) JP2010160083A (ko)
KR (1) KR20100082712A (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012037362A (ja) * 2010-08-06 2012-02-23 Micronics Japan Co Ltd プローブユニット及び検査装置
JP2012132891A (ja) * 2010-12-03 2012-07-12 Micronics Japan Co Ltd プローブ組立体

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101142462B1 (ko) * 2010-06-07 2012-05-08 한국광기술원 미세 피치 폭을 가지는 엘시디 패널 검사용 프로브블록 및 그 제작 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012037362A (ja) * 2010-08-06 2012-02-23 Micronics Japan Co Ltd プローブユニット及び検査装置
JP2012132891A (ja) * 2010-12-03 2012-07-12 Micronics Japan Co Ltd プローブ組立体

Also Published As

Publication number Publication date
KR20100082712A (ko) 2010-07-19

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