JP2010125352A5 - - Google Patents

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Publication number
JP2010125352A5
JP2010125352A5 JP2008299657A JP2008299657A JP2010125352A5 JP 2010125352 A5 JP2010125352 A5 JP 2010125352A5 JP 2008299657 A JP2008299657 A JP 2008299657A JP 2008299657 A JP2008299657 A JP 2008299657A JP 2010125352 A5 JP2010125352 A5 JP 2010125352A5
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JP
Japan
Prior art keywords
waste water
treatment system
photoresist development
wastewater
anion exchange
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JP2008299657A
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English (en)
Japanese (ja)
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JP5256002B2 (ja
JP2010125352A (ja
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Priority to JP2008299657A priority Critical patent/JP5256002B2/ja
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Publication of JP2010125352A5 publication Critical patent/JP2010125352A5/ja
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JP2008299657A 2008-11-25 2008-11-25 フォトレジスト現像排水の排水処理システム Active JP5256002B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008299657A JP5256002B2 (ja) 2008-11-25 2008-11-25 フォトレジスト現像排水の排水処理システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008299657A JP5256002B2 (ja) 2008-11-25 2008-11-25 フォトレジスト現像排水の排水処理システム

Publications (3)

Publication Number Publication Date
JP2010125352A JP2010125352A (ja) 2010-06-10
JP2010125352A5 true JP2010125352A5 (ru) 2011-09-22
JP5256002B2 JP5256002B2 (ja) 2013-08-07

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JP2008299657A Active JP5256002B2 (ja) 2008-11-25 2008-11-25 フォトレジスト現像排水の排水処理システム

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JP (1) JP5256002B2 (ru)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6526506B2 (ja) * 2015-07-07 2019-06-05 リファインホールディングス株式会社 アニオン性界面活性剤を含有する水の水処理方法
AU2017366425B2 (en) * 2016-09-12 2022-06-02 Aecom (Delaware Corporation) Use of electrochemical oxidation for treatment of per-and polyfluoroalkyl substances (PFAS) in waste generated from sorbent and resin regeneration processes
WO2020247029A1 (en) * 2019-06-07 2020-12-10 Evoqua Water Technologies Llc Pfas treatment scheme using separation and electrochemical elimination
AU2020304684A1 (en) * 2019-06-28 2021-12-16 Revive Environmental Technology, Llc Destruction of PFAS via an oxidation process and apparatus suitable for transportation to contaminated sites
KR20240028944A (ko) 2022-08-25 2024-03-05 도쿄엘렉트론가부시키가이샤 처리 시스템 및 처리 방법

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JP5163125B2 (ja) * 2005-10-14 2013-03-13 旭硝子株式会社 塩基性陰イオン交換樹脂の再生方法
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JP5298639B2 (ja) * 2008-05-26 2013-09-25 栗田工業株式会社 水溶性樹脂成分含有アルカリ廃液の処理方法および処理装置
JP5051004B2 (ja) * 2008-05-30 2012-10-17 栗田工業株式会社 水溶性樹脂成分含有アルカリ廃液の処理方法および処理装置
JP5062093B2 (ja) * 2008-08-06 2012-10-31 栗田工業株式会社 アミノ基を有する水溶性有機溶媒の回収方法

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