JP2010125352A5 - - Google Patents
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- JP2010125352A5 JP2010125352A5 JP2008299657A JP2008299657A JP2010125352A5 JP 2010125352 A5 JP2010125352 A5 JP 2010125352A5 JP 2008299657 A JP2008299657 A JP 2008299657A JP 2008299657 A JP2008299657 A JP 2008299657A JP 2010125352 A5 JP2010125352 A5 JP 2010125352A5
- Authority
- JP
- Japan
- Prior art keywords
- waste water
- treatment system
- photoresist development
- wastewater
- anion exchange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008299657A JP5256002B2 (ja) | 2008-11-25 | 2008-11-25 | フォトレジスト現像排水の排水処理システム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008299657A JP5256002B2 (ja) | 2008-11-25 | 2008-11-25 | フォトレジスト現像排水の排水処理システム |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010125352A JP2010125352A (ja) | 2010-06-10 |
JP2010125352A5 true JP2010125352A5 (ru) | 2011-09-22 |
JP5256002B2 JP5256002B2 (ja) | 2013-08-07 |
Family
ID=42326104
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008299657A Active JP5256002B2 (ja) | 2008-11-25 | 2008-11-25 | フォトレジスト現像排水の排水処理システム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5256002B2 (ru) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6526506B2 (ja) * | 2015-07-07 | 2019-06-05 | リファインホールディングス株式会社 | アニオン性界面活性剤を含有する水の水処理方法 |
AU2017366425B2 (en) * | 2016-09-12 | 2022-06-02 | Aecom (Delaware Corporation) | Use of electrochemical oxidation for treatment of per-and polyfluoroalkyl substances (PFAS) in waste generated from sorbent and resin regeneration processes |
WO2020247029A1 (en) * | 2019-06-07 | 2020-12-10 | Evoqua Water Technologies Llc | Pfas treatment scheme using separation and electrochemical elimination |
AU2020304684A1 (en) * | 2019-06-28 | 2021-12-16 | Revive Environmental Technology, Llc | Destruction of PFAS via an oxidation process and apparatus suitable for transportation to contaminated sites |
KR20240028944A (ko) | 2022-08-25 | 2024-03-05 | 도쿄엘렉트론가부시키가이샤 | 처리 시스템 및 처리 방법 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3364308B2 (ja) * | 1993-12-29 | 2003-01-08 | 株式会社東芝 | 排水処理方法及びその装置 |
JP3164968B2 (ja) * | 1994-06-02 | 2001-05-14 | オルガノ株式会社 | テトラアルキルアンモニウムヒドロオキシド含有廃液の処理方法及び装置 |
JPH0839059A (ja) * | 1994-07-28 | 1996-02-13 | Kurita Water Ind Ltd | 有機アルカリを含む半導体洗浄排水の回収方法 |
JP3656338B2 (ja) * | 1996-09-13 | 2005-06-08 | オルガノ株式会社 | フォトレジスト現像廃液の処理方法 |
JP3543915B2 (ja) * | 1996-11-21 | 2004-07-21 | オルガノ株式会社 | フォトレジスト現像廃液の再生処理方法 |
JP3663804B2 (ja) * | 1997-01-24 | 2005-06-22 | オルガノ株式会社 | フォトレジスト現像廃液の処理方法 |
DE19824614A1 (de) * | 1998-06-02 | 1999-12-09 | Dyneon Gmbh | Verfahren zur Rückgewinnung von fluorierten Alkansäuren aus Abwässern |
DE19824615A1 (de) * | 1998-06-02 | 1999-12-09 | Dyneon Gmbh | Verfahren zur Rückgewinnung von fluorierten Alkansäuren aus Abwässern |
JP3801793B2 (ja) * | 1998-10-15 | 2006-07-26 | オルガノ株式会社 | 有機成分の回収装置 |
JP3968678B2 (ja) * | 1998-10-26 | 2007-08-29 | オルガノ株式会社 | テトラアルキルアンモニウムイオン含有液の処理方法 |
DE19932771A1 (de) * | 1999-07-14 | 2001-01-18 | Dyneon Gmbh | Verfahren zur Eluierung fluorierter Emulgatoren |
DE19953285A1 (de) * | 1999-11-05 | 2001-05-10 | Dyneon Gmbh | Verfahren zur Rückgewinnung fluorierter Emulgatoren |
JP2001239142A (ja) * | 1999-12-20 | 2001-09-04 | Japan Organo Co Ltd | 超臨界水酸化分解処理装置 |
JP2003190949A (ja) * | 2001-12-27 | 2003-07-08 | Tokuyama Corp | フォトレジスト現像廃液の再生処理方法 |
JP2003215810A (ja) * | 2002-01-22 | 2003-07-30 | Japan Organo Co Ltd | フォトレジスト現像廃液からの現像液の回収方法 |
JP2004283746A (ja) * | 2003-03-24 | 2004-10-14 | Kurita Water Ind Ltd | 水溶性樹脂成分含有アルカリ廃液の処理方法および装置 |
JP3884407B2 (ja) * | 2003-06-03 | 2007-02-21 | 株式会社東芝 | フッ素含有水の処理方法および装置 |
JP2005175118A (ja) * | 2003-12-10 | 2005-06-30 | Japan Organo Co Ltd | フォトレジスト現像廃液の再生処理装置 |
JP2005173402A (ja) * | 2003-12-12 | 2005-06-30 | Japan Organo Co Ltd | フォトレジスト現像廃液の再生処理装置 |
JP2005215627A (ja) * | 2004-02-02 | 2005-08-11 | Japan Organo Co Ltd | レジスト剥離廃液の再生処理方法及び装置 |
JP4561967B2 (ja) * | 2004-05-19 | 2010-10-13 | オルガノ株式会社 | テトラアルキルアンモニウムイオン含有排水から水を回収する方法及び装置 |
EP1700869A1 (en) * | 2005-03-11 | 2006-09-13 | 3M Innovative Properties Company | Recovery of fluorinated surfactants from a basic anion exchange resin having quaternary ammonium groups |
JP5163125B2 (ja) * | 2005-10-14 | 2013-03-13 | 旭硝子株式会社 | 塩基性陰イオン交換樹脂の再生方法 |
US7666929B2 (en) * | 2006-05-31 | 2010-02-23 | E.I. Du Pont De Nemours And Company | Process for reducing fluorosurfactant content of fluropolymer dispersions using anionic surfactant-treated anion exchange resin |
WO2008101137A1 (en) * | 2007-02-16 | 2008-08-21 | 3M Innovative Properties Company | System and process for the removal of fluorochemicals from water |
TWI399342B (zh) * | 2007-04-25 | 2013-06-21 | Tokuyama Corp | Process for the preparation of waste liquid containing tetraalkylammonium ion |
JP4859863B2 (ja) * | 2008-03-24 | 2012-01-25 | オルガノ株式会社 | 水処理方法および水処理装置 |
JP5298639B2 (ja) * | 2008-05-26 | 2013-09-25 | 栗田工業株式会社 | 水溶性樹脂成分含有アルカリ廃液の処理方法および処理装置 |
JP5051004B2 (ja) * | 2008-05-30 | 2012-10-17 | 栗田工業株式会社 | 水溶性樹脂成分含有アルカリ廃液の処理方法および処理装置 |
JP5062093B2 (ja) * | 2008-08-06 | 2012-10-31 | 栗田工業株式会社 | アミノ基を有する水溶性有機溶媒の回収方法 |
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2008
- 2008-11-25 JP JP2008299657A patent/JP5256002B2/ja active Active
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