JP2010115566A - プラズマ発生用電極 - Google Patents
プラズマ発生用電極 Download PDFInfo
- Publication number
- JP2010115566A JP2010115566A JP2007202543A JP2007202543A JP2010115566A JP 2010115566 A JP2010115566 A JP 2010115566A JP 2007202543 A JP2007202543 A JP 2007202543A JP 2007202543 A JP2007202543 A JP 2007202543A JP 2010115566 A JP2010115566 A JP 2010115566A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- exhaust gas
- flow direction
- plasma
- gas flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32834—Exhausting
- H01J37/32844—Treating effluent gases
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/818—Employing electrical discharges or the generation of a plasma
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2240/00—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being
- F01N2240/28—Combination or association of two or more different exhaust treating devices, or of at least one such device with an auxiliary device, not covered by indexing codes F01N2230/00 or F01N2250/00, one of the devices being a plasma reactor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/10—Treatment of gases
- H05H2245/17—Exhaust gases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Processes For Solid Components From Exhaust (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Exhaust Gas After Treatment (AREA)
- Plasma Technology (AREA)
- Chimneys And Flues (AREA)
Abstract
【解決手段】プラズマ発生用電極は、処理される気体の流れ方向に気流に対面して間隔をあけて配置される、複数の貫通孔を有してなる複数の捕集部を備えてなる。
【選択図】図1
Description
3…捕集部
4…貫通孔
100…プラズマ反応器
Claims (3)
- 処理される気体の流れ方向に気流に対面して間隔をあけて配置される、複数の貫通孔を有してなる複数の捕集部を備えてなるプラズマ発生用電極。
- 複数の捕集部が、一枚の網状材を気体の流れ方向及びその流れ方向にほぼ直交する方向に波状に折り曲げることにより連続して形成されてなる請求項1記載のプラズマ発生用電極。
- 気体の流れ方向の上流における捕集部の粗さを、その下流における捕集部の粗さより粗くする請求項1又は2記載のプラズマ発生用電極。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007202543A JP5839766B2 (ja) | 2007-08-03 | 2007-08-03 | プラズマ反応器 |
EP08791730.8A EP2174707B1 (en) | 2007-08-03 | 2008-07-28 | Electrode for plasma generation |
JP2009526393A JP5312327B2 (ja) | 2007-08-03 | 2008-07-28 | プラズマ発生用電極 |
US12/671,732 US8623125B2 (en) | 2007-08-03 | 2008-07-28 | Electrode for plasma generation |
PCT/JP2008/063495 WO2009019998A1 (ja) | 2007-08-03 | 2008-07-28 | プラズマ発生用電極 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007202543A JP5839766B2 (ja) | 2007-08-03 | 2007-08-03 | プラズマ反応器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010115566A true JP2010115566A (ja) | 2010-05-27 |
JP5839766B2 JP5839766B2 (ja) | 2016-01-06 |
Family
ID=40341233
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007202543A Expired - Fee Related JP5839766B2 (ja) | 2007-08-03 | 2007-08-03 | プラズマ反応器 |
JP2009526393A Active JP5312327B2 (ja) | 2007-08-03 | 2008-07-28 | プラズマ発生用電極 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009526393A Active JP5312327B2 (ja) | 2007-08-03 | 2008-07-28 | プラズマ発生用電極 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8623125B2 (ja) |
EP (1) | EP2174707B1 (ja) |
JP (2) | JP5839766B2 (ja) |
WO (1) | WO2009019998A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012145011A (ja) * | 2011-01-11 | 2012-08-02 | Daihatsu Motor Co Ltd | プラズマ反応器 |
JP5312327B2 (ja) * | 2007-08-03 | 2013-10-09 | ダイハツ工業株式会社 | プラズマ発生用電極 |
WO2017002902A1 (ja) * | 2015-06-30 | 2017-01-05 | ダイハツ工業株式会社 | プラズマ発生用電極、電極パネルおよびプラズマリアクタ |
JP2017014948A (ja) * | 2015-06-30 | 2017-01-19 | ダイハツ工業株式会社 | プラズマ発生用電極、電極パネルおよびプラズマリアクタ |
JP2017016814A (ja) * | 2015-06-30 | 2017-01-19 | ダイハツ工業株式会社 | プラズマ発生用電極、電極パネルおよびプラズマリアクタ |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017107717A (ja) * | 2015-12-09 | 2017-06-15 | 日本特殊陶業株式会社 | プラズマ反応器及びプラズマ電極板 |
USD896943S1 (en) * | 2017-12-18 | 2020-09-22 | 3M Innovative Properties Company | Three dimensional filter frame |
CN113141700B (zh) * | 2021-03-16 | 2022-07-12 | 深圳大学 | 大气压空气均匀介质阻挡放电的电极结构和方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56126612A (en) * | 1980-03-10 | 1981-10-03 | Niles Parts Co Ltd | Engine exhaust gas smoke removal device |
US5630866A (en) * | 1995-07-28 | 1997-05-20 | Gregg; Lloyd M. | Static electricity exhaust treatment device |
JP2001009232A (ja) * | 1999-06-28 | 2001-01-16 | Denso Corp | 内燃機関の排気浄化装置 |
JP2002095996A (ja) * | 2000-09-21 | 2002-04-02 | Mitsubishi Electric Corp | 空気浄化装置 |
JP2003013725A (ja) * | 2001-02-22 | 2003-01-15 | Hiroo Masaki | ディーゼルエンジン排ガスの粒子状物質除去装置 |
JP2003529705A (ja) * | 2000-02-17 | 2003-10-07 | シーメンス アクチエンゲゼルシヤフト | ディーゼルエンジンのすす放出をプラズマ誘導式に減少させるための方法及び装置 |
JP2004223344A (ja) * | 2003-01-21 | 2004-08-12 | Sintokogio Ltd | 排ガス処理方法およびその装置 |
JP2005030280A (ja) * | 2003-07-10 | 2005-02-03 | Isuzu Motors Ltd | フィルタ |
WO2005028081A1 (de) * | 2003-09-24 | 2005-03-31 | Institut Für Niedertemperatur- Plasmaphysik E.V. | Vorrichtung und verfahren zur plasmagestützten abgasreinigung und behandlung von abluft |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3997304A (en) * | 1975-03-28 | 1976-12-14 | Carrier Corporation | Mounting system of ionizing wires of electrostatic precipitator |
JPS61209061A (ja) * | 1985-03-08 | 1986-09-17 | Takeshi Ishihara | 微小浮遊塵埃及び微生物の表面荷電を利用したhepaフイルタ− |
DE19704147A1 (de) * | 1997-02-04 | 1998-08-06 | Emitec Emissionstechnologie | Hitzebeständiger und regenerierbarer Filterkörper mit Strömungswegen |
GB9908099D0 (en) * | 1999-04-12 | 1999-06-02 | Gay Geoffrey N W | Air cleaning collection device |
US6660061B2 (en) * | 2001-10-26 | 2003-12-09 | Battelle Memorial Institute | Vapor purification with self-cleaning filter |
US7156898B2 (en) * | 2002-07-12 | 2007-01-02 | Jaisinghani Rajan A | Low pressure drop deep electrically enhanced filter |
JP5288342B2 (ja) * | 2005-10-05 | 2013-09-11 | ダイハツ工業株式会社 | プラズマ反応器用電極 |
US20080178737A1 (en) * | 2007-01-31 | 2008-07-31 | Pratt & Whitney Canada Corp. | Woven electrostatic oil precipitator element |
JP5839766B2 (ja) * | 2007-08-03 | 2016-01-06 | ダイハツ工業株式会社 | プラズマ反応器 |
JP2009112916A (ja) * | 2007-11-05 | 2009-05-28 | Mitsubishi Heavy Ind Ltd | 排ガス浄化装置 |
JP2009208025A (ja) * | 2008-03-05 | 2009-09-17 | Univ Of Tokushima | ディーゼル機関の排気ガス浄化フィルタ |
-
2007
- 2007-08-03 JP JP2007202543A patent/JP5839766B2/ja not_active Expired - Fee Related
-
2008
- 2008-07-28 US US12/671,732 patent/US8623125B2/en active Active
- 2008-07-28 WO PCT/JP2008/063495 patent/WO2009019998A1/ja active Application Filing
- 2008-07-28 EP EP08791730.8A patent/EP2174707B1/en not_active Not-in-force
- 2008-07-28 JP JP2009526393A patent/JP5312327B2/ja active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56126612A (en) * | 1980-03-10 | 1981-10-03 | Niles Parts Co Ltd | Engine exhaust gas smoke removal device |
US5630866A (en) * | 1995-07-28 | 1997-05-20 | Gregg; Lloyd M. | Static electricity exhaust treatment device |
JP2001009232A (ja) * | 1999-06-28 | 2001-01-16 | Denso Corp | 内燃機関の排気浄化装置 |
JP2003529705A (ja) * | 2000-02-17 | 2003-10-07 | シーメンス アクチエンゲゼルシヤフト | ディーゼルエンジンのすす放出をプラズマ誘導式に減少させるための方法及び装置 |
JP2002095996A (ja) * | 2000-09-21 | 2002-04-02 | Mitsubishi Electric Corp | 空気浄化装置 |
JP2003013725A (ja) * | 2001-02-22 | 2003-01-15 | Hiroo Masaki | ディーゼルエンジン排ガスの粒子状物質除去装置 |
JP2004223344A (ja) * | 2003-01-21 | 2004-08-12 | Sintokogio Ltd | 排ガス処理方法およびその装置 |
JP2005030280A (ja) * | 2003-07-10 | 2005-02-03 | Isuzu Motors Ltd | フィルタ |
WO2005028081A1 (de) * | 2003-09-24 | 2005-03-31 | Institut Für Niedertemperatur- Plasmaphysik E.V. | Vorrichtung und verfahren zur plasmagestützten abgasreinigung und behandlung von abluft |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5312327B2 (ja) * | 2007-08-03 | 2013-10-09 | ダイハツ工業株式会社 | プラズマ発生用電極 |
US8623125B2 (en) | 2007-08-03 | 2014-01-07 | Daihatsu Motor Co., Ltd. | Electrode for plasma generation |
JP2012145011A (ja) * | 2011-01-11 | 2012-08-02 | Daihatsu Motor Co Ltd | プラズマ反応器 |
WO2017002902A1 (ja) * | 2015-06-30 | 2017-01-05 | ダイハツ工業株式会社 | プラズマ発生用電極、電極パネルおよびプラズマリアクタ |
JP2017014948A (ja) * | 2015-06-30 | 2017-01-19 | ダイハツ工業株式会社 | プラズマ発生用電極、電極パネルおよびプラズマリアクタ |
JP2017016814A (ja) * | 2015-06-30 | 2017-01-19 | ダイハツ工業株式会社 | プラズマ発生用電極、電極パネルおよびプラズマリアクタ |
Also Published As
Publication number | Publication date |
---|---|
US8623125B2 (en) | 2014-01-07 |
WO2009019998A1 (ja) | 2009-02-12 |
JP5312327B2 (ja) | 2013-10-09 |
JPWO2009019998A1 (ja) | 2010-10-28 |
EP2174707A4 (en) | 2014-06-04 |
EP2174707B1 (en) | 2018-09-05 |
EP2174707A1 (en) | 2010-04-14 |
JP5839766B2 (ja) | 2016-01-06 |
US20110232492A1 (en) | 2011-09-29 |
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