JP2010085954A5 - - Google Patents

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Publication number
JP2010085954A5
JP2010085954A5 JP2008258110A JP2008258110A JP2010085954A5 JP 2010085954 A5 JP2010085954 A5 JP 2010085954A5 JP 2008258110 A JP2008258110 A JP 2008258110A JP 2008258110 A JP2008258110 A JP 2008258110A JP 2010085954 A5 JP2010085954 A5 JP 2010085954A5
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JP
Japan
Prior art keywords
line
exposure apparatus
bulb
discharge lamp
vicinity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008258110A
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English (en)
Japanese (ja)
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JP2010085954A (ja
JP5320006B2 (ja
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Publication date
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Priority to JP2008258110A priority Critical patent/JP5320006B2/ja
Priority claimed from JP2008258110A external-priority patent/JP5320006B2/ja
Publication of JP2010085954A publication Critical patent/JP2010085954A/ja
Publication of JP2010085954A5 publication Critical patent/JP2010085954A5/ja
Application granted granted Critical
Publication of JP5320006B2 publication Critical patent/JP5320006B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008258110A 2008-10-03 2008-10-03 露光描画装置 Active JP5320006B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008258110A JP5320006B2 (ja) 2008-10-03 2008-10-03 露光描画装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008258110A JP5320006B2 (ja) 2008-10-03 2008-10-03 露光描画装置

Publications (3)

Publication Number Publication Date
JP2010085954A JP2010085954A (ja) 2010-04-15
JP2010085954A5 true JP2010085954A5 (cg-RX-API-DMAC7.html) 2011-11-04
JP5320006B2 JP5320006B2 (ja) 2013-10-23

Family

ID=42249932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008258110A Active JP5320006B2 (ja) 2008-10-03 2008-10-03 露光描画装置

Country Status (1)

Country Link
JP (1) JP5320006B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5723652B2 (ja) 2011-03-30 2015-05-27 株式会社オーク製作所 測光装置および露光装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53678A (en) * 1976-06-23 1978-01-06 Hitachi Ltd Metal steam discharge lamp
JPS5397279A (en) * 1977-02-04 1978-08-25 Toshiba Corp Metal halide lamp
JPH03171546A (ja) * 1989-11-29 1991-07-25 Iwasaki Electric Co Ltd メタルハライドランプ
JP3177230B2 (ja) * 1999-05-25 2001-06-18 松下電子工業株式会社 金属蒸気放電ランプ
JP2006344383A (ja) * 2003-06-24 2006-12-21 Matsushita Electric Ind Co Ltd 光照射装置
JP2007026675A (ja) * 2003-06-24 2007-02-01 Matsushita Electric Ind Co Ltd 光照射装置、光照射装置用ランプおよび光照射方法
JP4400125B2 (ja) * 2003-07-30 2010-01-20 ウシオ電機株式会社 ショートアーク型放電ランプ点灯装置
JP4345401B2 (ja) * 2003-08-13 2009-10-14 ウシオ電機株式会社 高圧水銀ランプ装置
JP2006073538A (ja) * 2005-09-14 2006-03-16 Harison Toshiba Lighting Corp メタルハライドランプ、メタルハライドランプ点灯装置および自動車用前照灯装置
JP2008191252A (ja) * 2007-02-01 2008-08-21 Phoenix Denki Kk 露光用光源ならびにこれを用いた露光装置

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