JP2010056113A5 - - Google Patents

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Publication number
JP2010056113A5
JP2010056113A5 JP2008216343A JP2008216343A JP2010056113A5 JP 2010056113 A5 JP2010056113 A5 JP 2010056113A5 JP 2008216343 A JP2008216343 A JP 2008216343A JP 2008216343 A JP2008216343 A JP 2008216343A JP 2010056113 A5 JP2010056113 A5 JP 2010056113A5
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JP
Japan
Prior art keywords
conductive sheet
pressing member
cleaning
processing apparatus
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008216343A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010056113A (ja
JP5038259B2 (ja
Filing date
Publication date
Priority claimed from JP2008216343A external-priority patent/JP5038259B2/ja
Priority to JP2008216343A priority Critical patent/JP5038259B2/ja
Application filed filed Critical
Priority to TW097136668A priority patent/TWI409110B/zh
Priority to KR1020080095364A priority patent/KR101071368B1/ko
Priority to US12/285,177 priority patent/US8006340B2/en
Publication of JP2010056113A publication Critical patent/JP2010056113A/ja
Priority to US12/849,255 priority patent/US8024831B2/en
Publication of JP2010056113A5 publication Critical patent/JP2010056113A5/ja
Publication of JP5038259B2 publication Critical patent/JP5038259B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008216343A 2008-08-26 2008-08-26 クリーニング装置およびクリーニング方法 Expired - Fee Related JP5038259B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2008216343A JP5038259B2 (ja) 2008-08-26 2008-08-26 クリーニング装置およびクリーニング方法
TW097136668A TWI409110B (zh) 2008-08-26 2008-09-24 Cleanliness and clean method
KR1020080095364A KR101071368B1 (ko) 2008-08-26 2008-09-29 클리닝장치 및 클리닝방법
US12/285,177 US8006340B2 (en) 2008-08-26 2008-09-30 Cleaning apparatus
US12/849,255 US8024831B2 (en) 2008-08-26 2010-08-03 Cleaning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008216343A JP5038259B2 (ja) 2008-08-26 2008-08-26 クリーニング装置およびクリーニング方法

Publications (3)

Publication Number Publication Date
JP2010056113A JP2010056113A (ja) 2010-03-11
JP2010056113A5 true JP2010056113A5 (cg-RX-API-DMAC7.html) 2011-08-04
JP5038259B2 JP5038259B2 (ja) 2012-10-03

Family

ID=41723171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008216343A Expired - Fee Related JP5038259B2 (ja) 2008-08-26 2008-08-26 クリーニング装置およびクリーニング方法

Country Status (4)

Country Link
US (2) US8006340B2 (cg-RX-API-DMAC7.html)
JP (1) JP5038259B2 (cg-RX-API-DMAC7.html)
KR (1) KR101071368B1 (cg-RX-API-DMAC7.html)
TW (1) TWI409110B (cg-RX-API-DMAC7.html)

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JP6812264B2 (ja) * 2017-02-16 2021-01-13 東京エレクトロン株式会社 真空処理装置、及びメンテナンス装置
WO2019219163A1 (en) * 2018-05-14 2019-11-21 Applied Materials, Inc. Cleaning device for attracting particles in a substrate processing system, processing system for processing a substrate, and method of operation of a cleaning device
CN111938521B (zh) * 2018-07-25 2021-07-30 南京溧水高新产业股权投资有限公司 一种用于瓷砖地板的贴纸用水清除机构及使用方法
US12080528B2 (en) * 2019-11-01 2024-09-03 Lam Research Corporation Systems and methods for cleaning a showerhead
CN111822420B (zh) * 2020-07-15 2022-06-24 郑州龙华机电工程有限公司 一种基于物联网的电力设备检修系统
CN114308907B (zh) * 2022-02-23 2023-11-28 深圳市震华等离子体智造有限公司 一种用于精密分析仪器的等离子清洗装置
JP1783959S (ja) 2023-11-01 2024-11-07 ウェブ搬送用ガイド部材

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