JP2010047434A5 - - Google Patents
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- JP2010047434A5 JP2010047434A5 JP2008211292A JP2008211292A JP2010047434A5 JP 2010047434 A5 JP2010047434 A5 JP 2010047434A5 JP 2008211292 A JP2008211292 A JP 2008211292A JP 2008211292 A JP2008211292 A JP 2008211292A JP 2010047434 A5 JP2010047434 A5 JP 2010047434A5
- Authority
- JP
- Japan
- Prior art keywords
- average
- ceramic member
- adhered
- wafer
- washed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
表２に示すように、比較例１のセラミックス部材では、いずれのウエハーにもパーティクルが平均で１６．８個と多数付着していたが、本発明例３のセラミックス部材には、平均で１．０個とほとんど付着していなかった。また、５回の洗浄を実施した本発明例６のセラミックス部材においても、平均で３．３個と少なく、洗浄後にも本発明の効果が維持されることが確認できた。
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008211292A JP5537001B2 (ja) | 2008-08-20 | 2008-08-20 | 表面処理セラミックス部材、その製造方法および真空処理装置 |
| KR1020117003716A KR101276506B1 (ko) | 2008-08-20 | 2009-08-10 | 표면 처리 세라믹스 부재, 그 제조 방법 및 진공 처리 장치 |
| PCT/JP2009/064109 WO2010021260A1 (ja) | 2008-08-20 | 2009-08-10 | 表面処理セラミックス部材、その製造方法および真空処理装置 |
| CN200980132385.4A CN102123970B (zh) | 2008-08-20 | 2009-08-10 | 表面处理陶瓷构件、其制造方法及真空处理装置 |
| TW98127987A TWI400217B (zh) | 2008-08-20 | 2009-08-19 | A surface-treated ceramic member, a method of manufacturing the same, and a vacuum processing apparatus |
| US13/026,356 US8231967B2 (en) | 2008-08-20 | 2011-02-14 | Surface-treated ceramic member, method for producing the same and vacuum processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008211292A JP5537001B2 (ja) | 2008-08-20 | 2008-08-20 | 表面処理セラミックス部材、その製造方法および真空処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010047434A JP2010047434A (ja) | 2010-03-04 |
| JP2010047434A5 true JP2010047434A5 (ja) | 2011-05-26 |
| JP5537001B2 JP5537001B2 (ja) | 2014-07-02 |
Family
ID=41707138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008211292A Active JP5537001B2 (ja) | 2008-08-20 | 2008-08-20 | 表面処理セラミックス部材、その製造方法および真空処理装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8231967B2 (ja) |
| JP (1) | JP5537001B2 (ja) |
| KR (1) | KR101276506B1 (ja) |
| CN (1) | CN102123970B (ja) |
| TW (1) | TWI400217B (ja) |
| WO (1) | WO2010021260A1 (ja) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9034199B2 (en) | 2012-02-21 | 2015-05-19 | Applied Materials, Inc. | Ceramic article with reduced surface defect density and process for producing a ceramic article |
| US9212099B2 (en) | 2012-02-22 | 2015-12-15 | Applied Materials, Inc. | Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics |
| US9090046B2 (en) | 2012-04-16 | 2015-07-28 | Applied Materials, Inc. | Ceramic coated article and process for applying ceramic coating |
| US9604249B2 (en) | 2012-07-26 | 2017-03-28 | Applied Materials, Inc. | Innovative top-coat approach for advanced device on-wafer particle performance |
| US9343289B2 (en) | 2012-07-27 | 2016-05-17 | Applied Materials, Inc. | Chemistry compatible coating material for advanced device on-wafer particle performance |
| DE102013104186A1 (de) * | 2013-04-25 | 2014-10-30 | Coatec Gmbh | Lagerring, elektrisch isolierende Beschichtung und Verfahren zum Aufbringen einer elektrisch isolierenden Beschichtung |
| US9865434B2 (en) | 2013-06-05 | 2018-01-09 | Applied Materials, Inc. | Rare-earth oxide based erosion resistant coatings for semiconductor application |
| US9850568B2 (en) | 2013-06-20 | 2017-12-26 | Applied Materials, Inc. | Plasma erosion resistant rare-earth oxide based thin film coatings |
| US11047035B2 (en) | 2018-02-23 | 2021-06-29 | Applied Materials, Inc. | Protective yttria coating for semiconductor equipment parts |
| CN108937607B (zh) * | 2018-09-18 | 2021-02-05 | 杭州蜗牛实业有限公司 | 一种表面防粘炊具的制作方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60169139A (ja) * | 1984-02-13 | 1985-09-02 | Canon Inc | 気相法装置 |
| JPH06737A (ja) * | 1991-03-29 | 1994-01-11 | Shin Etsu Chem Co Ltd | 静電チャック基板 |
| JP3126635B2 (ja) | 1994-07-11 | 2001-01-22 | 東洋鋼鈑株式会社 | アルミナセラミックス焼結体 |
| JPH1121187A (ja) | 1997-07-02 | 1999-01-26 | Ngk Insulators Ltd | セラミックス製品の洗浄方法 |
| WO1999039890A1 (fr) * | 1998-02-05 | 1999-08-12 | Nippon Sheet Glass Co., Ltd. | Article a surface rugueuse, procede de production dudit article et composition a cet effet |
| JPH11312729A (ja) * | 1998-04-28 | 1999-11-09 | Kyocera Corp | 静電チャック |
| JP2001152307A (ja) | 1999-11-29 | 2001-06-05 | Nippon Steel Hardfacing Co Ltd | 耐食性を有し、長期間使用に耐える複合皮膜の形成方法およびその複合皮膜を有する部材 |
| JP3716386B2 (ja) * | 2000-07-24 | 2005-11-16 | 東芝セラミックス株式会社 | 耐プラズマ性アルミナセラミックスおよびその製造方法 |
| JP2002180233A (ja) | 2000-12-14 | 2002-06-26 | Ntn Corp | 封孔処理セラミックス絶縁層および軌道輪 |
| JP2003119087A (ja) | 2001-10-17 | 2003-04-23 | Ngk Insulators Ltd | 複合コーティング材料、積層体、耐蝕性部材、耐ハロゲンガスプラズマ用部材および複合コーティング材料の製造方法 |
| JP2003335589A (ja) | 2002-05-20 | 2003-11-25 | Nihon Ceratec Co Ltd | 耐食性複合部材およびその製造方法 |
| US7338699B2 (en) * | 2002-10-31 | 2008-03-04 | Tosoh Corporation | Island projection-modified part, method for producing the same, and apparatus comprising the same |
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2008
- 2008-08-20 JP JP2008211292A patent/JP5537001B2/ja active Active
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2009
- 2009-08-10 KR KR1020117003716A patent/KR101276506B1/ko active IP Right Grant
- 2009-08-10 WO PCT/JP2009/064109 patent/WO2010021260A1/ja active Application Filing
- 2009-08-10 CN CN200980132385.4A patent/CN102123970B/zh active Active
- 2009-08-19 TW TW98127987A patent/TWI400217B/zh active
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2011
- 2011-02-14 US US13/026,356 patent/US8231967B2/en active Active