JP2010034566A5 - - Google Patents

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Publication number
JP2010034566A5
JP2010034566A5 JP2009211737A JP2009211737A JP2010034566A5 JP 2010034566 A5 JP2010034566 A5 JP 2010034566A5 JP 2009211737 A JP2009211737 A JP 2009211737A JP 2009211737 A JP2009211737 A JP 2009211737A JP 2010034566 A5 JP2010034566 A5 JP 2010034566A5
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JP
Japan
Prior art keywords
block
substrate
processing
coating
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009211737A
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English (en)
Japanese (ja)
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JP2010034566A (ja
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Priority to JP2009211737A priority Critical patent/JP2010034566A/ja
Priority claimed from JP2009211737A external-priority patent/JP2010034566A/ja
Publication of JP2010034566A publication Critical patent/JP2010034566A/ja
Publication of JP2010034566A5 publication Critical patent/JP2010034566A5/ja
Pending legal-status Critical Current

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JP2009211737A 2009-09-14 2009-09-14 塗布、現像装置 Pending JP2010034566A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009211737A JP2010034566A (ja) 2009-09-14 2009-09-14 塗布、現像装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009211737A JP2010034566A (ja) 2009-09-14 2009-09-14 塗布、現像装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005025509A Division JP4459831B2 (ja) 2005-02-01 2005-02-01 塗布、現像装置

Publications (2)

Publication Number Publication Date
JP2010034566A JP2010034566A (ja) 2010-02-12
JP2010034566A5 true JP2010034566A5 (OSRAM) 2010-11-18

Family

ID=41738610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009211737A Pending JP2010034566A (ja) 2009-09-14 2009-09-14 塗布、現像装置

Country Status (1)

Country Link
JP (1) JP2010034566A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6994489B2 (ja) * 2019-10-02 2022-01-14 東京エレクトロン株式会社 塗布、現像装置及び塗布、現像方法
JP7297650B2 (ja) * 2019-11-27 2023-06-26 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板搬送方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2931820B2 (ja) * 1991-11-05 1999-08-09 東京エレクトロン株式会社 板状体の処理装置及び搬送装置
JP4104828B2 (ja) * 2001-02-22 2008-06-18 東京エレクトロン株式会社 処理装置
JP2004266283A (ja) * 2004-03-15 2004-09-24 Tokyo Electron Ltd 基板処理装置

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