JP2010027793A - Alignment apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an alignment apparatus reduced in size and weight in the whole apparatus, decreasing load of positioning when a workpiece is positioned, and reducing power consumption. <P>SOLUTION: The alignment device 30 has four alignment stages 31 separated from one another, and a panel is supported by alignment tables AT provided to the alignment stages 31, respectively. By driving a moving motor M2, the alignment tables AT positioned at each of four points are interlocked through connecting rods 40a, 40b, 41a and 41b to move the panel counterclockwise, clockwise, in right direction in parallel, in left direction in parallel, backward in parallel, and forward in parallel according to displacement, so that displacement of the panel to a light shielding mask becomes zero. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an alignment apparatus.

  A flat panel such as a liquid crystal display panel or a plasma display panel is generally formed by bonding two substrates. For example, in a liquid crystal display panel, an element substrate on which thin film transistors are arranged and formed in a matrix and an opposite substrate on which a light shielding film, a color filter, and the like are formed are arranged to face each other at an extremely narrow interval. When the two substrates are overlaid, the liquid crystal is sealed in a region between the two substrates and surrounded by a sealing material containing a photocurable resin. Subsequently, the liquid crystal display panel is manufactured by irradiating the sealing material with ultraviolet rays through a light shielding mask, curing the sealing material, and bonding the two substrates together. Various alignment apparatuses used for aligning the light shielding mask and the substrate have been proposed (for example, Patent Document 1).

In general, this type of alignment apparatus includes a stage for placing two superposed substrates enclosing liquid crystals, a moving mechanism for moving the stage in the X, Y direction, and the rotation direction on the placement surface, A mask holding member for holding the light shielding mask at the upper position. Then, the two superposed substrates placed on the stage are opposed to the light shielding mask held by the mask holding member. Then, the stage is moved in the X, Y and rotational directions by driving and controlling the moving mechanism, that is, the two substrates superimposed on the light shielding mask are relatively moved to perform high-precision positioning. It is like that.
JP 2002-220944 A

  By the way, the moving mechanism moves and aligns the two substrates (liquid crystal display panel) relative to the light shielding mask by moving the stage on which the two substrates (liquid crystal display panel) are placed. The weight of the two substrates (liquid crystal display panel) plus the weight of the stage had to be moved. Therefore, the moving mechanism is required to have a structure with high mechanical strength in consideration of the weight of the stage, which increases the size and cost of the apparatus and leads to an increase in power consumption for driving the moving body mechanism. . Moreover, it has become increasingly problematic with the recent increase in the size of display panels.

  The present invention has been made in order to solve the above-described problems, and the object thereof is to reduce the size and weight of the entire apparatus, reduce the alignment load when aligning the workpiece, and reduce power consumption. An object of the present invention is to provide an alignment apparatus capable of achieving the above.

  The invention according to claim 1 is an alignment apparatus that aligns the workpiece by moving the workpiece in one direction and another direction orthogonal to the one direction and horizontally rotating the workpiece. A first moving block provided on the upper surface of the base and on a pair of vertices on one diagonal of each of the vertices forming a square or rectangle; A second moving block provided to be able to reciprocate in the other direction at a pair of vertex positions on a diagonal line, and each first moving block on the one diagonal line to reciprocate in the one direction, respectively. First driving means, second driving means for reciprocally moving each second moving block on the other diagonal line in the other direction, and an upper surface of each first moving block, The first rotary table that is supported so as to be able to rotate flat and can be reciprocated in the other direction, and is supported on the upper surface of each second moving block so as to be horizontally rotatable and can be reciprocated in the one direction. A second rotary table that can be provided, a first connecting member that connects the first rotary table and the second rotary table facing each other in the one direction, and the first rotary table facing the other direction. And a second connecting member that connects the second rotary table to each other, and an alignment table that is provided on each of the first rotary table and the second rotary table and supports the workpiece in cooperation with each other. .

  According to the first aspect of the present invention, the four positions of the workpiece are supported by the alignment tables, and the alignment tables are interlocked via the first and second connecting members to move the workpiece in one direction and the one direction. It was made to move in the other direction orthogonal to the horizontal and rotate horizontally.

  Therefore, the apparatus can be reduced in size as compared with the conventional alignment stage that supports the entire lower surface of the workpiece and moves the workpiece for alignment, thereby reducing the cost. In addition, the weight can be much reduced as compared with the conventional alignment stage, and the power consumption for driving the movable body mechanism can be reduced.

According to a second aspect of the present invention, in the alignment apparatus according to the first aspect, the first connecting member and the second connecting member are pipes.
According to invention of Claim 2, since the 1st connection member and the 2nd connection member were comprised with the pipe, the 1st connection member and the 2nd connection member can be reduced in weight, and the power consumption for driving a mobile body mechanism Can be further reduced.

According to a third aspect of the present invention, in the alignment apparatus according to the first or second aspect, the base is reciprocated in the vertical direction by the first elevating means.
According to the invention of claim 4, the work supported on each alignment table can be guided from the standby position to the alignment position.

  According to a fourth aspect of the present invention, in the alignment apparatus according to the third aspect of the present invention, a transfer plate that is connected and arranged in parallel via an interval holding member at an upper position of the base, and a recess is provided on the upper surface of the transfer plate. The alignment table is accommodated, and the first recess means is disposed at a lower position of the base, the receiving recess for allowing the alignment plate to be tabled from the upper surface of the transfer plate, and penetrates the base and the transfer plate on the upper surface. And a delivery board provided with a plurality of delivery pins that protrude from the upper surface of the delivery plate by the first lifting means.

  According to the invention of claim 4, the work placed on the delivery pin can be delivered to the delivery plate simply by moving the base up and down by the first elevating means, and the work placed on the delivery plate can be delivered. Since the workpiece can be transferred to the transfer pin, the work for performing the processing after the workpiece is aligned can be continuously performed.

  According to a fifth aspect of the present invention, in the alignment apparatus according to the fourth aspect, the alignment tables provided in the first turntable and the second turntable are the first turntable and the second turntable. It is reciprocated in the vertical direction by the second elevating means provided in the.

  According to the invention of claim 5, since the alignment can be performed in a state in which each alignment table is moved up and the work is separated from the transfer plate, the transfer plate and the work are not rubbed during alignment. .

  According to the present invention, the entire apparatus can be reduced in size and weight, the load of alignment can be reduced when aligning a workpiece, and power consumption can be reduced.

  Hereinafter, an embodiment in which the alignment apparatus of the present invention is embodied in a light irradiation apparatus (ultraviolet irradiation apparatus) will be described with reference to the drawings. In addition, the ultraviolet irradiation apparatus of this embodiment irradiates the sealing material formed between two substrates of a liquid crystal display panel formed by bonding two substrates with ultraviolet rays through a light-shielding mask. This is a light irradiation device for curing a material and bonding both substrates together.

  As shown in FIG. 1, the ultraviolet irradiation device 1 installed on the floor includes a stage unit 2 on the lower side and a light irradiation unit 3 on the upper side. The stage unit 2 mounts a liquid crystal display panel (hereinafter referred to as a panel) P as a work before the sealing material is hardened, and guides (moves up) the panel P to the light irradiation unit 3 provided above. To align.

  The light irradiation unit 3 disposed above the stage unit 2 is provided with a lamp house 5 indicated by a two-dot chain line supported and fixed by a support member (not shown), and a plurality of ultraviolet lamps 6 are provided in the lamp house 5. It is attached to irradiate ultraviolet rays downward.

  A plate-like light-transmitting mask holding member 7 is disposed below the lamp house 5, and a light-shielding mask 8 is adsorbed and held on the lower surface of the mask holding member 7. A part of the ultraviolet light emitted from the ultraviolet lamp 6 is shielded by the light shielding mask 8 and is applied only to the sealing material formed on the panel P placed on the stage unit 2.

  In the stage unit 2, a square frame 11 is fixed to the floor 12. As shown in FIG. 1, a pair of front and rear support blocks 13 are fixed inside the left and right frames 11 a and 11 b constituting the frame 11.

  The support block 13 has support arms 14 extending inwardly at both upper and lower ends, and a ball screw 15 is rotatably supported between the pair of upper and lower support arms 14. An elevating motor M1 is fixed to the lower side surface of the lower support arm 14, and a ball screw 15 is drivingly connected to the rotating shaft thereof. Therefore, the ball screw 15 provided in each support block 13 rotates forward and backward based on the forward and reverse rotation of the respective lifting motor M1.

  Inside the rectangular frame 11, a lifting board 16 is disposed as a rectangular base. The elevator board 16 is formed of a rectangular stainless steel plate, and a lower guide hole 17 penetrating in the vertical direction (Z direction) is formed on the board in the horizontal direction (anti-X arrow direction and X arrow direction) and the front-rear direction ( A plurality are formed at equal intervals in the anti-Y arrow direction and the Y arrow direction. The lifting board 16 has a pair of front and rear connecting projections 18 extending from the left and right side surfaces thereof. A pair of front and rear connecting projections 18 formed on the left and right side surfaces are respectively screwed into ball screws 15 rotatably supported by the support block 13.

  Therefore, the elevator board 16 moves up and down when the ball screw 15 of each support block 13 is rotated forward and backward. Incidentally, in this embodiment, when each raising / lowering motor M1 is normally rotated, the raising / lowering board 16 will move up (rise), and when each raising / lowering motor M1 is reversely rotated, the raising / lowering board 16 will move downward (lower). ing. In the present embodiment, the support block 13, the ball screw 15, and the lifting motor M1 constitute first lifting means.

  Spacing members 19 are fixed at four locations on the upper surface 16 a of the elevator board 16, and a delivery plate 20 is connected and fixed to the upper ends of the spacing members 19. Therefore, the delivery plate 20 moves up and down together with the elevator board 16. The delivery plate 20 is a quadrangular stainless steel plate, and is disposed in parallel with the elevator board 16 via the interval holding member 19. As shown in FIG. 2, an upper guide hole 21 penetrating in the vertical direction (Z direction) is formed at a position opposite to each lower guide hole 17 formed in the lifting plate 16 on the delivery plate 20. ing.

  Moreover, as shown in FIG. 4, the delivery plate 20 is provided with nozzle holes 22 at equal intervals (about 300 mm pitch). The nozzle hole 22 ejects air sent from an air introduction pipe 23 piped on the lower surface of the delivery plate 20 and floats the panel P placed on the delivery plate 20 (0.3 mm in this embodiment). It is supposed to let you.

  And in this embodiment, the raising / lowering board 16 (delivery plate 20) moves up to the lower position (it is called alignment position) adjacent to the light shielding mask 8 with which the delivery plate 20 provided in the light irradiation part 3, and the downward direction is Further, it moves downward to an upper position (referred to as a standby position) adjacent to the transfer board 25 installed on the lower side of the elevator board 16.

  The delivery board 25 arranged below the elevator board 16 is supported and fixed to the frame 11. The delivery board 25 is a rectangular table plate, and delivery pins 26 penetrating a pair of lower and upper guide holes 17 and 21 formed in the elevator board 16 and the delivery plate 20 are respectively provided on the upper surface thereof. It is erected. Each delivery pin 26 appears and disappears from the upper surface 20a of the delivery plate 20 based on the vertical movement of the elevator board 16 (the delivery plate 20).

  Specifically, when the elevator 16 (the delivery plate 20) is in the standby position, the tip of each delivery pin 26 protrudes upward from the upper surface 20a of the delivery plate 20, and the elevator 16 (the delivery plate 20) is in the alignment position. At this time, the leading end of each delivery pin 26 comes out downward from the upper guide hole 21 of the delivery plate 20.

  When the elevator 16 (the delivery plate 20) is in the standby position and the tip of each delivery pin 26 protrudes upward from the upper surface 20a of the delivery plate 20, the panel P is placed on the tip of each delivery pin 26. The When the elevator 16 (the transfer plate 20) is moved up and the tip of each transfer pin 26 is immersed in the upper guide hole 21 of the transfer plate 20, the panel P placed on each transfer pin 26 is transferred to the transfer plate 26. 20 is placed and delivered.

  The panel P delivered to the delivery plate 20 is disposed at a position opposite to and adjacent to the light shielding mask 8 provided in the light irradiation unit 3 when the elevator 16 (delivery plate 20) further moves up to the alignment position. It is like that.

  Further, when the elevator 16 (the delivery plate 20) moves downward from the alignment position to the standby position, if the tip of each delivery pin 26 protrudes upward from the upper guide hole 21 of the delivery plate 20 during the downward movement, the delivery plate The panel P placed on the upper surface 20 is placed on and delivered to each delivery pin 26. Then, the elevator 16 (delivery plate 20) that delivered the panel P to each delivery pin 26 moves down to the standby position and stops to wait for the next delivery operation.

  An alignment device 30 is provided between the elevator 16 and the transfer plate 20. The alignment apparatus 30 includes four alignment stages 31 as shown in FIG. Each alignment stage 31 is fixed to the upper surface 16 a of the elevator board 16. In FIG. 3, the lower guide hole 17 and the spacing member 19 formed in the elevator board 16 are omitted for convenience of explanation.

  The four alignment stages 31 are arranged at equal distances from the center position Po of the elevator 16. Specifically, the four alignment stages 31 are arranged so as to surround the center position Po of the elevator 16 and are arranged at each vertex position of the square so that when the adjacent alignment stages 31 are connected to each other, a regular square is formed. Has been.

  When each of the alignment stages 31 is described in a particularly limited manner, for convenience of explanation, the alignment stage 31 provided on the left front side of the elevator 16 is referred to as the left front alignment stage 31a and provided on the right front side of the elevator 16. The alignment stage 31 is referred to as the right front alignment stage 31b. The alignment stage 31 provided on the right rear side of the elevator 16 is referred to as a right rear alignment stage 31c, and the alignment stage 31 provided on the left rear side of the elevator 16 is referred to as a left rear alignment stage 31d.

  Accordingly, the right front alignment stage 31b and the left rear alignment stage 31d are arranged at equidistant positions on the diagonal line across the center position Po of the elevator 16 and the left front alignment stage 31a and the right rear alignment stage 31c are the center of the elevator 16 They are arranged at equidistant positions on the diagonal line across the position Po.

  As shown in FIG. 4, each alignment stage 31 has a base 32 fixed to the upper surface 16 a of the elevator 16, and a ball screw 33 is rotatably supported on the base 32. The ball screw 33 supported so as to be rotatable with respect to the base 32 rotates forward and backward by driving of a moving motor M2 fixed to the base 32.

  Here, the ball screw 33 provided on the base 32 of the left front alignment stage 31a is arranged in the X arrow direction. As shown in FIG. 3, the moving motor M2 arranged on the left side of the base 32 moves the ball screw 33 forward. Reverse rotation. The ball screw 33 provided on the base 32 of the right front alignment stage 31b is arranged in the Y arrow direction, and the moving motor M2 arranged on the front side of the base 32 rotates the ball screw 33 forward and backward.

  The ball screw 33 provided on the base 32 of the right rear alignment stage 31c is arranged in the X arrow direction, and the moving motor M2 arranged on the right side of the base 32 rotates the ball screw 33 forward and backward. The ball screw 33 provided on the base 32 of the left rear alignment stage 31d is disposed in the direction of the arrow Y, and the moving motor M2 disposed on the rear side of the base 32 rotates the ball screw 33 forward and backward.

  A moving block 34 is slidably disposed in the longitudinal direction on the upper surface of the base 32 of the alignment stage 31, and a ball screw 33 is screwed to the moving block 34. The moving block 34 reciprocates along the ball screw 33 as the ball screw 33 rotates forward and backward.

  More specifically, the moving block 34 screwed into the ball screw 33 provided on the left front alignment stage 31a and the right rear alignment stage 31c reciprocates in the left-right direction (X arrow direction). In the present embodiment, the moving blocks 34 of the left front alignment stage 31a and the right rear alignment stage 31c move in the X arrow direction (right direction) when the moving motor M2 (ball screw 33) rotates forward, and the moving motor M2 When the (ball screw 33) rotates in the reverse direction, it moves in the anti-X arrow direction (left side direction).

  Further, the moving block 34 screwed into the ball screw 33 provided on the right front alignment stage 31b and the left rear alignment stage 31d reciprocates in the front-rear direction (Y arrow direction). In this embodiment, the moving block 34 of the right front alignment stage 31b and the left rear alignment stage 31d moves in the Y arrow direction (rear direction) when the moving motor M2 (ball screw 33) rotates in the forward direction. When M2 (ball screw 33) rotates in the reverse direction, it moves in the anti-Y arrow direction (front direction).

  In this embodiment, the first moving block is constituted by the moving block 34 of the left front alignment stage 31a and the right rear alignment stage 31c, and the second movement is made by the moving block 34 of the right front alignment stage 31b and the left rear alignment stage 31d. Configure the block. In the present embodiment, the first driving means is constituted by the movement motor M2 and ball screw 33 of the left front alignment stage 31a and right rear alignment stage 31c, and the movement motor M2 and ball screw of the right front alignment stage 31b and left rear alignment stage 31d. Reference numeral 33 denotes second driving means.

  A rotating plate 35 is disposed on the upper surface of each moving block 34. The rotating plate 35 is supported so as to be rotatable in the horizontal direction with respect to the moving block 34 around the central axis Ct of the rotating shaft of the rotating plate 35.

  A guide member 36 is fixed on the upper surface of the rotating plate 35 and rotates in the horizontal direction around the central axis Ct together with the rotating plate 35 with respect to the moving block 34. A guide groove 36 a having a U-shaped cross section extending in a direction orthogonal to the central axis direction of the ball screw 33 is formed on the upper surface of the guide member 36.

  The guide member 36 is provided with a rotary mounting table 37 on the upper side. The rotary mounting table 37 is a rectangular metal plate, and is supported by fitting a rail 38 fixed on the lower surface thereof into the guide groove 36a. The rail 38 extends along the guide groove 36a and is slidably fitted to the guide groove 36a to guide the rotary mounting table 37 so as to be movable along the guide groove 36a. Therefore, the rotary mounting table 37 can move along the guide groove 36a with respect to the guide member 36, and can rotate in the horizontal direction with respect to the moving block 34 together with the rotary plate 35 (guide member 36). ing.

  In this embodiment, the first rotation table is constituted by the rotation plate 35, the guide member 36, and the rotation mounting table 37 of the left front alignment stage 31a and the right rear alignment stage 31c, and the right front alignment stage 31b and the left rear alignment stage. The rotary plate 35, the guide member 36, and the rotary mounting table 37 of 31d constitute a second rotary table.

  As shown in FIG. 3 and FIG. 4, the rotation mounting table 37 of each alignment stage 31 is made of stainless steel pipes via a split fitting 39 provided between the adjacent rotation mounting tables 37 on the rotation mounting table 37. These are connected and fixed by front or rear X-axis connecting rods 40a and 40b as first connecting members and left or rear right Y-axis connecting rods 41a and 41b as second connecting members.

  Specifically, as shown in FIG. 3, the rotary mounting table 37 of the left front alignment stage 31a and the rotary mounting table 37 of the right front alignment stage 31b are connected to the front X-axis connecting rod 40a. The front X-axis connecting rod 40a is connected so that its center axis Cx coincides with the center axis of the ball screw 33 of the left front alignment stage 31a in plan view. Further, the front X-axis connecting rod 40a is connected so that the center axis Cx thereof is orthogonal to the center axis of the ball screw 33 of the right front alignment stage 31b in a plan view and intersects the center axis Ct of the rotating plate 35 of the right front alignment stage 31b. Has been.

  Further, the rotary mounting table 37 of the right front alignment stage 31b and the rotary mounting table 37 of the right rear alignment stage 31c are connected to the right Y-axis connecting rod 41b. The right YX-axis connecting rod 41b is connected so that its center axis Cy coincides with the center axis of the ball screw 33 of the right front alignment stage 31b in plan view. The right Y-axis connecting rod 41b has a center axis Cy that is orthogonal to the center axis of the ball screw 33 of the right rear alignment stage 31c in plan view and intersects the center axis Ct of the rotating plate 35 of the right rear alignment stage 31c. It is connected to.

  Further, the rotary mounting table 37 of the right rear alignment stage 31c and the rotary mounting table 37 of the left rear alignment stage 31d are connected to the rear X-axis connecting rod 40b. The rear X-axis connecting rod 40b is connected so that its center axis Cx coincides with the center axis of the ball screw 33 of the right rear alignment stage 31c in plan view. Further, the center axis Cx of the rear X-axis connecting rod 40b is orthogonal to the center axis of the ball screw 33 of the left rear alignment stage 31d in a plan view and intersects the center axis Ct of the rotating plate 35 of the left rear alignment stage 31d. So that they are connected.

  Furthermore, the rotary mounting table 37 of the left rear alignment stage 31d and the rotary mounting table 37 of the left front alignment stage 31a are connected to the left Y-axis connecting rod 41a. The left X-axis connecting rod 41a is connected so that its central axis Cy coincides with the central axis of the ball screw 33 of the left rear alignment stage 31d in plan view. The left Y-axis connecting rod 41a is connected so that its central axis Cy is orthogonal to the central axis of the ball screw 33 of the left front alignment stage 31a in plan view and intersects the central axis Ct of the rotating plate 35 of the left front alignment stage 31a. Has been.

  Here, in the rotary mounting table 37 of the left front alignment stage 31a, the cross point between the center axis Cx of the front X-axis connecting rod 40a and the center axis Cy of the left Y-axis connecting rod 41a is set perpendicularly (in the direction of the arrow Z). The passing axis is referred to as a reference axis Ck.

  Further, in the rotary mounting table 37 of the right front alignment stage 31b, an axis that passes perpendicularly (in the direction of the Z arrow) a cross point between the center axis Cx of the front X-axis connecting rod 40a and the center axis Cy of the right Y-axis connecting rod 41b. Is referred to as a reference axis Ck.

  Further, in the rotary mounting table 37 of the right rear alignment stage 31c, the cross point between the center axis Cy of the right Y-axis connecting rod 41b and the center axis Cx of the rear X-axis connecting rod 40a passes vertically (Z arrow direction). The axis to be called is the reference axis Ck.

  Furthermore, in the rotary mounting table 37 of the left rear alignment stage 31d, the cross point between the center axis Cx of the rear X-axis connecting rod 40b and the center axis Cy of the left Y-axis connecting rod 41b is perpendicular (Z arrow direction). The passing axis is referred to as a reference axis Ck.

  Now, when the rotary mounting table 37 of each alignment stage 31 is in the state shown in FIG. 3, the moving motor M2 of each alignment stage 31 is simultaneously rotated at the same rotational speed, and the left front and right rear alignment stages 31a, The moving block 34 of 31c is moved in the X arrow direction (right direction), and the moving blocks 34 of the right front and left rear alignment stages 31b, 31d are simultaneously moved in the anti-Y arrow direction (front direction) at the same speed.

  At this time, the rotary mounting table 37 of each alignment stage 31 is connected and fixed by connecting rods 40a, 40b, 41a, and 41b, and can be horizontally rotated around the central axis Ct of the rotating plate 35. Yes. As a result, the rotary mounting table 37 of each alignment stage 31 moves in the left-right direction or the front-rear direction, and rotates counterclockwise in FIG. 3 about the central axis Ct while moving in each direction.

  That is, the rotation mounting table 37 of the left front alignment stage 31a rotates in the counterclockwise direction in FIG. 3 around the central axis Ct while moving in the X arrow direction. The rotary mounting table 37 of the right front alignment stage 31b rotates in the counterclockwise direction in FIG. 3 about the central axis Ct while moving in the Y arrow direction. The rotary mounting table 37 of the right rear alignment stage 31c rotates in the counterclockwise direction in FIG. 3 about the central axis Ct while moving in the counter X arrow direction. The rotary mounting table 37 of the left rear alignment stage 31d rotates in the counterclockwise direction in FIG. 3 about the central axis Ct while moving in the counter-Y arrow direction.

  As a result, the quadrilateral connecting the central axis Ct of the rotation plate 35 of each alignment stage 31 is horizontally rotated counterclockwise around the central axis of the quadrangle, that is, the axis passing vertically through the central position Po of the elevator 16. To do. Hereinafter, this movement is referred to as a left rotation movement mode.

  On the contrary, the moving motor M2 of each alignment stage 31 is simultaneously rotated at the same rotational speed, and the moving block 34 of the left front and right rear alignment stages 31a and 31c is moved in the anti-X arrow direction (left direction), right front and left rear. The moving blocks 34 of the alignment stages 31b and 31d are moved simultaneously at the same speed in the Y arrow direction (rear direction).

  As a result, contrary to the previous time, the quadrilateral connecting the central axis Ct of the rotation plate 35 of each alignment stage 31 is clockwise around the central axis of the quadrangle, that is, the axis passing vertically through the center position Po of the elevator 16. Rotate horizontally in the direction. Hereinafter, this movement is referred to as a right rotation movement mode.

  Further, the moving motor M2 of the left front alignment stage 31a and the right rear alignment stage 31c is rotated at the same rotational speed, and the moving block 34 of the left front and right rear alignment stages 31a, 31c is moved in the X arrow direction (right direction). On the other hand, the moving blocks 34 of the right front and left rear alignment stages 31b and 31d are stopped.

  At this time, the rotary placement tables 37 of the right front and left rear alignment stages 31b and 31d are movable in the left-right direction along the guide groove 36a with respect to the moving block 34 (guide member 36), respectively. The rotary mounting table 37 of each alignment stage 31 moves in the right direction (X arrow direction). As a result, the quadrilateral connecting the central axis Ct of the rotating plate 35 of each alignment stage 31 is translated in the X arrow direction. Hereinafter, this movement is referred to as a right parallel movement mode.

  On the contrary, the moving motor M2 of the left front alignment stage 31a and the right rear alignment stage 31c is rotated at the same rotational speed, and the moving block 34 of the left front and right rear alignment stages 31a, 31c is moved in the anti-X arrow direction (left direction). Let On the other hand, the moving blocks 34 of the right front and left rear alignment stages 31b and 31d are stopped.

  At this time, since the rotation mounting table 37 of each alignment stage 31 moves in the left direction (counter X arrow direction), the rectangle connecting the center axis Ct of the rotation plate 35 of each alignment stage 31 is the anti X arrow. Translate in the direction. Hereinafter, this movement is referred to as a left parallel movement mode.

  Further, the moving motor M2 of the right front alignment stage 31b and the left rear alignment stage 31d is rotated at the same rotational speed, and the moving block 34 of the right front and left rear alignment stages 31b, 31d is moved in the Y arrow direction (rear side direction). . On the other hand, the moving blocks 34 of the left front and right rear alignment stages 31a and 31c are stopped.

  At this time, the rotary placement tables 37 of the left front and right rear alignment stages 31a and 31c are movable in the left-right direction along the guide groove 36a with respect to the moving block 34 (guide member 36), respectively. The rotary mounting table 37 of each alignment stage 31 moves in the rear direction (Y arrow direction). As a result, the quadrilateral connecting the central axis Ct of the rotating plate 35 of each alignment stage 31 is translated in the Y arrow direction. Hereinafter, this movement is referred to as a rear parallel movement mode.

  Conversely, the moving motor M2 of the right front alignment stage 31b and the left rear alignment stage 31d is rotated at the same rotational speed, and the moving block 34 of the right front and left rear alignment stages 31b, 31d is moved in the anti-Y arrow direction (front direction). Let On the other hand, the moving blocks 34 of the left front and right rear alignment stages 31a and 31c are stopped.

  At this time, the rotation mounting table 37 of each alignment stage 31 moves in the front direction (counter-Y arrow direction), and therefore, the square connecting the center axis Ct of the rotation plate 35 of each alignment stage 31 is the anti-Y arrow. Translate in the direction. Hereinafter, this movement is referred to as a front parallel movement mode.

  Thus, by controlling the rotation of each moving motor M2 in each mode, the quadrilateral connecting the central axis Ct of the rotating plate 35 of each alignment stage 31 can be reciprocally rotated in the horizontal rotation direction, and the X arrow Direction, it can be reciprocated in the direction of the arrow Y.

  On the upper surface of the rotary mounting table 37 of each alignment stage 31, an elevating air cylinder SL is provided as second elevating means. The lifting / lowering air cylinder SL is fixed to the rotary mounting table 37 so that the piston rod SLa faces upward and the center axis of the piston rod SLa coincides with the reference axis Ck. A disc-shaped elevating stage ST is connected and fixed to the tip of the piston rod SLa, and the elevating air cylinder SL moves the elevating stage ST up and down.

  A metal cylinder 44 is fixed to the upper surface of the elevating stage ST, and the cylinder 44 penetrates through a through hole 20b formed in the delivery plate 20. The through hole 20b formed in the delivery plate 20 has a large-diameter receiving recess 20c formed on the upper surface side of the delivery plate 20 so as to expand.

  A disk-shaped alignment table AT is fixed to the upper surface of the cylindrical body 44. The alignment table AT is accommodated in the accommodating recess 20c by driving the lifting air cylinder SL or protrudes from the upper surface of the delivery plate 20 (this In the embodiment, 0.3 mm). Incidentally, the central axis of the alignment table AT and the cylindrical body 44 coincides with the reference axis Ck.

  Accordingly, when the alignment table AT of each alignment stage 31 protrudes from the receiving recess 20c of the transfer plate 20, the panel P placed on the transfer plate 20 is lifted by 0.3 mm above the transfer plate 20 by each alignment table AT. It is done.

  When each rotary mounting table 37 executes the above-described various movement modes in a state where the panel P is lifted by each alignment table AT, the panel P lifted by each alignment table AT is moved together with each rotary mounting table 37. A left rotation movement, a right rotation movement, a right side parallel movement, a left side parallel movement, a rear side parallel movement, and a front side parallel movement are performed.

  That is, the panel P can be reciprocated in the horizontal rotation direction and can be reciprocated in the X arrow direction and the Y arrow direction by controlling the rotation of each movement motor M2 in each mode.

  As shown in FIG. 5, a plurality of suction holes 46 are formed in the central portion on the upper surface of each alignment table AT, and the suction holes 46 are formed on the side surfaces of the cylindrical body 44 through passages formed in the cylindrical body 44. It communicates with the provided port 47. A suction groove 48 is formed on the upper surface of each alignment table AT and is connected to the suction hole 46. When the panel P is placed on the upper surface of each alignment table AT, the opening of the suction groove 48 is closed by the panel P, and the air in the closed space is sucked through the suction holes 46. Thus, the panel P is attracted to the alignment table AT. Further, the panel P is released from the alignment table AT by introducing air from the suction holes 46 to the suction grooves 48 in a state where the panel P is attracted to the alignment table AT.

  Three elevating guide members 50 are provided at equal angular intervals between the elevating stage ST and the rotary mounting table 37 and around the elevating air cylinder SL. The raising / lowering guide member 50 has a cylindrical guide tube 50a and a guide shaft 50b inserted through the guide tube 50a. The guide tube 50 a has a lower end fixed to the rotary mounting table 37 and an upper side supported and fixed by a support plate 51. The guide shaft 50b has an upper end fixed to the lower surface of the elevating stage ST and a lower side inserted through the guide cylinder 50a so as to be slidable.

  Three stopper pins 52 are fixed to the lower surface of the lifting / lowering stage ST so as to surround the lifting / lowering air cylinder SL, and a screw portion 52a formed at the tip of the stopper pin 52 penetrates the support plate 51 so as to be movable in the vertical direction. It protrudes downward from the lower surface of the support plate 51. Two nuts 53 are screwed onto the tip of the screw portion 52a formed on the stopper pin 52, and when the elevating stage ST moves up, the nut 53 and the support plate 51 are engaged, and a predetermined distance ( In this embodiment, it is regulated so as not to move up to 0.3 mm) or more.

Next, the electrical configuration of the ultraviolet irradiation device 1 configured as described above will be described with reference to the electrical block circuit diagram shown in FIG.
In FIG. 6, the control device 61 is composed of a microcomputer provided with a CPU, ROM, RAM and the like. The control device 61 (CPU) guides the panel P between the standby position and the alignment position in accordance with the program stored in the ROM, and the panel P facing the light shielding mask 8 with respect to the light shielding mask 8. Alignment processing for aligning is executed.

  The imaging device 62 images an alignment mark (not shown) provided on the light shielding mask 8 and the panel P. The imaging device 62 starts imaging alignment in response to a control signal from the control device 61, and outputs the captured image data to the control device 61.

  The control device 61 calculates whether the panel P is misaligned in the X arrow direction, the Y arrow direction, and the horizontal rotation direction with respect to the light shielding mask 8 based on the alignment mark image data imaged by the imaging device 62. It is like that.

  The control device 61 moves the panel P to the left, moves to the right, translates to the right, and translates to the left on the basis of the calculated displacement of the panel P with respect to the calculated light shielding mask 8 in the X arrow direction, Y arrow direction, and horizontal rotation direction. A movement control signal for reciprocating the moving block 34 in the X arrow direction or the Y arrow direction is generated in order to move, rearward parallel movement, or frontward parallel movement to make the positional deviation zero.

  The control device 61 is electrically connected to the moving motor drive circuit 63. The movement motor drive circuit 63 is connected to each movement motor M2, and rotates each movement motor M2 forward and backward in response to a movement control signal from the control device 61.

  The control device 61 generates an elevation control signal for raising and lowering the elevator board 16 and outputs it to the elevation motor drive circuit 64. The lift motor drive circuit 64 is connected to each lift motor M1 and rotates each lift motor M1 forward and backward in response to a lift control signal from the control device 61.

  The control device 61 is connected to a levitation valve drive circuit 65, and the levitation valve drive circuit 65 is connected to a levitation electromagnetic valve 66. The levitation electromagnetic valve 66 is an electromagnetic valve for supplying air supplied from an air supply means (not shown) to the nozzle hole 22 formed in the delivery plate 20, and levitates in response to an opening / closing signal from the control device 61. The valve drive circuit 65 is opened and closed.

  The control device 61 is connected to a cylinder valve drive circuit 67, and the cylinder valve drive circuit 67 is connected to a cylinder electromagnetic valve 68. The cylinder electromagnetic valve 68 is an electromagnetic valve for supplying and discharging air supplied from an air supply means (not shown) to the raising / lowering air cylinder SL, and is driven in response to a control signal from the control device 61. Switching operation is performed by the circuit 67. More specifically, when the control device 61 outputs a control signal for moving up the alignment table AT, the cylinder electromagnetic valve 68 supplies air to the lift air cylinder SL to move the alignment table AT up. On the contrary, when the control device 61 outputs a control signal for lowering the alignment table AT, the cylinder electromagnetic valve 68 sucks and discharges air from the lifting air cylinder SL and lowers the alignment table AT.

  Further, the control device 61 is connected to an adsorption valve drive circuit 69, and the adsorption valve drive circuit 69 is connected to an adsorption electromagnetic valve 70. The suction electromagnetic valve 70 is an electromagnetic valve for sucking air from a port 47 (suction hole 46) provided in the cylindrical body 44, and in response to an opening / closing signal from the control device 61, the suction valve drive circuit 69. It is opened and closed at.

  Furthermore, the control device 61 is connected to the lamp driving circuit 71, and the lamp driving circuit 71 is connected to the ultraviolet lamp 6. The control device 61 controls lighting of the ultraviolet lamp 6 via the lamp driving circuit 71.

Next, the operation of the alignment apparatus 30 provided in the ultraviolet irradiation apparatus configured as described above will be described.
Now, the elevator board 16 (delivery plate 20) is in a standby position adjacent to the delivery board 25 as shown in FIG. Therefore, the tip of each transfer pin 26 provided on the transfer board 25 protrudes upward from the upper surface 20 a of the transfer plate 20. From this state, the panel P is placed on the tip of each transfer pin 26 protruding upward from the upper surface 20a of the transfer plate 20 using a fork-shaped robot hand.

  When the panel P is placed on the tip of the delivery pin 26, the control device 61 causes the elevation motor M1 to rotate forward via the elevation motor drive circuit 64 and moves the elevation board 16 (delivery plate 20) to the alignment position. Let During each upward movement, when each delivery pin 26 is immersed in the delivery plate 20, the panel P placed on each delivery pin 26 is delivered to and placed on the delivery plate 20.

When the elevator 16 (the transfer plate 20) moves up to the alignment position, the controller 61 stops the elevator motor M1 via the elevator motor drive circuit 64.
Next, the control device 61 operates the levitation electromagnetic valve 66 via the levitation valve drive circuit 65 to eject air from the nozzle holes 22 formed in the transfer plate 20, thereby causing the panel P from the transfer plate 20 to have a. Lift 3 mm. Subsequently, the control device 61 operates the cylinder electromagnetic valve 68 via the cylinder valve drive circuit 67 to supply air to each lifting air cylinder SL, extend the rod SLa, and deliver each alignment table AT. Move 0.3 mm above the plate 20.

At the same time, the control device 61 operates the suction electromagnetic valve 70 via the suction valve drive circuit 69 and sucks air from the suction holes 46 of each alignment table AT, thereby bringing the panel P into the alignment table AT. Adsorb. As a result, the floating panel P is placed and fixed on each alignment table AT.

  Subsequently, an alignment operation is performed. First, the control device 61 operates the imaging device 62 and acquires image data of the alignment mark imaged by the imaging device 62. The control device 61 calculates whether the panel P is displaced in the X arrow direction, the Y arrow direction, and the horizontal rotation direction with respect to the light shielding mask 8 based on the acquired image data of the alignment mark.

  When the positional deviation is calculated, the control device 61 moves the panel P to the left, right, right, left, rear, or parallel according to the position. Thus, a movement control signal for reciprocating the moving block 34 in the X arrow direction or the Y arrow direction is generated in order to make the positional deviation zero. The control device 61 outputs the generated movement control signal to the movement motor drive circuit 63, and appropriately controls the movement of each movement motor M2 so that the positional deviation of the panel P with respect to the light shielding mask 8 becomes zero.

  When the positional deviation of the panel P with respect to the light shielding mask 8 is eliminated, the control device 61 switches the levitation electromagnetic valve 66 via the levitation valve drive circuit 65 and ejects air from the nozzle hole 22 formed in the delivery plate 20. Stop. Subsequently, the control device 61 switches the cylinder electromagnetic valve 68 via the cylinder valve drive circuit 67 to suck and discharge air from each lifting air cylinder SL, contract the rod SLa, and accommodate each alignment table AT. It is accommodated in the recess 20c.

As a result, the panel P is placed on the upper surface 20a of the delivery plate 20 only by its own weight, becomes a stationary state, and the alignment is completed.
When the alignment is completed, the control device 61 turns on the ultraviolet lamp 6 via the lamp driving circuit 71 and irradiates the sealing material formed on the panel P (between the substrates) with ultraviolet rays via the light shielding mask 8. The sealing material is cured and the panel P (both substrates) is bonded.

  At the time of irradiation with the ultraviolet rays, the temperature of the panel P (both substrates) rises due to the ultraviolet rays, and each substrate constituting the panel P expands a little. At this time, since the panel P (both substrates) is merely placed on the upper surface 20a of the delivery plate 20 by its own weight, both the substrates perform the same elongation, and no stress is generated due to the difference in elongation.

  When the sealing material is cured and the bonding of the panel P (both substrates) is completed, the control device 61 turns off the ultraviolet lamp 6 via the lamp drive circuit 71 and then moves up and down the motor M1 via the lift motor drive circuit 64. Are reversed at high speed, and the elevator 16 (the transfer plate 20) is moved down at a high speed until immediately before each transfer pin 26 protrudes from the transfer plate 20 (for example, 3 mm before).

  When the elevator 16 (the delivery plate 20) descends to a position 3 mm before each delivery pin 26 protrudes from the delivery plate 20, the controller 61 temporarily stops the elevation motor M1 from rotating via the elevation motor drive circuit 64. Thereafter, the elevating motor M1 is reversely rotated forward at a low speed, and the elevating board 16 (the delivery plate 20) is lowered about 5 mm at a low speed.

  As a result, the tip of each transfer pin 26 protrudes upward from the upper guide hole 21 of the transfer plate 20 in the middle of the low speed descent, and the panel P placed on the upper surface of the transfer plate 20 is placed on each transfer pin 26. And passed.

  When the panel P is delivered to each delivery pin 26, the control device 61 temporarily stops the rotation of the lifting motor M1 via the lifting motor drive circuit 64, and then reversely rotates the lifting motor M1 at high speed. The elevator 16 (delivery plate 20) is lowered to a standby position at high speed and stopped to wait for the next delivery operation.

Next, effects of the embodiment configured as described above will be described below.
(1) According to the above embodiment, the alignment apparatus 30 includes the four alignment stages 31 that are spaced apart from each other, and the panel P is supported by the alignment table AT that is provided on each of the alignment stages 31 that are spaced apart from each other. Then, the alignment table AT positioned at four places is interlocked via the connecting rods 40a, 40b, 41a and 41b, and the panel P is rotated left, moved right, moved parallel to the right, and moved to the left according to the positional deviation. Translation, rear side translation, or front side translation was performed. Therefore, the positional deviation of the panel P with respect to the light shielding mask 8 can be made zero.

  (2) According to the above embodiment, the four positions of the panel P are supported by the alignment table AT of each alignment stage 31. In addition, the panel P is moved in conjunction with the connecting rods 40a, 40b, 41a, 41b.

  Therefore, compared with an alignment stage that supports the entire lower surface of the panel P and moves the panel P for alignment, the apparatus can be reduced in size, and the cost can be reduced accordingly. In addition, the weight can be much reduced as compared with the conventional alignment stage, and the power consumption for driving the movable body mechanism can be reduced.

  In addition, since the connecting rods 40a, 40b, 41a, 41b are formed of pipes, the weight can be further reduced, and the power consumption for driving the mobile mechanism can be further reduced.

  (3) According to the above embodiment, the panel P disposed on the transfer pin 26 can be transferred to the transfer plate 20 only by moving the lift plate 16 upward, and the lift plate 16 can be simply moved downward. Since the panel P placed on the transfer plate 20 can be transferred to the transfer pin 26, the panel P is aligned with the light shielding mask 8, and then the panel bonding process is performed by irradiating ultraviolet rays. Can be done continuously.

  At this time, each alignment table AT was moved up to perform alignment in a state where the panel P was separated from the delivery plate 20. Therefore, the delivery plate 20 and the panel P are not rubbed during alignment.

In addition, you may change the said embodiment as follows.
In the above embodiment, the alignment device 30 is provided between the elevator 16 and the transfer plate 20, and the alignment table AT of each alignment stage 31 is raised and lowered with respect to the upper surface 20 a of the transfer plate 20. This may be performed by omitting the delivery plate 20. In this case, it is necessary to directly place the panel P on the alignment table AT of each alignment stage 31.

In the above embodiment, each alignment stage 31 of the alignment apparatus 30 is arranged on the elevator 16 so as to be a regular square, but may be arranged in a rectangular shape.
In the above embodiment, in order to reduce the weight of the alignment device 30, the front shaft and the X-axis connecting rods 40a and 40b, the left Y and the right Y-axis connecting rods 41a and 41b are pipes. May be.

  In the above embodiment, the alignment device 30 is arranged on the lifting plate 16 and the panel P placed on the alignment device 30 is raised to the alignment position facing the light shielding mask 8. This may be performed by lowering the light-shielding mask 8 and facing the panel P placed on the alignment apparatus 30.

  In the above embodiment, the alignment device 30 is embodied in the ultraviolet irradiation device 1. You may apply this to light irradiation apparatuses other than an ultraviolet-ray, the apparatus for bonding the two board | substrates of a liquid crystal display panel, the manufacturing apparatus of a flat panel, the alignment apparatus of a semiconductor device, etc.

It is the schematic of the ultraviolet irradiation device for demonstrating this embodiment. Similarly, it is a schematic plan view. The top view which shows the attachment state of an alignment apparatus. The front view of the alignment stage which comprises an alignment apparatus. The top view of an alignment stage similarly. FIG. 2 is an electric block circuit diagram for explaining an electrical configuration of the ultraviolet irradiation device 1.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Ultraviolet irradiation apparatus, 2 ... Stage part, 3 ... Light irradiation part, 5 ... Lamp house, 6 ... Ultraviolet lamp, 7 ... Mask holding member, 8 ... Shading mask, 13 ... Support block, 15 ... Ball screw, 16 ... Elevation Panel 19, spacing member 20, delivery plate 25, delivery board 26, delivery pin 30, alignment device 31, alignment stage 31 a, left front alignment stage 31 b, right front alignment stage 31 c, right rear alignment Stage, 31d ... Left rear alignment stage, 32 ... Base, 33 ... Ball screw, 34 ... Movement block, 35 ... Rotating plate, 36 ... Guide member, 37 ... Rotation mounting table, 39 ... Split clamp, 40a ... Front side X Axis connecting rod, 40b ... Rear side X axis connecting rod, 41a ... Left side Y axis connecting rod, 41b ... Right side Y Connecting rod, 61 ... control device, 62 ... imaging device, 66 ... levitation electromagnetic valve, 68 ... cylinder electromagnetic valve, 70 ... adsorption electromagnetic valve, AT ... alignment table, P ... liquid crystal display panel, M1 ... lifting motor, M2 ... Movement motor, SL ... Elevating air cylinder, ST ... Elevating stage.

Claims (5)

An alignment apparatus for aligning the workpiece by moving the workpiece in one direction and another direction orthogonal to the one direction and horizontally rotating the workpiece,
The foundation,
A first moving block provided at a pair of vertex positions on one diagonal line of each of the vertices forming a regular tetragon or a rectangle on the upper surface of the base;
A second moving block provided at a pair of vertex positions on the other diagonal line of each vertex so as to be reciprocally movable in the other direction;
First driving means for reciprocally moving each of the first moving blocks on the one diagonal line in the one direction;
Second driving means for reciprocally moving each of the second moving blocks on the other diagonal line in the other direction;
A first rotary table supported on the upper surface of each first moving block so as to be horizontally rotatable and reciprocally movable in the other direction;
A second rotary table supported on the upper surface of each second moving block so as to be horizontally rotatable and reciprocally movable in the one direction;
A first connecting member that connects the first rotary table and the second rotary table facing each other in the one direction;
A second connecting member that connects the first rotary table and the second rotary table facing each other in the other direction;
An alignment table that is provided on each of the first rotary table and the second rotary table and supports the workpiece in cooperation with each other;
An alignment apparatus comprising: The alignment apparatus according to claim 1,
The alignment apparatus according to claim 1, wherein the first connecting member and the second connecting member are pipes. The alignment apparatus according to claim 1 or 2,
The base plate is reciprocated in the vertical direction by a first lifting means. The alignment apparatus according to claim 3, wherein
A delivery plate coupled and arranged in parallel via an interval holding member at an upper position of the base;
A recess formed on the upper surface of the transfer plate, storing the alignment table, and storing the alignment table on the alignment plate from the upper surface of the transfer plate by the first lifting means;
And a delivery board provided with a plurality of delivery pins penetrating from the upper surface of the delivery plate by the first elevating means and disposed on a lower surface of the foundation, penetrating the foundation and the delivery plate on the upper surface thereof. An alignment apparatus characterized by the above. The alignment apparatus according to claim 4, wherein
The alignment tables respectively provided on the first turntable and the second turntable are reciprocated in the vertical direction by second lifting means provided on the first turntable and the second turntable. Alignment device.

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