TWI376288B - Alignment device - Google Patents

Description

DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to an alignment device. [Prior Art] In general, a liquid crystal display panel is formed by bonding two substrates together. =.c panel and other plane plates are arranged opposite each other „ gta ^aa No panel is extremely narrow, when the two substrates are overlapped, the opposite substrate is colored here. The dense layer of photocurable resin 'And in the surrounding device comprising the two substrates bonded together; the liquid crystal display is hardened' = the alignment device used when the substrate is aligned (Vental = general *r ' such alignment is provided: placed a stage for sealing the plate; a moving mechanism for moving the stage on the placement surface: X γ in the direction of rotation; and a mask holding member holding the hood at a position above the stage; and then placing the cover The stage is: the two substrates of J are opposite to the hoods held by the mask holding member. "The moving mechanism is used to move the stage to the χ, the γ direction and the rotation are two or two, so that the weight is 2 The relative movement of the slats with respect to the hood is used to achieve the alignment of the ergonomic accuracy. [Patent Document 1] JP-A-2002-220944A 1376288 [Summary of the Invention] [The object to be solved by the invention] The method is to move the stage on which two substrates (liquid crystal display panels) are placed, and to make two pieces The board (liquid crystal display panel) is aligned with respect to the relative movement of the hood, so the weight of the two substrates (liquid crystal display panel) plus the total weight of the loading platform must be moved. Therefore, the moving mechanism requires the weight of the stage to be taken into consideration. The structure of the high mechanical strength is such that the size of the device is increased and the cost is high, and the power consumption for driving the moving body mechanism is increased, and various problems occur in recent years due to the increase in size of the display panel. In order to solve the above problems, it is an object of the invention to provide an alignment device which can reduce the size and weight of the entire device, reduce the load for aligning the workpiece, and reduce power consumption. [Means for Solving the Problem] The alignment device is placed on the base to move the workpiece in one direction and other directions orthogonal to the one direction, and is horizontally rotated to perform the positional alignment of the workpiece. The alignment device is provided with: two first moving blocks Blocks, which are respectively arranged to move back and forth along the base in a direction to form a square or a long length. Among the four vertices of the square, a pair of vertex positions on one diagonal line; two second moving blocks, which are respectively movable back and forth along the other directions in the aforementioned four vertices, diagonally on the other side a pair of vertex positions on the line; two first driving portions, each of which moves the corresponding one of the first moving blocks back and forth along the one direction; and two fourth 1376288 two driving portions, each of which makes the foregoing One of the two moving blocks moves back and forth along the other directions; two first rotating tables, each of which is horizontally rotatably supported, and are movable back and forth along the other directions An upper surface of the first moving block; two second rotating tables, each of which is horizontally rotatably supported, and is movable back and forth along the aforementioned one direction on the corresponding second moving block; a first connecting member connecting the two first rotating tables and the two second rotating tables to the one direction; two second connecting members The two first rotating tables and the two second rotating tables are respectively coupled to the other directions; and four alignment tables cooperatively supporting the workpieces, and each of which is disposed in the first Rotating the table and a corresponding one of the aforementioned second rotating tables. [Effect of the Invention] According to the present invention, the entire apparatus can be reduced in size and weight, and the positional alignment load can be reduced when the workpiece position is aligned, and power consumption can be reduced. [Embodiment] Hereinafter, an embodiment of an illumination device (ultraviolet irradiation device) to which the alignment device of the present invention is applied will be described with reference to the drawings. Further, the ultraviolet irradiation device of the present embodiment is a light irradiation device for irradiating ultraviolet rays through a light shielding cover on a sealing material formed between the substrates of a liquid crystal display panel formed by bonding two substrates, and sealing the ultraviolet rays. The material is hardened to fit the two substrates. As shown in the first figure, the ultraviolet irradiation device 1 disposed on the ground is at 5

The lower side preparation A is placed so that the seal is provided with the light irradiation unit 3. The stage unit 2 hereinafter referred to as a panel) p is a liquid crystal display panel of the workpiece (the side of the light is guided by the panel p (upward movement) to the position where the upper portion 3 is aligned. 2 above the light illuminating unit 3 is provided with a light chamber which is fixed by a two-dot chain line without the use of 5Tt (the lamp is equipped with a plurality of purple lights toward the lower side to irradiate the ultraviolet light. The lower side is provided with a plate-shaped light-transmitting mask to hold the structure, and the hood 8 is adsorbed and held under the f-mask holding member 7. ^, the ultraviolet ray emitted from the 攸 ultraviolet lamp 6 is partially sealed by the hood 8 The frame-shaped frame u, which is only irradiated on the panel P placed on the panel P of the stage unit 2, is fixed to the ground as shown in the first figure, and is formed on the left and right side frames la of the frame u. The inner side of 1 lb is fixedly provided with a pair of support blocks 13. The front and rear direction in the second description refers to the direction of the γ arrow and the direction of the inverse γ arrow shown in the second figure. The branch block 13 is oriented at the upper and lower ends. The inner side is extended to form a branch arm 4' which is rotatable between the upper and lower sides thereof The ground support has a ball screw 15. The lower side of the lower support arm 14 is fixedly provided with a lifting motor Μ1, and the % rotating shaft is drivingly coupled with the bead screw 15. Therefore, the ball screw 15 provided on each support block 13 is based on each lifting The motor M1 rotates forward and backward to rotate forward and backward. A lifting seat 16 as a base of a square shape 1376288 is disposed inside the frame-shaped frame Π. The lifting base 16 is formed, for example, in a square shape without a steel plate. The lifting base 16 is formed with a plurality of lower side guides penetrating in the vertical direction (Z direction) at equal intervals in the left-right direction (the reverse X-arrow direction and the X-arrow direction) and the front-rear direction (the reverse Y-arrow direction and the Y-arrow direction). A hole 17. The lifting base 16 has a pair of front and rear connecting protrusions 18 formed on the left and right side surfaces thereof. The pair of connecting protrusions 18 are screwed to the support block 13 rotatably before being formed on the left and right sides thereof. The ball screw 15 (refer to Fig. 2). Therefore, the ball screw 15 of each of the support blocks 13 rotates up and down the lifting block 16. Further, in the present embodiment, when the lifting motor M1 is rotated forward, the lifting and lowering is performed. When the lifter M1 is reversed, the lifter 16 is moved downward (downward). Then, in the present embodiment, the support block 13, the ball screw 15, and the lift motor M1 constitute the first lifter. A spacer member 19 is fixedly provided at four places on the upper surface 16a of the lift base 16, and the transfer plate 20 is coupled and fixed to the upper end of the spacer member 19. Therefore, the transfer plate 20 moves up and down together with the lift base 16. The transfer plate 20 is e.g. A square-shaped stainless steel plate is disposed in parallel with the lift base 16 via the gap holding member 19. The transfer plate 20 is at a position facing the lower guide holes 17 formed in the lift base 16, as shown in the second figure. As shown in the figure, the side guide holes 21 are formed through the upper side in the vertical direction (Z direction). Further, as shown in the fourth figure, nozzle holes 22 are provided at equal intervals (about 300 mm pitch) on the transfer plate 20. The nozzle hole 22 ejects air sent from the air introduction pipe 23 provided under the delivery plate 20, and floats the panel P placed on the parent plate 20 (this embodiment is 3 mm), the nozzle hole 22 and the air. The guide officer 23 is a kind of workpiece floating mechanism that floats as a panel of the guard. Then, in the present embodiment, regarding the lifting base 16 (the delivery plate 2A), the parent receiving plate 20 is moved upward to the vicinity of the hood (that is, the aligned position) provided in the light-irradiating portion 3, and the downward movement is directed to = to the vicinity of the upper (i.e., standby position) of the transfer base 25 provided on the lower side of the lift base 16. i is disposed at the delivery seat 25 on the lower side of the lifting base 16 (fixing the cabinet 帛U. The parent socket 25 is, for example, a square-shaped work table, and a plurality of transfer pins 26 are provided on the top of the eight, and the transfer pins are % For the corresponding pair of the side-side guide holes 17 and 2 formed in the lift base 16 and the transfer plate 2 (), the transfer pins 26 are moved up and down from the upper surface 20a of the transfer plate 20 according to the lift block μ and 20). . In the case of Liuyang, when the lifting seat 16 (the delivery plate 20) is in the standby position, the top end of the pin 26 protrudes from the upper side 2〇a of the parent plate 2〇, and the lifting seat 16 (the delivery plate 20) is When the position is aligned, the member end of each of the transfer pins 26 is exposed from the upper side of the transfer plate 2A to the lower side. When the descending seat 16 (parent board 20) is at the standby position and the top end of each of the transfer pins 26 is projected upward from the upper surface of the transfer plate 2, the panel p is placed at the top end of the transfer pin 26. Then, when the lifting base 16 is moved, the panel p placed on the delivery pin 26 is placed on the parent panel 2 for handing over when the top of each of the delivery pins 26 is detached from the delivery board m1. 8 d; Panel P of 20, on the lifting seat 16 (transfer plate

- When the step moves up to the aligned position, it is equipped with S. The positions of the hoods 8 of P 3 are opposite to each other. , the person U, and the lifting seat 16 (the transfer board 2〇) from the pair == in the middle of the downward movement thereof, the upper side of the 4th board 20 is protruded above the upper side of the boarding board 20 The panel p is placed at the transfer pin %, and the panel P is handed over to the lifting seat 16 of the delivery pin 26 (after the second hand is moved down to the standby position and stopped, the technical direction is between the lifting and lowering 6 and the transfer board 2〇 The alignment device 3 is provided. The alignment device 3G has four alignment stages 31. The alignment stage 31 is fixedly disposed on the upper surface 16& of the lifting base 16. In addition, in the third figure, for convenience of explanation The lifting seat 16 is omitted from the guide hole 17 and the spacing member 19. The four alignment stages 31 are arranged equidistantly from the center position p of the lifting base 16. For example, four alignment stages 31 surround the lifting and lowering. When the center of the seat Po is disposed at the position Po, the adjacent alignment stages 31 are arranged in a square shape at the apex positions of the squares. ° When the present specification specifies each of the alignment stages 31, The alignment stage 31 provided on the front side of the left side of the lift base 16 is called for convenience of explanation. The front alignment stage 31 a 'is referred to the alignment stage 31 provided on the right front side of the lift base 16 as the right front alignment stage 31b. Further, the alignment stage 31 provided on the right rear side of the lift base 16 Referring to the right rear alignment stage 31c, the alignment stage 31 provided on the left rear side of the lift base 16 is referred to as the left rear alignment stage 31d. Therefore, the right front alignment stage 31b is aligned with the left rear. The stage 31d is disposed at an equidistant position on the diagonal line with the center position Po of the lift base 16 interposed therebetween, and the left front alignment stage 31a and the right rear alignment stage 31c are disposed at the center position Po of the lift base 16 An equidistant position on the corner line. As shown in the fourth figure, each of the alignment stages 31 has a base 32 fixed to the upper surface 16a of the lift base 16, and rotatably supports the ball screw 33 on the base 32 thereof. The ball screw 33 rotatably supported by the base 32 is rotated forward and backward by the driving of the moving motor M2 fixed to the base 32. Here, the ball screw 33 provided on the base 32 of the left front alignment stage 31a is provided. Arranged in the direction of the X arrow, as shown in the third figure, the moving motor M2 disposed on the left side of the base 32 rotates the ball screw 33 forward and backward. The ball screw 33 of the base 32 aligned to the right front of the stage 31b is disposed in the Y-arrow direction, and the moving motor]\42 disposed on the front side of the base 32 causes the ball screw 33 to rotate forward and backward. The ball screw 33 of the base 32 of 31c is disposed in the direction of the X arrow, and the moving motor m2 disposed on the right side of the base 32 rotates the ball screw 33 forward and backward. The ball screw provided on the base 32 of the left rear alignment stage 31d 33 is disposed in the Y-arrow direction, and the moving motor M2 disposed on the rear side of the susceptor 32 rotates the ball screw 33 forward and backward. The moving block 34 is slidably disposed on the upper surface of the susceptor 32 of the aligning stage 31. The ball screw 33 is screwed in the moving block 34. The moving block 34 is moved back and forth along the ball screw 33 by the forward and reverse rotation of the ball screw 33. Specifically, the moving block 34 which is screwed to the left front alignment stage 31a and the right rear alignment stage 1376288, 31c, and the bead screw 33 is moved back and forth in the left-right direction (x and reverse = arrow directions). Further, in the present embodiment, the moving block of the left front alignment stage 31a and the right rear alignment stage 3U "moves in the direction of the reverse X arrow in the third figure when the moving motor M2 (the ball screw 33) is rotating. (Left direction) and χ arrow direction (right direction), when the motor M2 (ball screw 33) rotates in the opposite direction, it moves in the 箭头 arrow direction (right direction) and the reverse X arrow direction (left direction). The moving block 34 screwed to the right front alignment stage 31b and the left rear alignment stage 3ld is moved back and forth in the front-rear direction (the direction of the γ and anti-γ arrows). 2 and the left rear alignment of the moving block 34 of the load 3ld is moved in the third figure in the reverse γ front direction (front side direction) and the γ arrow direction (rear side direction) when the moving motor μ2 - (ball screw f) is rotating. ), when J moves the M2 (ball screw 33) to rotate in the opposite direction, it moves to the γ front U (backward direction) and the reverse arrow direction (front direction). The rhyme △ V is applied to the left front The first stage 31& and the right rear pair of three moving blocks 34 constitute the first shift The moving block is configured to be right-fronted to the second left rear alignment stage 31d, and each moving block 34 constitutes a right one. This embodiment is configured to align the left front with the carrier and the respective moving motor snails of the M2 and the ball screw 33. == Each of the moving parts constitutes a driving part. The rotating plate 35 is placed on the rotating plate 35. The rotating plate 35 is movable - the rotation can be rotated === (4) as the center, and the opposite 11 1376288 is in the rotating plate 35 The guiding member 36 is fixedly disposed thereon, and the guiding member 36 rotates in the horizontal direction with respect to the rotating plate 35 with the central axis Ct as the center and the moving block 34. The upper surface of the guiding member 36 is recessed and extends with the ball screw 33. The guide groove 36a is a U-shaped guide groove 36a in a direction orthogonal to the central axis direction. The guide member 36 is provided with a rotary placement table 37 on the upper side. The rotary placement table 37 is, for example, a square-shaped metal plate, and is fixedly disposed. The underside bar 38 is fitted to the guide groove 36a and supported by the guiding member 36. The bar 38 is formed to extend along the guiding groove 36a, slidably fits the guiding groove 36a, and along the guiding groove 36a Movable guide rotation placement work The table 37. Therefore, the rotation placing table 37 can move the guiding member 36 along the guiding groove 36a, and can rotate relative to the rotating plate 35 (the guiding member 36) in the horizontal direction. Then, this embodiment The respective rotary plates 35, the guide members 36, and the rotary placement table 37 of the left front alignment stage 31a and the right rear alignment stage 31c constitute a first rotary table, and the right front alignment stage 31b and the left rear alignment Each of the rotary plates 35, the guide member 36, and the rotary placement table 37 of the stage 31d constitutes a second rotary table. As shown in the third and fourth figures, each of the rotary placement tables 37 adjacent in the X direction is provided. The fastening fittings 39 of the table 37 are rotatably placed and fixed to the front side or rear side X-axis connecting rods 40a and 40b as the first connecting members. Further, each of the rotary placement tables 37 adjacent in the Y direction passes through the other fastening fittings 39 provided on the respective rotation placing tables 37, and the left or right Y-axis connecting rods 12 41a, 41b as the second coupling members. The link is fixed. Each of the connecting rods 40a, 40b, 41a, and 41b is made of, for example, a stainless steel tube. In detail, & 'As shown in the third figure, 'turning the table 37 and the right front alignment carrier A, the rotary table 37 and the front X-axis connecting rod 4〇a ^ 夂 放置 工作 4 4 4 The center axis Cx is from the top and the second. "The X-axis connecting rod 33 has the same axis of the coin. In addition, the ball screw axis Cx of the front side and the lower stage 3a is orthogonal to the axis from the top view and the right front alignment shaft connecting rod 4〇a. The center axis α of the ball of the right port is intersected. The rotating table is called the rotating plate = again, the right front is aligned with the stage 3lb 31c. The rotating table is placed 37 and the right: the cup 4ib is connected. The right γ wheel is connected 37 And the right side γ = 视 ^ right ^ aligns with the "center axis" of the center axis from the side Y-axis connecting rod 41 to the center axis of 3, right rearward aligned with the ball screw of the stage C Cy from the plane After viewing, the center axis of the rotation g of the stage 31c is orthogonal to the center axis Ct, and the right rear alignment is aligned with the stage 3le ^ and then the rotation of the stage 31d is rotated by the enemy. The table 37 is connected to the left side. The rear side x-wheel connecting rod system is connected to the rear side X-axis and the right rear is aligned with the center axis of the ball of the loading table 31c to the center axis of the rear/X-axis connecting rod 4〇b. The center axis of the middle and the dry 33 is left, and is aligned with the ball screw of the stage 31d: the light wire Cx is viewed from the top and is aligned with the left rear alignment stage plus the rotating plate = the middle line, and the + core axis Ct intersects. 1376288 Further, the rotational placement table 37 of the left rear alignment stage 31d and the rotational placement table 37 of the left front alignment stage 31a are coupled to the left Y-axis connecting rod 41a. The central axis Cy of the left Y-axis connecting rod 41a coincides with the central axis of the ball screw 33 which is aligned with the left rear alignment stage 31d. Further, the central axis Cy of the left Y-axis connecting rod 41a is orthogonal to the central axis of the ball screw 33 of the left front alignment stage 31a in plan view, and is aligned with the center axis Ct of the rotating plate 35 of the left front alignment stage 31a. cross. Further, here, in the rotational placement table 37 of the left front alignment stage 31a, the center axis Cx of the front X-axis connecting rod 40a and the center of the left Y-axis connecting rod 41a are vertically (Z-arrow direction). The axis of the intersection of the axis Cy is referred to as the reference axis Ck. Further, in the rotational placement table 37 of the right front alignment stage 31b, the vertical (Z-arrow direction) is crossed by the central axis Cx of the front X-axis connecting rod 40a and the central axis Cy of the right Y-axis connecting rod 41b. The axis of the point is called the reference axis Ck. Further, in the rotational placement table 37 of the right rear alignment stage 31c, the vertical axis (Z-arrow direction) passes through the central axis Cy of the right Y-axis connecting rod 41b and the central axis of the rear X-axis connecting rod 40b. The axis of the intersection of line Cx is called the reference axis Ck. Further, in the rotational placement table 37 of the left rear alignment stage 31d, the vertical axis (Z arrow direction) passes through the central axis Cx of the rear X-axis connecting rod 40b and the central axis of the left Y-axis connecting rod 41a. The axis of the intersection of Cy is called the reference axis Ck. At this time, when the rotation placing table 37 of each of the alignment stages 31 is in the state shown in the third figure, the moving motor M2 of each of the alignment stages 31 is rotated in the reverse rotation direction at the same speed as the phase 14 1376288, and The moving blocks 34 of the left front and right rear alignment stages 31a, 31c move in the X arrow direction (right direction) and the reverse X arrow direction (left direction) at the same rate, respectively, so that the right front and left rear are aligned with the stage 31b, The moving block 34 of 3ld moves in the γ arrow direction (rear side direction) and the anti γ arrow direction (front side direction) at the same rate, respectively. ...3 β丨回丨平战谷W Rotation of the workbench 37 to connect

== 4Gb, 41a, 41b are fixedly coupled, and each of the rotary tables 37 is horizontally rotatable about the central axis Ct of the rotary plate 35. As a result, in any one of the front, rear, left and right directions of each of the turrets of the alignment stage 31, when the mouth 37 is moved, the center axis Ct is centered and in the same direction in two directions. In the second diagram, the rotation is in the counterclockwise direction while moving in the direction of the X arrow. In the second diagram, the rotation of the table 37 is rotated in the third figure, which is centered on the counterclockwise axis C axis Ct.

The placement table 37 is moved to γ^_. The rotation of the right front alignment stage 31b is centered, and while the rotary head direction is in the third drawing, the table 3 is placed in the counterclockwise direction by the rotation of the central axis stage 31c. When the right rear is aligned, the center axis Ct is the middle two and the direction of the reverse X arrow is in the same direction. The left rear is aligned with the stage 31 (the expansion of 1 is rotated in the direction of the counterclockwise arrow in the third figure, and the center = the setting console 37 moves in the opposite direction to the counterclockwise direction. , , 'Ct is Center and in the third picture, the results are linked, and the joints are arranged.

The square of Ct, the central axis 7 of the central axis 7 of the rotating plate 35 of the square is about to be vertically rotated in the counterclockwise direction centering on the axis of the center position Po of the lifting seat 16 of 15 1376288. Hereinafter, this movement is referred to as a left rotation movement mode. Conversely, the moving motor M2 of each of the alignment stages 31 is rotated in the normal rotation direction at the same rotation speed, so that the moving blocks 34 of the left front and right rear alignment stages 31a, 31c are respectively moved at the same rate to the reverse X arrow. The direction (left direction) and the X arrow direction (right direction) cause the right front and left rear alignment stages 31b, 31d to move in the same direction at the same rate in the reverse Y arrow direction (front side direction) and the Y arrow direction ( Rear side)). As a result, contrary to the previous time, the square axis Ct of the rotating plate 35 of each of the alignment stages 31 is connected, and the central axis of the square, that is, the axis of the center position Po of the lifting base 16 is vertically Center, while rotating horizontally in the clockwise direction. Hereinafter, this movement is referred to as a right rotation movement mode. Further, the moving motor M2 of the left front alignment stage 31a and the right rear alignment stage 31c are respectively rotated at the same rotation speed in the reverse rotation direction and the positive rotation direction, and the left front and right rear are aligned with the movement blocks of the stages 31a and 31c. 34 — Moves in the direction of the X arrow (right direction) in the third diagram. Further, the right front and left rear alignment moving blocks 34 of the stages 31b and 31d are in a stopped state. At this time, since the rotation placing table 37 of the right front and left rear alignment stages 31b and 31d respectively moves relative to the moving block 34 (the guiding member 36) along the guiding groove 36a in the left-right direction, each alignment stage The rotation placing table 37 of 31 is moved in the right direction (the direction of the X arrow), respectively. As a result, the squares of the central axis Ct of the rotary plate 35 connecting the respective alignment stages 31 are moved in parallel in the direction of the X arrow. Hereinafter, this shift is referred to as a right parallel movement mode.

The moving motor 313 and the right rear are aligned with the rotation direction of the stage 31C, so that the left front and the right rear are shifted in the positive direction and the reverse direction in the third figure: the moving block of the front and the rear is further 'right front and left rear pair The load direction (left direction). Stop state. halberd. The moving block 34 of 31b, 31d is placed in the stop table 2, and the square of the CTRL is moved in parallel with the square of the ct, so that the right front is aligned with the load. The moving motor M2 is respectively connected with the wire * A ± Jun's turn to dry load 3ld = make right front and left rear right; reverse 3? side: move = left front and domain: head side? (back side direction). In addition, the installation lf 7 left front and right rear alignment The table cymbal, 3^ rotation 34 (^ 36> 2 = 八 下 downward direction, so the rotation of each alignment stage 31 is connected: each. For the rear direction (¥ arrow direction). The square is parallel to the 丨 arrow The middle of the second turn 3: the parallel movement mode of the axis ct, the direction, the following 'this movement is referred to as the rear side shift alignment stage 311' and the left rear alignment stage 31d of the moving motor M2 are respectively the same The rotation speed is rotated in the positive rotation direction and the reverse rotation direction, so that the right front and left rear alignment movement blocks 34 of the stages 31b, 31d move in the direction of the reverse Y arrow (front direction) in the third figure. The moving block 34 of the right rear alignment stage 31a, 31c is in a stopped state. At this time, since each of the alignment stages 31 is rotated, the table 37 is respectively placed. Since the movement is in the front side direction (in the direction of the Y-arrow direction), the square of the central axis Ct of the rotary plate 35 connecting the alignment stages 31 is moved in parallel in the direction of the reverse Y-arrow. Hereinafter, this movement is referred to as a front-side parallel movement mode. Thus, by controlling each of the moving motors M2 in each mode, the square of the central axis Ct of the rotating plate 35 connecting the respective alignment stages 31 can be rotated back and forth in the horizontal rotation direction, and can be along the X arrow direction, the Y arrow Moving upward and downward in the direction. On the upper surface of the rotary placement table 37 of each alignment stage 31, a lifting cylinder SL as a second lifting portion is provided. The piston rod SLa of the lifting cylinder SL faces upward, and the piston rod SLa The center axis is fixed to the rotary placement table 37 so as to coincide with the reference axis Ck. The disc-shaped elevating stage ST is fixedly coupled to the distal end of the piston rod SLa, and the elevating cylinder SL moves the elevating stage ST up and down. A cylindrical body 44 made of metal is fixed on the upper surface of the stage ST. The cylindrical body 44 is formed through the through hole 20b of the delivery plate 20. The through hole 20b formed in the delivery plate 20 and the expansion are formed on the delivery plate 20. The large-diameter accommodating recess 20c is connected to the surface side. The disk-shaped alignment table AT is fixed on the upper surface of the cylindrical body 44, and the alignment table AT is housed in the accommodating recess 20c by the driving of the lifting cylinder SL, or It is protruded from the upper surface of the transfer plate 20 (this embodiment is 1376288 0.3 mm). The center axis of the alignment table AT and the cylinder 44 coincides with the reference axis Ck. Therefore, the pair of the alignment stages 31 are aligned. When the quasi-stage AT protrudes from the housing recess 20c of the delivery board 20, the panel P placed on the delivery board 20 is lifted upward by 0.3 mm from the delivery board 20 by the alignment table AT. Then, in a state in which the panel P is lifted by the alignment table AT, when each of the above-described rotation placing tables 37 performs the above-described various movement modes, the panel P and the respective rotations which are lifted by the respective alignment tables AT are placed. The table 37 starts the left rotation movement, the right rotation movement, the right side parallel movement, the left side parallel movement, the rear side parallel movement, and the front side parallel movement. In other words, the panel P can be rotated in the horizontal rotation direction by rotating the respective movement motors M2 in each mode, and can be moved back and forth in the X-arrow direction and the Y-arrow direction. As shown in the fifth figure, a plurality of suction holes 46 are formed in the center portion of the alignment table AT, and the suction holes 46 pass through the passage formed in the cylinder 44 and the inlet 47 provided on the side of the cylinder 44. (Refer to the fourth figure) Connected. Adsorption grooves 48 are formed on the alignment table AT, and are connected to the suction holes 46. Then, when the panel P is placed on the alignment table AT, the opening of the adsorption groove 48 is blocked by the panel P, and the panel P is attracted to the alignment by sucking the air in the blocked space through the suction hole 46. Workbench AT. Further, in a state where the panel P is attracted to the alignment table AT, the panel P is released from the alignment table AT by introducing air from the suction holes 46 to the adsorption grooves 48. As shown in the fourth figure, between the elevating stage ST and the rotary placement table 37, three elevating guide members 50 are provided around the elevating cylinder SL at intervals of, for example, an equal angle of 19. The elevating bow guide member 5 is provided with a cylindrical guide cylinder 5〇a and a guide g 50b inserted through the guide cylinder 5〇a. The lower end of the guiding cylinder 50a is fixed to the rotary placement table 37, and the upper side of the guide cylinder 50a is supported and fixed by the support plate 51. Above the guide shaft, the lower side of the lower stage is positioned, and the lower side of the guide shaft is slidably inserted through the opposite guide 50a. The lower surface of the lifting platform ST is solidified, for example, by surrounding the lifting steam rainbow: two locking pins 52' are formed at the top end thereof, and the floor 51 is moved in the up and down direction, and is below the supporting plate 4 Below. When the top end of the threaded portion 52a formed on the stop 52 is screwed, for example, two nut-shaped lifting platforms are engaged, the cap 53 is engaged with the support plate 51 to restrict the upward movement from exceeding the pre-distance (this embodiment) The morphology is 0.3 mm). ▲, the person, according to the electrical block circuit diagram shown in the sixth figure, the electrical configuration of the ultraviolet irradiation device 1 as described above. In the figure, the control device 61 is configured by providing micro-electricity such as cpu, r〇m, and RAM. The control device 61 (cpu) performs guidance for guiding the panel 在 between the standby position and the aligned position according to the program stored in the Μ, and is used to position the hood 8 against the panel ρ of the hood 8 Aligned bit alignment processing, etc. The imaging device 62 captures the alignment mark/panel of the hood 8 and the panel 。. The imaging device 62 responds to the control hole from the control device 61. And outputting the image data obtained by the shooting to the control farm 61. The control device 61 calculates the panel according to the alignment mark photographed by the camera 62, and whether the hood 8 is in the direction of the arrow, the direction of the arrow, and the horizontal direction. A positional deviation occurs on the top.

According to the calculated panel P, the position of the hood 8 in the head direction and the horizontal rotation direction is shifted by X, and the left side is rotated, the right side is rotated, the right side is parallel, and the back side is parallel. Or the front side moves in parallel so that it is positioned at the position L to generate a motion control signal for moving the moving block 34 back and forth in the X arrow σ or 丫 front direction. The moving device 61 is electrically connected to the moving motor drive circuit 63. The moving circuit 63 is connected to each of the moving motors Μ2, and responds to the movement control signal from the control switch: 61, so that each of the moving motors M2 is rotated, and the device 61 generates a lifting control path for lifting the lifting block 16 and outputs it. To the hoist motor drive circuit 64. The hoist motor driving motor 64 is connected to each of the hoisting motors M1, and each of the hoisting motors M1 is rotated forward and backward in response to the counting control signal from the control unit 61. The control device 61 is connected to the floating valve drive circuit 65, and the floating valve drive circuit 65 is connected to the floating electromagnetic valve 66. The floating electromagnetic valve 66 is for supplying a supply of air supplied from an air supply means (not shown) to a solenoid valve formed in the nozzle hole 22 of the delivery plate 20, in response to a switching signal from the control device 61, and a floating valve. The drive circuit 65 performs a switching operation. Further, the control device 61 is connected to the cylinder valve drive circuit 67, and the cylinder valve drive circuit 67 is connected to the cylinder solenoid valve 68. The cylinder solenoid valve 68 is for supplying an air 1376288 gas supplied from an air supply means not shown to the lift cylinder SL or a solenoid valve for sucking air from the lift cylinder SL, and the response is from the control device 61. The switching operation is performed by the cylinder valve drive circuit 67 in the control signal. More specifically, when the control device 61 outputs a control signal for moving the alignment table AT upward, the cylinder electromagnetic valve 68 supplies air to the lifting cylinder SL to move the alignment table AT upward. On the other hand, when the control device 61 outputs a control signal for moving the alignment table AT downward, the cylinder solenoid valve 68 sucks and discharges air from the elevating cylinder SL, and moves the alignment table AT downward. Further, the control device 61 is connected to the adsorption valve drive circuit 69, and the adsorption valve drive circuit 69 is connected to the adsorption electromagnetic valve 70. The adsorption solenoid valve 70 is a solenoid valve for sucking air from an inlet 47 (suction hole 46) provided in the cylindrical body 44, and responds to a switching signal from the control device 61, and performs a switching operation by the adsorption valve drive circuit 69. Further, the control device 61 is connected to the lamp driving circuit 71, and the lamp driving circuit 71 is connected to the ultraviolet lamp 6. The control device 61 illuminates and controls the ultraviolet lamp 6 via the lamp driving circuit 71. Next, the action of the alignment device 30 provided in the ultraviolet irradiation device having the above configuration will be described. At this time, the lifting base 16 (the delivery plate 20) is adjacent to the standby position of the delivery base 25 as shown in the first figure. Therefore, the tips of the respective transfer pins 26 provided at the delivery base 25 protrude above the upper surface 20a of the delivery plate 20. From this state, the fork robot arm is used, and the panel P is placed on the top end of the transfer pin 26 which protrudes upward from the upper surface 20a of the delivery plate 20. When the panel P is placed at the top end of the transfer pin 26, the control unit 61 rotates the lift motor M1 forward by the lift motor drive circuit 64 via 22 1376288, and moves the lift base 16 (the transfer plate 20) upward to the aligned position. In the middle of the upward movement, when the transfer pins 26 are immersed in the delivery plate 20, the panel P placed on the delivery pin 26 is placed and placed on the delivery plate 20. When the lift base 16 (the transfer plate 20) is moved upward to the aligned position, the control device 61 stops the lift motor M1 via the lift motor drive circuit 64. Then, the control device 61 activates the floating electromagnetic valve 66 via the floating valve drive circuit 65, and ejects air from the nozzle hole 22 formed in the delivery plate 20, and floats the panel P from the delivery plate 20 by 0.3 mm. Then, the control device 61 activates the cylinder electromagnetic valve 68 via the cylinder valve drive circuit 67, supplies air to each of the lift cylinders SL, and extends the rod SLa, thereby moving each of the alignment tables AT upward from the delivery plate 20 by 0.3 mm. At the same time, the control device 61 activates the adsorption solenoid valve 70 via the adsorption valve drive circuit 69, and sucks air from the suction holes 46 of the alignment table AT, thereby causing the panel P to be attracted to the alignment table AT. Thereby, the floating panel P is placed and fixed to each of the alignment tables AT. Next, an alignment operation is performed. First, the control device 61 operates the imaging device 62 to acquire the image data of the alignment mark captured by the imaging device 62. The control unit 61 calculates whether or not the panel P has a positional deviation in the X-arrow direction, the Y-arrow direction, and the horizontal rotation direction based on the image data of the acquired alignment mark. Then, when the positional deviation is calculated, the control device 61 shifts the position of the panel P to the left, in order to rotate the panel P, the right rotation, the right side parallel movement, the left side parallel movement, the rear side parallel movement, or the front side parallel movement, so that the position 23 1376288 is deviated. Zero, a motion control signal is generated for moving the moving block 34 back and forth in the direction of the arrow or the direction of the Y arrow. The control unit 61 outputs the generated motion control signal to the moving motor drive circuit 63, and appropriately drives and controls each of the moving motors M2 so that the position of the panel P against the hood 8 is zero. When the positional deviation of the panel P against the hood 8 is eliminated, the control device 61 switches the floating electromagnetic valve 66' via the floating valve drive circuit 65 to stop the ejection of air from the nozzle hole 22 formed in the delivery plate 20. Then, the control slit 61 switches the cylinder solenoid valve 68' via the cylinder valve drive circuit 67, and sucks and discharges air from each of the lift cylinders sl to shrink the rod SLa', so that each of the alignment tables AT is accommodated in the housing recess 2c Inside. As a result, the panel P was placed on the upper surface 20a' of the delivery plate 2〇 by its own weight and was in a stationary state, and the alignment was completed. When the alignment is completed, the control device 61 turns on the ultraviolet lamp 6 via the lamp driving circuit 71, and irradiates ultraviolet rays through the hood 8 on the sealing material formed on the panel p (between the substrates) to cure the sealing material. Panel P (two substrates). f When the ultraviolet ray is irradiated, the panel P (both substrates) is heated by ultraviolet rays, and the respective substrates constituting the panel P are slightly stretched. At this time, since the panel P (two substrates) is placed on the upper surface 20a' of the delivery plate 20 by its own weight, the two substrates are equally stretched, and stress due to the difference in stretching does not occur. When the sealing material is hardened and the bonding of the panel P (two substrates) is completed, the UV lamp 6 is turned off via the lamp driving circuit 71, and the lifting motor M1 is rotated by the lifting motor driving circuit 64 at a high speed. 16 (the delivery plate 2〇) is lowered at a high speed at each of the transfer pins 26 from the delivery plate (for example, before 3 mm). Each of the transfer pins 26 protrudes from the transfer plate 2〇—when the lifter moves down by 2曰0L, the control device 61 temporarily stops after the rotation of the lift motor M1 is driven, and then the lifter and the horse rotate at a low speed. Lifting seat 16 (the cross-connection is lowered by 5mm.; in the middle of the lowering of the transfer speed, the top of each of the transfer pins is protruded from the top of the 2〇t guide hole 21, and the panel ρ placed on the upper side of the transfer plate is placed on the transfer pin 26 Then, when the panel Ρ is handed over to the delivery pin 26, the control device 61 temporarily stops the rotation of the hoist motor rafter via the 幵 马达 motor drive circuit 64, and then causes the rpm=motor M1 to rotate at a high speed, and the lifter 16 (the delivery plate 20) is stopped at a high speed and then stopped, and waits for the next six operations. Next, the effects of the embodiment configured as described above are described below. φ (1) The alignment device 30 is divided by four The alignment stage 31 is configured to support the panel ρ with the alignment table AT respectively disposed on the alignment stage 31 which is separated from each other. Then, it is located via the connecting rods 4〇a, 4〇b, & 41b. The alignment of the worktable AT is everywhere. The panel p is rotated in the left direction by the positional deviation, the right rotation movement, the right side parallel movement, the left side parallel movement, the rear side parallel movement, or the front side parallel movement. Therefore, the positional deviation of the panel Ρ against the hood 8 can be made zero. The four sides of the panel are supported by the alignment table AT of each of the alignment stages 31. The panels p are moved by the linkages 4〇a, 4〇b, 41a, and 41b, 25 1376288. Compared with the alignment stage of the support panel p and the alignment of the panel P for positioning, the device can be miniaturized and the cost can be reduced, and the alignment stage can be significantly lighter than the previous one. The power consumption for driving the moving body mechanism can be reduced. Further, since the connecting rods 40a, 40b, 41a, and 41b are formed by the tubes, the weight can be further reduced, and the power consumption for driving the moving body mechanism can be reduced.

(3) Since the panel P disposed on the delivery pin 26 can be handed over to the delivery plate 2 by merely moving the lifting base 16 upward, and can be placed only by moving the lowering seat 16 downward. Since the transfer plate is transferred to the transfer pin 26, the panel p is aligned with the hood 8 and the ultraviolet ray is continuously irradiated to perform the panel bonding process. At this time, the alignment table AT# is moved. Will the panel? The alignment is performed in a state of being separated from the transfer board 20. Therefore, the pair of the plate 20 and the panel P are not rubbed. ^

Further, the above embodiment can be changed as described below. In the above embodiment, the aligning device 3G is placed on the lift base 16 and the transfer, and the alignment I of each of the alignment stages 31 is made to appear on the upper surface 20a of the pair of splicing plates 20. It can also be implemented by omitting it. In this case, it is necessary to directly place the panel p on the alignment table AT of the stage 31. Each of the alignment stages 31 and 16 of the tapping + 戟 can be arranged. However, in the above embodiment, the alignment device 3 is arranged in a rectangular shape so as to be square. 26 1376288 • In the above embodiment, in order to make the alignment device 30 more lightweight, the front X-axis and the rear X-axis connecting rods 40a and 40b, the left Y-axis, and the right Y-axis connecting rods 41a and 41b are formed into a tube, but It can be a rod. In the above embodiment, the alignment device 30 is placed on the lift base 16, and the panel P placed on the alignment device 30 is raised to the aligned position with the shade 8. This also allows the hood 8 to be lowered and carried out against the panel P placed on the alignment device 30. In the above embodiment, the alignment device 30 is embodied as the ultraviolet irradiation device 1. It can also be applied to a light irradiation device other than ultraviolet rays, a device for bonding two substrates of a liquid crystal display panel, a manufacturing device for other flat plates, an alignment device for a semiconductor device, and the like. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a schematic view for explaining an ultraviolet irradiation apparatus of the present embodiment. The second drawing is a schematic plan view of the ultraviolet irradiation device. The third figure shows a top view of the mounted state of the alignment device. The fourth figure is a front view of the alignment stage that constitutes the alignment device. The fifth figure is a top view of the alignment stage. The sixth drawing is an electrical block circuit diagram for explaining the electrical configuration of the ultraviolet irradiation device. [Main component symbol description] 1 Ultraviolet irradiation device 2 Stage portion 27 1376288

3 Light illuminating unit 26 Transfer pin 5 Lamp chamber 30 Aligning device 6 UV lamp 31 Aligning stage 7 Mask holding member 31a Left front alignment stage 8 hood 31b Right front alignment stage 11 Frame 31c Right rear alignment Table 11a Left side frame 31d Left rear alignment stage lib Right side frame 32 Base 12 bottom surface 33 Ball screw 13 Support block 34 Moving block 14 Support arm 35 Rotating plate 15 Ball screw 36 Guide member 16 Lifting seat 36a Guide groove 16a Upper surface 37 Rotary placement table 17 Lower side guide hole 38 Bar 18 Attachment tab 39 Fastening fitting 19 Spacer retaining member 40a Front X-axis connecting rod 20 Transfer plate 40b Rear X-axis connecting rod 20a Upper surface 41a Left Y-axis connecting rod 20b Hole 41b Right Y-axis connecting rod 20c Housing recess 44 Cylinder 21 Upper side guide hole 46 Suction hole 22 Nozzle hole 47 Entrance 23 Air introduction pipe 48 Adsorption groove 25 Transfer seat 50 Lifting guide member 28 1376288 51 Support plate 70 Adsorption solenoid valve 50a Guide cylinder 71 lamp drive circuit 50b guide shaft AT alignment table 52 stopper pin Ck reference shaft 52a thread portion Ct center axis 53 Nut Cx Center axis 61 Control device Cy Center axis 62 Imaging device P Liquid crystal display panel 63 Moving motor drive circuit Po Center position 64 Lift motor drive circuit Ml Lift motor 65 Floating valve drive circuit M2 Moving motor 66 Floating solenoid valve SL lifting cylinder 67 cylinder valve drive circuit Sla piston rod 68 cylinder solenoid valve ST lifting platform 69 adsorption valve drive circuit 29

Claims (1)

1376288 VII. Patent application scope: 1. An alignment device is placed on the base to move the workpiece in one direction and other directions orthogonal to the previous direction, and horizontally rotate to perform the position alignment of the workpiece. The method is characterized in that: two first moving blocks are respectively arranged to move back and forth along the one direction in a plurality of four vertices which are arranged on the base to form a square or a rectangle, on one diagonal line. a pair of vertex positions; two second moving blocks respectively movably disposed along the other directions in the foregoing four vertices, a pair of vertex positions on the other diagonal; two first driving portions Each of which moves the corresponding one of the first moving blocks back and forth along the aforementioned one direction; the two second driving portions each move the corresponding one of the second moving blocks back and forth along the other directions; Two first rotary tables, each of which is horizontally rotatably supported and movable forwardly along the other directions The upper surface of the corresponding first moving block; the two second rotating tables, each of which is horizontally rotatably supported, and is movable back and forth along the aforementioned one direction to the corresponding second moving block The first two connecting members respectively connect the two first rotating tables and the two second rotating tables to the one direction; the two second connecting members are the two a first rotary machine 30 1376288, a table and the two second rotary tables are respectively coupled to the other directions; and four alignment tables cooperatively supporting the workpieces, and each of which is disposed on the first rotary table And a corresponding one of the aforementioned second rotary tables. 2. The alignment device of claim 1, wherein the first connecting member and the second connecting member are each a tube. 3. The aligning device of claim 1 or 2, wherein the base is moved back and forth in a vertical direction by a first lifting portion. 4. The alignment device of claim 3, further comprising four second lifting portions '+ each of which is disposed in a corresponding one of the first rotating table and the second rotating table, so as to correspond to The alignment table moves back and forth in the up and down direction. 5. The alignment device of claim 3, wherein the transfer plate is disposed in parallel with the spacer member at a position above the base, the transfer plate having a receiving recess that is recessed thereon The alignment table is protrudedly received from the upper surface of the transfer plate, and a fixing seat is disposed at a position below the base. The fixed seat has a plurality of transfer pins disposed thereon, and is configured by the first lifting The opening of the part passes through the base and the transfer plate, and can be seen from the top of the transfer plate. 6. The aligning device of claim 5, wherein there are four second lifting portions, each of which is disposed in a corresponding one of the first rotating table and the second rotating table, so that the corresponding pair The quasi-workbench moves back and forth in the up and down direction. The aligning device of claim 6, wherein the workpiece floating mechanism for lifting the workpiece is disposed on the transfer plate. 8. The aligning device of claim 1 or 2, wherein the horizontal rotation mode and the parallel movement mode are selectively executable, wherein the horizontal rotation mode is for the first rotary table and the second rotation The table rotates horizontally, and all of the two first driving units and the two second driving units are driven, and the parallel movement mode drives the two in order to move the first rotating table and the second rotating table in parallel. One first driving portion or the two second driving portions.