TW201004737A - Alignment device - Google Patents

Abstract

The present invention provides an alignment device, which allows the whole device to be compact and light weight, reduces the loading for alignment of location of workpiece, and reduces the consumption of electrical power. The alignment device 30 according to the present invention comprises four alignment carriers 31, which are spaced from each other, and four alignment platforms AT, which are respectively set on the alignment carriers 31 to support a panel. The alignment platforms AT that are located at four sites are interlocked to each other through connection bars 40a, 41a, 41b, so that leftward rotation movement, rightward rotation movement, rightward parallel movement, leftward parallel movement, rearward parallel movement, and frontward parallel movement can be carried out in accordance with positional error of the panel supported by the alignment platforms AT in order to reduce the positional error of the panel with respect to a mask to zero.

Description

201004737 Description of the Invention: [Technical Field] The present invention relates to an alignment device. [Prior Art] In general, a liquid crystal display panel and a plasma display surface are attached to a two-piece substrate (four). For example, when the liquid and the flat plates are arranged in opposite directions, the thin film is electrically connected to the second and the plate is formed by the extremely narrow element substrate 'after forming the occlusion pattern', and the two substrates are overlapped. Substrate. On the other hand, the sealing material of the photocurable resin is sealed in the area of 2, including, and the cover is irradiated with ultraviolet rays on the sealing material: the two substrates are bonded together, thereby manufacturing a liquid crystal display, and the substrate is hardened, and the mask and the substrate are cured. When the position is aligned, there are various kinds of such obscurations. ? Alignment device used (for example, in general, such an alignment device is provided with: a stage of two substrates; a mask holding member that holds the hood on the hood; and then: = two substrates in position and a hood j held by the mask holding member; and: j ' drive control movement mechanism to move the stage to and move for high precision: the substrate is moved relative to the hood [Problem to be Solved by the Invention] Further, since the moving mechanism moves the stage on which two substrates (liquid crystal display panels) are placed, Therefore, the two substrates (the wave crystal display panel) are relatively aligned with respect to the movement of the hood, so the weight of the two substrates (the liquid crystal display panel) plus the total weight of the weight of the loading table is required. The high mechanical strength of the weight of the stage is taken into consideration, so that the device becomes large-sized and high in cost, and the power consumption for driving the moving body mechanism is also increased by the traveller, and is accompanied by display in recent years. Various problems have occurred in the present invention. The present invention has been made to solve the aforementioned problems, and an object thereof is to provide an 'aligning device' which can reduce the weight and weight of the entire device, and reduce the load for aligning the workpiece, and can reduce the load. [Means for Solving the Problem] The alignment device of the present invention is placed on the base to move the workpiece in the ~ ❹ direction and other directions orthogonal to the aforementioned one direction, and is horizontally rotated to perform the position of the workpiece. Aligning. The aligning device is provided with a first moving block (the block is respectively movable back and forth along one of the above directions on the top of the base to form a square or a rectangle of four vertices, in one side A pair of vertices on the diagonal line are only placed; the two second moving blocks are respectively disposed in the foregoing four vertices in a back-and-forth direction along the other directions, and the apex positions on the other side diagonal line; Two first driving portions respectively moving one of the corresponding first moving blocks to move back and forth along the one direction; two fourth 201004737 two driving portions, Each of the aforementioned second moving blocks is moved back and forth along the other directions; the two first rotating tables 'each of which are horizontally rotatably supported and movable back and forth along the other directions Provided on the upper surface of the corresponding first moving block; two second rotating tables, each of which is horizontally rotatably supported, and is movable back and forth along the aforementioned one direction to the corresponding second moving block The first connecting member connects the two first rotating tables and the two second rotating tables to the one direction; the two second connecting members are the two a first rotating table and the two second rotating tables are respectively coupled to the other directions; and four alignment tables cooperatively supporting the workpieces, each of which is disposed on the first rotating table and the foregoing The corresponding one of the second rotary tables. [Effect of the Invention] According to the present invention, the entire apparatus can be reduced in size and weight, and the positional alignment load can be reduced when the workpiece position is aligned, and power consumption can be reduced. [Embodiment] Hereinafter, an embodiment of an illumination device (ultraviolet irradiation device) to which the alignment device of the present invention is applied will be described with reference to the drawings. Further, the ultraviolet irradiation device of the present embodiment is a light irradiation device for irradiating ultraviolet rays through a light shielding cover on a sealing material formed between the substrates of a liquid crystal display panel formed by bonding two substrates, and sealing the ultraviolet rays. The material is hardened to fit the two substrates. As shown in the first figure, the ultraviolet irradiation device 1 installed on the ground is provided with a second sigma portion 2 at 5 2 〇 〇〇 4737 and a light illuminating portion 3 at the upper side. a 9 The two sides of the liquid crystal display surface as the workpiece before hardening are two; the guide (upward movement) is set to the light irradiation portion 3 provided above the stage portion 2 shown above to be provided. 5 灯In the lamp room indicated by the two-point chain, the two-point chain line (~ equipped with a plurality of purple two lamps, the ultraviolet light is directed downwards, and the light is transmitted through the cover. f: The wire has a - part 峨 ^ sealing material. ... the frame 4 placed on the panel P of the stage 2 is densely fixed to the ground. There is a pair of support blocks 13 in the 。 。 。 。 。 。 。 。 本 γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ γ 14==Rotating ground is broken with a ball screw, and its rotating shaft can be driven to fix the ball screw 15 of each supporting block 13 of the lifting motor. The ball is screwed to the screw 15. Therefore, it is set to rotate in the forward and reverse directions. You are equipped with a square shape 6 201004737 on the inside of the four-frame frame 11 according to each hoisting motor milk. The lowering seat 16 of the seat. The lifting seat 16 is formed, for example, by a square-shaped stainless steel plate, and the lifting seat 16 is in the left-right direction (the direction of the anti-X arrow and the direction of the parent arrow) and the front-rear direction (the direction of the anti-gamma arrow and γ) A plurality of lower guide holes 17 penetrating in the vertical direction (Z direction) are formed at equal intervals in the direction of the arrow. The lift base 16 has a front/rear/pair connecting projection 18 formed on the left and right side surfaces thereof. The pair of connecting tabs 18 are respectively screwed to the ball screw 15 rotatably supported by the support block 13 (refer to the second figure). Therefore, the jade reversing the ball screw 15 of each of the support blocks 13 causes the lifting seat In the present embodiment, when the lift motors are rotated forward, the lift base 16 is moved upward (upper turn), and when the respective downshift motors M1 are reversed, the lift base 16 is moved downward (down). In the embodiment, the first lifting portion is constituted by the supporting block 13, the ball screw 丨 5, and the lifting motor M1. The spacing holding member 19 is fixedly disposed at four places on the upper surface 16a of the lifting base 16, and is connected at the upper end of the spacing holding member 19. The transfer plate 20 is fixed. Therefore, the 'transfer plate 20 moves up and down together with the lift block 16. The transfer plate 20 is, for example, a square-shaped stainless steel plate' and is disposed in parallel with the lift block 16 via the space-retaining member 19. Further, 20 is formed at a position facing each of the lower guide holes 升降 of the lift base 16, and as shown in Fig. 2, 'the guide holes 21 are formed through the upper side in the up-down direction (Z direction), respectively. As shown in the figure, nozzle holes 22 are provided at equal intervals (about 300 mm pitch) on the transfer plate 20. The nozzle holes 22 eject air sent from the air introduction pipe 23 provided under the transfer plate, so that the 201004737 is placed on the transfer plate. The panel p of 20 floats (this embodiment is 〇.3mrn). The nozzle hole 22 and the air introduction pipe 23 are a kind of workpiece floating mechanism that floats as a panel p of the workpiece.

Then, in the present embodiment, with respect to the lifting base 16 (the delivery plate 20), the delivery plate 20 is moved upward to the vicinity of the lower position (i.e., the aligned position) of the hood 8 provided in the light-irradiating portion 3, and the lower movement is performed. The downward movement is moved to the vicinity of the upper position (ie, the standby position) of the delivery seat 25 provided on the lower side of the lifting base 16. The transfer seat 25 (fixed seat) disposed on the lower side of the lift base 16 is supported by the frame 11. The transfer base 25 is, for example, a square-shaped work table, on which a plurality of transfer pins 26 are erected, and the transfer pins 26 are respectively inserted through a pair of side guide holes formed in the lift base 16 and the transfer plate 2 Π, 2 卜 each of the transfer pins 26 according to the lifting seat 16 々 and 20) up and down from the top of the transfer plate 2 出, each of the traffic, parent press 2 υ) in the standby position, from the top of the transfer plate 2 ° When the protrusion 26 is protruded (the parent board 2 〇) is in the aligned position, each of the intersections: = the upper side 20 is exposed to the lower side. The upper surface of the transfer plate 2G is protruded from the upper surface, and is placed on the top of the parent receiving pin 20. When the person is printed on the top, the panel P° is placed on the roll 柘on, a, and then the lift block 16 (2. The upper side; =, on the transfer board 2G for the transfer. The panel P of the parent connector 26 is placed 8 201004737 The panel p is handed over to the transfer board 20, and is further moved up to the alignment on the lift base 16 (the transfer board 2〇) In the position, it is disposed at a position adjacent to the shade 8 provided in the light irradiation unit 3.

Further, when the lifting base 16 (the delivery plate 2 is moved downward) from the aligned position to the position of the driver, the top of each of the transfer pins 26 protrudes from the upper side guide hole 21 of the delivery plate 20 during the downward movement thereof. When it is above, the panel P placed on the top of the transfer board 20 is placed at the transfer pin % for handing over. Then, the panel P parent is connected to the lifting seat 16 of the parent receiving pin 26 (the handover is made 2), and is moved downward to the standby position to stop, waiting for the next handover operation. An alignment device 3 is disposed between the lifting base 16 and the transfer plate 20. As shown in the third figure, the alignment device 30 has four alignment stages "Μ. Each pair of alignment stages 31 is fixedly disposed on the upper surface 16& of the lifting base 16. Further, in the third drawing, the bow guide hole 17 and the space holding member 19 formed on the lower side of the lift base 16 are omitted for convenience of explanation. The four alignment stages 31 are arranged equidistantly from the center position % of the lifting base 16, respectively. For example, four alignment stages 31 are arranged to surround the center position P of the lifting seat. In addition, each of the adjacent alignment stages 31 is arranged in a square shape at each vertex position of the square. In addition, it is convenient to explain that each of the alignment stages 31 is described in the present specification. The pair of the table 31, which is secretly disposed on the left side of the front side of the lifting base 16, is referred to as the left front alignment stage 31a, and will be disposed on the front side of the lifting base 16. The alignment stage 31 is referred to as a right front alignment stage 31b. Further, the alignment stage 31 on the right rear side of the # side lifter 16 is referred to as a right rear alignment 31c, and the alignment load Δ31 Q provided on the left rear side of the lift base 16 is aligned with the stage. 31d. The mouth is left 201004737 Therefore, the right miscellaneous load Wib and the left rear alignment ί are placed at the center position P0 of the seat 16 on the diagonal: etc.: set, the left front alignment stage 3ia and the right rear alignment stage 16 The center position p〇 is equidistant on the diagonal. As shown in the fourth figure, the base 32 of each of the upper faces 16a of the alignment stage 31 16 is provided with a ball screw 33 on the base 32 thereof. Rotating the pedestal 32 滚 rotation of the ball ^ drought /

The error is fixed by the driving of the mobile motor that is fixedly disposed on the base 32, and is rotated forward and backward by 0. Here, the 33 of the base 32 of the left front pair of the money table 3a is disposed in the direction of the X arrow, as shown in the third figure, and is disposed at the base. The moving motor M2 on the left side of the seat % causes the ball screw 33 to rotate forward and backward. The ball screw 33 provided on the base 32 of the right front alignment stage 31b is disposed in the γ arrow direction, and the moving motor Μ2 on the front side of the susceptor 32 causes the ball screw 33 to rotate forward and backward. The ball screw 33 provided on the right rear of the base 32 of the stage 31c is disposed in the X direction, and the (four) motor disposed on the right side of the base 32 causes the ball screw 33 to rotate forward and backward. The ball screw 33 provided on the left rear rear alignment stage 3id's seat 32 is disposed in the direction of the γ arrow, and the moving motor M2 disposed on the rear side of the base & rotates the ball screw 33 forward and backward. On the upper surface of the base 32 of the alignment stage 31, a moving block 34 is slidably disposed in the longitudinal direction, and a ball screw 33 is screwed in the moving block 34. The moving block 34 is rotated forward and backward by the ball screw 33 and moved back and forth along the ^ screw 33. In detail, the moving block 34 which is screwed to the left front alignment stage 31a and the right rear alignment stage 201004737 stage 31c^ball screw 33 moves back and forth in the left-right direction (χ and the reverse X front direction). Further, in the present embodiment, the left front alignment stage 31a and the right rear alignment stage 31 (when the moving block 34 is rotated by the moving motor M2 (ball screw 33), respectively, are moved to the reverse X arrow in the third figure. In the direction (left direction) and the 乂 arrow direction (right direction), when the moving motor M2 (ball screw 33) rotates in the opposite direction, it moves in the χ arrow direction (right direction) and the reverse X arrow direction (left direction). φ The moving block 34 screwed to the ball screw 33 provided on the right front alignment stage 31b and the left rear alignment stage 31d moves back and forth in the front-rear direction (the direction of the γ and the anti-γ arrow). In addition, the present embodiment is the right front alignment. The moving block 34 of the stage 31b and the left rear alignment stage 3ld moves in the direction of the inverse γ arrow (front side direction) and the γ arrow direction in the third figure when the moving motor Μ 2 ^ ball screw 33) is rotating. In the rear direction), when the moving motor M2 (ball screw 33) rotates in the reverse direction, it moves in the direction of the γ arrow (rear direction) and the direction of the reverse γ arrow (the front direction is eight and then, this embodiment is to align the stage with the front left side) 31& and right rear alignment of the stage 31c Each of the moving blocks 34 constitutes a first moving block, and each moving block % of the right quasi-stage 31b and the left rear collimation stage 31d constitutes a type 1 system, and the left front is aligned with the stage j and j is aligned with each of the moving motors of the stage. The group and the first driving unit are arranged, and the moving motor M2 and the ball and the rear alignment stage 31d which are aligned with the front A and the cups 33 are arranged on the top of each moving block 34, and the third driving is formed. In the middle of the rotating shaft of the rotating plate 35, there is a rotating plate 35. The rotating plate 35 can be rotated in the horizontal direction and the line Ct as the center, and the guiding member 36' is placed on the mosquito above the 201004737 plate 35. Further, the V member "rotating plate 35" rotates the center axis Ct as a center and the phase f block 34 rotates in the horizontal direction. The upper surface of the guiding member 36 is recessed to extend in a direction orthogonal to the central axis direction of the ball screw %. The direction is = U-shaped bow guide groove. The cymbal member 36 is provided with a rotary placement table 37 on the upper side. The rotary table 37 is, for example, a square-shaped metal plate, and is placed underneath by being fixed. The rail 38 is fitted to the guide groove 36a and supported by the V member 36. Extending along the guide groove 36a, the guide groove 36a is slidably fitted, and the table 37 is movably placed along the guide groove 36a. Therefore, the pair of the table 37 is rotated and placed: (the guide member 36) - The relative moving block 34 is rotatable = ❿ and then the present embodiment is configured such that the left front plate is aligned with the respective rotating plates 35 of the stage loading stage 31c, and the guiding member is disposed right rearward to form the first rotating table, to the right front. And the respective rotating plates 35 of the left rear alignment stage 31d and the guiding jaws 1b are rotated and placed on the table 37 to constitute a second rotating table. 6 and as shown in the third and fourth figures, adjacent in the X direction. The screwing table 37 is coupled and fixed as a first connecting member front side or rear side cymbal link 40a, 40b via a fastening fitting 39 provided on each of the rotary placing tables 37. Further, each of the rotary placing tables 37 adjacent in the γ direction passes through the other fastening fittings 39' provided in the respective rotating placement tables 37 to the left or right γ-axis connecting rods 201004737 4匕4lb as the second joining members. Even, fixed. Each connecting rod gamma, 働, ❿, is composed of no steel pipe. For example, in detail, as shown in the third figure, the table is placed on the table 37. The needle is placed on the table. The front of the table is the center of the turntable 37. Uranium p are only linked. The front side X-axis flail=the second side view and the left side, the quasi-load (4) 4忒 core axis Cx is orthogonal to the central axis from the top right side to the right front side X-axis connecting rod 40a, and the ball screw of the right expansion stage 31b The center axis Ct of 33 is intersected, and the rotating plate 35 of the fresh-stage stage 31b is connected to the right-hand side of the stage 3, and the rotating table 3 of the rotating table of the stage 31c is connected to the right-hand bar 41b. . Right side Y is far from the table 37 and the right Y-axis is connected. The top and right front alignment stage 3lb = the central axis Cy of the knot 41b. Further, the right Y-axis is coupled to the center, and the center axis of the bead screw 33 is aligned with the center axis Cy& plane view of the right rear alignment stage 31, and the center of the stage 3丨c screw 33 is aligned with the right rear. The axes are orthogonal, forked. The center axis Ct of the slewing plate 35 is intersected, and the rotation of the aligning table 3ld is aligned with the right rear aligning load a3, and the rotation placing table 37 is coupled to the left stalk 40b. The rear side ^ shaft is made up of the table 37 and the rear side χ axis. The top and right rear alignment of the stage 3lc: the center axis Cx of the rod 40b. Further, the central axis of the rear X-axis connecting rod bead screw 33 is aligned with the center axis Cx of the ball of the rear stage 3ld, and the center axis of the ball of the stage 3ld is aligned with the left rear. The intersection, and the central axis Ct of the plate 35 is intersected again. 201004737 The left front front alignment stage 31d is rotated and placed on the table 37, and the connecting rods 4a and the left side Y-axis are aligned from the center axis Cy of the top left and right rear 2 shaft connecting rods 41a. Also, the center axis of the ball screw 33 of the left 4 port 3ld

The central axis Cy of the connecting rod 41a is orthogonal to the central axis of the ball screw 33 of the left front pair and is aligned with the central axis Ct of the rotating plate 35 of the σ 31a. The table 37' here, in the left front alignment stage 31a, the rotationally placed work bar 4〇a passes vertically (Z arrow direction) through the front side X-axis connection - the central axis of the axis Cx and the left Y-axis connecting rod 41a The axis of the intersection of & is called the reference axis Ck. The rotation is placed on the right side of the table 3 lb in the rotation of the table 37, (z arrow direction) through the front X-axis connecting rod, ·, Cx and the central axis cy of the right γ-axis connecting rod 41b The axis of the intersection is called the reference axis Ck. Further, the rotary placement table 37 on the right rear alignment stage 31c passes vertically (in the direction of the Z arrow) through the center line Cy of the right γ-axis connecting rod 41b and the rear side X-axis connecting rod 4〇b. The axis of the parent fork point of the center axis Cx is called the reference handle Ck. Further, in the rotational placement table 37 of the left rear alignment stage 31d, the vertical axis (Z arrow direction) passes through the central axis Cx of the rear X-axis connecting rod 40b and the central axis Cy of the left Y-axis connecting rod 41a. The axis of intersection is called the reference axis Ck. At this time, 'the rotation placement table 37 of each alignment stage 31 is in the state shown in the third figure. 'The moving motor M2 of each alignment stage 31 is rotated in the reverse rotation direction by the phase 14 201004737 f, and The left front and the right rear are aligned, and the moving blocks 34 of 3la and 31c are respectively moved at the same rate in the direction of the arrow (right direction) X arrow direction (left direction), and the left rear is aligned with the stages 31b, 31d. The moving block 34 places the table 37 in the direction of the γ-direction and the anti-¥ arrow direction (front direction), respectively, by rotating the table: the rotation of the table 37 to connect the table 37 with the rotation of the table 37 and When the rotation placing table 37 is moved forward and backward of each rotation, the center axis Ct is Α Π and is moved in the same direction in all directions. In the third figure, the rotation is in the counterclockwise direction. In other words, the left front pair rotates the table 37 which is moved in the direction of the X arrow and the rotation of the table 37. In the third figure, the rotation is in the opposite direction, and the center axis Ct is centered. On the enemy table 37, it moves to the inside. The rotation of the right front alignment stage 31b is centered, and in the third direction of the arrow, the rotation of the center axis table 31c is reversed and the counterclockwise direction is turned. When the right rear is aligned with the carrier, the center line Ct σ 37 moves in the same direction as the reverse arrow direction. The left rear is aligned with the center of the stage 3U1 and rotated in the direction of the counterclockwise arrow in the third figure, and the table 37 is moved by the rotation to the counterclockwise direction. The axis Ct is the center and the result is rotated in the third figure, and the pairs are connected.

The center axis of the center line 4 of the rotating plate 35 of the square of the Ct will be horizontally rotated in the counterclockwise direction centering on the axis of the central position P〇 of the lifting seat 16 of the 15 201004737. Hereinafter, this movement is referred to as a left rotation movement mode. Conversely, the moving motor M2 of each of the alignment stages 31 is rotated in the normal rotation direction at the same rotation speed, so that the moving blocks 34 of the left front and right rear alignment stages 31a, 31c are respectively moved at the same rate to the reverse X arrow. Direction (left direction) and X arrow direction (right direction), so that the right front and left rear alignment of the moving blocks 34 of the stages 31b, 3ld are the same

The rate moves in the direction of the anti-Y arrow (front side direction) and the gamma arrow direction (rear side direction). As a result, contrary to the previous time, the square axis Ct of the rotating plate 35 of each of the alignment stages 31 is connected, and the central axis of the square, that is, the axis perpendicularly passing through the center position p of the lifting base 16 The heart rotates horizontally in the clockwise direction. Hereinafter, this movement is referred to as a right rotation movement mode. Further, the left front alignment stage 3& and the right rear alignment stage Mc movement motor M2 are respectively rotated at the same rotation speed in the reverse rotation direction and the positive rotation direction, and the left front and right rear alignment stages 31a, 31 (; The moving block 34 moves together in the direction of the X arrow (right direction) in the second figure. In addition, the moving block 34 of the right front and left rear aligned stages 31b, 31d is in the stop-like bear. At this time, due to the right front and the left rear The rotation I/7 of the alignment stages 31b, 31d is respectively movable relative to the moving block 34 (the guiding member 36) in the left-right direction. Therefore, the respective alignment stages 31 疋乍 σ 37 are respectively moved in the right direction (X arrow) The square result is connected to the rotating plate 35 of each of the stages 31, and the four of the rotating plates 35 are moved in parallel with the direction of the parent arrow. Hereinafter, the shift 16 201004737 is referred to as the right parallel moving mode. The left front aligned moving motor M2 is respectively aligned with the right rearward alignment of the stage 3lc in the direction of rotation 'the left front and the right rear=turning to the positive rotation direction and the reverse movement in the third figure moving to the opposite mouth = 3U In addition, the right front and left rear are aligned with the load A and σ (left direction). The moving block 34 of the mouth b, 31d is stopped at this time, because the respective alignment loads do not move in the left direction (reverse arrow = place the table 37 to separate the center of the rotating plate 35 of the loading table 31) In the direction of the anti-X arrow. In the following, the square of the private version of the 兮 私 平行 is moved in parallel, so that the right front is called the left parallel movement mode. C M2 is rotated at the same rotation speed on the opposite rotation side: The moving block 2 of 31b and 3ld moves to the left of the gamma arrow and moves to the stage 31, and the moving block 34 is placed on the leaf, because the left front and the right rear are aligned with the stage 31a, = The table 37 can be moved in the up and down direction with respect to the moving block 34 (guide member 36) = ^ 冓 36a, respectively, and therefore the rotation of each of the alignment stages 31 = the table 37 is moved in the rear direction (丫 arrow direction). The knot=4 is connected to the central axis α of the rotating plate 35 of each of the alignment stages 31: the flattening moves in the direction of the Y arrow. Hereinafter, the parallel movement mode is performed. Conversely, the right front is aligned with the stage 31b and the left rear The moving motor M2 aligned with the stage Md is rotated at the same rotational speed in the positive rotational direction and 17 201004737 = turn direction, make the right minus left and then align the stage m, η block 34 together in the third picture to move two shifts 2). In addition, the left front and right rear are aligned about la $ square f (the side t move block 34 at county mouth 3la, 31e

The shifting material 31 is transferred to the guarding table 37 minutes in the (four) direction (in the direction of the anti-gamma arrow), so that the squares of the central axes Ct of the rotating plates 35 which are aligned with each other are moved in parallel in the direction of the arrow. Hereinafter, this movement is referred to as a front side parallel movement mode. In this way, by controlling each of the moving motors M2 in each mode, the square of the central axis ct of the rotating plate 35 of each of the alignment stages 31 can be coupled to the horizontal rotation direction and can be along the X arrow direction. , γ arrow direction and move back and forth. A lifting cylinder SL as a second lifting portion is provided on the upper surface of the rotating placement table 37 of each of the alignment stages 31. The movable jaw of the lifting cylinder sl is oriented upward on the SLa, and is fixed to the rotary placement table 37 so that the central axis of the piston rod SLa coincides with the reference axis Ck. The disc-shaped elevating stage ST is coupled and fixed to the distal end of the piston rod SLa, and the lifting/lowering cylinder SL moves the elevating stage ST up and down. A cylindrical body 44 made of metal is fixed to the upper surface of the lifting stage ST, and the cylindrical body 44 is formed through the through hole 20b of the delivery plate 20. The through hole 20b formed in the delivery plate 20 communicates with the large-diameter receiving recess 20c which is formed on the upper surface side of the delivery plate 20. A disk-shaped alignment table AT is fixed on the upper surface of the cylinder 44, and the alignment table AT is housed in the housing recess 20c by the driving of the lifting cylinder SL or protrudes from the upper surface of the delivery plate 20 (this embodiment) Morphology system 18 201004737 〇.3mm). Further, the reference axis Ck is aligned with the table AT and the cylinder. Center handle of 44

Therefore, when the alignment operations a 2 〇 of the alignment stages 31 are added, m plus μ # σ ΑΤ ΑΤ ΑΤ ΑΤ ΑΤ ΑΤ ΑΤ ΑΤ 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 放置 工作 工作 工作 工作 工作 工作 工作2〇 Lift up 〇3mm upwards. Next, the state in which the panel p is lifted by the jade table AT is not widely rotated and placed on the table 37. The various moving molds described above are executed. The panel p and the respective rotations are placed on each of the alignment tables AT. - The left rotation movement, the right rotation movement, the right side parallel movement, the left side parallel movement, the rear side parallel movement, and the front side parallel movement are performed. By changing &, the panel P can be rotated back and forth in the horizontal rotation direction by rotating each of the moving motors]V[2] in each mode, and moving back and forth along the X-arrow direction and the Y-arrow direction. As shown in FIG. 5, a plurality of suction holes 46 are formed in the center portion of the alignment table AT, and the suction holes 46 pass through the passage formed in the cylinder 44 and the inlet 47 provided on the side of the cylinder 44. (Refer to the fourth figure) Connected. Adsorption grooves 48 are formed on the alignment table AT, and are connected to the suction holes 46. Then, when the panel P is placed on the alignment table AT, the opening of the adsorption groove 48 is blocked by the panel p, and the panel P is attracted to the alignment by sucking the air in the blocked space through the suction hole 46. Workbench AT. Further, in a state where the panel p is adsorbed to the alignment table AT, the panel p is released from the alignment table AT by introducing air from the suction holes 46 to the adsorption grooves 48'. As shown in the fourth figure, between the cymbal lowering stage ST and the rotary placement table 37, and around the lifting cylinder SL, for example, at an equal angle of 19 201004737 = a tripod SG is provided. The lifting material % has a circular guide 850a and a guiding shaft inserted through the guiding cylinder. The lower end of the guide cylinder 5〇a is fixed to the rotary placement table p, and the upper side of the guide cylinder 50a is supported and fixed by the support plate 51. Above the guide shaft 5〇b Ϊ = under the lifting stage ST, the lower side of the guiding shaft 5〇b is slidably inserted through the opposite side 50a.

The lower surface of the lifting platform st' is fixed to the top of the lifting cylinder SL, for example, in such a manner as to surround the lifting cylinder SL. The threaded portion 52a formed at the top end thereof is formed to be movable through the supporting plate 51 in the up-and-down direction thereof and from the supporting plate 51. The underside is highlighted below. For example, the top end of the threaded portion 52a of the stop 52 is screwed with two nuts 53 respectively, and the lifting stage st is moved upward to engage with the smashing plate 51 to restrict the upward movement from exceeding the distance of the pre-twisting (this The embodiment is 0.3 mm). The electric configuration of the ultraviolet irradiation device 1 having the configuration described above will be described in accordance with the electrical block circuit diagram shown in Fig. 6. In the sixth diagram, the control device 61 is configured by including an ntr microcomputer such as a CPU, R〇M, or RAM. The control device 61 (CPU) executes the guiding process for guiding the panel P between the standby position and the aligned position in accordance with the program stored therein, and aligns the hood 8 with the panel p facing the visor 8 The position is aligned and processed. The imaging device 62 captures an alignment mark (f) provided on the hood 8 and the panel p. The image pickup device 62 responds to the image pickup from the control device 61 by the control signal (4), and outputs the image data to the control device 61. 13之 The control unit 61 generates a positional deviation in the X-arrow direction, the Y-arrow direction, and the horizontal rotation direction with respect to the hood 8 based on the image data of the 2010201037 alignment mark of the image pickup device 62. The control device 61 aligns the position of the hood 8 in the X-arrow direction, the Y-arrow direction, and the horizontal rotation direction according to the calculated panel P, and moves the panel P to the left, the right to the right, the right to the parallel, and the left to the parallel. The rear side moves in parallel or the front side moves in parallel so that the positional deviation is zero, and a movement control signal for moving the moving block 34 back and forth in the X arrow direction or the Y arrow direction is generated. The control device 61 is electrically connected to the moving motor drive circuit 63. The moving motor drive circuit 63 is connected to each of the moving motors M2 to respond to the movement control signals from the control unit 61, so that the respective moving motors M2 rotate forward and backward. • The control unit 61 generates a lift control signal for raising and lowering the lift base 16 and outputs it to the lift motor drive circuit 64. The hoist motor drive circuit 64 is connected to each of the hoisting motors M1, and the hoisting motor M1 is rotated forward and backward in response to the hoisting control signal from the control unit 61. The control device 61 is connected to the floating valve drive circuit 65, and the floating valve drive circuit 65 is connected to the floating electromagnetic valve 66. The floating electromagnetic valve 66 is for supplying a supply of air supplied from an air supply means (not shown) to a solenoid valve formed in the nozzle hole 22 of the delivery plate 20, in response to a switching signal from the control device 61, and a floating valve. The drive circuit 65 performs a switching operation. Further, the control device 61 is connected to the cylinder valve drive circuit 67, and the cylinder valve drive circuit 67 is connected to the cylinder solenoid valve 68. The cylinder solenoid valve 68 is for use in an air supply 21 201004737 from a non-illustrated air supply means, or an electric field valve that draws an air from the lift cylinder SL, in response to a control signal from the control unit 61. The switching operation is performed by the &c; flying cylinder swaying circuit 67. Specifically, "control", 61 rounds of control signals for moving the alignment table AT upwards = 'steam = the air is supplied to the lifting cylinder SL by the electromagnetic valve 68, and the table AT is moved upward. Conversely, when the control device 61 outputs a control signal for moving the alignment t=〇at downward, the cylinder uses the solenoid valve to lift the air to the intake cylinder AT, and the alignment table AT to the control unit. The device 61 is connected to the adsorption valve drive circuit 69, and the adsorption inter-drive circuit 69 is connected to the adsorption electromagnetic valve 7A. The electromagnetic chamber 70 for adsorption is used for a switching operation from the inlet 47 (suction hole 46) of the cylindrical body 44 and the air-inducing solenoid valve in response to the switching signal from the control unit 61, and the switching operation by the adsorption valve driving circuit 69. . . Further, the control device 61 is connected to the lamp driving circuit 71, and the lamp driving circuit 71 is connected to the ultraviolet lamp 6. The control device 61 illuminates and controls the ultraviolet lamp 6 via the lamp driving circuit 71. Next, the action of the alignment device 30 provided in the ultraviolet irradiation device having the above configuration will be described. This is dry, and the lifting base 16 (the delivery plate 20) is adjacent to the standby position of the delivery base 25 as shown in the first figure. Therefore, the tips of the respective transfer pins 26 provided at the delivery base 25 protrude above the upper surface 2〇a of the delivery plate 2〇. From this state, the fork robot arm is used, and the panel p is placed on the top end of the transfer pin 26 which protrudes upward from the upper surface 20a of the parent panel. When the panel p is placed at the top end of the parent receiving pin 26, the control unit 61 causes the elevation motor M1 to rotate forward by the elevation motor drive circuit 64 via 22 201004737, and moves the lift base 16 (the transfer plate 20) upward to the aligned position. In the middle of the upward movement, when the transfer pins 26 are immersed in the delivery plate 20, the panel P placed on the delivery pin 26 is placed and placed on the delivery plate 20. When the lift base 16 (the transfer plate 20) is moved upward to the aligned position, the control device 61 stops the lift motor M1 via the lift motor drive circuit 64. Then, the control device 61 activates the floating electromagnetic valve 66 via the floating valve drive circuit 65, and ejects air from the nozzle hole 22 formed in the delivery plate 20, and floats the panel P from the delivery plate 20 by 0.3 mm. Next, the control device 61 activates the cylinder electromagnetic valve 68 via the cylinder valve drive circuit 67, supplies air to each of the lift cylinders SL, and extends the rod SLa, thereby moving each of the alignment tables AT upward from the delivery plate 20. Mm. At the same time, the control device 61 activates the adsorption solenoid valve 70 via the adsorption valve drive circuit 69, and sucks air from the suction holes 46 of the alignment table AT, thereby causing the panel P to be attracted to the alignment table AT. _ Thereby, the floating panel P is placed and fixed to each alignment table AT. Next, an alignment operation is performed. First, the control device 61 operates the imaging device 62 to acquire the image data of the alignment mark captured by the imaging device 62. The control unit 61 calculates whether or not the panel P has a positional deviation in the X-arrow direction, the Y-arrow direction, and the horizontal rotation direction based on the image data of the acquired alignment mark. Then, when the positional deviation is calculated, the control device 61 shifts the left side of the panel P, the right rotation movement, the right side parallel movement, the left side parallel movement, the rear side parallel movement, or the front side parallel movement according to the positional deviation, so that the position 23 201004737 The offset ########################################################################## The control unit 61 outputs the mobile control signals of the two generations to the moving motor drive circuit 63, and controls the respective moving motors M2 so that the position difference of the panel P to the hood 8 is zero. In addition to the positional deviation of the panel P on the hood 8, the control device 66 switches the floating solenoid valve by the floating valve drive circuit 65, and the nozzle hole 22 of the splicing plate 2 squirts air. In addition, the air is exhausted and exhausted by each of the two cylinders, so that the 捍SLa company accommodates each of the alignment tables AT in the accommodating recess 2c. On the other hand, at 90°, the panel P is placed on the transfer plate 2〇 by itself and becomes a stationary state, and the alignment ends. In the case of the external line, the (fourth) device 61 causes the purple material J·d to be redundant via the lamp driving circuit 71, and the sealing material formed on the panel Ρ (between the substrates) is irradiated with ultraviolet rays by the visor 8 to cure the sealing material. . panel! > (two substrates). When the two-line irradiation is performed, the panel p (two substrates) is warmed by ultraviolet rays, and the respective substrates of the panel p are slightly stretched. At this time, due to 20a, the two are placed under the stress of the transfer plate 20 by the weight.仃 — 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 伸展 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制 控制64, the lifting motor M1 is rotated at a high speed, 24 201004737, and the lifting seat 16 (the delivery plate 20) is lifted 3 mm from the transfer plate 20 at the high speed of each of the lift pins 16 (for example, before the brewing). 16 (the transfer plate 20) is lowered, the control device 61 is temporarily stopped by the rotation of =2 = 2 liters and the reverse of the rotation of M1, and then the speed is decreased by 51 degrees, and the correction seat 16 is borrowed. In the middle of the low speed drop, the upper side guide holes 21 of the parenting plate 20 of each of the transfer pins 2 protrude above, and the panel P from the upper side of the 20 is placed at the transfer pin % for the transfer.

Then, when the panel P is handed over to the delivery pin 26, the control motor 64 is driven by the slamming motor drive circuit 64 to make the hoisting motor " A 板 board cumbersome: 1 to rotate at a high speed, and the swell: seat = = the speed is lowered to standby After the position is stopped, wait for the next & ❹ Next, the effect of the embodiment configured as described above is as follows: (1) The alignment device 30 is formed by four alignment stages μ which are separated from each other and are respectively disposed in The alignment stage 31 which is separated from each other is aligned with the table eight support panel P. Then, the alignment table AT is placed at four positions via the connecting rods 40a, 40b, 41a, and 41j, and the panel p is rotated by the left side, the right side is rotated, the right side is parallel, and the left side is parallel. The rear side moves in parallel or the front side moves in parallel. Therefore, the positional deviation of the panel P against the hood 8 can be made zero.

(2) The panel p is moved by aligning the four stages of the support table AT of the stage 31 with each of the alignment stages 31 and passing them through the connecting rods 4a, ., 41a, 41bi^P 25 201004737. You; f this 'with the entire underside of the support panel P, for the position alignment can make the device small":: can be entered =: = r °a, 4 °b, 41a, 41b, _ reduced. In order to make the power consumption for driving the moving body mechanism (3), the panel bonding force is performed only by the panel of the lifting seat i=lock 26 being connected to the delivery plate 20 = continuous = row of ultraviolet rays. When the connecting plate 20 is separated, the alignment of the parent receiving plate 20 and the panel P is not rubbed. In the case of 皋, the other 'the aforementioned solid wire _ can be changed as T material. The embodiment is applied to the lifting seat 16 and the transfer plate. The device 3G' is included, so that the alignment I of each scale stage 31 is used as the upper surface 20a of the board 20. It can also be omitted as a rectangle of the plum 31. The wire lifting seat 16 can be configured. 26 201004737. In the above embodiment, the front X-axis and the rear X-axis connecting rods 40a and 40b, the side γ 钲, and the right side yaw connecting rods 41a and 41b are formed into a tube in order to make the aligning device 30 more lightweight. In the above embodiment, the alignment device 3 is disposed on the lifting base 16, and the panel p placed on the alignment device 3G is raised to an aligned position with the hood 。. This can also be concealed. The panel 对准 of the alignment device 30 is implemented. The placement is performed. The foregoing embodiment is to align the alignment device 3G. It can be used as an ultraviolet ray or device 1. It can also be applied to a device for illuminating two substrates for mounting a liquid crystal display panel, a device for manufacturing a flat panel, an alignment device for a semiconductor device, and the like. BRIEF DESCRIPTION OF THE DRAWINGS The schematic diagram of the ultraviolet irradiation device 2 of the present embodiment is a schematic plan view of the ultraviolet irradiation device of the present embodiment. The plan view of the mounting state of the alignment device is performed. Aligning the front view of the stage. The fifth figure is the top view of the alignment stage. The electric component of the ultraviolet irradiation device is described. [Main component symbol description] 1 Ultraviolet irradiation device 2 Stage portion 27 201004737

3 Light illuminating unit 26 Transfer pin 5 Lamp chamber 30 Aligning device 6 UV lamp 31 Aligning stage 7 Mask holding member 31a Left front alignment stage 8 hood 31b Right front alignment stage 11 Frame 31c Right rear alignment Table 11a Left side frame 31d Left rear alignment stage lib Right side frame 32 Base 12 bottom surface 33 Ball screw 13 Support block 34 Moving block 14 Support arm 35 Rotating plate 15 Ball screw 36 Guide member 16 Lifting seat 36a Guide groove 16a 37 Rotary placement table 17 Lower side guide hole 38 Bar 18 Attachment tab 39 Fastening fitting 19 Spacer retaining member 40a Front X-axis connecting rod 20 Transfer plate 40b Rear X-axis connecting rod 20a Upper surface 41a Left Y-axis connecting rod 20b Through hole 41b Right Y-axis connecting rod 20c Housing recess 44 Cylinder 21 Upper side guide hole 46 Suction hole 22 Nozzle hole 47 Entrance 23 Air introduction pipe 48 Adsorption groove 25 Transfer seat 50 Lifting guide member 28 201004737 51 Support plate 70 Electromagnetic adsorption Valve 50a Guide cylinder 71 Lamp drive circuit 50b Guide shaft AT Alignment table 52 Stop pin Ck Reference shaft 52a Thread portion Ct Center axis 53 Nut Cx Center axis 61 Control device Cy Center axis 62 Imaging device P Liquid crystal display panel 63 Moving motor drive circuit Po Center position 64 Lift motor drive circuit Ml Lift motor 65 Floating valve drive circuit M2 Moving motor 66 Floating electromagnetic 阙SL lifting cylinder 67 cylinder valve drive circuit Sla piston rod 68 cylinder solenoid valve ST lifting platform 69 adsorption valve drive circuit

29

Claims (1)

201004737 VII. Patent application scope: L—the kind of aligning device' is placed on the top of the base, so that the worker moves to the other direction in the other direction: the direction is orthogonal, and the water is in doubt to perform the position alignment of the aforementioned workpiece. , its special | ^ A first moving block, which can be placed along the pedestal to the apex position 纛 纛 摆 摆 摆 摆 ? ? ? ? ? ? ? ? ? ? ? ? ? ? Among the four vertices of the square direction, two second moving blocks are formed in a square-to-square diagonal direction, and the two moving blocks are respectively movable in the above four vertices, and the other positions are opposite to the vertex position; Two first driving parts on the square diagonal line, which are respectively corresponding to each other - the second driving part of the front (the front of the financial direction (four) moving block, which corresponds to the two-part two-moving block The first rotary table, which is doubled, supported, and can be horizontally rotated along the aforementioned upper-moving block of the first-moving block; and is moved back and forth to the first two second rotating operations. a table, which is supported and can be disposed on the front surface of the second moving block corresponding to the second moving block which is horizontally rotatable in the horizontal direction. The stages are respectively connected to the first one of the first structural members, which are the two first rotating workers 30 201004737 2. ❿ 3. 4. 5. 6. and the two second rotating directions; And the mouth is respectively connected to the aforementioned four alignments The first rotating illuminator is disposed on the workpiece, and the corresponding one of the stages. α and the aforementioned second rotating operation, such as the structural member and the second connecting member of the scope of claiming patent i, wherein the money is connected to the base of the first and second lifting portions of the patent application scope If you apply for a special interception of the direction of the third. The four second lifting parts are further provided with corresponding ones in the rotary table, and the two I are aligned with the working machine in the up and down direction. The aligning device of the + 肚 要 + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + And (4) on the upper side of the parenting plate, the positioning table is protrudedly received, and a fixing seat is disposed at a position below the base, and the fixing seat has a plurality of connecting pins disposed thereon And passing through the base and the delivery plate by the opening of the first lifting portion, and can be seen from the upper surface of the delivery plate. For example, the aligning device of the fifth aspect of the patent, wherein four first = descending portions are respectively disposed in a corresponding one of the first rotating table and the second rotating table, so that the corresponding pair The quasi-workbench moves back and forth in the up and down direction. The method of claim 6, wherein the workpiece floating mechanism that floats the workpiece is disposed on the transfer plate. 8. The aligning device of claim 1 or 2, wherein the horizontal rotation mode and the parallel movement mode are selectively executable, wherein the horizontal rotation mode is for the first rotary table and the second rotation The table rotates horizontally, and all of the two first driving portions and the two second driving portions are driven, and the parallel movement mode is driven to move the first rotating table and the second rotating table in a row. The two first driving units or the two second driving units. 32