TWI233994B - Inspection device for substrate to be inspected - Google Patents

Abstract

An inspection device for a substrate to be inspected is provided for preventing the substrate to be inspected from being departed from an inspection stage due to an inertia force caused while removing the substrate to be inspected in a high speed, wherein the device is characterized in that the substrate to be inspected, which is received by the inspection stage, is pressed onto the inspection stage by a press member for pressing the substrate during a removing of the inspection stage at least from a first location that receives the substrate to be inspected to a second location that inspects the substrate to be inspected, and the pressing of the substrate to be inspected is relieved by the press member after the inspection stage is removed to the second location with the press member being retreated beyond a disposition area of the substrate to be inspected.

Description

1233994 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to an inspection device for conducting an electric current test on a substrate to be inspected such as a liquid crystal display panel or organic electroluminescence (elector. Luminescence). [Prior art] In general, a liquid crystal display panel having a quadrangular edge, a display substrate for organic electroluminescence, or the like is inspected by a power-on test such as a visual lighting inspection or an automatic lighting inspection to check whether it is manufactured in accordance with a specification. The lighting inspection apparatus is performed by maintaining the display substrate of the substrate to be inspected in a horizontal state, and performing the inspection by tilting the substrate to be inspected. In particular, for visual inspection, it is preferable that the inspection is performed with the substrate to be inspected tilted in order to easily confirm the quality. In view of the above, the present inventors have considered the ease with which the substrate to be inspected can be attached to and removed from the inspection table, and have invented a method for attaching and detaching the inspected substrate to the inspection table in a horizontal state, tilting the inspection table, and placing the inspected substrate on the inspection table. The tilt state is checked (refer to Patent Document 1). In this inspection apparatus, 'the substrate to be inspected is placed on the inspection table in a horizontal state, the substrate to be inspected is adsorbed on an adsorption groove provided in the inspection table, the substrate to be inspected is maintained on the inspection table, and the inspection table is tilted to The substrate to be inspected is loaded in an inclined state. In such an inspection device, in order to increase productivity, it is expected that the inspection speeds up. Therefore, it is indispensable to quickly change the inspection table in a horizontal state and an inclined state. [Patent Document 1] Japanese Patent No. 2 0 0 2-9 6 5 9 6 (Taiwan Patent Publication No. 91 j 1 3456)

314148.ptd Page 6a ▲ · * ·. 机 * 5 1233994 V. Description of the invention (2) However, in the above-mentioned inspection device, when the inspection table is rapidly shifted from a horizontal state to an inclined state, due to the adsorption groove pair The inspected substrate has a small adsorption force, so the inertial force generated by the inspected substrate due to the rapid displacement of the inspected substrate on the inspection table may cause the inspected substrate to detach from the inspection table. Therefore, It is difficult to shorten the overall inspection time. The object of the present invention is' even if the substrate to be inspected is rapidly displaced, the substrate to be inspected can be prevented from detaching from the inspection table due to its inertial force. [Summary of the Invention] The inspection device for a substrate to be inspected according to the present invention includes: a second position that is different from the first position and that accepts the first position of the substrate to be inspected and the second position of the inspected substrate is selectively displaceable In order to releasably press the substrate to be inspected accepted by the inspection table to the inspection table, one or more substrate pressing members arranged on the inspection table. The substrate pressing member is configured to push the substrate to be inspected to the inspection table between at least the first position and the second position of the inspection table, and the inspection table is displaced to the second position. After the position, the pressing of the substrate to be inspected by the substrate to be inspected is released, and the pressing member outside the field of the substrate to be inspected is retracted. The inspection table receives the substrate to be inspected at the first position, and then shifts to the position ‘. After inspecting the inspected substrate at the second position, it is shifted to the first position. 'It is placed between the second position and the second position, and is placed on the inspection table △:; ί Ϊ: The pressing member pushed by the substrate pressing member to the inspection is wrong: to Π: V is set, so even if the inspection table is moved from the first 1 position changes rapidly — 1 position 2 position, during and after the displacement, the inspected substrate does not

1233994 V. Description of the invention (3)

Risk of detachment from the examination table. As a result, inspection A can shorten the time required to inspect an object. The speed of displacement of the substrate is accelerated. In addition to the above-mentioned substrate pressing member, the pressing structure is arranged on the support base of the above inspection table; in addition to the above, the substrate pressing member further includes: one of the first and second directions intersecting with each other ^ ^ Holding the base parallel and phased arms, it is swingably supported by the above-mentioned support base with a plurality of intervals at a distance of 1 cent in the first and second directions;; the axis of the axis extending in the direction supports Others in the first and second directions a the above-mentioned pressing member pivot multiple connecting arms; and the above-mentioned pressing ^ 冓; the substrate to be inspected around the extended axis is pressed to the pressing position of the inspection table ^ ^ is selectively located The structure for retreating the retreat position f 外 outside the arrangement area of the substrate to the pressure member to be inspected becomes simple, and the dimensions are the same. In this way, the inertia force of the substrate pressing member as a whole will be two = small. As a result, the substrate time is shortened. Moreover, the court will be able to change the position of the inspection table. The first position of the inspection table may be extended in one of the first and second directions; the second position may be displaced along the position. The above inspection table is angled around the axis of extension. The inspection table is horizontal at the first position, and the position may be inclined. In this way, the inspection board is installed on the inspection table for the second board, and the inspection table can be used to remove the inspection substrate so that it is not only the agricultural inspection of the inspection substrate. The visual inspection is performed downward, so the inspection efficiency can be improved-moment ΐ = seen as a quadrangular shape 7 It is used to connect the rectangular substrate to be inspected, and the substrate pushes the component in order to divide

vi uii 02 1233994 V. Description of the invention (4) --_ Don't push the plural corners of the above-mentioned substrate under inspection, or I can do so, you can surely press the substrate under inspection to the inspection ': there are multiple . [Embodiment] Take a sip. Referring to FIG. 1, the inspection device 10 is a rectangular lighting inspection device that is a substrate 12 to be inspected. The inspection device is not visible. When the direction perpendicular to the paper surface is the left and right sides of the inspection device, in FIG. 1, The front side of the inspection device, the left side is the inspection direction (4 x direction), the right side inspection device is the front and back direction (y direction), the upper side, and the left and right direction is the downward direction (z direction). The direction is above the inspection device. The inspection device 10 includes a plate-shaped support U horizontally arranged on a frame; a frame 16 from the support ^; a horizontal axis extending in the left and right directions; # The method of supporting the pillars is supported by the examination table 20 of the pillar 16; 18, and the axis of the holding shaft 18 can be rotated at an angle. Use it to move the examination table and make the examination table 20 around the support. The driving mechanism 2 200 is rotated around the angle by the driving mechanism 22, and the position of the inspected beauty m 1 accepted by the inspection under the axis of the axis of the support shaft 18 underwater and the tilt State displacement. Select the 2nd position of the slope of Earth Anti 1 2

The driving mechanism 22 is provided with approximately a quarter of the center of the gland a and left △. The inspection table 20 is formed in a fan-shaped passive gear 24 with driving teeth and plates engaged by a supporting shaft 18 and a wheel 24; and a passive gear mechanism 2 8. " " ’and the drive that reciprocates the drive gear 2 6 passive gear 2 4 The drive gear 26 is composed of

1233994 V. Description of the invention (5) Supported by a bracket 30 mounted on a support 14 and rotating around the axis which can be extended in the left-right direction. The drive mechanism 28 is a drive source provided on the support body 1 4 'and includes a motor, a rotary solenoid (s 0 1 e n 〇 丨 ^), and the like. The inspection table 20 is provided with a plate-shaped base 32 assembled on the passive gear 24, a support table 34 assembled on the base 32, and a backlight unit (back 1 ightunit) installed on the support table 34. The chuck top 3 6 〇 support table 34 is composed of X 'Y' 0 table, which moves the chuck top 36 to the left and right direction and front to back direction, and at the same time to the up and down direction (vertical to the receiving substrate Direction) around the 0 axis of the stretch for angular rotation. As shown in FIG. 2 and FIG. 3, the top 36 of the chuck is attached to a box (not shown) for housing the backlight assembly, and an upper cover 38 is mounted on the upper cover 38. The receiving substrate 1 is detachably mounted on the upper cover 38. 2 of the rectangular frame 4 〇. The upper cover 38 has a rectangular shape larger than the inspected substrate 12 and a rectangular area slightly smaller than the inspected substrate 12 accepted by the user as a display area 42 that allows light from the north module to pass through, and the outer side thereof is used as an absorption Two "44. Or i 3 8 series have through holes 4 6 for bolts (b〇11) installed at the corners of the engraving (not shown) to accommodate the backlight assembly, and are opposite to each other. Positioning holes 48 are located near the center of each side of the direction. The long side cover 38 is accommodated in the positioning holes 48, and is screwed (not shown) through the * + hole 46 (not shown). The box body that extends upwards = a pin (not shown) is assembled in the box body.

314148.ptd Page 10 1233994 V. Description of the invention (6) The frame 40 is provided with one or more suction grooves 5 that vacuum-suck the suction area 44 of the substrate 12 to be inspected at each edge corresponding to the four sides of the rectangle. = Consider Figure 4 (B)). The frame 40 is detachably attached to the upper cover 38 by a plurality of bolt members (not shown). The inspection table 20 is maintained when the substrate to be inspected 12 is moved to the first position shown in FIG. 1 (A) when it is attached to and detached from the frame 40. However, when the inspection substrate 12 is received by the inspection substrate 12 'Change position to the second position shown in Figure 1 (] 8) and hold. Figures 2 and 3 of McCaw, above the upper cover 3 8 are equipped with two sets of stoppers 52 (stoopers) 52 that receive the adjacent edges of the substrate 12 to be inspected, and will be inspected by 4 The substrate 12 is pressed to the plurality of pushers 54 of the group of the brake 52, and the four substrate pressing members 56 are pressed. ^ In the example shown in the figure, two brakes are provided on the long and short sides of the rectangle adjacent to each other in the long and short sides. Furthermore, two propulsion states 5 4 ′ should be provided at intervals between the other long sides in the direction of the long sides, and one thruster 5 4 is provided near the center of the other short side corresponding to the other short sides. The stoppers 52 of each group are spaced apart from each other in the corresponding edge direction in order to make the edges corresponding to the substrates 2 to be inspected abut '. Each propulsion unit 54 is connected to a movable (movava phantom I) member 60 of a lever of a driving mechanism 58 such as a cylinder (a 丨 rcy 1nder or a solenoid poUnoid), and the driving mechanism 58 Stretching advances the pressing member 60. The pressing substrate 60 is pressed to the brake 52 by the pressing member 60. The pressing member 60 can be retracted by the contraction of the driving mechanism 58, and installed.

1233994 V. Description of the invention (7) One by one ~~~~-Cover the upper part 38 of the driving mechanism 5 8. The frame 40 is a plurality of one-port portions that are opened to the outside in the arrangement positions of the stopper 52 and the pressing member 60, leaving the suction area 44 of the substrate 12 to be inspected. As shown in FIG. 4 and FIG. 5, each of the substrate pressing members 5 6 is coated on one of the upper 盍 38 pairs of supporting bases 6 2; the two sets of connecting arms 6 & Supported on the support base in the front-back direction and left-right direction, /, around the axis extending in the left-right direction and back-and-forth direction, it can be supported by the two sets of connecting arms 64. The pushing force = 66; and the driving mechanism μ for swinging the link arm 64. The upper ends of the brake 52 and the pressing member 60 are higher than those accepted by the inspection table 20, and the lower surface of the inspection substrate 12 is not higher than the position of the inspection base. ^ The two support bases 62 and 2 are spaced apart in the left-right direction. The connection f 64 of each group is extended in the up-and-down direction while maintaining an interval in the front-rear direction, and can be rotated at an angle around the axis extending in the right-hand direction, and is installed on two support bases 62 at the lower end. The pressing member 6 6 is attached to the connecting arm 6 4 in a swingable (displaceable) state in a state parallel to the substrate to be inspected 2 (a horizontal state). The pressing member 6 6 is, for example, a plate-shaped member in which an elastic plate of a rubber plate is attached to a metal plate = a pressing pad (P ad), and is attached to the connecting arm 6 so that the elastic plate is in contact with the substrate to be inspected 12. 4. In the example shown in the figure, the + drive mechanism 68 is telescopically extended to the front and back, and the front end of the piston rod is pivotally connected to the connecting arm 64.

1233994 V. Description of the invention (8) For the cylinder, the cylinder and the pillar 7 are used pivotally, such as a solenoid or a linear motor (1 i) to replace the cylinder with a rotation source, rack and pinion. 5 6, the corners of the plate 1 2 are set on the upper Yun 5 6, and the connecting arms 6 4 of each group of the edge portion of the far side of the swing center of the substrate 2 2 2 are parallel to the branch Linking mechanism, the machine swingably supports four pressing members plate 12 in a state of parallel swinging four. Each substrate pressing member 56, such as the expansion and contraction of the structure 6 8 can be shifted to the inspection Outside the configuration area, the corners of the substrate 12 inspected in Figure 5 (A) are pushed to the inspection position. The inspection device 1 is inspected and controlled by the inspection table 2 as shown in Figure 1 (A) below. At this time, as in the 5th and 6th series, the pressing member 66 is retracted to the retracting member 60. In this state, the inspection base is connected. As a driving mechanism 68, other ear telescopic mechanisms and wheels can also be used. (Pinion) and other mechanisms, or other machines, press the inspection member 38 with the pressing member 6 6. Instead of one or two of the four substrate pressing members, it is also possible to press away from the inspection table side. The holding base 6 2 and the pressing member 6 6 are connected in a state parallel to the substrate 12 to be inspected 6 6. If the connecting arm 64 is supporting the pressing member 6 with the inspection base, it is not limited to see from above, as the driver board inspection platform 20 accepts the retreat position of the inspection substrate 12 as shown in FIG. The substrate to be inspected 12 is measured in the pressing sequence shown in FIG. 5 (B) of the inspected table 20. The device 10 is driven horizontally by the driving mechanism 2 2 as shown in FIG. 5 (A), and each substrate pushes the member away from the position. The thruster 5 4 system makes the pressing plate 1 2 system be carried by the transfer robot W \

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Page 13 314148.ptd Λ Dance n 1233994

Go to inspection table 2 0 and place on inspection table 2 0. At this time, the inspection substrate 12 is placed on the frame 40 so as not to be loaded on the brake 52. Next, the driving mechanism 58 of each thruster 54 advances the pressing member 60. As a result, the substrate to be inspected 12 abuts the adjacent edge portion with the stopper 52 and positions the inspection table 20. Next, the adsorption groove 50 is vacuum-adsorbed, and the substrate to be inspected 2 is adsorbed on the inspection table 20. Next, as shown in FIG. 5 (B), the pressing members 6 6 of the substrate pressing members 56 are shifted to the pressing position by the driving mechanism 68, and are not damaged on the upper surface of the inspected substrate 12 ( The face of the eye) to the extent of the corner. Therefore, the substrate to be inspected 12 can be reliably held on the inspection table 20 because the adsorption force of the adsorption groove 50 and the pressing force of the substrate pressing member 56 are overlapped. Next, as shown in FIG. 1 (B), the inspection table 20 is displaced to a second position and tilted. Therefore, the substrate to be inspected 2 is also inclined. At this time, the substrate to be inspected 1 2 ′ is displaced to the right (front side of the inspection device) in FIG. 1 due to inertial force. However, this displacement is prevented by the substrate to be inspected 12 being pressed against the inspection table 20 by the substrate pressing member 56. Then 'align the substrate to be inspected 2 and the probe unit (not shown)] The side alignment is to support the inspection table 2 through the support table 3 4 to perform a two-dimensional intersection in the χ and γ directions. Angular rotation around the θ axis is performed. The probe unit system f is shown in FIG. 1 (B) and is arranged diagonally to the upper right of the substrate 12 to be inspected. Then, the pressing member 66 of the substrate pressing member 56 is returned to the standby position shown in FIG. 5 (A). However, the substrate i 2 to be inspected is adsorbed by the groove 5.

1233994

5 2 is held by the pressing member 60 and is relatively attracted, and the position of the probe unit is moved to the needle unit by the brake after the position of the inspection table 20 is not changed by π. position. The electrode pushed to the substrate 12 to be inspected hinders the movement of the probe unit. Diagonally below the substrate 12 to be inspected, the electrodes of the substrate 12 are probed. At this time, the probe of the probe unit is surely pushed, and the substrate pressing member 56 does not need to be 'powered on to be inspected' at the same time. It can be judged that the backlight assembly is lit in the above state. ^ Board 1 2 'Visual inspection of the inspection status of the substrate 1 to be inspected. Head. The visual inspection is based on the inspected substrate 12 being tilted as shown in FIG. 丨 (B). Since & 'the confirmation of the quality of the substrate 12 to be inspected is easier than that of a device for visually inspecting the substrate when the substrate is horizontal. After the inspection is completed, the probe unit moves to the upper side relative to the substrate to be inspected 2 and separates from the substrate 12 to be inspected. The inspection table 20 returns to the original first position as shown in FIG. 1 (person). In the period of returning the inspection table 20 to the i-th position, the inspection substrate 12 may be pushed to the inspection table 20 by the pressing member 66 of the substrate pressing member 56. After that, the inspected substrate 12 after the inspection is completed, the suction groove of the suction groove is released, and the holding by the brake is 5 2 and the pressing member 60 is removed by the transfer robot from the inspection table 20. w In the inspection device 10, while the inspection table 20 is displaced from the first position to the second position, the substrate to be inspected on the inspection table 20 is pushed by the pressing member 6 6

Page 15

1233994 V. Description of the invention (π) It is pushed to the inspection table 20, and it cannot be moved. Therefore, even if the inspection table 20 is displaced from the first position to the second position at a high speed, the displacement of the inspection table 20 and its changes After the bit is placed, the substrate to be inspected 12 does not have to be separated from the inspection table 20. As a result, the displacement speed of the examination table 20 can be accelerated, and the time required to inspect an inspection object can be shortened. + The inspection base, inspection base, etc. are suitable for use as the organizer of the organic electricity inspection platform 20. The mechanism (except screw), the cylinder mechanism, and the various pushers 54 are used to hold the pressing plate 12 of the substrate 12 to be inspected after the adsorption groove 50 and the rear plate 12 or at the same time as the substrate being inspected. Cancel. In addition to the substrates 12 to be inspected, other substrates to be inspected, such as liquid crystal electroluminescence, are transferred to the substrates to be inspected 12. Also, as an example in which the inspection table is selectively illustrated, a screw nut (1 eadnut), The linear motion mechanism such as a coupling or a linear motor is not limited to the above-mentioned embodiment, but only changes. By pressing the member 6 6 and pushing 1 2 back to the standby position, the board can be replaced instead of the display panel. In addition, it is possible to replace the transfer machine to the 1st and 2nd positions with manual labor instead of the transfer source, lead screw (lead arm (1 ink), etc.), or other mechanisms such as steam. Without departing from its purpose, you can

314148.ptd Page 16 1233994

Brief description of the drawing [Simplified description of the drawing [Figure 1] This is the side view of the inspection device of the substrate to be inspected according to the present invention. See the state diagram of the inspection table in the horizontal position. (B) indicates whether the inspection is performed, (A) State diagram of the table. ~ ΌIn the inclined position [Fig. 2] Fig. [Fig. 3] The external perspective view of the inspection table of the inspection device shown in Fig. 1 is the top view of the inspection table shown in Fig. 2. [Figure 4] This is an enlarged view of the substrate pressing member not shown in Figure 2. (B) is a front view and (C) is a side view. [Fig. 5] is an enlarged perspective view of the substrate pressing member shown in Fig. 4, (d represents the state of the substrate pressing member retracted to the standby position. (Β) represents the displacement of the substrate pressing member to the pressing position State diagram of the inspection device. 10 Inspection device 14 Support body 18 Support shaft 22 Driving mechanism for inspection table 2 6 Drive gear 30 Bracket 34 Support table 1 2 Inspection substrate 1 6, 7 0 Pillar 2 〇 Inspection table 2 4 Passive gear 2 8, 5 8, 6 8 Drive mechanism 32 Base 3 6 Top of chuck

025ϋ52 1233994

314148.ptd Page 18

Claims (1)

1233994 Sat 1 · Scope of patent application t ^ An inspection device for inspected substrates, including: a second position different from the first position for receiving the first position of the inspected j substrate and the second position of the inspected substrate is selectable An inspection table that performs a displacement, and one or more substrate pressing members arranged on the inspection table in order to releasably press the inspected substrate accepted by the inspection table to the inspection table; ^ The substrate pressing The component system is provided with the inspection table shifted from at least the tff 1 position to the second position, and will be inspected: upper, inspection table ', and the inspection table is shifted to the second position, and the inspection table is pushed / Pushing, and pushing back the pushing member outside the field of arrangement of a soil plate. In: ί 2: ί 1 The inspection device for the substrate to be inspected, the substrate pressing member further includes a support base arranged on the inspection table, and any of the first and the first parallel and intersecting The two directions show that there are multiple distances apart and the other directions in the second direction., ## It is supported in the first and the above mentioned support bases. The support is swingably supported around the first and the first. 2 directions = f-member pivots are supported towards the above-mentioned knot arms; and the plural connecting plates around the extended axis are selectively shifted to position and retract the configuration base of the substrate to be inspected at the avoidable position of the substrate to be inspected Drive mechanism. 314148.ptc 1233994 Case No. 91132548 Yue Guangri VI. Application scope of patent 3. If the patent application is applied, the above inspection is placed along the above-mentioned angle. 4. As in the patent application, the above inspection is placed along the above. Make angle changes 5. If the patent application inspection device, level, in the above 6. If the patent application inspection device, the shape, the substrate is pressed against the corner structure and has 7. If the patent application, The above inspections accept rectangles in order to push several pieces separately.卞 — 艿 —One FT correction The inspection device for the substrate to be inspected around item 1, the above-mentioned first position of the table is a position around the axis extending in one of the second and first directions. The above-mentioned first position of the inspection device surrounding the substrate to be inspected in item 2 is a peripheral position of an axis extending in one of the second and first directions. The substrate to be inspected according to any one of items 1 to 4 wherein the inspection table is formed at the first position and the second position is inclined. The substrate to be inspected according to any one of items 1 to 4, wherein the inspection table is a quadrangle from above for receiving the rectangular substrate to be inspected, and the above-mentioned pieces respectively push a plurality of plural numbers of the substrate to be inspected. Each. The inspection device for the inspected substrate surrounding Item 5 has a quadrangular shape when viewed from above. It uses the aforementioned inspected substrate, the aforementioned substrate pressing member, and a plurality of corner portions of the inspected substrate. 314148.ptc Page 20 1233994 /