CN107146768B - For laying the device and alignment device of article - Google Patents
For laying the device and alignment device of article Download PDFInfo
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- CN107146768B CN107146768B CN201710459363.5A CN201710459363A CN107146768B CN 107146768 B CN107146768 B CN 107146768B CN 201710459363 A CN201710459363 A CN 201710459363A CN 107146768 B CN107146768 B CN 107146768B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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Abstract
The present invention provides a kind of device and alignment device for being used to lay article.Device for laying article includes support plate, multiple first draw pins and multiple second draw pins being arranged in along mutually orthogonal directions on support plate, two the first support modules with two the first mortises, with two the second support modules with two the second mortises, two the first support modules equidistantly can be installed to the support plate on by the joggle between first draw pin and first mortise and apart from the intersection point, two the second support modules equidistantly can be installed to the support plate on by the joggle between second draw pin and second mortise and apart from the intersection point.More various sizes of recesses can be limited in the case of using support module as few as possible according to the present invention, therefore, it is possible to significantly decrease spare parts purchasing cost and spare parts management cost, and significantly shorten downtime, improve production efficiency.
Description
Technical field
The present invention relates to the device for laying the article with different size, more particularly to semiconductor chip manufacturing process
In be used for adjust on the alignment device of die orientation be used for lay chip device and including it is this be used for lay chip
The alignment device of device.
Background technology
In the semiconductor industry, the packaging and testing process either in the manufacturing process of chip or after chip manufacturing
In, it is required for taking chip from a station away using crawl and placement unit and shifts and be placed on next station, with
Just the processing or processing of subsequent processing are carried out.For example, in chip testing separator, it is necessary to will using capturing and laying unit
Chip is taken away from heating station and shifts and be placed on test station and after testing is complete by chip from test station
Take away and shift and be placed on take-up reel.Before being crawled by chip and being placed in test station, the orientation of chip needs
It is adjusted to consistent with its orientation in test station.For example, by rotating the chip on alignment device so that take
From the alignment of orientation of the orientation of the 1st stitch of the chip of pallet and the 1st stitch of test interface unit.Therefore, alignment device leads to
The often device for being used to lay chip including rotating mechanism and on rotating mechanism.In rotary course, chip must be
Position is reliably held on alignment device.Device for laying chip must be adapted with the chip size of specific standard,
It can ensure that chip is reliably held at position.
In existing alignment device, corresponding to the chip of specific standard, the generally branch in the device for laying chip
Mounting groove with the size fit of the chip of this specific standard is set on board.Specification such as fruit chip changes, it is necessary to
The support plate with various sizes of mounting groove is changed, to be adapted to the size of the chip of specification change.In this manner it is achieved that need
Prepare the support plate of plurality of specifications, this not only significantly increases spare parts purchasing cost and spare parts management cost, and changes branch
Board needs to take considerable time, causes downtime significantly to extend, reduce production efficiency.
It is then desired to the existing device for being used to lay article is improved.
The content of the invention
One object of the present invention seeks to propose a kind of improved device for being used to lay article, this to be used to lay thing
The device of product can not only significantly decrease spare parts purchasing cost and spare parts management cost, and when can significantly shorten shutdown
Between, improve production efficiency.
Therefore, according to an aspect of the present invention, there is provided a kind of device for being used to lay article, including：
Support plate, there are two axis to intersect vertically on the support plate；
It is equal along the intersection point of two axis described in an axial line distance in two axis on the support plate
Distance ground is disposed with multiple first draw pins towards the both ends of an axis, adjacent first draw pin on the intersection point is per side
The distance between center is equal and is the first distance；
Along intersection point equidistance described in another axial line distance in two axis the court on the support plate
Another axis both ends are disposed with multiple second draw pins, between the center of adjacent second draw pin on the intersection point is per side
Distance it is equal and be second distance；
There are two the first support modules of two the first mortises respectively, first support module has basal surface and top
Surface and first end and the second end, described two first mortises prolong along the first end from first support module
The straight line for reaching second end of first support module is formed on the basal surface of first support module, simultaneously
And for receiving the distance between first draw pin, the center of described two first mortises be the 3rd distance, the described 3rd away from
From being integral multiple with a distance from described first, distance of described two first mortises to the end of neighbouring first support module
Difference, the first groove, first tenon are also formed with the basal surface of first support module along the straight line
Wall thickness between eye and adjacent first groove is less than the gap between adjacent first draw pin；
There are two the second support modules of two the second mortises respectively, second support module has basal surface and top
Surface and first end and the second end, described two second mortises prolong along the first end from second support module
The straight line for reaching second end of second support module is formed on the basal surface of second support module, simultaneously
And for receiving the distance between second draw pin, the center of described two second mortises be the 4th distance, the described 4th away from
From the integral multiple for being the second distance, distance of described two second mortises to the end of neighbouring second support module
Difference, the second groove, second tenon are also formed with the basal surface of second support module along the straight line
Wall thickness between eye and adjacent second groove is less than the gap between adjacent second draw pin；
Wherein, described two first support modules can pass through the joggle between first draw pin and first mortise
And equidistantly it is installed on the support plate apart from the intersection point, described two second support modules can pass through described
Joggle between two draw pins and second mortise and equidistantly it is installed on the support plate apart from the intersection point.
Preferably, extended to along the first end from first support module described in first support module
The straight line at the second end is on the top surface of first support module formed with for receiving two the 3rd of first draw pin
The distance between mortise, the center of described two 3rd mortises is also the 3rd distance, described two 3rd mortises to neighbouring institute
State the end of the first support module distance it is different and with described two first mortises to neighbouring first support module
End distance it is also different, along the straight line on the top surface of first support module formed with the 3rd groove, institute
State the gap that the wall thickness between the 3rd mortise and adjacent 3rd groove is less than between adjacent first draw pin；
Second end of second support module is extended to along the first end from second support module
Straight line on the top surface of second support module formed with two the 4th mortises for receiving second draw pin, institute
It is also the 4th distance to state the distance between center of two the 4th mortises, and described two 4th mortises are to neighbouring described second
The distance of the end of backing block it is different and with described two second mortises to the end of neighbouring second support module
Distance is also different, along the straight line on the top surface of the second support module formed with the 4th groove, the 4th mortise with
Wall thickness between adjacent 4th groove is less than the gap between adjacent second draw pin；
Wherein, described two first support modules can pass through the joggle between first draw pin and the 3rd mortise
And equidistantly it is installed on the support plate apart from the intersection point, described two second support modules can pass through described
Joggle between two draw pins and the 4th mortise and equidistantly it is installed on the support plate apart from the intersection point.
Preferably, the described device for being used to lay article also includes at least one pair of first other support module, described
At least one pair of first other support module is identical with described two first support modules, except it is described at least one pair of in addition the
The distance of mortise on the basal surface and top surface of one support module to the end of the neighbouring first other support module
With the mortise on the basal surface and top surface of described two first support modules to the end of neighbouring first support module
Distance difference outside.
Preferably, the described device for being used to lay article also includes at least one pair of second other support module, described
At least one pair of second other support module is identical with described two second support modules, except it is described at least one pair of in addition the
The distance of mortise on the basal surface and top surface of two support modules to the end of the neighbouring second other support module
With the mortise on the basal surface and top surface of described two second support modules to the end of neighbouring second support module
Distance difference outside.
Preferably, the both sides of first groove between described two first mortises of first support module
Formed with the elongated slot penetrated from the basal surface to the top surface on part；And described in second support module
Formed with being passed through from the basal surface to the top surface on the part of the both sides of second groove between two the second mortises
Logical elongated slot.
Preferably, on the lateral wall at the second end of the first end sum of first support module and at described second
Formed with the inclined surface for guiding article on the lateral wall at the second end of the first end sum of backing block.
Preferably, the distance of the inclined surface to the corresponding mortise of the neighbouring inclined surface is different.
Preferably, the intersection point is located at the center of the support plate.
Preferably, formed with cross protuberance, first draw pin and the second draw pin quilt on the support plate
It is arranged on the cross protuberance, first support module and second support module are respectively formed with supporting leg,
The recess for receiving the cross protuberance is limited between the supporting leg.
Preferably, formed with cross protuberance, first draw pin and the second draw pin quilt on the support plate
It is arranged on the cross protuberance, first support module and second support module are respectively formed with supporting leg,
The recess for receiving the cross protuberance is limited between the supporting leg so that first support module and described
Two support modules are H-shaped.
Preferably, be not provided with the support plate first draw pin and second draw pin position formed it is multiple
Equally distributed receiver hole, for removably laying the sleeve for receiving guiding pin.
Preferably, the described device for being used to lay article is the device for laying chip.
According to another aspect of the present invention, there is provided a kind of alignment device, the alignment device are used for the orientation for adjusting chip,
The alignment device includes：
Rotating mechanism；And
The device for being used to lay chip on the rotating mechanism；
Wherein, the device for being used to lay chip is the device as described above for being used to lay article.
Preferably, the support plate is opposite in the side with installing first support module and second support module
Opposite side on formed with cavity, to match with forming the protuberance on the rotating mechanism.
According to the present invention be used for lay the device of article, by adjusting the position of support module relative to draw pin, four
Support module can limit the recess for the article for being suitable for laying different specification size.Mortise is additionally, since to neighbouring end
The distance in portion is different, though the mortise on support module coordinates with same a pair of draw pins, but by making support module rotate for example
Joggle is realized after 180 ° of orientation, the recess for the article for being suitable for laying other different specification size can be limited.Therefore,
More various sizes of recesses can be limited in the case of using support module as few as possible.
Brief description of the drawings
Fig. 1 is the schematic perspective view according to the preferred embodiment of the invention for being used to lay the device of article；
Fig. 2 is the schematic perspective view according to the preferred embodiment of the invention for being used to lay the support plate of the device of article；
Fig. 3 is the schematic isometric according to the preferred embodiment of the invention for being used to lay the support module of the device of article
Figure；
Fig. 4 is schematically looking up for the support module according to the preferred embodiment of the invention for being used to lay the device of article
Figure；
Fig. 5 is the diagrammatic top according to the preferred embodiment of the invention for being used to lay the support module of the device of article
Figure；And
Fig. 6 is that the opposite side according to the preferred embodiment of the invention for being used to lay the support plate of the device of article is schematically stood
Body figure.
Embodiment
Each preferred embodiment of the present invention is described in detail with reference to example.It will be understood by those skilled in the art that this
A little embodiments are exemplary, and it is not meant to form any restrictions to the present invention.
Fig. 1 is the schematic perspective view according to the preferred embodiment of the invention for being used to lay the device of article, and Fig. 2 is basis
The schematic perspective view for being used to lay the support plate of the device of article of the preferred embodiment of the present invention.As illustrated in fig. 1 and 2, according to
The device 1 for being used to lay article of the preferred embodiment of the present invention includes support plate 3.Support plate 3 is generally circular, but according to need
Will, support plate 3 can also be formed as rectangle, square, ellipse or other any suitable shapes.Have on support plate 3
There are two axis X to intersect vertically X and YY, axis X X and YY intersection point are preferably located in the center O of support plate 3.Along axis
Multiple first draw pins 5 are disposed with to XX distance center O equidistances towards axis X X both ends, in center O per adjacent the on side
The distance between the center of one draw pin 5 is equal and is the first distance.Similarly, along axis YY distance center O equidistances
Ground is disposed with multiple second draw pins 7 towards axis YY both ends, between the center of adjacent second draw pin 7 on center O is per side
Apart from equal and be second distance.
As shown in figure 1, the device 1 according to the preferred embodiment of the invention for being used to lay article also includes having two first
Two the first support modules 9 of mortise and two the second support modules 11 with two the second mortises.Two first backing
Block 9 is equidistantly installed on support plate 3 by the joggle between the first draw pin 5 and the first mortise and distance center O.Class
As, two the second support modules 11 by the joggle between the second draw pin 7 and the second mortise and distance center O it is equidistant
Ground is installed on support plate 3.First support module 9 and support module 11 can have identical structure, can also be at certain
It is slightly different in terms of a little sizes.
The structure of the first support module 9 is described in detail referring to Fig. 3 and Fig. 4.Fig. 3 is preferable to carry out according to the present invention
The schematic perspective view for being used to lay the support module of the device of article of example, Fig. 4 is use according to the preferred embodiment of the invention
In the schematic, bottom view of the support module for the device for laying article.As shown in Figures 3 and 4, the first support module 9 has basal surface
13 and top surface 15 and the end 19 of first end 17 and second.Along extending to the straight line at the second end 19 from first end 17 first
Formed with two the first mortises 21 for receiving the first draw pin 5 on the basal surface 13 of support module 9, two the first mortises 21
The distance between center is the 3rd distance.3rd distance is the distance between center of adjacent first draw pin 5 (that is, the first distance)
Integral multiple, for example it is assumed that first distance be 2mm, then the 3rd distance is illustrated in figure 4 8mm.Two the first mortises 21 arrive neighbouring
End distance it is different, for example, the distance of mortise 21 to the first end 17 of neighbouring first end 17 be 1.875mm, and adjacent to the
The distance at the end of mortise 21 to the second 19 at two ends 19 is 3.625mm.In order to ensure two the first draw pins 5 and two the first mortises 21
Other first draw pins 5 are inserted in two the first mortises 21 without prejudice to this two the first draw pins 5 when forming joggle, along from first end
17 straight lines for extending to the second end 19 are also formed with the first groove 23, the first mortise on the basal surface 13 of the first support module 9
Wall thickness between 21 and adjacent first groove 23 is less than the gap between adjacent first draw pin.Between two the first mortises 21
Can also be formed with the elongated slot 25 penetrated from basal surface 13 to top surface 15, to work as on the part of the both sides of first groove 23
First support module 9 is supported after being installed on support plate 3 by being screwed into the screw 27 of support plate 3 through elongated slot 25 by first
Module 9 is securely fixed on support plate 3.
Similarly, the second support module 11 also has basal surface and top surface and first end and the second end.Along from
One end extends to the straight line at the second end on the basal surface of the second support module 11 formed with for receiving two of the second draw pin 7
The distance between second mortise, the center of two the second mortises is the 4th distance.4th distance is the center of adjacent second draw pin
The distance between (that is, second distance) integral multiple.The distance of two the second mortises to neighbouring end is different.In order to ensure two
Other second draw pins are without prejudice to two second draw pins insertions two the when individual second draw pin 7 and two the second mortises form joggle
In two mortises, second is also formed with the basal surface of the second support module 11 along the straight line that the second end is extended to from first end
Groove, the wall thickness between the second mortise and adjacent second groove are less than the gap between adjacent second draw pin.In two the second tenons
Can also be formed with the elongated slot penetrated from basal surface to top surface, to work as on the part of the both sides of the second groove between eye
Second support module 11 is supported after being installed on support plate 3 by being screwed into the screw 27 of support plate 3 through elongated slot by second
Module 11 is securely fixed on support plate 3.
Preferably, inclined surface 29 is formed in the first end of each support module and the lateral wall at the second end, for
Guiding article is placed in correct position.As a kind of example, article can also be placed in the support module being oppositely arranged
Inclined surface 29 on, i.e. inclined surface 29 itself can also be as the supporting surface of supports articles.In each support module
First end with the second end near inclined surface to the mortise of adjacent sloped surfaces distance it is different.For example, shown in Fig. 4
In the schematic, bottom view of first support module 9, near the first end 17 of the first support module 9 and positioned at basal surface side
The distance that inclined surface 29 arrives the first mortise 21 of the neighbouring inclined surface 29 is 1mm, and at the second end of the first support module
19 nearby and the distance of the first mortises 21 that arrives adjacent to the inclined surface 29 of the inclined surfaces 29 positioned at basal surface side is
2.75mm；In the schematic plan of the first support module 9 shown in Fig. 5, near the first end 17 of the first support module 9
And the distance that the inclined surface 29 positioned at top surface side arrives the 3rd mortise 31 of the neighbouring inclined surface 29 is 2.50mm, and
Second end 19 of the first support module is nearby and the inclined surface 29 positioned at top surface side arrives the of the neighbouring inclined surface 29
The distance of three mortises 31 is 1.25mm.
When two the first support modules 9 pass through the joggle and distance center O etc. between the first draw pin 5 and the first mortise
It is installed on support plate 3 to distance and two the second support modules 11 passes through the tenon between the second draw pin 7 and the second mortise
Connect and when distance center O is equidistantly installed on support plate 3, two the first support modules 9 and two the second support modules
11 limit the recess of general rectangular or square together, for receiving the article for needing to be placed.By relative to draw pin
To adjust the position of support module, four support modules can limit the recessed of the article that is suitable for laying different specification size
Portion.Mortise is additionally, since to the distance difference of neighbouring end, even if the mortise on support module coordinates with same a pair of draw pins,
But joggle is realized in the orientation by making support module to rotate 180 ° afterwards, can limit and be suitable for laying other different size
The recess of the article of size.Therefore, can be limited in the case of using support module as few as possible more various sizes of
Recess.
Fig. 5 is the diagrammatic top according to the preferred embodiment of the invention for being used to lay the support module of the device of article
Figure.Preferably, as shown in Figures 3 and 5, along extending to the straight line at the second end 19 from first end 17 on the top of the first support module 9
Two the 3rd mortises 31 for receiving the first draw pin 5 are also formed with surface 15, between the center of two the 3rd mortises 31
Distance is also the 3rd distance.3rd distance is the integer of the distance between center of adjacent first draw pin 5 (that is, the first distance)
Times, for example it is assumed that the first distance is 2mm, then the 3rd distance is illustrated in figure 5 8mm.Two the 3rd mortises 31 arrive neighbouring end
Distance it is different, for example, the distance of mortise 31 to the first end 17 of neighbouring first end 17 be 3.375mm, and adjacent to the second end 19
The distance at the end of mortise 31 to the second 19 be 2.125mm.In order to ensure that two the first draw pins 5 and two the 3rd mortises 31 form tenon
Other first draw pins 5 are inserted in two the 3rd mortises 31 without prejudice to this two the first draw pins 5 when connecing, and are extended along from first end 17
Straight line to the second end 19 is also formed with the 3rd groove 33, the 3rd mortise 31 and phase on the top surface 13 of the first support module 9
Wall thickness between adjacent 3rd groove 33 is less than the gap between adjacent first draw pin.
Similarly, also formed on the top surface of the second support module 11 along the straight line that the second end is extended to from first end
It is also the 4th distance to have the distance between two the 4th mortises, the center of two the 4th mortises for receiving the second draw pin 7.The
Four distances are the integral multiples of the distance between the center of adjacent second draw pin 7 (that is, second distance).Two the 4th mortises are to neighbouring
End distance it is different.Other second draw pins 7 are not during in order to ensure that two the second draw pins and two the 4th mortises form joggle
This two the second draw pins 7 are hindered to insert in two the 4th mortises, along extending to the straight line at the second end from first end at second
The 4th groove is also formed with the top surface of backing block, the wall thickness between the 4th mortise and adjacent 4th groove is less than adjacent second
Gap between draw pin.
Because the distance for being respectively formed at basal surface and the mortise on top surface to neighbouring end is different, even if Zhi Chengmo
Mortise on the basal surface and top surface of block coordinates with same a pair of draw pins, but by making to realize tenon after support module changing location
Connect so that can limit four groups of different sizes along same axis X X or YY, and then limit and be suitable for laying different size
The recess of the article of size.Therefore, can be limited in the case of using support module as few as possible more various sizes of
Recess.
As an example, in chip manufacturing proces, Chip scale size is generally changed with the differential of 0.5mm.Adjusting
When saving support module position, in order to keep chip to be located at the center for the device for being used to lay chip, along same axis X X or YY
On two support modules must be adjusted in the same manner.In the case of it is assumed that the distance between draw pin center is 2mm, if together
When two support modules on one axis X X or YY are adjusted by 2mm, the gap change between them is 4mm.By for for
First support module of device two kinds of specifications of setting and/or the second support module of two kinds of specifications of placement chip, every kind of first
Distance of the mortise differed only on bottom surface and top surface of support module and every kind of second support module to neighbouring end
It is different, it is possible to limit a variety of various sizes of recesses for being suitable for specification using 0.5mm as the chip of differential change.
It is of course also possible to the first support module of more kinds of specifications and/or more is set as needed for for laying the device of chip
Second support module of kind specification.
It is in place in order to contribute to support module rapidly to be alignd with draw pin and install, ten can be formed on support plate 3
Font protuberance 35, the first draw pin 5 and the second draw pin 7 are arranged on cross protuberance 35.Accordingly, the first support module
9 and second support module 11 be respectively formed with supporting leg 37, limited between supporting leg 37 for receiving cross protuberance 35
Recess 39.Preferably, the first support module 9 and the second support module 11 are substantially H-shaped.In the first support module 9 and second
Can also be formed with hole 41, to lead to when the recess for being used to lay article of restriction is oversized on the supporting leg 37 of backing block 11
Cross alignment pin and screw and splice extension (not shown) on the first support module 9 and the second support module 11.
It is in order that the chip being crawled is accurately placed on alignment device, such as to grab as is known in the art
Take and lay the guiding pin on unit and need to insert and be used to lay in the sleeve 43 on the device of chip.Due to the change of Chip scale
Change and in order to adapt to the guiding pin on different crawl and placement units, the first draw pin 5 and the are not provided with support plate 3
The position of two draw pins 7 forms multiple equally distributed receiver holes 45, for laying sleeve 43.Sleeve 43 with receiver hole can be with
Receive and such as capture and lay the guiding pin on unit.Therefore, changed or in Chip scale in order to adapt to different crawls
During with the position of the guiding pin laid on unit, it is only necessary to sleeve 43 is extracted and reinserted be adapted with Chip scale
Or in the receiver hole 45 adaptable from the guiding pin in different crawls and placement unit.
Fig. 6 is that the opposite side according to the preferred embodiment of the invention for being used to lay the support plate of the device of article is schematically stood
Body figure.As shown in fig. 6, support plate 3 on the opposite side opposite with installation support module side formed with cavity 47, so as to shape
Match into the protuberance on the rotating mechanism of alignment device, so as to rapidly and accurately by the device for laying chip
It is placed on rotating mechanism.Support plate 3 can also be formed with for pacifying on the opposite side opposite with installation support module side
The placed hole 49 of magnet is put, couples to be used in the device of placement chip and rotating mechanism formation magnetic, is used for so as to realize
Lay the fast assembling-disassembling of the device of chip.
Above in association with specific embodiment to the present invention have been described in detail.Obviously, above description and show in the accompanying drawings
The embodiment gone out should be construed as it is exemplary, without being construed as limiting the invention.For example, in a preferred embodiment,
The present invention be described as in the semiconductor manufacturing industry be used for adjust on the alignment device of die orientation be used for lay chip
Device, it will be appreciated that, the present invention is applied to lay the device of any article of plurality of specifications or size.For this area skill
For art personnel, various variations or modifications can carried out to it without departing from the spirit of the invention, these modifications or
Modification is all without departing from the scope of the present invention.
Claims (15)
1. a kind of device (1) for being used to lay article, including：
Support plate (3), there are two axis (XX, YY) to intersect vertically on the support plate (3)；
Intersection point phase on the support plate (3) along an axis (XX) in two axis apart from two axis
Multiple first draw pins (5) equidistantly are disposed with towards the both ends of an axis, adjacent first on the intersection point is per side
The distance between the center of draw pin (5) is equal and is the first distance；
On the support plate (3) along another axis (YY) in two axis apart from the intersection point equidistance
Multiple second draw pins (7) are disposed with towards another axis both ends, adjacent second draw pin (7) on the intersection point is per side
The distance between center is equal and is second distance；
There are two the first support modules (9) of two the first mortises (21) respectively, first support module (9) has bottom table
Face (13) and top surface (15) and first end (17) and the second end (19), described two first mortises (21) are along from described
The first end (17) of first support module (9) extends to the straight of second end (19) of first support module (9)
Line is formed on the basal surface (13) of first support module (9) and for receiving first draw pin (5), institute
It is the 3rd distance to state the distance between center of two the first mortises (21), and the 3rd distance is the integer of first distance
Times, the distance of the end of described two first mortises (21) to neighbouring first support module is different, along the straight line
The first groove (23), first mortise (21) are also formed with the basal surface (13) of first support module (9)
Wall thickness between adjacent first groove (23) is less than the gap between adjacent first draw pin；
There are two the second support modules (11) of two the second mortises respectively, second support module (11) has basal surface
With top surface and first end and the second end, described two second mortises are along from the described of second support module (11)
The straight line that first end extends to second end of second support module (11) is formed in second support module (11)
The basal surface on and for receiving second draw pin (7), the distance between the center of described two second mortises is
4th distance, the 4th distance are the integral multiples of the second distance, described two second mortises to neighbouring described second
The distance of the end of support module is different, and shape is gone back on the basal surface of second support module (11) along the straight line
Into there is the second groove, the wall thickness between second mortise and adjacent second groove is less than the gap between adjacent second draw pin；
Wherein, described two first support modules (9) can be by between first draw pin (5) and first mortise (21)
Joggle and be equidistantly installed on the support plate (3) apart from the intersection point, described two second support modules (11)
Equidistantly it can be installed to by the joggle between second draw pin (7) and second mortise and apart from the intersection point
On the support plate.
2. the device (1) according to claim 1 for being used to lay article, it is characterised in that：
The described of first support module (9) is extended to along the first end (17) from first support module (9)
The straight line at the second end (19) is on the top surface (15) of first support module (9) formed with for receiving first draw pin
(5) the distance between two the 3rd mortises (31), center of described two 3rd mortises (31) are also the 3rd distance, described two
Distance of individual 3rd mortise (31) to the end of neighbouring first support module it is different and with described two first mortises
(21) distance to the end of neighbouring first support module is also different, along the straight line in first support module
(9) formed with the 3rd groove (33) on top surface (13), between the 3rd mortise (31) and adjacent 3rd groove (23)
Wall thickness is less than the gap between adjacent first draw pin (7)；
Described the of second support module (11) is extended to along the first end from second support module (11)
The straight line at two ends is on the top surface of second support module (11) formed with for receiving two of second draw pin (7)
The distance between 4th mortise, the center of described two 4th mortises is also the 4th distance, and described two 4th mortises are to neighbouring
Second support module end distance it is different and supported with described two second mortises to neighbouring described second
The distance of the end of module is also different, along the straight line on the top surface of the second support module formed with the 4th groove, institute
State the gap that the wall thickness between the 4th mortise and adjacent 4th groove is less than between adjacent second draw pin；
Wherein, described two first support modules (9) can be by between first draw pin (5) and the 3rd mortise (31)
Joggle and be equidistantly installed on the support plate (3) apart from the intersection point, described two second support modules (11)
Equidistantly it can be installed to by the joggle between second draw pin (7) and the 4th mortise and apart from the intersection point
On the support plate.
3. according to claim 2 be used to lay the device (1) of article, it is characterised in that described to be used to lay article
Device (1) also include ating least one pair of other first support module (9), at least one pair of described first other support module
(9) it is identical with described two first support modules (9), except the bottom table of at least one pair of other first support module (9)
Mortise on face and top surface to the end of the neighbouring first other support module distance with described two first
The basal surface of backing block (9) and the mortise on top surface are to the distance difference of the end of neighbouring first support module
Outside.
4. according to claim 2 be used to lay the device (1) of article, it is characterised in that described to be used to lay article
Device (1) also include ating least one pair of other second support module (11), at least one pair of described second other support module
(11) it is identical with described two second support modules (11), except the bottom of at least one pair of other second support module (11)
The distance and described two second of mortise on surface and top surface to the end of the neighbouring second other support module
The distance of the basal surface of support module (11) and the mortise on top surface to the end of neighbouring second support module is different
Outside.
5. the device (1) according to claim 1 or 2 for being used to lay article, it is characterised in that first support module
(9) and second support module (11) is identical.
6. the device (1) according to claim 1 or 2 for being used to lay article, it is characterised in that in first backing
Formed with from the bottom on the part of the both sides of first groove (23) between described two first mortises (21) of block (9)
The elongated slot (25) of the top surface (15) insertion is arrived on surface (13)；And
On the part of the both sides of second groove between described two second mortises of second support module (11)
Formed with the elongated slot penetrated from the basal surface to the top surface.
7. the device (1) according to claim 1 or 2 for being used to lay article, it is characterised in that in first backing
In the first end of block (9) and the lateral wall at the second end and second support module (11) first end and the second end it is outer
Formed with the inclined surface (29) for guiding article in side wall.
8. the device (1) according to claim 7 for being used to lay article, it is characterised in that the inclined surface (29) is arrived
The distance of the corresponding mortise of the neighbouring inclined surface (29) is different.
9. the device (1) according to claim 1 or 2 for being used to lay article, it is characterised in that the intersection point is positioned at described
The center (O) of support plate (3).
10. the device (1) according to claim 1 for being used to lay article, it is characterised in that on the support plate (3)
Formed with cross protuberance (35), first draw pin (5) and second draw pin (7) are arranged on the cross and protruded
In portion (35), first support module (9) and second support module (11) are respectively formed with supporting leg (37), in the branch
The recess (39) for receiving the cross protuberance (35) is limited between leg (37).
11. the device (1) according to claim 2 for being used to lay article, it is characterised in that on the support plate (3)
Formed with cross protuberance (35), first draw pin (5) and second draw pin (7) are arranged on the cross and protruded
In portion (35), first support module (9) and second support module (11) are respectively formed with supporting leg (37), in the branch
The recess (39) for receiving the cross protuberance (35) is limited between leg (37) so that first support module
(9) and second support module (11) is H-shaped.
12. the device (1) according to claim 1 or 2 for being used to lay article, it is characterised in that in the support plate (3)
On be not provided with first draw pin (5) and the position of second draw pin (7) forms multiple equally distributed receiver holes (45),
For removably laying the sleeve (43) for receiving guiding pin.
13. the device (1) according to claim 1 or 2 for being used to lay article, it is characterised in that described is used to lay
The device (1) of article is the device for laying chip.
14. a kind of alignment device, the alignment device is used for the orientation for adjusting chip, and the alignment device includes：
Rotating mechanism；And
The device for being used to lay chip on the rotating mechanism；
Wherein, the device for being used to lay chip is according to any described devices for being used to lay article of claim 1-13
(1)。
15. alignment device according to claim 14, it is characterised in that the support plate (3) is with installing described first
Formed with cavity (47) on the opposite opposite side in the side of support module and second support module, so as to being formed described
Protuberance on rotating mechanism matches.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710459363.5A CN107146768B (en) | 2017-06-16 | 2017-06-16 | For laying the device and alignment device of article |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710459363.5A CN107146768B (en) | 2017-06-16 | 2017-06-16 | For laying the device and alignment device of article |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107146768A CN107146768A (en) | 2017-09-08 |
| CN107146768B true CN107146768B (en) | 2018-03-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710459363.5A Active CN107146768B (en) | 2017-06-16 | 2017-06-16 | For laying the device and alignment device of article |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107146768B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108288602B (en) * | 2018-01-29 | 2019-06-14 | 英特尔产品（成都）有限公司 | Crawl and placing device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07193119A (en) * | 1993-12-27 | 1995-07-28 | Nippon Plast Co Ltd | Holding jig |
| US6851170B2 (en) * | 2001-12-14 | 2005-02-08 | Applied Materials, Inc. | Method and apparatus for alignment of carriers, carrier handlers and semiconductor handling equipment |
| JP4890067B2 (en) * | 2006-03-28 | 2012-03-07 | 大日本スクリーン製造株式会社 | Substrate processing apparatus and substrate transfer method |
| JP4629129B2 (en) * | 2008-07-17 | 2011-02-09 | 株式会社アルバック | Alignment device |
| TWI593048B (en) * | 2009-07-21 | 2017-07-21 | 尼康股份有限公司 | Substrate processing system, substrate holder, substrate holder pair, substrate bonding apparatus, and device manufacturing method |
| JP5877005B2 (en) * | 2011-07-29 | 2016-03-02 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing apparatus, substrate holding apparatus, and substrate holding method |
| DE102012111167A1 (en) * | 2012-11-20 | 2014-05-22 | Aixtron Se | Device for aligning a wafer on a wafer carrier |
| CN105575868B (en) * | 2014-11-10 | 2018-12-07 | 上海理想万里晖薄膜设备有限公司 | Substrate calibration method and apparatus |
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